Baffle opening adjusting device

Abstract

The utility model relates to the technical field of vacuum coating, in particular to a baffle opening adjusting device which is characterized in that a coating opening is formed in a baffle, and a movable barrier strip is connected with the baffle through a sliding assembly, so that a driving assembly can drive the movable barrier strip to move along the sliding assembly to shield or open the coating opening. The opening of the baffle is directly adjusted in the vacuum state, direct production of products with different widths is carried out, the action of breaking vacuum to replace the opening of the baffle is omitted, the switching time of the products with different widths is greatly saved, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating, in particular to a baffle opening regulating device. Background Art

[0002] During the production process, the magnetron sputtering coating machine cannot control the deposition direction of all sputtered materials due to the particularity of its sputtering principle. This will cause deposits all around the target material, so it needs to be cleaned regularly. In flexible coating, because the transmission main drum needs to rotate continuously, if materials are continuously deposited on it, the target residue will continue to accumulate and be transmitted on the main drum, which will lead to problems such as short production cycle and high defective rate. Therefore, baffles are usually used to block during the production process, and baffle openings are made in the product coating area. Products of different widths require different baffle openings for production at different target periods. Before replacing the baffle, the equipment needs to break the vacuum, the entire chamber needs to be cleaned again, and then the vacuum needs to be re-evacuated and the target burned before production, which wastes a lot of time. In addition, different widths require customized baffle openings. As the width of the product changes, the cost of customized baffles also increases. Utility Model Content

[0003] The purpose of the present invention is to provide a baffle opening adjustment device to solve the problems raised in the above background technology.

[0004] To achieve the above objectives, the present invention provides the following technical solutions:

[0005] A baffle opening adjustment device, comprising:

[0006] A baffle, wherein a coating port is provided on the baffle;

[0007] A movable baffle, wherein the movable baffle is connected to the baffle via a sliding assembly;

[0008] A driving assembly is used to drive the movable baffle to move along the sliding assembly, cover or open the coating opening, and adjust the size of the coating opening.

[0009] Preferably, the sliding assembly includes a pulley track arranged on the baffle and a pulley arranged in the pulley track, and the movable baffle is connected to the pulley.

[0010] Preferably, the driving assembly includes a rotating motor, a gear provided on the rotating motor, and a rack provided on the moving bar.

[0011] Preferably, the rotating motor is used to drive the movable baffle to move along the pulley track.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] Compared with the previous method of breaking vacuum to replace the baffle, this device can save at least one day of product switching time and two days of time for the equipment to recover to the best condition. In addition, this device is more labor-saving during the disassembly process. Only the mobile baffle needs to be replaced in each target period, and only one type of baffle is used. After the product width is changed, there is no need to customize a new baffle. During production, there is no need to re-burn the target, and the equipment can always be in the best production state for production, with high production efficiency and high yield. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a structural diagram of the utility model;

[0015] Figure 2 It is a structural schematic diagram of the back side of the utility model;

[0016] Figure 3 It is a schematic cross-sectional structural diagram of the movable baffle of the present utility model.

[0017] In the figure: 1. baffle; 2. coating port; 3. movable baffle; 4. pulley track; 5. pulley; 6. rotating motor; 7. gear; 8. rack. DETAILED DESCRIPTION

[0018] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0019] See also Figures 1 to 3 , the utility model provides a technical solution:

[0020] A baffle opening adjustment device, characterized by comprising:

[0021] A baffle 1 is provided with a coating port 2;

[0022] The movable baffle 3 is connected to the baffle 1 by setting a sliding assembly on the movable baffle 3. The sliding assembly includes a pulley track 4 and a pulley 5. The pulley track 4 is set on the baffle 1. The pulley track 4 is fixedly connected to the baffle 1 by setting screws, etc. The pulley 5 is set in the pulley track 4. The pulley 5 is movably connected to the pulley track 4 so that the pulley 5 can move along the pulley track 4. The movable baffle 3 is set on the pulley 5. The movable baffle 3 is fixedly connected to the pulley 5 by setting screws, etc., so that the movable baffle 3 can move along the pulley track 4. One end of the pulley track 4 can extend out of the baffle 1 to increase the moving range of the movable baffle 3.

[0023] The driving assembly is used to drive the mobile baffle 3 to move along the sliding assembly, cover or open the coating port 2, and adjust the size of the coating port 2. The driving assembly includes a rotating motor 6, a gear 7 and a rack 8. The rotating motor 6 is arranged on the installation plane of the coating machine. The specific installation position can be reasonably selected according to actual usage. The gear 7 is arranged on the rotating motor 6. The gear 7 is fixedly connected to the rotating motor 6 by interference fit and setting a flat key. The rack 8 is arranged on the mobile baffle 3. The rack 8 and the mobile baffle 3 are integrally formed. The gear 7 and the rack 8 are engaged with each other, so that the rotating motor 6 rotates with the gear 7, thereby driving the rack 8 to move, so that the mobile baffle 3 moves, which can cover the coating port 2 or release the coating port 2.

[0024] Working principle: When in use, the rotating motor 6 rotates with the gear 7, thereby driving the rack 8 to move, so that the movable baffle 3 moves along the pulley track 4, which can cover the coating port 2 or release the coating port 2. By controlling the rotation of the rotating motor 6, the gear 7 is used to drive the movable baffle 3 forward or backward. The pulley track 4 and the pulley 5 behind the movable baffle 3 stabilize the forward or backward direction of the movable baffle 3 to prevent deviation. The forward or backward distance is controlled by the number of rotations of the gear 7. According to the width requirements of the production products, the opening of the baffle 1 can be directly adjusted under a vacuum state, and direct production of products of different widths can be carried out, eliminating the action of breaking the vacuum to replace the opening of the baffle 1, greatly saving the switching time between products of different widths, and improving production efficiency.

[0025] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A baffle opening adjustment device, characterized in that: include: A baffle, wherein a coating port is provided on the baffle; A movable baffle, wherein the movable baffle is connected to the baffle via a sliding assembly; A driving assembly is used to drive the movable baffle to move along the sliding assembly, cover or open the coating opening, and adjust the size of the coating opening.

2. The baffle opening adjustment device according to claim 1, characterized in that: The sliding assembly includes a pulley track arranged on the baffle and a pulley arranged in the pulley track, and the movable baffle is connected to the pulley.

3. The baffle opening adjustment device according to claim 2, characterized in that: The driving assembly includes a rotating motor, a gear arranged on the rotating motor, and a rack arranged on the moving stop bar.

4. The baffle opening adjustment device according to claim 3, characterized in that: The rotary motor is used to drive the movable baffle to move along the pulley track.

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