Liftable vertical furnace

Abstract

The utility model provides a liftable vertical furnace, which comprises an outer furnace tube, an inner furnace tube arranged on the inner side of the outer furnace tube, a lower furnace door detachably connected with the lower end of the outer furnace tube, a carrier boat bearing device vertically arranged on the lower furnace door, and at least one lifting mechanism connected with the outer side of the outer furnace tube, the lifting mechanism is used for lifting the outer furnace tube and the inner furnace tube to expose the carrier boat bearing device; according to the liftable vertical furnace, the outer furnace tube and the inner furnace tube are lifted through the lifting mechanism so that the carrier boat bearing device can be exposed, feeding and discharging are facilitated, and compared with the mode that a paddle is adopted to drive a carrier boat to enter and exit from the furnace tubes to achieve feeding and discharging in the prior art, the height of the whole device can be reduced through the liftable vertical furnace.

Description

Technical Field

[0001] The utility model belongs to the technical field of solar energy, and more specifically relates to a liftable vertical furnace. Background Art

[0002] The current photovoltaic industry uses two types of furnaces for diffusion, oxidation, annealing, doping, PECVD (low-pressure chemical vapor deposition), LPCVD (plasma-enhanced chemical vapor deposition) and other processes: vertical furnaces and horizontal furnaces. Both types of structures require silicon wafers to be placed in specific carrier boats and transferred into the reaction chamber for processing. By introducing specific reaction gases, specific coating, diffusion, oxidation and thin film deposition processes can be achieved on the silicon wafers.

[0003] Currently, most loading and unloading mechanisms used in horizontal and vertical furnaces use paddles to drive a carrier boat in and out of the furnace tube. This type of loading and unloading mechanism does not cause major problems in horizontal furnaces. However, in vertical furnaces, due to the limited height of the equipment installation site, if this loading and unloading method is still used, the center of gravity of the equipment will be designed at a high position to avoid the automated docking position, making the overall equipment design very high and the overall maintenance very difficult. Utility Model Content

[0004] The purpose of the utility model is to provide a liftable vertical furnace to solve the problem that the existing vertical furnace uses a paddle to drive a carrier boat in and out of the furnace tube to achieve loading and unloading, resulting in the overall equipment being very high.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A liftable vertical furnace is provided, comprising: an outer furnace tube, an inner furnace tube arranged inside the outer furnace tube, a lower furnace door detachably connected to the lower end of the outer furnace tube, a carrier boat supporting device uprightly arranged on the lower furnace door, and at least one lifting mechanism connected to the outer side of the outer furnace tube, the lifting mechanism being used to lift the outer furnace tube and the inner furnace tube to expose the carrier boat supporting device.

[0007] Furthermore, the lifting mechanism includes: a lifting guide rail located on one side of the outer furnace tube, at least one movable connecting member slidably arranged on the lifting guide rail for connecting to the outer side of the outer furnace tube, and a driving structure for driving the movable connecting member to perform lifting movement along the lifting guide rail.

[0008] Furthermore, the number of the movable connecting members is set to three, and the three movable connecting members are arranged at intervals along the axial direction of the outer furnace tube.

[0009] Furthermore, the driving structure includes a motor arranged at the upper end of the lifting guide rail and a rolling screw arranged on one side of the lifting guide rail. The motor is connected to the rolling screw through a coupling, and the movable connecting piece is sleeved on the rolling screw.

[0010] Furthermore, the driving structure includes a motor arranged at the upper end of the lifting guide rail, and a synchronous belt arranged on one side of the lifting guide rail, the synchronous belt is connected to the motor through a synchronous wheel, and the movable connecting member is arranged on the synchronous belt.

[0011] Furthermore, the driving structure includes a cylinder arranged at the upper end of the lifting guide rail, and a moving seat slidably arranged on one side of the lifting guide rail, the moving seat is connected to the piston rod of the cylinder, and the moving connecting member is arranged on the moving seat.

[0012] Furthermore, the number of the lifting mechanisms is set to two, and the two lifting mechanisms are symmetrically arranged on both sides of the outer furnace tube.

[0013] Furthermore, it also includes a frame, the lifting mechanism is uprightly arranged on the frame, and the lower furnace door is arranged at the middle position of the frame.

[0014] Furthermore, it also includes a driving device for driving the carrier boat carrying device to rotate, and the driving device is arranged on a side of the lower furnace door away from the outer furnace tube.

[0015] Furthermore, the carrier boat carrying device includes a first rotating base located between the lower end of the inner furnace tube and the lower furnace door, a rotating shaft connected to the driving device, and a first supporting member for supporting the carrier boat, the rotating shaft is arranged on the side of the first rotating base away from the inner furnace tube, the first supporting member is uprightly arranged on the first rotating base and sleeved on the outer side of the inner furnace tube, and the first supporting member is provided with a hook hole for hanging the carrier boat.

[0016] Furthermore, the carrier boat carrying device includes a second rotating base mounted on the outer side of the inner furnace tube, a rotating connector located between the lower end of the inner furnace tube and the lower furnace door, and multiple pairs of second supporting members for carrying the carrier boat, the rotating connector connects the second rotating base and the driving device, the second rotating base is provided with a carrying position for the carrier boat to pass through, each pair of second supporting members is located on both sides of the same carrying position and each pair of second supporting members can be folded and arranged on the second rotating base.

[0017] The beneficial effects of the liftable vertical furnace provided by the utility model are:

[0018] In the liftable vertical furnace provided by the utility model, a lifting mechanism is provided on the outside of the outer furnace tube, and the outer furnace tube and the inner furnace tube are lifted by the lifting mechanism to expose the carrier boat bearing device, which is convenient for loading and unloading. Compared with the prior art method of using paddles to drive the carrier boat in and out of the furnace tube to achieve loading and unloading, the liftable vertical furnace provided by the utility model can reduce the height of the entire equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments or descriptions of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0020] Figure 1 This is a cross-sectional view of the overall structure of a liftable vertical furnace provided in Example 1 of the present utility model;

[0021] Figure 2 A partial cross-sectional structural diagram of a vertical furnace that can be raised and lowered when the outer furnace tube is connected to the lower furnace door provided in Example 1 of the present utility model;

[0022] Figure 3 Schematic diagram of the structure of the carrier boat carrying device provided in Example 1 of the utility model Figure 1 ;

[0023] Figure 4 Schematic diagram of the structure of the carrier boat carrying device provided in Example 1 of the utility model Figure 2 ;

[0024] Figure 5 A top view of the heating element and the heat dissipation element provided in Example 1 of the present utility model in conjunction with the inner and outer furnace tubes;

[0025] Figure 6 This is a cross-sectional view of the overall structure of a liftable vertical furnace provided in Example 2 of the present utility model;

[0026] Figure 7 A partial cross-sectional structural diagram of a vertical furnace that can be raised and lowered when the outer furnace tube is connected to the lower furnace door provided in Example 2 of the present utility model;

[0027] Figure 8 A schematic structural diagram of a carrier boat carrying device provided in Example 2 of the present utility model;

[0028] Among them, the main marks of the drawings in the figure are:

[0029] Outer furnace tube; 14, inner furnace tube; 15, carrier boat carrying device; 16, drive device; 17, carrier boat; 18, lifting mechanism; 161, magnetic fluid sealing assembly; 162, belt; 163, second motor; 181, lifting guide rail; 182, movable connector; 183, first motor; 19, frame;

[0030] 2. Upper furnace cover; 21. Reinforcement ribs; 22. Lower plate; 23. Inner plate; 24. Outer plate; 25. Connector;

[0031] 3. Lower the furnace door;

[0032] 41. Fixed ring; 42. First rotating base; 47. Rotating shaft; 43. First bearing member; 491. First thermal insulation member; 492. Second thermal insulation member;

[0033] 71. External heating element; 72. Internal heating element; 73. First heat dissipation element; 74. Second heat dissipation element; 75. Water cooling interface;

[0034] 81. Second rotating base; 82. Second bearing member; 83. Rotating connecting member; 821. Bearing fixed part; 822. Bearing movable part. DETAILED DESCRIPTION

[0035] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0036] The principle and structure of the present invention are described in detail below with reference to the accompanying drawings and embodiments.

[0037] Currently, most vertical furnace loading and unloading mechanisms utilize paddles to propel a carrier boat in and out of the furnace tubes. Due to the limited height of the equipment installation site, this loading and unloading method results in the equipment's center of gravity being positioned high to avoid the need for automated docking. This results in a very high overall design and makes maintenance difficult. To address this issue, the present utility model proposes a vertical furnace that can be raised and lowered to reduce the overall height of the equipment. Example 1:

[0038] For ease of understanding, the following directions are explained first. The vertical furnace has a cylindrical structure. The axial direction of the vertical furnace is the up and down direction, that is, the height direction, and the radial direction of the vertical furnace is the inside and outside direction.

[0039] Please also see Figure 1 、 Figure 2The liftable vertical furnace provided in this embodiment includes an upper furnace cover 2, a lower furnace door 3, an outer furnace tube 13, an inner furnace tube 14, a carrier boat carrying device 15, a driving device 16 and a lifting mechanism 18.

[0040] The upper furnace cover 2 and lower furnace door 3 are positioned opposite each other. The outer furnace tube 13 is positioned between the upper furnace cover 2 and the lower furnace door 3. The inner furnace tube 14 is positioned inside the outer furnace tube 13 and coaxially arranged with the outer furnace tube 13. The lower end of the inner furnace tube 14 is closed, while the lower end of the outer furnace tube 13 is open. The lower furnace door 3 is detachably connected to the lower end of the outer furnace tube 13. A lifting mechanism 18 is used to move the outer furnace tube 13 and the inner furnace tube 14 in a lifting motion, thereby separating and connecting the outer furnace tube 13 to the lower furnace door 3. When the lower furnace door 3 is connected to the lower end of the outer furnace tube 13, a distance is maintained between the lower end of the inner furnace tube 14 and the lower furnace door 3. The inner furnace tube 14, the outer furnace tube 13, the upper furnace cover 2, and the lower furnace door 3 collectively form a receiving chamber with a concave cross-section. A carrier boat support device 15 is rotatably disposed within the receiving chamber and is used to support a carrier boat 17.

[0041] The lift-type vertical furnace provided in this embodiment elevates the outer furnace tube 13 and inner furnace tube 14 by means of a lifting mechanism 18 before the process begins, exposing the boat carrier 15 and facilitating material loading. After the process is completed, the outer furnace tube 13 and inner furnace tube 14 are lifted by the lifting mechanism 18, while the lower furnace door 3, boat carrier 15, and the boat carrier 17 thereon remain in place, awaiting automated docking and unloading. This lift-type vertical furnace can reduce the overall height of the equipment.

[0042] In this embodiment, if Figure 1 As shown, there are two lifting mechanisms 18, which operate synchronously. The two lifting mechanisms 18 are vertically mounted on a frame 19 and symmetrically arranged on either side of the outer furnace tube 13. The lower furnace door 3 is located in the center of the frame 19. The two symmetrically arranged lifting mechanisms 18 synchronously drive the outer furnace tube 13 and the inner furnace tube 14 to move upward and downward, ensuring balanced forces on the outer furnace tube 13, 14 during their movement.

[0043] Each lifting mechanism 18 includes a lifting guide rail 181 located on one side of the outer furnace tube 13, at least one movable connecting member 182 slidably arranged on the lifting guide rail 181 for connecting to the outside of the outer furnace tube 13, and a driving structure for driving the movable connecting member 182 to move up and down along the lifting guide rail 181.

[0044] In this embodiment, the specific number of movable connectors 182 can be set according to the height of the outer furnace tube 13. For example, the number of movable connectors 182 is set to three, and the three movable connectors 182 are spaced apart along the axial direction of the outer furnace tube 13 to ensure that the outer furnace tube 13 and the inner furnace tube 14 are driven to move upward and downward while providing sufficient support for the outer furnace tube 13 and the inner furnace tube 14.

[0045] In this embodiment, there are various specific types of driving structures, including but not limited to motor driving or cylinder driving.

[0046] For example, the drive structure includes a first motor 183 mounted at the top of the lifting rail 181 and a rolling screw mounted on one side of the lifting rail 181. The first motor 183 is connected to the rolling screw via a coupling, and a movable connector 182 is sleeved onto the rolling screw. The rolling screw converts the rotational motion of the first motor 183 into linear motion, driving the connected movable connector 182 to move linearly, thereby achieving the lifting motion of the outer furnace tube 13 and the inner furnace tube 14 along the lifting rail 181. The motor drive system using a rolling screw transmission offers high precision and high rigidity.

[0047] For example, the drive structure includes a first motor 183 mounted at the upper end of the lifting rail 181 and a synchronous belt mounted on one side of the lifting rail 181. The synchronous belt is connected to the first motor 183 via a synchronous pulley, and a movable connector 182 is mounted on the synchronous belt. The first motor 183 drives the synchronous belt via the synchronous pulley, and the synchronous belt in turn drives the movable connector 182 to move linearly, thereby achieving linear motion of the outer furnace tube 13 and the inner furnace tube 14 along the lifting rail 181. This motor drive system employing a synchronous belt drive offers smooth transmission and low noise.

[0048] For example, the drive structure includes a cylinder mounted on the upper end of a lifting rail 181 and a movable base slidably mounted to one side of the lifting rail 181. The movable base is connected to the cylinder's piston rod, and a movable connector 182 is mounted on the movable base. The cylinder drives the movable base for linear motion, which in turn drives the connected movable connector 182 for linear motion, thereby achieving linear motion of the outer furnace tube 13 and the inner furnace tube 14 along the lifting rail 181. The cylinder drive method offers advantages such as a simple structure and high load capacity.

[0049] In this embodiment, if Figure 2As shown, the boat carrier 15 is rotated by the drive device 16. The drive device 16 is arranged on the side of the lower furnace door 3 away from the outer furnace tube 13 and is connected to the boat carrier 15. When the drive device 16 drives the boat carrier 15 to rotate, the boat carrier 17 arranged on the boat carrier 15 is driven to rotate synchronously, thereby ensuring that the silicon wafers on the boat carrier 17 are heated evenly.

[0050] like Figure 2 、 Figure 3 、 Figure 4 As shown, the carrier boat supporting device 15 includes a first rotating base 42, a rotating shaft 47, and a first supporting member 43. The first rotating base 42 is located between the lower end of the inner furnace tube 14 and the lower furnace door 3. The rotating shaft 47 is disposed on a side of the first rotating base 42 away from the inner furnace tube 14 and is connected to the driving device 16. The first supporting member 43 is disposed on the first rotating base 42 and sleeved on the outer side of the inner furnace tube 14. The first supporting member 43 is used to support the carrier boat 17.

[0051] Furthermore, the specific structures of the carrier boat carrying device 15 in this embodiment are of various types.

[0052] For example, Figure 2 、 Figure 3 As shown, the boat carrier 15 includes a first rotating base 42, a first thermal insulator 491, a fixed ring 41, a first carrier 43, and a rotating shaft 47. The first rotating base 42 is spaced apart from and parallel to the fixed ring 41. The first carrier 43 includes a plurality of hanging plates arranged in a circular pattern between the first rotating base 42 and the fixed ring 41. The hanging plates are fixed to the edges of the first rotating base 42. At least one hook hole is provided at intervals along the height of the hanging plates for suspending the boat 17, which can be a vertical quartz boat. The first thermal insulator 491 is positioned above the first rotating base 42, and the rotating shaft 47 is positioned below the first rotating base 42. The first thermal insulator 491 has an open end facing the first rotating base 42. Together, the first thermal insulator 491 and the first rotating base 42 form a chamber filled with thermal insulation material. The first thermal insulator 491 and the thermal insulation material prevent heat from within the vertical furnace from being transferred through the first rotating base 42 to the lower furnace door 3. This protects the lower furnace door 3 and components such as the drive mechanism 16 while also reducing energy loss within the furnace. The edge of the first thermal insulator 491 is also provided with multiple, spaced-apart notches, which facilitate the installation of a mounting plate.

[0053] For example, Figure 4As shown, the boat carrier 15 comprises a first rotating base 42, a second thermal insulator 492, a fixed ring 41, a first carrier 43, and a rotation axis (noted in the figure). The first rotating base 42 is spaced apart and parallel to the fixed ring 41. The first carrier 43 comprises four hanging plates arranged in a circular pattern between the first rotating base 42 and the fixed ring 41. The first carrier 43 is fixed to the center of the first rotating base 42. At least one hook hole is provided at intervals along the height of the hanging plates for suspending the boat 17, which can be a vertical quartz boat. The second thermal insulator 492 is positioned above the first rotating base 42, and the rotation axis is positioned below the first rotating base 42. The second thermal insulator 492 has an open end facing the first rotating base 42. Together, the second thermal insulator 492 and the first rotating base 42 form a chamber filled with thermal insulation material. The second thermal insulator 492 and the thermal insulation material prevent heat from within the vertical furnace from being transferred through the first rotating base 42 to the lower furnace door 3. This protects the lower furnace door 3 and components such as the drive unit 16 while also reducing energy loss within the furnace. The center region of the second thermal insulator 492 is also provided with multiple retaining holes for the insertion of a hanging plate. The placement of these retaining holes facilitates installation of the hanging plate.

[0054] In this embodiment, if Figure 2 、 Figure 3 As shown, the driving device 16 is arranged on the side of the lower furnace door 3 away from the outer furnace tube 13. The driving device 16 includes a magnetic fluid sealing assembly 161, a belt 162 and a second motor 163. The magnetic fluid sealing assembly 161 includes a transmission shaft, one end of which is connected to the second motor 163 through the belt 162, and the other end of which is connected to the rotating shaft 47 in the carrier boat carrying device 15. The carrier boat carrying device 15 is driven to rotate by the second motor 163, thereby driving the carrier boat 17 suspended on the carrier boat carrying device 15 to rotate together. It should be noted that the magnetic fluid sealing assembly 161 includes a fixed seat and a transmission shaft arranged on the inner side of the fixed seat, and two magnetic poles are arranged on the outer side of the transmission shaft along its axial direction, and a permanent magnet is provided between the two magnetic poles. There is a gap between the two magnetic poles and the transmission shaft, and the gap is filled with magnetic fluid. Magnetic fluid is composed of magnetic nanoparticles that have been specially processed to uniformly disperse them in a liquid (carrier) with a very low saturated vapor pressure. The dispersant, when mixed with the liquid, creates a solid-liquid colloid that neither precipitates nor solidifies. It possesses both the fluidity of a liquid and magnetic properties. Magnetic fluid dynamic vacuum seals are based on these properties. Magnetic fluid seal assembly 161 utilizes these properties to secure the magnetic fluid around the shaft using magnets, forming a liquid "O-ring seal." By connecting magnetic fluid seal assembly 161 to the rotatable carrier boat 15, power transmission is guaranteed, preventing furnace decompression and process gas leakage.

[0055] In this embodiment, if Figure 2 As shown, the upper end of the inner furnace tube 14 is provided with a connector 25 for hoisting. The provision of the connector 25 enables the inner furnace tube 14 to be connected to an external hoisting connector. The hoisting connector can provide strength to the inner furnace tube 14 to ensure that the inner furnace tube 14 is suspended on the inner side of the outer furnace tube 13. The hoisting connector is not limited to piles set on the ceiling. The lower end of the inner furnace tube 14 is a closed end and is hemispherical. By setting the lower end of the outer furnace tube 13 to be hemispherical, it can withstand greater pressure and is more suitable for the demand of vacuuming inside the vertical furnace. The inner furnace tube 14 can be made of a quartz tube. The outer wall of the inner furnace tube 14 and the inner wall of the outer furnace tube 13 form a reaction chamber, which is part of the aforementioned accommodating chamber. When the carrier boat 17 enters the interior of the vertical furnace, the carrier boat 17 is mainly placed in the reaction chamber.

[0056] In this embodiment, if Figure 2 As shown, the upper furnace cover 2 is positioned at the upper end of the outer furnace tube 13 and is sealed to the outer furnace tube 13. A central hole is provided in the middle of the upper furnace cover 2 for the inner furnace tube 14 to pass through. The central hole and the upper (open) end of the inner furnace tube 14 form concentric circles when viewed from above. The upper end surface of the upper furnace cover 2 features an upwardly projecting spherical protrusion. This design allows the upper furnace cover 2 to withstand greater pressure and prevent it from collapsing when a vacuum is applied to the vertical furnace. A cavity is defined within the upper furnace cover 2 surrounding the central hole. The upper furnace cover 2 also includes a lower plate 22, an inner plate 23, and an outer plate 24, which form the cavity with the upper end surface. The cavity is provided with multiple reinforcing ribs 21 connected between the upper and lower inner walls of the cavity. Each rib 21 is plate-shaped and has multiple through-holes. The ribs 21 are arranged in a circular pattern within the annular cavity. The ribs 21 enhance the outer furnace cover's ability to withstand pressure. A water cooling component or an air cooling component can also be set in the upper furnace cover 2. The lower layer 22, the inner layer 23, and the outer layer 24 are all hollow layers to form a water flow channel or an air flow channel. During the operation of the vertical furnace, water or air can be used to continuously take away excess heat, thereby facilitating temperature control in the vertical furnace.

[0057] In this embodiment, if Figure 2 、 Figure 5 As shown, both the inner furnace tube 14 and the outer furnace tube 13 are equipped with heating elements to heat the chamber within the vertical furnace. The heating element on the inner furnace tube 14 is located on the outside of the inner furnace tube 14 and is hereinafter referred to as the inner heating element 72. The heating element on the outer furnace tube 13 is located on the inside of the outer furnace tube 13 and is hereinafter referred to as the outer heating element 71. Both the inner heating element 72 and the outer heating element 71 can be heated using heating wires, infrared lamps, electromagnetic induction heating, or other heating methods. By independently controlling the heating of the outer heating element 71 and the inner heating element 72, a high-temperature environment is created for the silicon wafer reaction.

[0058] Furthermore, there are various types of specific arrangements of the heating elements in this embodiment.

[0059] For example, the inner heating element 72 covers the entire inner side of the inner furnace tube 14 and is formed by heating wires that are evenly wound along the axial direction of the inner furnace tube 14. Similarly, the outer heating element 71 covers the entire inner side of the inner furnace tube 14 and is formed by heating wires that are evenly wound along the axial direction of the outer furnace tube 13.

[0060] For another example, the inner heating element 72 is composed of a plurality of first independent heating segments, each of which uses a heating wire, and each first independent heating is formed by winding the heating wire along the axial direction of the inner furnace tube 14. The distribution density of the heating wires between different first independent heating segments can be the same or different. Similarly, the outer heating element 71 is composed of a plurality of second independent heating segments, and each second independent heating is formed by winding the heating wire along the axial direction of the outer furnace tube 13. The distribution density of the heating wires between different first independent heating segments can be the same or different. In this example, both the inner heating element 72 and the outer heating element 71 are composed of a plurality of independent heating segments, that is, the inner heating element 72 is composed of a plurality of first independent heating segment groups, and the outer heating element 71 is composed of a plurality of second independent heating segments, so that the inner and outer heating elements can be independently controlled for heating in zones and / or layers.

[0061] In this embodiment, if Figure 2 、 Figure 5 As shown, heat dissipation elements can be provided on both the inner furnace tube 14 and the outer furnace tube 13 to achieve rapid and stable adjustment of the temperature of the inner and outer furnace tubes 13. Specifically, a first heat dissipation element 73 is provided on the inner side of the inner furnace tube 14. At the same time, the first heat dissipation element 73 and the inner heating element 72 can be provided independently or integrally. Similarly, a second heat dissipation element 74 is provided on the outer side of the outer furnace tube 13. At the same time, the second heat dissipation element 74 and the outer heating element 71 can be provided independently or integrally. The first and second heat dissipation elements can adopt an air-cooled structure or a water-cooled structure, but are not limited to the above structures. Any mechanism with heat exchange and heat dissipation function is included in this scope. The first and second heat dissipation elements can be manually controlled or automatically controlled by collecting temperature signals, pressure signals, etc. Any method that can achieve automatic control is included in this scope.

[0062] In this embodiment, if Figure 2As shown, a water cooling port 75 is provided at the connection between the outer furnace tube 13 and the lower furnace door 3 for supplying water to the heat dissipation elements disposed therein. Water or air flow channels may also be provided on the inner furnace tube 14 and the outer furnace tube 13, and even within the heating elements of the inner furnace tube 14 and the outer furnace tube 13, to achieve better temperature control within the vertical furnace.

[0063] In this embodiment, the lower furnace door 3 is an integrated unit, meaning it is a single, integral structure. It can be connected to the lower end of the carrier boat support 15. The side of the lower furnace door 3 near the outer furnace tube 13 features a spherical protrusion. This design allows the lower furnace door 3 to withstand greater pressure and prevent it from being deflated during vacuuming of the vertical furnace. Example 2:

[0064] Please also refer to Figure 6 、 Figure 7 and Figure 8 The liftable vertical furnace provided in this embodiment includes an upper furnace cover 2, a lower furnace door 3, an outer furnace tube 13, an inner furnace tube 14, a carrier boat carrying device 15, a driving device 16 and a lifting mechanism 18.

[0065] The upper furnace cover 2 and lower furnace door 3 are positioned opposite each other. The outer furnace tube 13 is positioned between the upper furnace cover 2 and the lower furnace door 3. The inner furnace tube 14 is positioned inside the outer furnace tube 13 and coaxially arranged with the outer furnace tube 13. The lower end of the inner furnace tube 14 is closed, while the lower end of the outer furnace tube 13 is open. The lower furnace door 3 is detachably connected to the lower end of the outer furnace tube 13. A lifting mechanism 18 is used to move the outer furnace tube 13 and the inner furnace tube 14 in a lifting motion, thereby separating and connecting the outer furnace tube 13 to the lower furnace door 3. When the lower furnace door 3 is connected to the lower end of the outer furnace tube 13, a distance is maintained between the lower end of the inner furnace tube 14 and the lower furnace door 3. The inner furnace tube 14, the outer furnace tube 13, the upper furnace cover 2, and the lower furnace door 3 collectively form a receiving chamber with a concave cross-section. A carrier boat support device 15 is rotatably disposed within the receiving chamber and is used to support a carrier boat 17.

[0066] The lift-type vertical furnace provided in this embodiment elevates the outer furnace tube 13 and inner furnace tube 14 by means of a lifting mechanism 18 before the process begins, exposing the boat carrier 15 and facilitating material loading. After the process is completed, the outer furnace tube 13 and inner furnace tube 14 are lifted by the lifting mechanism 18, while the lower furnace door 3, boat carrier 15, and the boat carrier 17 thereon remain in place, awaiting automated docking and unloading. This lift-type vertical furnace can reduce the overall height of the equipment.

[0067] In this embodiment, if Figure 7 、 Figure 8As shown, the boat carrier 15 is rotated by the drive device 16. The drive device 16 is arranged on the side of the lower furnace door 3 away from the outer furnace tube 13 and is connected to the boat carrier 15. When the drive device 16 drives the boat carrier 15 to rotate, the boat carrier 17 arranged on the boat carrier 15 is driven to rotate synchronously, thereby ensuring that the silicon wafers on the boat carrier 17 are heated evenly.

[0068] The carrier boat carrying device 15 includes a second rotating base 81, a second bearing member 82, and a rotating connector 83. The second rotating base 81 is sleeved on the outside of the inner furnace tube 14. The second rotating base 81 is provided with multiple bearing positions for the carrier boat 17 to pass through. The rotating connector 83 is located between the closed end of the inner furnace tube 14 and the lower furnace door 3, and the rotating connector 83 connects the second rotating base 81 with the driving device 16. The second bearing member 82 is used to carry the carrier boat 17. The second bearing members 82 are provided in multiple pairs, each pair of second bearing members 82 is located on both sides of the same bearing position, and each pair of second bearing members 82 is folded and arranged on the second rotating base 81. It should be noted that the carrier boats 17 of this embodiment are stacked on each other and do not need to be hung. Rotating the entire second rotating base 81 causes the carrier boat 17 on the second rotating base 81 to rotate.

[0069] The rotating connector 83 comprises a fixed connection portion, an insulating portion, and a rotating connection portion. The insulating portion is filled with insulating material. This design prevents heat from the vertical furnace from being transferred to the lower furnace door 3, protecting the lower furnace door 3 and components such as the drive unit 16, while also reducing energy loss within the vertical furnace. The fixed and rotating connection portions are located above and below the insulating portion, respectively. The fixed connection portion is connected to the second rotating base 81, and the rotating connection portion is connected to the drive unit 16.

[0070] Among them, the second rotating base 81 is provided with six bearing positions arranged in a circular shape, and is also provided with two second bearing members 82 corresponding to each bearing position, which have a folded state and an unfolded state. These two second bearing members 82 form a pair of second bearing members 82. Each second bearing member 82 includes a bearing fixed portion 821 and a bearing movable portion 822. The bearing fixed portion 821 is fixedly set on the second rotating base 81, and the bearing movable portion 822 is rotatably set on the bearing fixed portion 821. In any two adjacent second bearing members 82, a bearing fixed portion 821 belonging to one of the second bearing members 82 is connected to a bearing fixed portion 821 belonging to the other second bearing member 82. In actual applications, in any two adjacent second bearing members 82, the two mutually connected bearing fixed portions 821 can be formed as one piece. This design can reduce the number of parts and save installation time.

[0071] Taking the rotation angle of the supporting movable portion 822 in each second supporting member 82 as 90 degrees as an example, the supporting fixed portion 821 is always in a horizontal setting. When the second supporting member 82 is in a folded state, the supporting movable portion 822 is perpendicular to the supporting fixed portion 821. When the second supporting member 82 is in an unfolded state, the supporting movable portion 822 is also in a horizontal setting. Taking the taking and placing of a carrier boat 17 as an example, if the carrier boat 17 is to be placed, the two second supporting members 82 are switched to a folded state so that the carrier boat 17 can pass through the supporting position. When the bottom of the carrier boat 17 moves to the supporting position, the two second supporting members 82 are switched to an unfolded state so that the carrier boat 17 is placed on the supporting member. If the carrier boat 17 is to be taken out later, the two second supporting members 82 are switched to a folded state so that the carrier boat 17 can pass through the supporting position, thereby realizing the taking and placing of the carrier boat 17.

[0072] In this embodiment, if Figure 7 As shown, the drive device 16 is arranged on the side of the lower furnace door 3 away from the outer furnace tube 13. The drive device 16 includes a magnetic fluid sealing assembly 161, a belt 162 and a second motor 163. The magnetic fluid sealing assembly 161 includes a transmission shaft, one end of which is connected to the second motor 163 through the belt 162, and the other end of which is connected to the rotating connector 83 in the carrier boat carrying device 15. The carrier boat carrying device 15 is driven to rotate by the second motor 163, thereby driving the carrier boat 17 stacked on the carrier boat carrying device 15 to rotate together. It should be noted that the magnetic fluid sealing assembly 161 includes a fixed seat and a transmission shaft arranged on the inner side of the fixed seat, and two magnetic poles are arranged on the outer side of the transmission shaft along its axial direction, and a permanent magnet is provided between the two magnetic poles. There is a gap between the two magnetic poles and the transmission shaft, and the gap is filled with magnetic fluid. Magnetic fluid is composed of magnetic nanoparticles that have been specially processed to uniformly disperse them in a liquid (carrier) with a very low saturated vapor pressure. The dispersant, when mixed with the liquid, creates a solid-liquid colloid that neither precipitates nor solidifies. It possesses both the fluidity of a liquid and magnetic properties. Magnetic fluid dynamic vacuum seals are based on these properties. Magnetic fluid seal assembly 161 utilizes these properties to secure the magnetic fluid around the shaft using magnets, forming a liquid "O-ring seal." By connecting magnetic fluid seal assembly 161 to the rotatable carrier boat 15, power transmission is guaranteed, preventing furnace decompression and process gas leakage.

[0073] It should be noted that the specific structures of the upper furnace cover 2, the lower furnace door 3, the outer furnace tube 13, the inner furnace tube 14 and the lifting mechanism 18 in this embodiment are the same as those in the previous embodiment and will not be described in detail here.

[0074] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. Liftable vertical furnace, characterized in that: include: An outer furnace tube, an inner furnace tube arranged on the inner side of the outer furnace tube, a lower furnace door detachably connected to the lower end of the outer furnace tube, a carrier boat supporting device uprightly arranged on the lower furnace door, and at least one lifting mechanism connected to the outer side of the outer furnace tube, the lifting mechanism being used to lift the outer furnace tube and the inner furnace tube to expose the carrier boat supporting device.

2. The liftable vertical furnace according to claim 1, characterized in that: The lifting mechanism includes: a lifting guide rail located on one side of the outer furnace tube, at least one movable connecting member slidably arranged on the lifting guide rail for connecting with the outer side of the outer furnace tube, and a driving structure for driving the movable connecting member to move up and down along the lifting guide rail.

3. The liftable vertical furnace according to claim 2, characterized in that: The number of the movable connecting members is set to three, and the three movable connecting members are arranged at intervals along the axial direction of the outer furnace tube.

4. The liftable vertical furnace according to claim 2, characterized in that: The driving structure includes a motor arranged at the upper end of the lifting guide rail and a rolling screw arranged at one side of the lifting guide rail. The motor is connected to the rolling screw through a coupling, and the movable connecting piece is sleeved on the rolling screw.

5. The liftable vertical furnace according to claim 2, characterized in that: The driving structure includes a motor arranged at the upper end of the lifting guide rail and a synchronous belt arranged at one side of the lifting guide rail. The synchronous belt is connected to the motor through a synchronous wheel, and the movable connecting member is arranged on the synchronous belt.

6. The liftable vertical furnace according to claim 2, characterized in that: The driving structure includes a cylinder arranged at the upper end of the lifting guide rail, and a moving seat slidably arranged on one side of the lifting guide rail. The moving seat is connected to the piston rod of the cylinder, and the moving connecting member is arranged on the moving seat.

7. The liftable vertical furnace according to claim 1, characterized in that: The number of the lifting mechanisms is set to two, and the two lifting mechanisms are symmetrically arranged on both sides of the outer furnace tube.

8. The liftable vertical furnace according to claim 1, characterized in that: The utility model further comprises a frame, the lifting mechanism is vertically arranged on the frame, and the lower furnace door is arranged at the middle position of the frame.

9. The liftable vertical furnace according to claim 1, wherein: It also includes a driving device for driving the carrier boat carrying device to rotate, and the driving device is arranged on a side of the lower furnace door away from the outer furnace tube.

10. The liftable vertical furnace according to claim 9, characterized in that: The carrier boat carrying device includes a first rotating base located between the lower end of the inner furnace tube and the lower furnace door, a rotating shaft connected to the driving device, and a first supporting member for supporting the carrier boat, the rotating shaft is arranged on a side of the first rotating base away from the inner furnace tube, the first supporting member is uprightly arranged on the first rotating base and sleeved on the outer side of the inner furnace tube, and the first supporting member is provided with a hook hole for hanging the carrier boat.

11. The liftable vertical furnace according to claim 9, characterized in that: The carrier boat carrying device includes a second rotating base mounted on the outer side of the inner furnace tube, a rotating connector located between the lower end of the inner furnace tube and the lower furnace door, and multiple pairs of second supporting members for carrying the carrier boat. The rotating connector connects the second rotating base and the driving device. The second rotating base is provided with a carrying position for the carrier boat to pass through. Each pair of second supporting members is located on both sides of the same carrying position and each pair of second supporting members can be folded and arranged on the second rotating base.

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