Crystal boat box cover buckling jig structure

Abstract

The utility model relates to a crystal boat box cover buckling jig structure, which is integrally formed and comprises a bottom plate and a crystal boat box body, the crystal boat box body is fixedly arranged above the bottom plate and comprises a crystal boat box coaming, the crystal boat box coaming has a preset height, and the crystal boat box cover buckling jig structure is arranged on the bottom plate. The wafer box coamings surround in the circumferential direction, and the wafer box coamings are connected end to end, so that the wafer box body forms a cavity, the opening of the cavity is upward, and the cavity is communicated with the outside; a first supporting boss, a second supporting boss, a third supporting boss and a fourth supporting boss are further fixedly arranged on the bottom plate, and the first supporting boss, the second supporting boss, the third supporting boss and the fourth supporting boss are all located below the bottom plate. The first supporting boss, the second supporting boss, the third supporting boss and the fourth supporting boss are all used for supporting the bottom plate.

Description

Technical Field

[0001] The utility model relates to the field of jigs, in particular to a jig structure for a crystal boat box cover. Background Art

[0002] A wafer cassette is a device used to store wafer cassettes or wafers. It features a snap-on lid. Current snap-on lid jigs are assembled from multiple parts, making assembly cumbersome. Furthermore, the parts can easily become loose during use, leading to the risk of the lid falling apart over extended periods, posing a production risk. Furthermore, most snap-on lid jigs currently on the market are made of metal, which wears easily during use. During routine production, the worn metal can fall onto the wafer cassette or wafers, potentially damaging them. Summary of the Invention

[0003] The purpose of the utility model is to solve the shortcomings of the prior art and to propose a wafer boat box cover fixture structure.

[0004] In order to achieve the above-mentioned purpose, the utility model adopts the following technical solutions: a crystal boat box cover fixture structure, which is integrally formed and includes a base plate and a crystal boat box body, the crystal boat box body is fixedly installed above the base plate, the crystal boat box body includes a crystal boat box enclosure, the crystal boat box enclosure has a preset height, the crystal boat box enclosure surrounds the circumference, and the crystal boat box enclosure is connected end to end, so that the crystal boat box body forms a chamber, the chamber opens upward, and the chamber is connected to the outside world; a first supporting boss, a second supporting boss, a third supporting boss, and a fourth supporting boss are also fixedly provided on the base plate, the first supporting boss, the second supporting boss, the third supporting boss, and the fourth supporting boss are all located below the base plate; the first supporting boss, the second supporting boss, the third supporting boss, and the fourth supporting boss are all used to support the base plate.

[0005] Furthermore, it includes a first reinforcement block, which is fixedly connected to the bottom plate on one hand and to the wafer boat box enclosure on the other hand, and the first reinforcement block is fixedly connected to the outer wall of the wafer boat box enclosure.

[0006] Furthermore, it includes a second reinforcement block, which is fixedly connected to the bottom plate on one hand and to the wafer boat box enclosure on the other hand, and the second reinforcement block is fixedly connected to the outer wall of the wafer boat box enclosure.

[0007] Furthermore, a first plug-in slot, a second plug-in slot, a third plug-in slot, and a fourth plug-in slot are formed on the wafer boat box body, and the first plug-in slot, the second plug-in slot, the third plug-in slot, and the fourth plug-in slot are all connected to the cavity of the wafer boat box body.

[0008] Furthermore, a positioning block is included. The chamber of the wafer boat box body has a bottom. The positioning block is located in the chamber of the wafer boat box body on one hand, and is fixedly connected to the bottom of the wafer boat box body on the other hand.

[0009] Furthermore, the positioning block has a semi-cylindrical groove, and the semi-cylindrical groove is recessed from the outer wall of the positioning block toward the bottom of the wafer boat box body by a preset depth.

[0010] Furthermore, a preset number of bosses are included. On one hand, the bosses are fixedly placed in the cavity of the wafer boat box body, and on the other hand, the bosses are fixedly connected to the bottom of the wafer boat box body.

[0011] Furthermore, it also includes a first wedge-shaped boss and a second wedge-shaped boss. The first wedge-shaped boss is fixedly connected to the inner wall of the crystal boat box enclosure on the one hand, and is fixedly connected to the bottom of the crystal boat box body on the other hand; the second wedge-shaped boss is fixedly connected to the inner wall of the crystal boat box enclosure on the one hand, and is fixedly connected to the bottom of the crystal boat box body on the other hand; the first wedge-shaped boss and the second wedge-shaped boss are both located in the cavity of the crystal boat box body.

[0012] Furthermore, it also includes a first support block and a second support block; a first groove and a second groove are provided on the wafer box enclosure, the first groove is formed by the wafer box enclosure being recessed inwardly to a preset depth toward the cavity of the wafer box body, and the second groove is formed by the wafer box enclosure being recessed inwardly to a preset depth toward the cavity of the wafer box body, and the first groove and the second groove are symmetrical about the axis of the wafer box body; the first support block is placed in the first groove, and the first support block is fixedly connected to the outer wall of the wafer box enclosure on the one hand, and the first support block is fixedly connected to the bottom plate on the other hand; the second support block is placed in the second groove, and the second support block is fixedly connected to the outer wall of the wafer box enclosure on the one hand, and the second support block is fixedly connected to the bottom plate on the other hand.

[0013] Furthermore, the wafer boat box cover fixture structure is made of non-metallic material.

[0014] The beneficial effects of the present application are: the crystal boat box cover jig provided by the present application has a simple structure and is easy to manufacture, and on the one hand, since the jig is integrally formed, compared with traditional cover jigs, the jig will not be deformed or fall apart after long-term use; on the other hand, since the jig is made of non-metallic materials, compared with traditional metal cover jigs, no metal debris will be generated during use to contaminate the crystal boat or wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 The utility model provides a schematic structural diagram of a wafer boat box cover fixture structure.

[0016] Figure 2 This is another structural schematic diagram of a wafer boat box cover fixture structure provided by the present invention.

[0017] Figure 3 This is another structural schematic diagram of a wafer boat box cover fixture structure provided by the present invention.

[0018] Figure 4 This is another structural schematic diagram of a wafer boat box cover fixture structure provided by the present invention. DETAILED DESCRIPTION

[0019] The present application is further described in detail below by means of specific embodiments in conjunction with the accompanying drawings. Similar elements in different embodiments are numbered with associated similar elements. In the following embodiments, many detailed descriptions are provided to enable the present application to be better understood. However, those skilled in the art will readily appreciate that some of the features may be omitted in different circumstances, or may be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification. This is to avoid the core portion of the present application being overwhelmed by excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail. They can fully understand the related operations based on the description in the specification and the general technical knowledge in the art.

[0020] In addition, the features, operations, or characteristics described in the specification may be combined in any appropriate manner to form various implementations, and the operational steps involved in each embodiment may be interchanged or adjusted in a manner that is obvious to those skilled in the art. Therefore, the specification and drawings are only for the purpose of clearly describing a particular embodiment and do not imply a required composition and / or sequence.

[0021] The serial numbers assigned to components herein, such as "first," "second," etc., are used solely to distinguish the objects being described and do not convey any sequential or technical meaning. References to "connection" and "coupling" herein, unless otherwise specified, include both direct and indirect connections (couplings).

[0022] Please refer to Figure 1-4 The present application provides a wafer boat box cover fixture structure (hereinafter referred to as "the fixture"), which is integrally formed and includes a bottom plate 1 and a wafer boat box body 2. The wafer boat box body 2 is fixedly installed above the bottom plate 1. The wafer boat box body 2 includes a wafer boat box enclosure 25. The wafer boat box enclosure 25 has a preset height. The wafer boat box enclosure 25 surrounds the wafer boat box along the circumference and is connected end to end, so that the wafer boat box body 2 forms a chamber 20, and the chamber 20 opens upward. And the chamber 20 is connected to the outside; a first supporting boss 11, a second supporting boss 12, a third supporting boss 13, and a fourth supporting boss 14 are also fixedly provided on the base plate 1, and the first supporting boss 11, the second supporting boss 12, the third supporting boss 13, and the fourth supporting boss 14 are all located below the base plate 1; the first supporting boss 11, the second supporting boss 12, the third supporting boss 13, and the fourth supporting boss 14 are all used to support the base plate 1.

[0023] In one embodiment of the present application, the jig further includes a first reinforcement block 5, which is fixedly connected to the base plate 1 on one hand, and fixedly connected to the wafer boat box enclosure 25 on the other hand, and the first reinforcement block 5 and the outer wall of the wafer boat box enclosure 25 are fixedly connected.

[0024] In one embodiment of the present application, the jig further includes a second reinforcement block 6, which is fixedly connected to the base plate 1 on one hand, and fixedly connected to the wafer boat box enclosure 25 on the other hand, and the second reinforcement block 6 is fixedly connected to the outer wall of the wafer boat box enclosure 25.

[0025] In one embodiment of the present application, a first plug-in slot 21, a second plug-in slot 22, a third plug-in slot 23, and a fourth plug-in slot 24 are formed on the crystal boat box body 2, and the first plug-in slot 21, the second plug-in slot 22, the third plug-in slot 23, and the fourth plug-in slot 24 are all connected to the chamber 20 of the crystal boat box body 2.

[0026] In one embodiment of the present application, the fixture also includes a positioning block 8. The chamber 20 of the crystal boat box body 2 has a bottom 28. On the one hand, the positioning block 8 is located in the chamber 20 of the crystal boat box body 2. On the other hand, the positioning block 8 is fixedly connected to the bottom 28 of the crystal boat box body 2.

[0027] In one embodiment of the present application, the blocking block 8 has a semi-cylindrical groove 80 , and the semi-cylindrical groove 80 is recessed from the outer wall of the blocking block 8 toward the bottom 28 of the wafer boat box body 2 by a preset depth.

[0028] In one embodiment of the present application, the fixture further includes a preset number of bosses 7 , which are fixedly placed in the chamber 20 of the wafer boat box body 2 on one hand, and are fixedly connected to the bottom 28 of the wafer boat box body 2 on the other hand.

[0029] In one embodiment of the present application, the fixture also includes a first wedge-shaped boss 9 and a second wedge-shaped boss 10. The first wedge-shaped boss 9 is fixedly connected to the inner wall of the crystal boat box enclosure 25 on the one hand, and is fixedly connected to the bottom 28 of the crystal boat box body 2 on the other hand; the second wedge-shaped boss 10 is fixedly connected to the inner wall of the crystal boat box enclosure 25 on the one hand, and is fixedly connected to the bottom 28 of the crystal boat box body 2 on the other hand; the first wedge-shaped boss 9 and the second wedge-shaped boss 10 are both located in the cavity 20 of the crystal boat box body 2.

[0030] In one embodiment of the present application, the jig further includes a first support block 3 and a second support block 4; a first groove 26 and a second groove 27 are provided on the wafer box enclosure 25, the first groove 26 being formed by the wafer box enclosure 25 being recessed inwardly to a preset depth toward the chamber 20 of the wafer box body 2, and the second groove 27 being formed by the wafer box enclosure 25 being recessed inwardly to a preset depth toward the chamber 20 of the wafer box body 2, and the first groove 26 and the second groove 27 are symmetrical about the axis of the wafer box body 2; the first support block 3 is placed in the first groove 26, and the first support block 3 is fixedly connected to the outer wall of the wafer box enclosure 25 on the one hand, and the first support block 3 is fixedly connected to the base plate 1 on the other hand; the second support block 4 is placed in the second groove 27, and the second support block 4 is fixedly connected to the outer wall of the wafer box enclosure 25 on the one hand, and the second support block 4 is fixedly connected to the base plate 1 on the other hand.

[0031] In one embodiment of the present application, the fixture is made of non-metallic material.

[0032] The crystal boat box cover jig provided in the present application has a simple structure and is easy to manufacture. On the one hand, since the jig is integrally formed, compared with traditional cover jigs, the jig will not deform or fall apart after long-term use; on the other hand, since the jig is made of non-metallic materials, compared with traditional metal cover jigs, no metal debris will be generated during use to contaminate the crystal boat or wafers.

[0033] The above embodiments are intended only to illustrate the technical concepts and features of the present invention. Their purpose is to enable those familiar with the art to understand the contents of the present invention and implement them accordingly. They are not intended to limit the scope of protection of the present invention. Any equivalent changes or modifications based on the spirit of the present invention are intended to be included in the scope of protection of the present invention.

Claims

1. A wafer boat box cover fixture structure, characterized in that: The crystal boat box cover fixture structure is integrally formed, which includes a base plate and a crystal boat box body. The crystal boat box body is fixedly installed above the base plate. The crystal boat box body includes a crystal boat box enclosure. The crystal boat box enclosure has a preset height. The crystal boat box enclosure surrounds the circumference and is connected end to end, so that the crystal boat box body forms a chamber, the chamber opens upward, and the chamber is connected to the outside world; a first supporting boss, a second supporting boss, a third supporting boss, and a fourth supporting boss are also fixedly provided on the base plate, and the first supporting boss, the second supporting boss, the third supporting boss, and the fourth supporting boss are all located below the base plate; the first supporting boss, the second supporting boss, the third supporting boss, and the fourth supporting boss are all used to support the base plate.

2. The wafer boat box cover fixture structure according to claim 1, characterized in that: It also includes a first reinforcement block, which is fixedly connected to the bottom plate on one hand and to the wafer boat box enclosure on the other hand, and the first reinforcement block is fixedly connected to the outer wall of the wafer boat box enclosure.

3. The wafer boat box cover fixture structure according to claim 2, characterized in that: It also includes a second reinforcement block, which is fixedly connected to the bottom plate on one hand and to the wafer boat box enclosure on the other hand, and the second reinforcement block is fixedly connected to the outer wall of the wafer boat box enclosure.

4. The wafer boat box cover fixture structure according to claim 3, characterized in that: The wafer boat box body is formed with a first plug-in slot, a second plug-in slot, a third plug-in slot, and a fourth plug-in slot. The first plug-in slot, the second plug-in slot, the third plug-in slot, and the fourth plug-in slot are all connected to the cavity of the wafer boat box body.

5. The wafer boat box cover fixture structure according to claim 4, characterized in that: It also includes a positioning block. The cavity of the wafer boat box body has a bottom. The positioning block is located in the cavity of the wafer boat box body on the one hand, and is fixedly connected to the bottom of the wafer boat box body on the other hand.

6. The wafer boat box cover fixture structure according to claim 5, characterized in that: The positioning block has a semi-cylindrical groove, and the semi-cylindrical groove is recessed from the outer wall of the positioning block toward the bottom of the wafer boat box body by a preset depth.

7. The wafer boat box cover fixture structure according to claim 6, characterized in that: It also includes a preset number of bosses, which are fixedly placed in the cavity of the wafer boat box body on one hand, and are fixedly connected to the bottom of the wafer boat box body on the other hand.

8. The wafer boat box cover fixture structure according to claim 7, characterized in that: It also includes a first wedge-shaped boss and a second wedge-shaped boss. The first wedge-shaped boss is fixedly connected to the inner wall of the crystal boat box enclosure on the one hand, and is fixedly connected to the bottom of the crystal boat box body on the other hand; the second wedge-shaped boss is fixedly connected to the inner wall of the crystal boat box enclosure on the one hand, and is fixedly connected to the bottom of the crystal boat box body on the other hand; the first wedge-shaped boss and the second wedge-shaped boss are both located in the cavity of the crystal boat box body.

9. The wafer boat box cover fixture structure according to claim 8, characterized in that: The cam is secured to a location where the cam is held in place and the cam is secured to a location where the cam is held in place and the cam is secured to a location where the cam is held in place.

10. The wafer boat box cover fixture structure according to claim 1, characterized in that: The crystal boat box cover fixture structure is made of non-metallic materials.

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