Gas penetration piece for ion source

Abstract

The utility model discloses a gas penetration piece for an ion source, which relates to the field of optical coating, and aims to solve the problem that a reaction gas reagent is polluted due to the fact that a part of fine particles are stripped from a gas supply pipeline and mixed into reaction gas when the gas supply pipeline is aged after being used for a long time, and the key point of the technical scheme is that the gas penetration piece comprises a gas inlet pipe, a middle pipe and a gas outlet pipe, the air inlet pipe, the middle pipe and the air outlet pipe are sequentially connected end to end, the air inlet pipe is externally connected with an air supply pipeline, the air outlet pipe is communicated with the ion source coating machine, a fixed impurity filter screen is arranged on a partition of the air inlet pipe, and a fixed graphene aerogel layer is arranged on a partition of the air outlet pipe. The effect of effectively ensuring the purity degree of the reaction gas reagent through double filtration is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of optical coating, in particular to a gas penetrating component for an ion source. Background Art

[0002] Ion sources are a rapidly developing field of applied science and technology with a wide range of applications, diverse types, diverse scientific disciplines, and highly technical processes. Their function is to ionize neutral atoms or molecules and generate an ion beam from them. Ion sources are widely used in equipment such as optical coating, plasma cleaning, and atomic layer deposition.

[0003] The current ion sources include Kaufman ion source, Hall source and high-energy radio frequency ion source. The Kaufman ion source emits electrons by heating the cathode tungsten filament. The electrons collide with the gas molecules introduced into the ion source to produce ions, and then form an ion beam through the accelerating electric field generated by the porous grid; the Hall source has a magnetic field. The electrons are first emitted by heating the cathode tungsten filament and migrate to the anode. The electrons collide with the gas molecules to ionize them. The electrons form a Hall current in the magnetic field to generate an electric field. The ions are accelerated by the Hall electric field and drawn out to form an ion beam; the high-energy radio frequency ion source uses an alternating radio frequency field to generate electrons. The electrons absorb energy in the radio frequency field and oscillate in the electric field to ionize the gas. The electrons are confined in the discharge chamber due to the action of the electromagnetic field, and the ions are accelerated by the grid to form an ion beam and drawn out.

[0004] The commonly used reaction gas reagents include methane, isobutane, ammonia, etc. When the gas supply pipeline is used for a long time and ages, some fine particles will be peeled off from the pipeline and mixed into the reaction gas, causing the reaction gas reagents to be contaminated and affecting the ionization effect of the ion source. Utility Model Content

[0005] The utility model aims to provide a gas penetrating component for an ion source.

[0006] To achieve the above objectives, the present invention provides the following technical solutions:

[0007] It includes an air inlet pipe, an intermediate pipe and an air outlet pipe. The air inlet pipe is connected to an external air supply pipe, and the air outlet pipe is connected to an ion source coating machine. The air inlet pipe, the intermediate pipe and the air outlet pipe are connected in sequence. The air inlet pipe partition is provided with a fixed impurity filter, and the air outlet pipe partition is provided with a fixed graphene aerogel layer.

[0008] By adopting the above technical solution, the setting of the impurity filter can first filter out large particles of impurities in the gas supply pipeline to prevent them from entering the ionization chamber of the ion source. The graphene aerogel layer is a carbon aerogel with a nanoscale three-dimensional network structure. The network structure is elastic, the specific surface area is very large, the overall weight is particularly light, the network structure has a high porosity, and the overall density is very low. It is a new type of material with excellent absorption effect on impurities in various gases, and can further filter out tiny particles in the reaction gas reagent. The double filtration setting can effectively ensure the purity of the reaction gas reagent.

[0009] Furthermore, the intermediate tube is partitioned by a metal dust removal net, and a pair of electrode columns passing through the intermediate tube are fixedly provided on the outer edge of the metal dust removal net, and the electrode columns are externally connected to a power supply.

[0010] By adopting the above technical solution, the metal dust removal net with electrode columns has a good electrostatic dust removal effect. The dust-laden gas is electrically separated when passing through the electrostatic field. After the dust particles combine with negative ions and carry negative charges, they tend to discharge and deposit on the surface of the anode electrode column. On the premise that the impurity filter removes large particles of impurities, it has a good adsorption and treatment effect on tiny dust particles. Small particles that cannot be electrostatically adsorbed will be adsorbed and removed by the graphene aerogel layer. The triple filtration ensures the purity of the reaction gas reagents entering the ionization chamber.

[0011] Furthermore, the graphene aerogel layer is mixed with carbon nanotube particles.

[0012] By adopting the above technical solution, graphene powder, carbon nanotubes and deionized water are mixed into an aqueous solution of a certain concentration; ultrasonic vibration is uniformly applied, and then graphene organic hydrogel is prepared at a higher temperature. The graphene organic hydrogel is immersed in ammonia water and dried with low-temperature power supply to obtain a graphene aerogel with high elasticity. Due to the doping of carbon nanotubes, carbon nanotubes have better adsorption and dust removal effects than graphene. Adding carbon nanotubes can effectively improve the small particle adsorption effect of the graphene aerogel layer.

[0013] Furthermore, a threaded connection barrel is provided on one end of the air inlet pipe, the intermediate pipe and the air outlet pipe, and a threaded groove for threaded connection barrel is provided on one end of the air inlet pipe, the intermediate pipe and the air outlet pipe away from the threaded connection barrel.

[0014] By adopting the above technical solution, the air inlet pipe, the intermediate pipe and the air outlet pipe are all connected by the first thread at the front and back. When there is a problem with one of the links, it can be easily removed by twisting the corresponding pipe. At the same time, the three pipes can be freely combined. When the filtering effect needs to be adjusted, the number of the air inlet pipe, the intermediate pipe and the air outlet pipe used can be freely adjusted according to actual needs, which is also convenient for regular cleaning of the above three pipes.

[0015] Furthermore, joints are distributed between the air inlet pipe and the intermediate pipe, and between the intermediate pipe and the air outlet pipe. The joints are wrapped with sealing tape, and the threaded connection tube and the threaded groove are coated with sealant.

[0016] By adopting the above technical solution, the sealant can be combined with the sealing tape after solidification to effectively fill the joint gap, improve the tightness of the connection between the three pipes, and improve the overall structural strength of the gas penetration piece.

[0017] In summary, the beneficial technical effects of the present invention are:

[0018] 1. The impurity filter and graphene aerogel layer are used to produce double filtration to effectively ensure the purity of the reaction gas reagents;

[0019] 2. The metal dust removal net and power supply are used to produce triple filtration to further ensure the purity of the reaction gas reagents entering the ionization chamber;

[0020] 3. The first thread connection is adopted, which makes it convenient to freely combine and maintain the pipeline according to actual needs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The accompanying drawings are used to provide a further understanding of the present invention and constitute part of the specification, but do not constitute a limitation of the present invention. In the accompanying drawings:

[0022] Figure 1 It is a schematic diagram of the overall structure of the utility model;

[0023] Figure 2 It is a schematic cross-sectional view of the overall structure of the utility model;

[0024] Figure 3 yes Figure 2 Enlarged schematic diagram of the structure of part A in the middle.

[0025] In the figure, 1. air inlet pipe; 11. impurity filter; 2. intermediate pipe; 21. metal dust removal net; 22. electrode column; 3. air outlet pipe; 31. graphene aerogel layer; 4. threaded connection cylinder; 5. threaded groove; 6. joint; 7. sealing tape. DETAILED DESCRIPTION

[0026] The present invention will be described in further detail below with reference to the accompanying drawings.

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] See also Figure 1-3 , this utility model provides a technical solution:

[0029] The utility model comprises an air inlet pipe 1, an intermediate pipe 2 and an air outlet pipe 3, wherein the air inlet pipe 1 is connected to an external air supply pipe, and the air outlet pipe 3 is connected to an ion source coating machine. The air inlet pipe 1, the intermediate pipe 2 and the air outlet pipe 3 are connected in sequence. The air inlet pipe 1 is partitioned with a fixed impurity filter 11, and the air outlet pipe 3 is partitioned with a fixed graphene aerogel layer 31. The impurity filter 11 can first filter out large particles of impurities in the air supply pipe to prevent them from entering the ion source ionization chamber. The graphene aerogel layer 31 is a carbon aerogel with a nanoscale three-dimensional network structure. The network structure is elastic, the specific surface area is very large, the overall weight is particularly light, the porosity of the network structure is high, and the overall density is very low. It has a very good absorption effect on impurities in various gases and can further filter out tiny particles in the reaction gas reagent. The double filtration setting can effectively ensure the reaction The purity of the gas reagent is ensured by a metal dust removal net 21 which is provided on the partition of the middle tube 2. A pair of electrode columns 22 which pass through the middle tube 2 are fixed on the outer edge of the metal dust removal net 21. The electrode columns 22 are connected to an external power supply. The metal dust removal net 21 with the electrode columns 22 has a good electrostatic dust removal effect. The dust-laden gas is electrically separated when passing through the electrostatic field. After the dust particles are combined with negative ions and carry negative charge, they tend to discharge and deposit on the surface of the anode electrode column 22. On the premise that the impurity filter 11 filters out large particles of impurities, it has a good adsorption effect on tiny dust particles. Small particles that cannot be electrostatically adsorbed will be adsorbed and removed by the graphene aerogel layer 31. The triple filtration ensures the purity of the reaction gas reagent entering the ionization chamber. The graphene aerogel layer 31 is mixed with carbon nanotube particles. The graphene powder, carbon nanotubes and deionized water are mixed into an aqueous solution of a certain concentration.Ultrasonic vibration is uniform, and then graphene organic hydrogel is prepared at a higher temperature. The graphene organic hydrogel is soaked in ammonia water and dried with low-temperature power supply to obtain a graphene aerogel with higher elasticity. Due to the doping of carbon nanotubes, carbon nanotubes have better adsorption and dust removal effects than graphene. Adding carbon nanotubes can effectively improve the small particle adsorption effect of the graphene aerogel layer 31. The air inlet pipe 1, the intermediate pipe 2 and the air outlet pipe 3 are extended at one end with a threaded connection tube 4. The air inlet pipe 1, the intermediate pipe 2 and the air outlet pipe 3 are provided with a threaded groove 5 that is threaded and matched with the threaded connection tube 4 at one end. The air inlet pipe 1, the intermediate pipe 2 and the air outlet pipe 3 are all connected with the first thread at the front and back. If a problem occurs with one of the links, it can be easily removed by twisting the corresponding pipe. The three pipes can be freely combined, allowing the number of inlet pipe 1, intermediate pipe 2, and outlet pipe 3 used to be adjusted according to actual needs when adjusting the filtering effect. This also facilitates regular cleaning of the three pipes. Joints 6 are provided between the inlet pipe 1 and intermediate pipe 2, and between the intermediate pipe 2 and outlet pipe 3. Sealing tape 7 is provided around these joints 6. Sealant is applied to the threaded connection tube 4 and the threaded groove 5. Once the sealant solidifies, it combines with the sealing tape 7 to effectively fill the gaps in the joints 6, improving the tightness of the connection between the three pipes and enhancing the overall structural strength of the gas penetrating component.

[0030] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0031] Finally, it should be noted that the above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art will be able to modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein with equivalents. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.

Claims

1. A gas penetrating member for an ion source, comprising an air inlet pipe (1), an intermediate pipe (2) and an air outlet pipe (3), wherein the air inlet pipe (1) is connected to an external air supply pipe, and the air outlet pipe (3) is connected to an ion source coating machine, characterized in that: The air inlet pipe (1), the intermediate pipe (2) and the air outlet pipe (3) are connected in sequence, the air inlet pipe (1) is partitioned with a fixed impurity filter (11), and the air outlet pipe (3) is partitioned with a fixed graphene aerogel layer (31).

2. A gas penetrating member for an ion source according to claim 1, characterized in that: The intermediate tube (2) is partitioned by a metal dust removal screen (21), and the outer edge of the metal dust removal screen (21) is fixedly provided with a pair of electrode columns (22) passing through the intermediate tube (2), and the electrode columns are externally connected to a power supply.

3. The gas penetrating member for an ion source according to claim 2, characterized in that: The graphene aerogel layer (31) is mixed with carbon nanotube particles.

4. The gas penetrating member for an ion source according to claim 3, wherein: A threaded connection barrel (4) is provided at one end of the air inlet pipe (1), the intermediate pipe (2) and the air outlet pipe (3), and a threaded groove (5) for threadedly matching the threaded connection barrel (4) is provided at one end of the air inlet pipe (1), the intermediate pipe (2) and the air outlet pipe (3) away from the threaded connection barrel (4).

5. The gas penetrating member for an ion source according to claim 4, characterized in that: Joints (6) are distributed between the air inlet pipe (1) and the intermediate pipe (2), and between the intermediate pipe (2) and the air outlet pipe (3). The joints (6) are surrounded by a sealing tape (7), and the threaded connection cylinder (4) and the threaded groove (5) are coated with a sealing adhesive.

Images