Split type crucible and silicon carbide crystal growth furnace

Abstract

The utility model provides a split type crucible and a silicon carbide crystal growth furnace, relates to the technical field of silicon carbide crystal growth, the split type crucible comprises a crucible body and a lining sleeve, a containing opening is formed at the top end of the crucible body, and the lining sleeve is in a two-end opening shape and is detachably arranged in the containing opening. The lining sleeve is installed on the upper portion of the crucible body, a first open hole is formed in the side wall, close to the containing opening, of the crucible body, a second open hole is formed in the side wall of the lining sleeve, and the first open hole and the second open hole are correspondingly communicated. Compared with the prior art, the split type crucible provided by the utility model adopts the lining sleeve which is designed in a split manner, and when the inner crucible needs to be taken out, the lining sleeve can be taken out by utilizing the second opening firstly and then the inner crucible is taken out because a crystallization part is arranged on the inner side of the lining sleeve; the problem that the inner crucible is difficult to take out due to crystallization of the inner wall of the outer crucible is avoided, the inner crucible can be conveniently taken out, and the overall crystal growth efficiency can be improved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide crystal growth, in particular to a split crucible and a silicon carbide crystal growth furnace. Background Art

[0002] When preparing silicon carbide (SiC) single crystals, a crucible made of high-temperature resistant material provides a relatively enclosed space for the reaction and deposition of gaseous components. Existing SiC growth furnaces typically consist of an inner crucible and an outer crucible. The outer crucible is typically a one-piece graphite cylinder that is directly mounted outside the inner crucible. After SiC crystal growth is complete, the inner crucible needs to be removed. However, polycrystals form on the upper half of the inner sidewall of the outer crucible, making it difficult to remove the inner crucible. This hinders subsequent processing and affects overall growth efficiency. Utility Model Content

[0003] The purpose of the utility model is to provide a split crucible and a silicon carbide crystal growth furnace, which can easily remove the inner crucible and is conducive to improving the overall crystal growth efficiency.

[0004] The embodiment of the present utility model can be implemented as follows:

[0005] In the first aspect, an embodiment of the utility model provides a split crucible, comprising a crucible body and an inner lining sleeve, wherein a receiving opening is formed at the top of the crucible body, the inner lining sleeve is open at both ends and can be detachably installed in the receiving opening, and the inner lining sleeve is installed on the upper part of the crucible body, wherein a first opening is provided at the side wall of the crucible body near the receiving opening, and a second opening is provided at the side wall of the inner lining sleeve, and the first opening and the second opening are correspondingly connected.

[0006] In an optional embodiment, a stop step is further provided on the middle inner wall of the crucible body, and the lining sleeve is installed into the accommodating opening and placed on the stop step.

[0007] In an optional embodiment, the crucible body includes an integral base, a first crucible tube and a second crucible tube, the first crucible tube is arranged at the edge of the base, the second crucible tube is concentrically arranged on the first crucible tube, the accommodating opening is formed at one end of the first crucible tube away from the base, and the stop step is arranged at the junction of the first crucible tube and the second crucible tube.

[0008] In an optional embodiment, the thickness of the first crucible tube is greater than that of the second crucible tube, and the outer wall of the first crucible tube is flush with the outer wall of the second crucible tube, so that the stop step is formed at the junction of the first crucible tube and the second crucible tube.

[0009] In an optional embodiment, the lining sleeve is assembled inside the second crucible tube, and the outer diameter of the lining sleeve is adapted to the inner diameter of the second crucible tube, and the inner wall of the lining sleeve is flush with the inner wall of the first crucible tube.

[0010] In an optional embodiment, the thickness of the first crucible tube is 15 mm, the thickness of the second crucible tube is 10 mm, and the thickness of the lining sleeve is 5 mm.

[0011] In an optional embodiment, a stop ring is integrally provided at the middle portion of the inner wall of the crucible body, and the stop ring is used to form the stop step and abut against the bottom end surface of the liner sleeve.

[0012] In an optional embodiment, the edge of the liner sleeve is further provided with a positioning handle protruding radially outward, and the crucible body of the accommodating opening edge is provided with a positioning groove, and the positioning handle is assembled in the positioning groove.

[0013] In an optional embodiment, the angle between the opening direction of the second opening and the protruding direction of the positioning handle is 90°.

[0014] In a second aspect, an embodiment of the present invention provides a silicon carbide crystal growth furnace, comprising an inner crucible and the aforementioned split crucible, wherein the inner crucible is arranged in the crucible body, and the lining sleeve is arranged outside the inner crucible.

[0015] The beneficial effects of the embodiments of the present utility model are:

[0016] The split crucible and silicon carbide crystal growth furnace provided by the embodiment of the present invention adopts a split structure of a crucible body and an inner lining sleeve, and the inner lining sleeve is installed at the receiving opening at the top of the crucible body, and the inner lining sleeve is fixed to the upper part of the crucible body. In actual use, the inner lining sleeve can be hoisted into the crucible body, and the second opening and the first opening can be used as hoisting holes, which is convenient for loading and unloading the inner lining sleeve and convenient for transporting the crucible. Compared with the prior art, the split crucible provided by the present invention adopts a split-designed inner lining sleeve. When the inner crucible needs to be taken out, since the crystallization site is on the inner side of the inner lining sleeve, the inner lining sleeve can be taken out using the second opening first, and then the inner crucible can be taken out, thereby avoiding the problem of difficulty in taking out the inner crucible caused by crystallization of the inner wall of the outer crucible. The inner crucible can be easily taken out, which is conducive to improving the overall crystal growth efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 A schematic structural diagram of a split crucible provided in an embodiment of the present utility model;

[0019] Figure 2 A schematic diagram of the exploded structure of the split crucible provided in an embodiment of the present invention from a first viewing angle;

[0020] Figure 3 A schematic diagram of the exploded structure of the split crucible provided by an embodiment of the present invention at a second viewing angle;

[0021] Figure 4 A schematic structural diagram of a crucible body in another split crucible provided in an embodiment of the present invention.

[0022] icon:

[0023] 100-split crucible; 110-crucible body; 111-accommodating opening; 113-first opening; 115-base; 117-first crucible tube; 119-second crucible tube; 130-liner sleeve; 131-second opening; 150-stop step; 151-stop ring; 170-positioning handle; 171-positioning groove. DETAILED DESCRIPTION

[0024] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.

[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0027] In the description of the present invention, it should be noted that if the terms "upper", "lower", "inside", "outside", etc. appear, the orientation or position relationship indicated is based on the orientation or position relationship shown in the accompanying drawings, or is the orientation or position relationship in which the utility model product is usually placed when in use. It is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it cannot be understood as a limitation on the present invention.

[0028] In addition, the terms "first", "second", etc., if used, are merely used to distinguish and describe, and should not be understood as indicating or implying relative importance.

[0029] As disclosed in the background technology, the existing integrated outer crucible will form polycrystals on the upper part of the outer crucible during the crystal growth process, resulting in the opening of the inner crucible being too small when it is taken out, which makes it difficult to take out the crucible and requires crystallization, which is not conducive to the subsequent process and also affects the overall crystal growth efficiency.

[0030] In view of the above situation, the present invention provides a novel split crucible 100 and a silicon carbide crystal growth furnace. It should be noted that the features in the embodiments of the present invention can be combined with each other if there is no conflict.

[0031] See also Figures 1 to 3 The embodiment of the present invention provides a split crucible 100, which can easily remove the inner crucible due to its split design, which is beneficial to improving the overall crystal growth efficiency.

[0032] The split crucible 100 provided in the embodiment of the present invention includes a crucible body 110 and a lining sleeve 130, wherein a receiving opening 111 is formed at the top of the crucible body 110, the lining sleeve 130 is open at both ends and can be detachably installed in the receiving opening 111, and the lining sleeve 130 is installed on the upper part of the crucible body 110, wherein a first opening is provided at the side wall of the crucible body 110 near the receiving opening 111, and a second opening 131 is provided at the side wall of the lining sleeve 130, and the first opening and the second opening 131 are correspondingly connected.

[0033] In this embodiment, the split crucible 100 is an outer crucible structure in a crystal growth furnace. During crystal growth, an inner crucible needs to be placed inside. In actual use, the inner liner sleeve 130 can be loaded and unloaded through the second opening 131, while the first opening can serve as a transport and handling structure for the entire crucible. Since a split-design inner liner sleeve 130 is used here, when the inner crucible needs to be removed, since the crystallization site is inside the inner liner sleeve 130, the inner liner sleeve 130 can be removed first using the second opening 131, and then the inner crucible can be removed. This avoids the problem of difficulty in removing the inner crucible due to crystallization on the inner wall of the outer crucible, and allows for easy removal of the inner crucible, which is beneficial to improving the overall crystal growth efficiency.

[0034] In this embodiment, a stop step 150 is further provided on the central inner wall of the crucible body 110. The liner sleeve 130 is inserted into the receiving opening 111 and placed on the stop step 150. Specifically, the stop step 150 can abut against the bottom surface of the liner sleeve 130, thereby supporting the liner sleeve 130. The stop step 150 can be distributed in an annular shape in the central interior of the crucible body 110, and the inner diameter of the stop step 150 needs to be smaller than the outer diameter of the liner sleeve 130, so that the liner sleeve 130 can be smoothly placed on the stop step 150.

[0035] The crucible body 110 includes an integral base 115, a first crucible tube 117, and a second crucible tube 119. The first crucible tube 117 is disposed at the edge of the base 115, and the second crucible tube 119 is concentrically disposed on the first crucible tube 117. An accommodating opening 111 is formed at one end of the first crucible tube 117 away from the base 115, and a stop step 150 is disposed at the junction of the first crucible tube 117 and the second crucible tube 119. Specifically, the first crucible tube 117 and the second crucible tube 119 are integrally constructed and both are cylindrical graphite structures. The base 115 may be 25 mm thick, the first crucible tube 117 may be 450 mm high, and the second crucible tube 119 may be 200 mm high. The height of the second crucible tube 119 may be adapted to the height of the liner sleeve 130, so that the liner sleeve 130 can abut against the stop step 150 while remaining flush with the second crucible tube 119. Of course, the dimensions of the crucible body 110 and the liner sleeve 130 are merely examples, and their actual dimensions may be modified according to crystal growth requirements.

[0036] In this embodiment, the thickness of the first crucible tube 117 is greater than that of the second crucible tube 119, and the outer wall of the first crucible tube 117 is flush with the outer wall of the second crucible tube 119, so that a stop step 150 is formed at the junction of the first crucible tube 117 and the second crucible tube 119. Specifically, the first crucible tube 117 is at the bottom and the second crucible tube 119 is at the top, and the outer walls of the two are flush. The thickness of the first crucible tube 117 is greater. This allows the top end surface of the first crucible tube 117 to be exposed outside the second crucible tube 119. The exposed portion forms the stop step 150, thereby facilitating the support of the liner sleeve 130.

[0037] Furthermore, the liner sleeve 130 is assembled inside the second crucible tube 119, and the outer diameter of the liner sleeve 130 is adapted to the inner diameter of the second crucible tube 119, and the inner wall of the liner sleeve 130 is flush with the inner wall of the first crucible tube 117. The inner wall of the liner sleeve 130 is flush with the inner wall of the first crucible tube 117, which enables the entire outer crucible to form a relatively flat inner wall, making it easier to place the inner crucible and maintain internal thermal field balance. The liner sleeve 130 can fit precisely inside the second crucible tube 119, ensuring that the outer wall of the liner sleeve 130 and the inner wall of the second crucible tube 119 are tightly fitted, avoiding the problem of crystallization in the gap caused by an excessive gap between the two.

[0038] Preferably, in some embodiments, the thickness of the first crucible tube 117 is 15 mm, the thickness of the second crucible tube 119 is 10 mm, and the thickness of the lining sleeve 130 is 5 mm. Specifically, the thickness difference between the first crucible tube 117 and the second crucible tube 119 is 5 mm, so that the radial width of the stop step 150 is 5 mm, which is equivalent to the thickness of the lining sleeve 130, so that the lining sleeve 130 can just fill the table where the stop step 150 is located. Furthermore, in this embodiment, the inner diameter of the lining sleeve 130 is 276 mm and the height is 200 mm. Of course, the size data of the first crucible tube 117, the second crucible tube 119 and the lining sleeve 130 are for illustration only and do not serve any limiting purpose.

[0039] See also Figure 4 In other preferred embodiments of the present invention, a stop ring 151 is integrally provided in the middle of the inner wall of the crucible body 110. The stop ring 151 is used to form a stop step 150 and abut against the bottom end surface of the liner sleeve 130. Specifically, the stop ring 151 can be a graphite ring, which is integrally provided on the inner wall of the crucible body 110 and can also achieve a load-bearing and support function for the liner sleeve 130.

[0040] Please continue to see Figures 1 to 3In this embodiment, a positioning handle 170 protruding radially outward is further provided on the edge of the liner sleeve 130, and a positioning groove 171 is provided on the crucible body 110 at the edge of the accommodating opening 111. The positioning handle 170 is assembled in the positioning groove 171. Specifically, there can be two positioning handles 170, which are respectively provided at the left and right edges of the top side of the liner sleeve 130 and protrude outward. Two positioning grooves 171 are correspondingly provided at the top end of the second crucible tube 119. By providing the positioning handles 170, the liner sleeve 130 can be positioned in the circumferential direction after being assembled in place, thereby preventing the liner sleeve 130 from rotating relative to the crucible body 110.

[0041] Furthermore, the angle between the opening direction of the second opening 131 and the protruding direction of the positioning handle 170 is 90°. Specifically, the opening direction of the second opening 131 refers to the direction of the central axis of the second opening 131. There are two second openings 131, and the two second openings 131 can be set on the front and rear side walls of the liner sleeve 130. By setting the positioning handle 170, it is also possible to ensure that the second opening 131 is accurately positioned with the first opening, and facilitate the positioning of the second opening 131 when the liner sleeve 130 is subsequently removed. Of course, in other preferred embodiments of the present invention, the angle between the opening direction of the second opening 131 and the protruding direction of the positioning handle 170 can also be other angles such as 60° or 45°, which are not specifically limited here.

[0042] The present invention also provides a silicon carbide crystal growth furnace, comprising an inner crucible and the aforementioned split crucible 100, wherein the split crucible 100 comprises a crucible body 110 and an inner liner sleeve 130, wherein the top of the crucible body 110 is formed with an accommodating opening 111, the inner liner sleeve 130 is open at both ends and can be detachably installed in the accommodating opening 111, and the inner liner sleeve 130 is installed on the upper portion of the crucible body 110, wherein a first opening is provided on the side wall of the crucible body 110 near the accommodating opening 111, and a second opening 131 is provided on the side wall of the inner liner sleeve 130, and the first opening and the second opening 131 are correspondingly connected. The inner crucible is disposed within the crucible body 110, and the inner liner sleeve 130 is disposed outside the inner crucible.

[0043] In summary, the present invention provides a split crucible 100 and a silicon carbide crystal growth furnace, which utilize a split structure of a crucible body 110 and a liner sleeve 130. The liner sleeve 130 is inserted into the receiving opening 111 at the top of the crucible body 110 and is fixed to the upper portion of the crucible body 110. In actual use, the liner sleeve 130 can be hoisted into the crucible body 110, and the second opening 131 and the first opening can serve as hoisting holes, facilitating the insertion and removal of the liner sleeve 130 and facilitating the transport of the crucible. Compared with the prior art, the split crucible 100 provided by the present invention adopts a split-design inner lining sleeve 130. When the inner crucible needs to be removed, since the crystallized part is on the inner side of the inner lining sleeve 130, the inner lining sleeve 130 can be removed using the second opening 131 first, and then the inner crucible can be removed. This avoids the problem of difficulty in removing the inner crucible due to crystallization on the inner wall of the outer crucible, and the inner crucible can be easily removed, which is beneficial to improving the overall crystal growth efficiency.

[0044] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A split crucible, characterized in that: The invention comprises a crucible body (110) and an inner lining sleeve (130), wherein a receiving opening (111) is formed at the top end of the crucible body (110), the inner lining sleeve (130) is open at both ends and can be detachably installed in the receiving opening (111), and the inner lining sleeve (130) is installed on the upper part of the crucible body (110), wherein a first opening is provided at the side wall of the crucible body (110) close to the receiving opening (111), and a second opening (131) is provided at the side wall of the inner lining sleeve (130).

2. The split crucible according to claim 1, characterized in that: The first opening and the second opening (131) are correspondingly connected, and a stop step (150) is also provided on the middle inner wall of the crucible body (110). The lining sleeve (130) is inserted into the accommodating opening (111) and placed on the stop step (150).

3. The split crucible according to claim 2, characterized in that: The crucible body (110) includes an integrally arranged base (115), a first crucible tube (117) and a second crucible tube (119), wherein the first crucible tube (117) is arranged on the edge of the base (115), and the second crucible tube (119) is concentrically arranged on the first crucible tube (117). The accommodating opening (111) is formed at one end of the first crucible tube (117) away from the base (115), and the stop step (150) is arranged at the junction of the first crucible tube (117) and the second crucible tube (119).

4. The split crucible according to claim 3, characterized in that: The thickness of the first crucible tube (117) is greater than the thickness of the second crucible tube (119), and the outer wall of the first crucible tube (117) and the outer wall of the second crucible tube (119) are flush with each other, so that the stop step (150) is formed at the junction of the first crucible tube (117) and the second crucible tube (119).

5. The split crucible according to claim 4, characterized in that: The lining sleeve (130) is assembled on the inner side of the second crucible tube (119), and the outer diameter of the lining sleeve (130) is adapted to the inner diameter of the second crucible tube (119), and the inner wall of the lining sleeve (130) is flush with the inner wall of the first crucible tube (117).

6. The split crucible according to claim 5, characterized in that: The thickness of the first crucible tube (117) is 15 mm, the thickness of the second crucible tube (119) is 10 mm, and the thickness of the lining sleeve (130) is 5 mm.

7. The split crucible according to claim 2, characterized in that: A stop ring (151) is integrally provided at the middle portion of the inner wall of the crucible body (110), and the stop ring (151) is used to form the stop step (150) and abut against the bottom end surface of the lining sleeve (130).

8. The split crucible according to claim 1, characterized in that: The edge of the lining sleeve (130) is further provided with a positioning handle (170) protruding radially outward, and a positioning groove (171) is provided on the crucible body (110) at the edge of the accommodating opening (111), and the positioning handle (170) is assembled in the positioning groove (171).

9. The split crucible according to claim 8, characterized in that: The angle between the opening direction of the second opening (131) and the protruding direction of the positioning handle (170) is 90°.

10. A silicon carbide crystal growth furnace, characterized in that: The invention comprises an inner crucible and a split crucible according to any one of claims 1 to 9, wherein the inner crucible is arranged in the crucible body (110), and the lining sleeve (130) is arranged outside the inner crucible.

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