Quartz boat deformation rapid detection device

Abstract

The utility model discloses a quartz boat deformation rapid detection device, which comprises a bottom plate, a positioning mechanism and a testing mechanism, the positioning mechanism and the testing mechanism are arranged on the upper surface of the bottom plate, the testing mechanism is positioned on the Y-direction side of the positioning mechanism, and the Y direction is positioned in a horizontal plane; a plurality of guide rails extending in the Y direction are arranged on the bottom plate. The testing mechanism comprises a sliding frame moving along the guide rails, a testing plate arranged on the side, close to the positioning mechanism, of the sliding frame and a plurality of tooth-shaped pieces fixed to the upper side and the lower side of the testing plate. According to the rapid detection device for deformation of the quartz boat, after the quartz boat is positioned on the positioning mechanism, the whole detection mechanism moves along the guide rail, if the tooth-shaped piece can normally penetrate through the interior of the quartz boat and is not clamped by the interval teeth, the deformation of the quartz boat is in an error range, otherwise, the error of the quartz boat is too large, and the detection result is accurate. Therefore, whether the quartz boat is qualified or not can be distinguished.

Description

Technical Field

[0001] The utility model belongs to the field of detection technology, in particular to a quartz boat deformation rapid detection device. Background Art

[0002] A quartz boat is a common tool in semiconductor device manufacturing, particularly in solar cell production. It's primarily used to carry silicon wafers for transfer between different production equipment. The boat's design allows for vertical placement of the wafers, preventing them from falling during handling and ensuring safe handling. The boat's structural characteristics necessitate a tilting mechanism during use, which explains the document's mention of a quartz boat flipping mechanism, which facilitates flipping the boat between different equipment.

[0003] A quartz boat typically has two sides for lifting and several connecting rods connecting the two sides. The connecting rods are located in pairs on the left, right, and bottom of the boat. The left connecting rod has right-facing spacer teeth, while the right connecting rod has left-facing spacer teeth. To ensure the proper insertion of flat-plate silicon wafers, the spacer teeth on both sides must be aligned. However, quartz boats inevitably undergo heat treatment, and the heating and cooling cycles gradually deform them. If the position of the spacer teeth on the left and right sides deviates beyond a certain range, the silicon wafer cannot be properly inserted.

[0004] Therefore, it is necessary to design a special device to detect whether the deformation of the quartz boat exceeds the maximum allowable value. Utility Model Content

[0005] The main purpose of the utility model is to provide a quartz boat deformation rapid detection device, which can quickly complete the position detection of the spacing teeth on the quartz boat, thereby determining whether the deformation of the quartz boat exceeds the deviation and determining whether the quartz boat can be put into use.

[0006] The utility model achieves the above-mentioned object through the following technical solutions: a quartz boat deformation rapid detection device for testing the spacing of the teeth of the quartz boat, comprising a bottom plate and a positioning mechanism and a testing mechanism provided on the upper surface of the bottom plate, wherein the testing mechanism is located on the Y-direction side of the positioning mechanism, and the Y-direction is located in the horizontal plane;

[0007] The quartz boat includes two side plates and a plurality of connecting rods connected between the two side plates, the connecting rods are uniformly provided with a plurality of spaced teeth along a busbar, and the positioning mechanism fixes the quartz boat;

[0008] The bottom plate is provided with a plurality of guide rails extending in the Y direction. The testing mechanism includes a sliding frame moving along the guide rails, a testing plate provided on the side of the sliding frame close to the positioning mechanism, and a plurality of toothed parts fixed on the upper and lower sides of the testing plate.

[0009] Specifically, the positioning mechanism includes an X-direction reference block, an X-direction clamping assembly, two Y-direction reference blocks, two Y-direction clamping components and several pads. The X-direction clamping assembly cooperates with the X-direction reference block to clamp the outer sides of the two side plates. The two Y-direction clamping components are respectively located on both sides of the X-direction of the testing mechanism. The Y-direction reference block is located at a relative position to the Y-direction clamping components. The corresponding Y-direction reference block and the Y-direction clamping components respectively clamp the two ends of a side plate. The Y direction is in the horizontal plane and perpendicular to the X direction.

[0010] Furthermore, the X-direction clamping assembly includes a base fixed on the bottom plate, two guide rods passing through the base along the X direction, a driving block passed through by the two guide rods, a quick clamp provided on the base and controlling the movement of the driving block along the X direction, a pressure block fixed to the end of the guide rod, and two springs clamped between the pressure block and the driving block, the two springs are respectively passed through by the two guide rods, and the driving block is provided with linear bearings respectively cooperating with the two guide rods.

[0011] Specifically, buffer members are provided on both sides of the sliding plate in the X direction, and the bottom plate is further provided with an inner stopper for limiting the forward movement limit position of the buffer member and an outer stopper for limiting the backward movement limit position of the sliding frame.

[0012] Specifically, handles are provided on both sides of the bottom plate in the X direction.

[0013] Specifically, the bottom plate, the sliding frame and the test plate are all provided with weight-reducing holes.

[0014] Compared with the prior art, the beneficial effects of the present invention are:

[0015] After the quartz boat is positioned on the positioning mechanism, the entire testing mechanism moves along the guide rail. If the toothed part can pass through the interior of the quartz boat normally without being stuck by the spacer teeth, it means that the deformation of the quartz boat is within the error range. Otherwise, it means that the error of the quartz boat is too large and it cannot be used as a positioning carrier for silicon wafers, thereby distinguishing whether the quartz boat is qualified. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a three-dimensional diagram of the quartz boat deformation rapid detection device in this embodiment in a working state;

[0017] Figure 2 for Figure 1 A partial enlarged view of position A in the middle;

[0018] Figure 3 It is a three-dimensional picture of a quartz boat;

[0019] Figure 4 This is the main view of the quartz boat deformation rapid detection device in working state;

[0020] Figure 5 This is a top view of a quartz boat deformation rapid detection device;

[0021] Figure 6 It is a three-dimensional diagram of the X-axis pressing assembly;

[0022] Figure 7 A three-dimensional diagram of the test mechanism.

[0023] The numbers in the figure represent:

[0024] 1-Quartz boat deformation rapid detection device,

[0025] 11- bottom plate, 111- handle, 112a- inner stopper, 112b- outer stopper, 113- guide rail, 114- weight reduction hole,

[0026] 12-positioning mechanism, 121-X-direction reference block, 122-X-direction clamping assembly, 1221-base, 1222-guide rod, 1223-drive block, 1224-quick clamp, 1225-pressure block, 1226-spring, 1227-linear bearing, 123-Y-direction reference block, 124-Y-direction clamping component, 125-pad,

[0027] 13-test mechanism, 131-sliding frame, 132-test plate, 133-toothed member, 134-buffer member;

[0028] 2-quartz boat, 21-side plate, 22-connecting rod, 221-spacer tooth. DETAILED DESCRIPTION

[0029] Example:

[0030] like Figures 1 to 5 As shown, the present invention provides a quartz boat deformation rapid detection device 1 for measuring the distance between spacer teeth 221 of a quartz boat 2. The device comprises a base plate 11, a positioning mechanism 12, and a testing mechanism 13 disposed on the upper surface of the base plate 11. The testing mechanism 13 is located on the Y-direction side of the positioning mechanism 12, with the Y-direction lying within a horizontal plane. The quartz boat 2 includes two side plates 21 and a plurality of connecting rods 22 connected between the side plates 21. The connecting rods 22 are provided with a plurality of spacer teeth 221 evenly distributed along a generatrix.

[0031] The bottom plate 11 is a fixed base for the entire quartz boat deformation rapid detection device 1 , the positioning mechanism 12 is used to position the quartz boat 2 , and the testing mechanism 13 is used to test the distance between the spaced teeth 221 .

[0032] like Figure 2 、 Figure 4 and Figure 5As shown, the positioning mechanism 12 includes an X-direction reference block 121, an X-direction clamping assembly 122, two Y-direction reference blocks 123, two Y-direction clamping components 124 and a plurality of pads 125. The X-direction clamping assembly 122 cooperates with the X-direction reference block 121 to clamp the outer sides of the two side plates 21. The two Y-direction clamping components 124 are respectively located on both sides of the X-direction of the testing mechanism 13. The Y-direction reference block 123 is located at a relative position to the Y-direction clamping components 124. The corresponding Y-direction reference block 123 and the Y-direction clamping component 124 respectively clamp the two ends of one side plate 21. The Y direction is in the horizontal plane and perpendicular to the X direction.

[0033] The positioning mechanism 12 is used to secure the quartz boat 2. During testing, the upper connecting rod spacer teeth in the quartz boat 2 face downward, while the lower connecting rod spacer teeth face downward. This creates a height difference between the two side panels 21, so pads 125 are needed to support the bottoms of the side panels 21 to maintain their upright position. The X-axis reference block 121 and two Y-axis reference blocks 123 serve as positioning references for the sides of the quartz boat 2, secured by an X-axis clamping assembly 122 and a Y-axis clamping component 124. The X-axis is the length of the connecting rod 22 of the quartz boat 2, and testing must be performed from the side (i.e., the Y-axis) of the connecting rod 22. Therefore, the Y-axis side of the positioning mechanism 12 is occupied by the testing mechanism 13, making it difficult to configure the two Y-axis clamping components 124 as a single unit. Separate positioning is required. However, since there are no other mechanisms blocking the X-axis sides of the positioning mechanism 12, and the X-axis side of the quartz boat 2 is the wide side, clamping can be accomplished using a single X-axis reference block 121 and a single X-axis clamping assembly 122. The Y-direction pressing component 124 can be a quick clamp. Since the operator also needs to operate the test mechanism 13 to move, the Y-direction pressing component 124 is preferably arranged on the same side of the positioning mechanism 12 in the Y direction and close to the test mechanism 13.

[0034] like Figure 6 As shown, the X-direction clamping assembly 122 includes a base 1221 fixed on the base plate 11, two guide rods 1222 passing through the base 1221 along the X-direction, a driving block 1223 passed through by the two guide rods 1222, a quick clamp 1224 provided on the base 1221 and controlling the movement of the driving block 1223 along the X-direction, a pressure block 1225 fixed to the end of the guide rod 1222, and two springs 1226 clamped between the pressure block 1225 and the driving block 1223. The two springs 1226 are respectively passed through by the two guide rods 1222, and the driving block 1223 is provided with a linear bearing 1227 respectively cooperating with the two guide rods 1222.

[0035] The quick clamp 1224 is used to operate the drive block 1223 to move in the X-direction. This, in turn, indirectly drives the pressure block 1225 via the spring 1226 to press against one side plate 21 of the quartz boat 2. This, in turn, cooperates with the X-direction reference block 121 on the other side to achieve X-direction positioning of the quartz boat 2. The spring 1226 allows the pressure block 1225 to rebound, reducing pressure on the quartz boat 2 and preventing damage to the surface. It also allows the pressure plate 1225 to adjust itself, ensuring full contact with the side plate 21 and ensuring stable clamping. The linear bearing 1227 maintains low friction with the guide rod 1222 to prevent jamming.

[0036] like Figure 7 As shown, the base plate 11 is provided with a plurality of guide rails 113 extending in the Y direction. The testing mechanism 13 includes a sliding frame 131 that moves along the guide rails 113, a testing plate 132 disposed on the side of the sliding frame 131 near the positioning mechanism 12, a plurality of toothed members 133 fixed to the upper and lower sides of the testing plate 132, and buffer members 134 disposed on both sides of the sliding plate 131 in the X direction. The base plate 11 is also provided with an inner stopper 112a that limits the forward movement limit of the buffer member 134, and an outer stopper 112b that limits the rearward movement limit of the sliding frame 131.

[0037] After the quartz boat 2 is positioned on the positioning mechanism 12, the tooth grooves of the spacing teeth 221 should theoretically face the Y direction, and the position of the spacing teeth 221 should correspond to the toothed members 133. The toothed members 133 do not necessarily correspond to all the spacing teeth 221 on the same side; only a few sections of spacing teeth 221 need to be selected for correspondence. The entire testing mechanism 13 moves along the guide rail 113, so the toothed members 133 will move along the Y direction. In this embodiment, there is only a 0.4mm gap between the structure of the toothed members 133 and the structure of the spacing teeth 221. If the toothed members 133 can pass through the interior of the quartz boat 2 normally without being stuck by the spacing teeth 221, it means that the deformation of the quartz boat 2 is within the error range. Otherwise, it means that the error of the quartz boat 2 is too large and it cannot be used as a positioning carrier for silicon wafers. The inner stopper 112a and the outer stopper 112b are used to limit the linear motion range of the sliding frame 131 to prevent it from leaving the guide rail 113. The buffer member 134 has a buffering effect, which can prevent the sliding frame 131 from being knocked crooked when it overcomes the friction force and is suddenly pushed forward, so as to maintain the accuracy of detection.

[0038] like Figure 1 、 Figure 2 and Figure 5 As shown, handles 111 are provided on both sides of the bottom plate 11 in the X direction, a plurality of weight-reducing holes 114 are provided on the bottom plate 11 , and a plurality of weight-reducing holes are also provided on the sliding frame 131 and the test plate 132 .

[0039] The handle 111 is used to carry the entire device. The weight-reducing holes are formed by punching a number of holes on the plate-shaped parts to reduce the weight of the entire device without affecting the structural strength, making it more convenient to carry.

[0040] The working process of the quartz boat deformation rapid detection device 1 is as follows: the quartz boat 2 is placed on the positioning mechanism 12 in the correct state, the side plate 21 is supported by the pad 125, the Y-direction pressing component 124 and the X-direction pressing component 122 are operated to clamp the quartz boat 2 to complete the horizontal position positioning of the quartz boat 2. At this time, the sliding frame 131 is located outside the range of the positioning mechanism 12; the sliding frame 131 is pushed along the Y direction, and the sliding frame 131 passes through the interior of the quartz boat 2. When the error of the quartz boat 2 is within the design range, the quartz boat 2 is positioned horizontally. , the toothed part 133 can pass through the spacing teeth 221 normally, and then the sliding frame 131 exits the quartz boat 2, the Y-direction clamping component 124 and the X-direction clamping assembly 122 are released, and the quartz boat 2 is taken away and used as a qualified product; if the toothed part 133 is stuck with the spacing teeth 221, it means that the error of the quartz boat 2 is greater than the design range, then the sliding frame 131 is driven to exit the quartz boat 2, the Y-direction clamping component 124 and the X-direction clamping assembly 122 are released, and the quartz boat 2 is taken away and excluded as a defective product.

[0041] The above descriptions are only some embodiments of the present invention. For those skilled in the art, several modifications and improvements can be made without departing from the inventive concept of the present invention, and these all fall within the scope of protection of the present invention.

Claims

1. A quartz boat deformation rapid detection device for testing the spacing of teeth in a quartz boat, characterized by: It includes a bottom plate and a positioning mechanism and a testing mechanism provided on the upper surface of the bottom plate, wherein the testing mechanism is located on the Y-direction side of the positioning mechanism, and the Y-direction is located in the horizontal plane; The quartz boat includes two side plates and a plurality of connecting rods connected between the two side plates, the connecting rods are uniformly provided with a plurality of spaced teeth along a busbar, and the positioning mechanism fixes the quartz boat; The bottom plate is provided with a plurality of guide rails extending in the Y direction. The testing mechanism includes a sliding frame moving along the guide rails, a testing plate provided on the side of the sliding frame close to the positioning mechanism, and a plurality of toothed parts fixed on the upper and lower sides of the testing plate.

2. The quartz boat deformation rapid detection device according to claim 1, characterized in that: The positioning mechanism includes an X-direction reference block, an X-direction clamping assembly, two Y-direction reference blocks, two Y-direction clamping components and a plurality of pads. The X-direction clamping assembly cooperates with the X-direction reference block to clamp the outer sides of the two side plates. The two Y-direction clamping components are respectively located on both sides of the X-direction of the testing mechanism. The Y-direction reference block is located at a relative position to the Y-direction clamping components. The corresponding Y-direction reference block and the Y-direction clamping components respectively clamp the two ends of a side plate. The Y direction is in the horizontal plane and perpendicular to the X direction.

3. The quartz boat deformation rapid detection device according to claim 2, characterized in that: The X-direction clamping assembly includes a base fixed on the bottom plate, two guide rods passing through the base along the X direction, a driving block passed through by the two guide rods, a quick clamp provided on the base and controlling the movement of the driving block along the X direction, a pressure block fixed to the end of the guide rod, and two springs clamped between the pressure block and the driving block, the two springs are respectively passed through by the two guide rods, and the driving block is provided with linear bearings respectively cooperating with the two guide rods.

4. The quartz boat deformation rapid detection device according to claim 1, characterized in that: Buffers are provided on both sides of the sliding frame in the X direction, and the bottom plate is also provided with an inner stopper for limiting the forward movement limit position of the buffer and an outer stopper for limiting the backward movement limit position of the sliding frame.

5. The quartz boat deformation rapid detection device according to claim 1, characterized in that: Handles are provided on both sides of the bottom plate in the X direction.

6. The quartz boat deformation rapid detection device according to claim 1, characterized in that: The bottom plate, the sliding frame and the test plate are all provided with weight-reducing holes.

Images