Weighing device for silicon carbide wafer
By designing a second platform and support block structure that can be retracted and extended, the problem that existing devices can only be adapted to single-size silicon carbide wafers is solved, and accurate weighing of silicon carbide wafers is achieved in different sizes.
Patent Information
- Application Number
- CN202422114320.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-29
- Publication Date
- 2025-08-19
- Estimated Expiration
- 2034-08-29
AI Technical Summary
The existing silicon carbide wafer weighing devices can only be adapted to one size, which makes it difficult to ensure the center alignment of silicon carbide wafers of different sizes during weighing, affecting the weighing accuracy.
A silicon carbide wafer weighing device is designed, including a second platform with a shrinking and extended state, adaptation of silicon carbide wafers of different sizes is achieved through the support block and the rail structure, and the support block is fixed with fasteners to ensure center alignment.
The adaptation of silicon carbide wafers of different sizes is achieved, the weighing accuracy is improved, the center alignment is ensured, and the weighing needs of silicon carbide wafers of different sizes is achieved.
Smart Images
Figure CN223243743U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of silicon carbide weighing equipment, in particular to a weighing device for silicon carbide wafers. Background Art
[0002] Silicon carbide (SiC), as an emerging third-generation semiconductor core material, has excellent properties such as wide bandgap, high critical breakdown electric field strength, high electron mobility, good radiation resistance and chemical stability. This makes it an important substrate wafer material with wide applications, showing good application prospects in aviation devices, new energy vehicles, rail transportation and household appliances.
[0003] During the weighing process of silicon carbide wafers, in order to ensure the weighing accuracy, it is generally necessary to align the center of the silicon carbide wafer with the center of the weighing platform during weighing. However, some current weighing devices can only adapt to one size of silicon carbide wafers. Utility Model Content
[0004] The purpose of the utility model is to provide a weighing device for silicon carbide wafers, which can be adapted to silicon carbide wafers of different sizes.
[0005] The embodiment of the present utility model is achieved as follows:
[0006] In a first aspect, the present invention provides a weighing device for silicon carbide wafers, comprising:
[0007] Weighing pieces;
[0008] The placement platform includes a first platform and a second platform connected to each other. The first platform is connected to the weighing piece, and the second platform has a retracted state and an extended state. When the second platform is in the extended state, the radial dimension of the second platform is greater than the radial dimension of the first platform and is coaxially arranged with the first platform. The second platform is used to place silicon carbide wafers.
[0009] In an optional embodiment, the second platform includes a plurality of support blocks arranged on the first platform, and the first platform is also provided with a plurality of guide rails, which extend radially along the first platform and have a first end and a second end relative to each other, and the first end is close to the axis of the first platform relative to the second end. The plurality of guide rails are connected one-to-one with the plurality of support blocks, and the support blocks can slide on the guide rails.
[0010] In an optional embodiment, the support block has a third end and a fourth end relative to each other, and the third end is close to the axis of the first platform relative to the fourth end. When the third ends of the multiple support blocks are located at the second end of the corresponding guide rail, the second platform is in an extended state. When the third ends of the multiple support blocks are located at the first end of the corresponding guide rail, the second platform is in a retracted state.
[0011] In an optional embodiment, when the third ends of the multiple support blocks are located at the first ends of the corresponding guide rails, the end surfaces of the fourth ends of the multiple support blocks jointly form a cylindrical surface and the radial dimension of the cylindrical surface is the same as the radial dimension of the first platform.
[0012] In an optional embodiment, the weighing device of the silicon carbide wafer also includes a fastener, a first mating hole is provided on the support block, and a second mating hole is provided on the guide rail. When the second platform is in an extended state, the first mating hole corresponds to the second mating hole, and the fastener can pass through the first mating hole and the second mating hole in sequence.
[0013] In an optional embodiment, the fastener is a threaded fastener or a latch, and when the fastener is a threaded fastener, the first matching hole is a through hole, and the second matching hole is a threaded hole;
[0014] When the fastener is a pin, the first matching hole and the second matching hole are both through holes.
[0015] In an optional embodiment, the weighing device of the silicon carbide wafer also includes a fastener, a third mating hole is provided on the support block, and a fourth mating hole is provided on the guide rail. When the second platform is in a retracted state, the third mating hole corresponds to the fourth mating hole, and the fastener can pass through the third mating hole and the fourth mating hole in sequence.
[0016] In an optional embodiment, the fastener is a threaded fastener or a latch. When the fastener is a threaded fastener, the third matching hole is a through hole, and the fourth matching hole is a threaded hole.
[0017] When the fastener is a pin, the third matching hole and the fourth matching hole are both through holes.
[0018] In an optional embodiment, the weighing device for silicon carbide wafers further includes a closed box, wherein the closed box is provided with a closed space, and the weighing piece and the placement platform are accommodated in the closed space.
[0019] In an alternative embodiment, the enclosure is made of a transparent material.
[0020] The beneficial effects of the embodiments of the present invention are as follows: the weighing device for silicon carbide wafers provided by the embodiments of the present invention includes a weighing piece and a placement platform, the placement platform includes a first platform and a second platform connected to each other, the first platform is connected to the weighing piece, and the second platform is arranged on the side of the first platform away from the weighing piece, and the second platform has a retracted state and an extended state. When the second platform is in the extended state, the radial dimension of the second platform is greater than the radial dimension of the first platform, and the second platform is used to place silicon carbide wafers. When the second platform is in the retracted state, it can adapt to small-sized silicon carbide wafers, and when the second platform is in the extended state, it can adapt to large-sized silicon carbide wafers. By setting the second platform, silicon carbide wafers of different sizes can be adapted. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.
[0022] Figure 1 A schematic structural diagram of a weighing device provided in an embodiment of the present utility model;
[0023] Figure 2 A top view of the second platform of the placement platform provided in an embodiment of the present utility model when in a retracted state;
[0024] Figure 3 This is a top view of the second platform of the placement platform provided in an embodiment of the present invention when it is in an extended state.
[0025] Icons: 1-weighing device; 100-weighing piece; 200-placing platform; 210-first platform; 211-guide rail; 220-second platform; 221-support block; 222-first matching hole; 223-third matching hole; 300-enclosed box; 310-enclosed space. DETAILED DESCRIPTION
[0026] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.
[0027] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.
[0028] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0030] In addition, the terms "horizontal" and "vertical" do not mean that the components must be absolutely horizontal or overhanging, but can be slightly tilted. For example, "horizontal" only means that its direction is more horizontal than "vertical", not that the structure must be completely horizontal, but can be slightly tilted.
[0031] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0032] The specific structure of a silicon carbide wafer weighing device 1 provided by an embodiment of the present invention and the corresponding technical effects thereof are described in detail below in conjunction with the patent drawings.
[0033] Please refer to Figure 1-Figure 3 The present invention provides a weighing device 1 for silicon carbide wafers, including a weighing member 100 and a placement platform 200. The placement platform 200 includes a first platform 210 and a second platform 220 connected to each other. The first platform 210 is connected to the weighing member 100, and the second platform 220 is disposed on a side of the first platform 210 away from the weighing member 100. The second platform 220 has a retracted state and an extended state. When the second platform 220 is in the extended state, the radial dimension of the second platform 220 is greater than the radial dimension of the first platform 210. It is understandable that the radial dimension of the outer peripheral wall of the second platform 220 is greater than the radial dimension of the first platform 210. In addition, the second platform 220 is coaxially disposed with the first platform 210. The second platform 220 is used to place silicon carbide wafers.
[0034] It should be noted that in some existing embodiments, only the first platform 210 is provided. During weighing, the outer peripheral wall of the first platform 210 is flush with the outer peripheral wall of the silicon carbide wafer to ensure that the silicon carbide wafer is aligned with the center of the first platform 210. The center of the first platform 210 corresponds to the weighing center of the weighing member 100. However, the radial dimensions of the first platform 210 can only accommodate the radial dimensions of one type of silicon carbide wafer, for example, only six-inch or eight-inch silicon carbide wafers. When adapting to other sizes, it is difficult to align the center of the silicon carbide wafer with the center of the first platform 210, affecting weighing accuracy.
[0035] In this embodiment, since the second platform 220 can have an extended state, and when the second platform 220 is in a deep state, the radial dimension of the outer wall is greater than the radial dimension of the first platform 210, at this time, a large-sized silicon carbide wafer can be placed on the second platform 220, and the outer peripheral wall of the silicon carbide wafer is flush with the outer peripheral wall of the second platform 220.
[0036] Specifically, in this embodiment, when the second platform 220 is in a retracted state, the radial dimension of the outer wall of the second platform 220 is equal to the radial dimension of the outer wall of the first platform 210, and the second platform 220 is coaxial with the first platform 210. Therefore, when the second platform 220 is in a retracted state, it can accommodate small-sized silicon carbide wafers, and when the second platform 220 is in an extended state, it can accommodate large-sized silicon carbide wafers. The configuration of the second platform 220 allows for the adaptation of silicon carbide wafers of different sizes.
[0037] Optionally, the second platform 220 includes a plurality of support blocks 221 arranged on the first platform 210. The first platform 210 is also provided with a plurality of guide rails 211. The guide rails 211 extend along the radial direction of the first platform 210 and have a relative first end and a second end. The first end is close to the axis of the first platform 210 relative to the second end. The plurality of guide rails 211 are connected one-to-one with the plurality of support blocks 221, and the support blocks 221 can slide on the guide rails 211.
[0038] That is, the second platform 220 is composed of a plurality of support blocks 221 , and the support blocks 221 slide on the guide rails 211 to allow the second platform 220 to retract or extend.
[0039] Optionally, the support block 221 has a third end and a fourth end relative to each other, and the third end is close to the axis of the first platform 210 relative to the fourth end. When the third ends of the multiple support blocks 221 are located at the second end of the corresponding guide rail 211, the second platform 220 is in an extended state. When the third ends of the multiple support blocks 221 are located at the first end of the corresponding guide rail 211, the second platform 220 is in a retracted state.
[0040] Of course, in other embodiments, when the second platform 220 is in the extended state, the third end of the support block 221 is not limited to being located at the second end of the guide rail 211. When the second platform 220 is in the retracted state, the third end of the support block 221 is not limited to being located at the first end of the guide rail 211.
[0041] When the third ends of the multiple support blocks 221 are located at the first ends of the corresponding guide rails 211, the cross-sections of the fourth ends of the multiple support blocks 221 jointly form a cylindrical surface and the radial dimension of the cylindrical surface is the same as the radial dimension of the first platform 210, ensuring that when a silicon carbide wafer of corresponding size is placed, the center of the silicon carbide wafer can be aligned with the center of the second platform 220 by making the outer peripheral wall of the silicon carbide wafer flush with the outer peripheral wall of the second platform 220.
[0042] Optionally, the weighing device 1 for silicon carbide wafers further includes a fastener, a first mating hole 222 is provided on the support block 221, and a second mating hole is provided on the guide rail 211. When the second platform 220 is in an extended state, the first mating hole 222 on the support block 221 corresponds to the second mating hole on the guide rail 211, and the fastener can sequentially penetrate the first mating hole 222 and the second mating hole. It is understandable that after the fastener penetrates the first mating hole 222 and the second mating hole, the support block 221 can be fixed on the first platform 210, thereby preventing the support block 221 from sliding, thereby ensuring the accuracy of the center of the weighing piece 100 when placing large-sized silicon carbide wafers. For example, at this time, the radial dimension of the 8-inch silicon carbide wafer is the same as the radial dimension of the second platform 220.
[0043] The support block 221 is also provided with a third mating hole 223, and the guide rail 211 is also provided with a fourth mating hole. When the second platform 220 is in the retracted state, the third mating hole 223 corresponds to the fourth mating hole. When the second platform 220 is in the retracted state, the third mating hole 223 corresponds to the fourth mating hole. The fastener can be sequentially inserted through the third mating portion and the fourth mating portion. Similarly, after the fastener is inserted through the third mating hole 223 and the fourth mating hole, the support block 221 can be fixed to the first platform 210, thereby preventing the support block 221 from sliding. This ensures the accuracy of the center of the weighing piece 100 when placing a small-sized silicon carbide wafer. For example, in this case, the radial dimension of a 6-inch silicon carbide wafer is the same as the radial dimension of the second platform 220.
[0044] It should be noted that the fastener can be a threaded fastener or a latch. When the fastener is a threaded fastener, the first matching hole 222 is a through hole and the second matching hole is a threaded hole. When the fastener is a latch, the first matching hole 222 and the second matching hole are through holes.
[0045] When the fastener is a threaded fastener, the third matching hole 223 is a through hole and the fourth matching hole is a threaded hole. When the fastener is a latch, the third matching hole 223 and the fourth matching hole are through holes.
[0046] It should be noted that, in some embodiments, when the first mating hole 222 is set at the top of the support block 221, no matter the fastener is a threaded fastener or a pin, after being inserted into the first mating hole 222 and the second mating hole, the top of the fastener is located in the first mating hole 222 and does not extend out of the first mating hole 222. This can prevent the extended fastener from contacting the silicon carbide wafer and affecting the weighing of the silicon carbide wafer. Similarly, when the third mating hole 223 is set at the top of the support block 221, after the fastener is inserted into the third mating hole 223 and the fourth mating hole, the top of the fastener is located in the third mating hole 223.
[0047] It should be noted that the cooperation between the support block 221 and the guide rail 211 in this embodiment can be a sliding cooperation or a rolling cooperation. Both the sliding cooperation and the rolling cooperation are conventional structures in the sliding and rolling structures, and will not be elaborated here. It is sufficient as long as it can ensure that the support block 221 can move on the guide rail 211.
[0048] Optionally, the silicon carbide wafer weighing device 1 further includes a closed box 300 having a closed space 310, and the weighing element 100 and the placement platform 200 are both accommodated in the closed space 310. It is understood that in order to prevent external airflow from affecting the weighing accuracy of the silicon carbide wafer, the weighing element 100 and the placement platform 200 can be accommodated in the closed space 310 during weighing.
[0049] The closed box 300 is a closed box body 300. In order to facilitate the operator to observe the situation in the closed space 310, in some optional embodiments, the closed box 300 is made of a transparent material.
[0050] In summary, the weighing device 1 for silicon carbide wafers provided in an embodiment of the present invention includes a weighing piece 100 and a placement platform 200. The placement platform 200 includes a first platform 210 and a second platform 220 connected to each other. The first platform 210 is connected to the weighing piece 100, and the second platform 220 is arranged on the side of the first platform 210 away from the weighing piece 100. The second platform 220 has a retracted state and an extended state. When the second platform 220 is in the extended state, the radial dimension of the second platform 220 is greater than the radial dimension of the first platform 210. The second platform 220 is used to place silicon carbide wafers. When the second platform 220 is in the retracted state, it can adapt to small-sized silicon carbide wafers. When the second platform 220 is in the extended state, it can adapt to large-sized silicon carbide wafers. Through the setting of the second platform 220, silicon carbide wafers of different sizes can be adapted.
[0051] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.
Claims
1. A weighing device for silicon carbide wafers, characterized in that: include: Weighing piece (100); A placement platform (200) is provided, wherein the placement platform (200) comprises a first platform (210) and a second platform (220) connected to each other, wherein the first platform (210) is connected to the weighing piece (100), and the second platform (220) has a retracted state and an extended state. When the second platform (220) is in the extended state, the radial dimension of the second platform (220) is greater than the radial dimension of the first platform (210) and the second platform (220) is coaxially arranged with the first platform (210). The second platform (220) is used for placing silicon carbide wafers.
2. The weighing device for silicon carbide wafers according to claim 1, wherein: The second platform (220) includes a plurality of support blocks (221) arranged on the first platform (210). The first platform (210) is also provided with a plurality of guide rails (211). The guide rails (211) extend radially along the first platform (210) and have a first end and a second end relative to each other. The first end is close to the axis of the first platform (210) relative to the second end. The plurality of guide rails (211) are connected to the plurality of support blocks (221) in a one-to-one correspondence. The support blocks (221) can slide on the guide rails (211).
3. The weighing device for silicon carbide wafers according to claim 2, wherein: The support block (221) has a third end and a fourth end relative to each other, and the third end is close to the axis of the first platform (210) relative to the fourth end. When the third ends of the plurality of support blocks (221) are located at the second end corresponding to the guide rail (211), the second platform (220) is in an extended state. When the third ends of the plurality of support blocks (221) are located at the first end corresponding to the guide rail (211), the second platform (220) is in a retracted state.
4. The weighing device for silicon carbide wafers according to claim 3, wherein: When the third ends of the plurality of support blocks (221) are located at the first end of the corresponding guide rail (211), the end faces of the fourth ends of the plurality of support blocks (221) jointly form a cylindrical surface, and the radial dimension of the cylindrical surface is the same as the radial dimension of the first platform (210).
5. The weighing device for silicon carbide wafers according to claim 3, wherein: The weighing device for silicon carbide wafers also includes a fastener, wherein a first matching hole (222) is provided on the support block (221), and a second matching hole is provided on the guide rail (211). When the second platform (220) is in an extended state, the first matching hole (222) corresponds to the second matching hole, and the fastener can penetrate the first matching hole (222) and the second matching hole in sequence.
6. The silicon carbide wafer weighing device according to claim 5, characterized in that: The fastener is a threaded fastener or a latch. When the fastener is a threaded fastener, the first matching hole (222) is a through hole, and the second matching hole is a threaded hole. When the fastener is a latch, both the first matching hole (222) and the second matching hole are through holes.
7. The silicon carbide wafer weighing device according to claim 3, wherein: The weighing device for silicon carbide wafers also includes a fastener, a third matching hole (223) is provided on the support block (221), and a fourth matching hole is provided on the guide rail (211). When the second platform (220) is in a retracted state, the third matching hole (223) corresponds to the fourth matching hole, and the fastener can penetrate the third matching hole (223) and the fourth matching hole in sequence.
8. The silicon carbide wafer weighing device according to claim 7, characterized in that: The fastener is a threaded fastener or a latch. When the fastener is a threaded fastener, the third matching hole (223) is a through hole, and the fourth matching hole is a threaded hole. When the fastener is a latch, the third matching hole (223) and the fourth matching hole are both through holes.
9. The silicon carbide wafer weighing device according to claim 1, wherein: The silicon carbide wafer weighing device further comprises a closed box (300), wherein the closed box (300) is provided with a closed space (310), and the weighing piece (100) and the placement platform (200) are accommodated in the closed space (310).
10. The silicon carbide wafer weighing device according to claim 9, characterized in that: The closed box (300) is made of transparent material.