Preparation device for improving thickness uniformity of ALD (atomic layer deposition) film

Abstract

The utility model provides a preparation device for improving the thickness uniformity of an ALD (atomic layer deposition) film. The preparation device for improving the thickness uniformity of the ALD film comprises an aluminum boat; the boat cover is arranged at the top of the aluminum boat, a plurality of rotating buckles are fixedly connected to the positions, close to the top, of the front face and the back face of the aluminum boat, and a buckle is rotationally connected to the outer surface of each rotating buckle; the handle is fixedly connected to the position, close to the other end, of the top of each buckle, and a supporting pad is fixedly connected to the position, close to the other end, of the bottom of each buckle. The preparation device for improving the thickness uniformity of the ALD film is of a columnar structure, the upper end of the preparation device is connected with the lower portion of the boat cover, the lower edge of the boat cover is uneven and connected with a buckle in a tangent mode, and the other section of the boat cover is connected with a boat page of an aluminum boat and embedded into the boat page. The problem that a furnace tail film layer is too low or no film layer exists can be solved, the uniformity of the film thickness of the whole boat is improved, and the quality and productivity of products can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ALD film preparation, in particular to a preparation device for improving the uniformity of ALD film thickness. Background Art

[0002] ALD is a molecular-level deposition process that grows thin films layer by layer, atomically. It is used to produce high-quality films with angstrom-level precision and conformality unmatched by other deposition techniques. It has become an essential coating tool for the advancement of nanotechnology. ALD was originally developed to produce phosphor films for electroluminescent displays and later became an indispensable supporting technology for chip miniaturization in the semiconductor industry.

[0003] Currently, the alumina film deposition methods on the market mainly include tubular and plate types. The tubular type is a cavity type equipment. In response to market requirements, the production capacity per unit time has been further improved. The aluminum boat currently used for tubular alumina deposition has 8 workstations; the cavity air intake method is to intake air from the furnace mouth.

[0004] The use of multiple workstations in the ALD film thickness preparation process results in less gas distribution in some workstations away from the furnace mouth, which in turn leads to differences in film thickness between the furnace mouth and the furnace tail. Even the remaining workstations away from the furnace mouth are prone to seriously low film thickness and plating leakage, resulting in abnormal batch yield and efficiency.

[0005] Therefore, it is necessary to provide a preparation device that improves the uniformity of ALD film thickness to solve the above technical problems. Utility Model Content

[0006] The utility model provides a preparation device for improving the uniformity of ALD film thickness, which solves the problem that the multi-station setting in the ALD film thickness preparation process causes different gas distributions at stations with different distances from the furnace mouth, thereby causing uneven ALD film thickness.

[0007] In order to solve the above technical problems, the present invention provides a preparation device for improving the uniformity of ALD film thickness, comprising: an aluminum boat;

[0008] A boat cover is provided on the top of the aluminum boat, wherein a plurality of rotating buckles are fixedly connected to the front and back of the aluminum boat near the top, and a buckle is rotatably connected to the outer surface of each rotating buckle;

[0009] A handle is fixedly connected to the top of each buckle near the other end, and a support pad is fixedly connected to the bottom of each buckle near the other end;

[0010] 7-13 clips are installed from the furnace tail to the furnace mouth. The materials are mainly high-temperature resistant materials. The clips are mainly concentrated at the furnace tail to prevent the aluminum boat at the furnace tail from tilting and causing plating leakage. The boat cover is 8mm wider than the outside of the aluminum boat and is connected to a cylinder with a diameter of 6mm and a height of 20mm. The cylinder is 1mm apart from the aluminum boat. The cylinder and a cylinder with a diameter of 6mm and a height of 7mm are L-shaped. The outside of the aluminum boat is 20mm away from the aluminum boat cover. A groove is dug from the outside of the furnace tail, which is 80mm long and has a 7mm long arc at the tail.

[0011] Preferably, the front and back of the aluminum boat are both provided with a plurality of shaping grooves, and the front and back of the aluminum boat are both provided with a plurality of bolts;

[0012] The bolts are used to fix the internal docking structure of the aluminum boat, and the shaping grooves are for aesthetics.

[0013] Preferably, the other ends of the buckles are fixedly connected to a fixing plate, the tops of the fixing plates are threadedly connected to adjusting screws, and the bottom ends of the adjusting screws are rotatably connected to a contact plate;

[0014] The fixing plate is provided with a hole which is threadedly connected with the adjusting screw.

[0015] Preferably, the top of the contact plate near both ends is fixedly connected with a fixing plate, and the top of the fixing plate is fixedly connected with a stabilizing rod;

[0016] The stabilizer bar passes through the fixed plate.

[0017] Preferably, a plurality of mounting buckles are fixedly connected to the front and back of the aluminum boat near the top, and fixing bolts are threadedly connected to both sides of the mounting buckles;

[0018] The fixing bolts are threadedly connected to the threaded holes on both sides of the clamping block.

[0019] Preferably, a clamping block is provided inside each of the mounting buckles, one side of each of the clamping blocks is fixedly connected to a mounting plate, and threaded holes are provided on both sides of each of the clamping blocks;

[0020] The front of the mounting plate is used to mount the swivel buckle.

[0021] Compared with related technologies, the preparation device for improving ALD film thickness uniformity provided by the present invention has the following beneficial effects:

[0022] The utility model provides a preparation device for improving the uniformity of ALD film thickness. In order to improve the problem of uneven thickness in the ALD preparation process, a boat cover is installed on the top of the aluminum boat, and a plurality of clips are installed on the front and back of the aluminum boat. When the boat cover is buckled on the aluminum boat, it can be fixed by the clips, thereby increasing the stability of the boat cover and avoiding the risk of deformation of the boat cover due to excessive temperature. The aluminum boat is increased with 7-12 clips so that the boat cover of the aluminum boat can better fit the aluminum boat. The distribution of the clips is uneven from the furnace tail to the furnace mouth, and the furnace tail is relatively dense. The clip structure is L-shaped, and it is a columnar structure. The upper end is connected to the lower part of the boat cover. The lower edge of the boat cover is uneven, and one clip is tangently connected, and the other section is connected to the boat page of the aluminum boat and embedded in the boat page. By adjusting the process formula and modifying the aluminum boat, the problem of low or no film layer at the furnace tail can be reduced, the uniformity of the film thickness of the entire boat can be improved, and the quality and production capacity of the product can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic structural diagram of a first embodiment of a preparation device for improving ALD film thickness uniformity provided by the present invention;

[0024] Figure 2 A side view of an aluminum boat is provided for the present invention;

[0025] Figure 3 Provided for the utility model Figure 2 An enlarged view of point A is shown;

[0026] Figure 4 A schematic structural diagram of a second embodiment of the preparation device for improving ALD film thickness uniformity provided by the present invention;

[0027] Figure 5 Provided for the utility model Figure 4 An enlarged view of point B is shown;

[0028] Figure 6 A schematic structural diagram of a third embodiment of the preparation device for improving ALD film thickness uniformity provided by the present invention;

[0029] Figure 7 Provided for the utility model Figure 6 An enlarged view of point C is shown.

[0030] Numbers in the figure: 1. Aluminum boat, 2. Plastic groove, 3. Bolt, 4. Rotating buckle, 5. Buckle, 6. Boat cover, 7. Handle, 8. Support pad, 9. Stabilizer bar, 10. Adjusting screw, 11. Fixing plate, 12. Contact plate, 13. Fixing plate, 14. Mounting plate, 15. Block, 16. Threaded hole, 17. Fixing bolt, 18. Mounting buckle. DETAILED DESCRIPTION

[0031] The present invention will be further described below with reference to the accompanying drawings and implementation examples.

[0032] Please refer to Figure 1 、 Figure 2 、 Figure 3 ,in, Figure 1 A schematic structural diagram of a first embodiment of a preparation device for improving ALD film thickness uniformity provided by the present invention; Figure 2 A side view of an aluminum boat is provided for the present invention; Figure 3 Provided for the utility model Figure 2 An enlarged view of point A is shown. A preparation apparatus for improving ALD film thickness uniformity includes: an aluminum boat 1;

[0033] A boat cover 6 is provided on the top of the aluminum boat 1. A plurality of rotating buckles 4 are fixedly connected to the front and back of the aluminum boat 1 near the top. A buckle 5 is rotatably connected to the outer surface of each rotating buckle 4.

[0034] A handle 7 is fixedly connected to the top of each buckle 5 near the other end, and a support pad 8 is fixedly connected to the bottom of each buckle 5 near the other end;

[0035] 7-13 clips 5 are installed from the furnace tail to the furnace mouth. The materials are mainly high-temperature resistant materials. The clips 5 are mainly concentrated at the furnace tail to prevent the aluminum boat 1 at the furnace tail from tilting up and causing plating leakage. The boat cover 6 is 8mm wider than the outside of the aluminum boat 1 and is connected to a cylinder with a diameter of 6mm and a height of 20mm. The cylinder is 1mm apart from the aluminum boat. The cylinder and a cylinder with a diameter of 6mm and a height of 7mm are L-shaped. The outside of the aluminum boat is 20mm away from the aluminum boat cover. A groove is dug from the outside of the furnace tail, which is 80mm long and has a 7mm long arc at the tail. This type of clip 5 starts from 80mm at the furnace tail and 5-8 can be placed in the middle to 900mm, and 2-4 can be placed from 900mm to 177mm. The clip 5 is in the shape of 7 and can buckle the boat cover 6 on the aluminum boat 1.

[0036] The front and back of the aluminum boat 1 are both provided with a plurality of shaping grooves 2, and the front and back of the aluminum boat 1 are both provided with a plurality of bolts 3;

[0037] The bolts 3 are used to fix the internal docking structure of the aluminum boat 1, and the shaping grooves 2 are aesthetically pleasing.

[0038] The working principle of the preparation device for improving the uniformity of ALD film thickness provided by the utility model is as follows:

[0039] A boat cover 6 is installed on the top of the aluminum boat 1, and multiple buckles 5 are installed on the front and back of the aluminum boat 1. When the boat cover 6 is buckled on the aluminum boat 1, it can be fixed by the buckles 5 to increase the stability of the boat cover 6 and avoid the risk of deformation of the boat cover due to excessive temperature. In the ALD film thickness preparation process, the flow rate of water and TMA is increased in each step, and the pulse time of TMA is appropriately reduced, and the number of TMA cycles is increased by 1-3 times. This can ensure that there is enough gas at the tail of the furnace while trying not to increase the overall film thickness. 7-12 buckles 5 are added to the aluminum boat 1 so that the boat cover 6 of the aluminum boat 1 can better fit the aluminum boat 1. The distribution of the buckles 5 is uneven from the tail of the furnace to the furnace mouth, and the tail of the furnace is relatively dense. The buckle 5 structure is L-shaped, and it is a columnar structure. The upper end is connected to the lower part of the boat cover 6. The lower edge of the boat cover 6 is uneven, one buckle is connected tangently, and the other section is connected to the boat page of the aluminum boat 1 and embedded in the boat page.

[0040] Compared with related technologies, the preparation device for improving ALD film thickness uniformity provided by the present invention has the following beneficial effects:

[0041] In order to improve the problem of uneven thickness in the ALD preparation process, a boat cover 6 is installed on the top of the aluminum boat 1, and multiple buckles 5 are installed on the front and back of the aluminum boat 1. When the boat cover 6 is buckled on the aluminum boat 1, it can be fixed by the buckles 5 to increase the stability of the boat cover 6 and avoid the risk of deformation of the boat cover due to excessive temperature. The aluminum boat 1 adds 7-12 buckles 5 so that the boat cover 6 of the aluminum boat 1 can better fit the aluminum boat 1. The distribution of the buckles 5 from the furnace tail to the furnace mouth is uneven, and the furnace tail is relatively dense. The buckle 5 structure is L-shaped, and it is a columnar structure. The upper end is connected to the lower part of the boat cover 6. The lower edge of the boat cover 6 is uneven, and one buckle is tangentially connected, and the other section is connected to the boat page of the aluminum boat 1 and embedded in the boat page. By adjusting the process formula and modifying the aluminum boat 1, the problem of low or no film layer at the furnace tail can be reduced, the uniformity of the film thickness of the entire boat can be improved, and the quality and production capacity of the product can be improved.

[0042] Second embodiment

[0043] Please refer to Figure 4-Figure 5 , Figure 4 A schematic structural diagram of a second embodiment of the preparation device for improving ALD film thickness uniformity provided by the present invention; Figure 5 Provided for the utility model Figure 4 An enlarged view of point B is shown. Based on the apparatus for improving ALD film thickness uniformity provided in the first embodiment of this application, the second embodiment of this application provides another apparatus for improving ALD film thickness uniformity. The second embodiment is merely a preferred embodiment of the first embodiment, and implementation of the second embodiment will not affect implementation of the first embodiment alone.

[0044] Specifically, the second embodiment of the present application provides a device for improving the uniformity of ALD film thickness. The difference is that the other end of each clip 5 is fixedly connected to a fixing plate 13, the top of each fixing plate 13 is threadedly connected to an adjusting screw 10, and the bottom end of each adjusting screw 10 is rotatably connected to a contact plate 12.

[0045] The contact plate 12 is located between the buckle 5 and the boat cover 6 , and the fixing plate 13 is provided with a hole threadedly connected to the adjusting screw 10 .

[0046] The top of the contact plate 12 near both ends is fixedly connected with a fixing plate 11, and the top of the fixing plate 11 is fixedly connected with a stabilizing rod 9;

[0047] The stabilizing rod 9 passes through the fixing plate 13 , and the stabilizing rod 9 moves up and down along with the contact plate 12 to increase stability.

[0048] Compared with related technologies, the preparation device for improving ALD film thickness uniformity provided by the present invention has the following beneficial effects:

[0049] In order to make the buckle 5 suitable for boat covers 6 of different thicknesses, a fixing plate 13 is installed at the other end of the buckle 5, and then the contact plate 12 is installed on the adjacent side of the buckle 5 and the boat cover 6 through the adjusting screw 10. At the same time, the stabilizing rod 9 passes through the fixing plate 13 to increase the stability of the up and down adjustment of the contact plate 12. In actual use, after fastening the buckle 5, it is only necessary to rotate the adjusting screw 10 to drive the contact plate 12 downward through the principle of the thread, so as to squeeze the boat cover 6 to make it fit more closely with the aluminum boat 1. This structure increases the stability of the connection between the boat cover 6 and the aluminum boat 1, and at the same time makes the buckle 5 suitable for boat covers 6 of different thicknesses.

[0050] Third embodiment

[0051] Please refer to Figure 6-Figure 7 , Figure 6 A schematic structural diagram of a third embodiment of the preparation device for improving ALD film thickness uniformity provided by the present invention; Figure 7 Provided for the utility model Figure 6 An enlarged view of point C is shown. Based on the novel grinding roller sleeve lifting tool provided in the first embodiment of this application, the third embodiment of this application provides another novel grinding roller sleeve lifting tool. The third embodiment is merely a preferred embodiment of the first embodiment, and implementation of the third embodiment will not affect the implementation of the first embodiment alone.

[0052] Specifically, the second embodiment of the present application provides a device for improving the uniformity of ALD film thickness. The difference is that a plurality of mounting buckles 18 are fixedly connected to the front and back of the aluminum boat 1 near the top, and fixing bolts 17 are threadedly connected to both sides of the mounting buckles 18.

[0053] The fixing bolts 17 are threadedly connected to the threaded holes 16 on both sides of the block 15, and can be fixed inside the mounting buckle 18. The shape of the mounting buckle 18 is referenced to FIG. Figure 7 .

[0054] A clamping block 15 is provided inside each mounting buckle 18. One side of each clamping block 15 is fixedly connected to a mounting plate 14. Threaded holes 16 are provided on both sides of each clamping block 15.

[0055] The front side of the mounting plate 14 is used to mount the rotating buckle 4 , and the shape of the clamping block 15 corresponds to that of the mounting buckle 18 .

[0056] Compared with related technologies, the preparation device for improving ALD film thickness uniformity provided by the present invention has the following beneficial effects:

[0057] In order to facilitate the disassembly and replacement of the clip 5, the mounting clip 18 is welded at the position where the clip 5 needs to be installed on the aluminum boat 1, and then the rotating clip 4 is installed on the block 15 through the mounting plate 14. The rotating clip 4 is normally installed on the mounting plate 14. The connection method between the clip 5 and the mounting clip 18 can facilitate the later disassembly and replacement of the clip 5. In actual use, it is only necessary to insert the block 15 from the bottom of the mounting clip 18 into the inside of the mounting clip 18, and then fix the block 15 to the inside of the mounting clip 18 through the fixing bolts 17 on both sides of the mounting clip 18. When disassembly is required, it is only necessary to remove the two fixing bolts 17 to easily disassemble and replace the clip 5. This design reduces the difficulty of disassembling the clip 5 and facilitates later replacement.

[0058] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. A preparation device for improving ALD film thickness uniformity, characterized in that: include: aluminum boats; A boat cover is provided on the top of the aluminum boat, wherein a plurality of rotating buckles are fixedly connected to the front and back of the aluminum boat near the top, and a buckle is rotatably connected to the outer surface of each rotating buckle; A handle is fixedly connected to a position near the other end of the top of each buckle, and a support pad is fixedly connected to a position near the other end of the bottom of each buckle.

2. The device for improving ALD film thickness uniformity according to claim 1, wherein: A plurality of shaping grooves are provided on the front and back of the aluminum boat, and a plurality of bolts are provided on the front and back of the aluminum boat.

3. The device for improving ALD film thickness uniformity according to claim 1, wherein: The other ends of the buckles are fixedly connected to a fixing plate, the tops of the fixing plates are threadedly connected to adjusting screws, and the bottom ends of the adjusting screws are rotatably connected to a contact plate.

4. The device for improving ALD film thickness uniformity according to claim 3, wherein: The top of the contact plate near both ends is fixedly connected with a fixing plate, and the top of the fixing plate is fixedly connected with a stabilizing rod.

5. The device for improving ALD film thickness uniformity according to claim 1, wherein: A plurality of mounting buckles are fixedly connected to the front and back of the aluminum boat near the top, and fixing bolts are threadedly connected to both sides of the mounting buckles.

6. The device for improving ALD film thickness uniformity according to claim 5, characterized in that: A clamping block is provided inside the mounting buckle, one side of the clamping block is fixedly connected to a mounting plate, and threaded holes are provided on both sides of the clamping block.

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