Explosion-proof pipeline sealing device

Abstract

The utility model relates to the field of chip manufacturing, in particular to an anti-explosion pipeline sealing device which comprises a shell, a bottom cover, a sealing cover, a clamping sleeve, a first elastic piece and a second elastic piece. A through hole is formed in the middle of the shell, a containing groove is circumferentially formed in the inner wall of the shell at one end of the through hole, an inclined groove is formed between one end of the containing groove and the inner wall, and a limiting bearing platform is arranged on the inner wall of the through hole; the clamping sleeve comprises a mounting sleeve and a connecting sleeve, more than two mounting holes corresponding to the accommodating grooves in position are formed in the circumferential direction of the mounting sleeve, and sliding parts are placed in the mounting holes; the sealing cover is located in the mounting sleeve, the side face of the sealing cover is matched with the sliding part and used for extruding one side of the sliding part into the containing groove, and the connecting sleeve is connected with the bottom cover; the first elastic piece is located between the sealing cover and the bottom cover, and the second elastic piece is located between the limiting bearing platform and the bottom cover. Installation and detachment are convenient and fast, explosive substances in the pipeline can be effectively prevented from exploding, and the risk of personnel injury is reduced.

Description

Technical Field

[0001] The utility model relates to the field of chip manufacturing, in particular to a sealing device for an exhaust gas discharge pipeline used in chip manufacturing. Background Art

[0002] During chip manufacturing, after the deposition step, the wafer is coated with a photosensitive material called photoresist. The designed circuit pattern is then transferred to the wafer using photolithography. Etching and ion implantation are then used to further process the circuit pattern into components such as transistors with specific functions. This is known as photolithography and etching. High-risk, high-concentration chemicals, such as cleaning agents, resists, stripping solutions, and other solvents or other acids and bases, are often used in this process. Furthermore, the light source required for photolithography must be extremely pure. When purifying the light beam, a vacuum chamber is used to remove gas molecules and other impurities from the beam to reduce scattering and absorption. Therefore, the byproduct materials generated by these chemicals, such as waste chemicals, exhaust gases, and impurities in the light beam, need to be discharged downward through dry pumps (responsible for vacuum extraction of pipelines) and multiple exhaust gas discharge lines (pumping lines) to exhaust gas treatment equipment (such as gas purification equipment and scrubbers). Then, they are discharged into the atmosphere through acid scrubbers, acid and alkali exhaust fans, and other equipment. Over time, chemical waste gas particles and impurities contained in the light beam will accumulate on the pipe wall of the exhaust gas emission pipe, gradually blocking the exhaust channel and affecting the emission efficiency. Therefore, the pipe needs to be dismantled and cleaned regularly.

[0003] Because the exhaust gas emission pipeline (Pumpingline) is a humid environment, the chemicals attached to the pipe wall contain high concentrations of flammable substances such as phosphorus and alkanes. If the exhaust gas emission pipeline (Pumpingline pipeline) is dismantled for cleaning in a dust-free workshop, these flammable substances will quickly generate heat and expand after coming into contact with the outside air, causing the internal space of the Pumpingline pipeline to be squeezed or even deformed. If it cannot be effectively sealed within a short period of time and a certain oxidation peak is reached, there will be a risk of explosion or combustion (generally forming an oxidation peak within 1-2 minutes. The more crystals inside the pipeline, the faster this oxidation value is reached, and some may even explode or burn after more than ten seconds). This will not only easily cause injury to maintenance personnel, but also affect the cleaning requirements of the dust-free operation in the production workshop and even cause fire.

[0004] In the existing technology, before an explosion occurs, maintenance personnel need to cooperate with multiple people to perform sealing operations. The sealing methods include: (1) First, personnel need to soak the dust-free cloth in clean water in advance. After disassembling the pipe interface, quickly cover the pipe mouth with the soaked dust-free cloth and tie it up to isolate the air, achieve the effect of sealing and preventing rapid oxidation; (2) Place the sealing ring at the pipe mouth, then use the pipe blind plate to block the pipe mouth, and use the clamp to fix the blind plate to block the pipe mouth. After sealing in the above way, it can be transferred to the external environment for cleaning (the seal can be opened in the external environment and then actively detonated).

[0005] Due to the narrow operating space, it is not convenient for coordinating personnel to get close when transferring workpieces and collaborating in operations. Sometimes, there are problems such as incorrect coordination in time and links, which causes maintenance personnel to always work in a highly tense state. Therefore, both of the above methods have the problems of too many maintenance personnel, long operation time, and inconvenient operation, and still have safety hazards. Utility Model Content

[0006] In order to solve the problems in the prior art of sealing the exhaust gas discharge pipeline (Pumpingline) used in chip manufacturing, such as the large number of personnel required, long operation time, inconvenient operation, and potential safety hazards, the utility model provides an explosion-proof pipeline sealing device, which has the characteristics of requiring fewer personnel, convenient operation, quickness and safety.

[0007] In order to solve the above problems, the following technical solutions are proposed:

[0008] A explosion-proof pipe sealing device comprises an outer shell, a bottom cover, a sealing cover, a ferrule, a first elastic member and a second elastic member; a through hole is provided in the middle of the outer shell, a circumferential accommodating groove is provided on the inner wall of the outer shell at one end of the through hole, an inclined groove is provided between one end of the accommodating groove and the inner wall, and a limiting support is provided on the inner wall of the through hole; the ferrule comprises a mounting sleeve and a connecting sleeve, the mounting sleeve is circumferentially provided with two or more mounting holes corresponding to the positions of the accommodating grooves, and sliding members are placed in the mounting holes; the sealing cover is located in the mounting sleeve, and the side surface of the sealing cover cooperates with the sliding member for squeezing one side of the sliding member into the accommodating groove, and the connecting sleeve is connected to the bottom cover; the first elastic member is located between the sealing cover and the bottom cover; the second elastic member is located between the limiting support and the bottom cover.

[0009] Furthermore, the accommodating groove is an annular groove or more than two clamping grooves distributed circumferentially along the inner wall of the shell.

[0010] Furthermore, the sliding member is a ball or an arc with a bottom that matches the inclined groove.

[0011] Furthermore, the side surface of the mounting sleeve fits against the inner wall of the housing.

[0012] Furthermore, the first elastic member and the second elastic member are both conical springs.

[0013] Furthermore, a locking cover is included, which is installed below the bottom cover and is used to lock the position of the bottom cover.

[0014] Furthermore, a hand-held portion is provided on the side of the shell.

[0015] The beneficial effects of this utility model are as follows: 1. When blocking a pipeline, simply snap the device onto the pipeline joint to complete the blockage. Disassembly is also quick and easy, effectively preventing explosive substances inside the pipeline from exploding when exposed to air for a long time, reducing the risk of injury to operators. It also helps ensure dust-free production workshops. 2. The structure is sophisticated and low-cost. Made of metal, it has a long service life and can be recycled. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a cross-sectional view of the structure of the pipeline sealing device in the present invention under normal conditions, showing the state before the pipeline is blocked;

[0017] Figure 2 To correspond Figure 1 A cross-sectional view of the internal structure change of the pipeline sealing device in cooperation with the pipeline, showing the state after the pipeline is blocked;

[0018] Figure 3 for Figure 1 The corresponding three-dimensional half-section diagram;

[0019] Figure 4 for Figure 2 The corresponding three-dimensional half-section diagram;

[0020] Figure 5 This is a cross-sectional view of the structure of the pipeline sealing device in the utility model under the second normal state, which is the state before the pipeline is blocked;

[0021] Figure 6 To correspond Figure 5 A cross-sectional view of a second internal structural change of the pipe sealing device in cooperation with the pipe, showing the state after the pipe is blocked;

[0022] Figure 7 This is a cross-sectional view of the structure of the pipeline sealing device in the utility model under the third normal state, which is the state before the pipeline is blocked;

[0023] Figure 8 To correspond Figure 7 A cross-sectional view of the third internal structural change of the pipe sealing device in cooperation with the pipe, showing the state after the pipe is blocked;

[0024] Figure 9 To correspond Figure 3 、 Figure 4 Exploded diagram of the overall structure;

[0025] Figure 10 This is a structural cross-sectional view of the fourth normal state of the pipeline sealing device in the utility model, which is the state before the pipeline is blocked;

[0026] Figure 11 To correspond Figure 10 A cross-sectional view of the fourth internal structural change of the pipe sealing device in cooperation with the pipe, showing the state after the pipe is blocked;

[0027] In the figure: 1. Outer shell; 2. Bottom cover; 3. Sealing cover; 4. Clamping sleeve; 5. First elastic member; 6. Second elastic member; 7. Accommodating groove; 8. Inclined groove; 9. Limiting support platform; 10. Mounting sleeve; 11. Connecting sleeve; 12. Mounting hole; 13. Sliding member; 14. Locking cover; 15. Connecting head; 16. Connecting hole; 17. Hand-held part; 18. Exhaust gas discharge pipe; 19. Flanged edge; 20. Sealing ring; 21. Circular groove. DETAILED DESCRIPTION

[0028] The following is a detailed description of an explosion-proof pipeline sealing device of the present invention in conjunction with specific embodiments.

[0029] It should be noted that the joint at the end of the exhaust gas discharge pipe 18 has an outer flange 19. When the exhaust gas discharge pipes 18 are connected, a sealing ring 20 is installed in the middle and a clamp is used to connect and fix them on the outside.

[0030] like Figures 1 to 11 As shown, an explosion-proof pipe sealing device includes an outer shell 1, a bottom cover 2, a sealing cover 3, a ferrule 4, a first elastic member 5 and a second elastic member 6; a through hole is provided in the middle of the outer shell 1, and a circumferential accommodating groove 7 is provided on the inner wall of the outer shell 1 at one end of the through hole, an inclined groove 8 is provided between one end of the accommodating groove 7 and the inner wall, and a limiting support 9 is provided on the inner wall of the through hole; the ferrule 4 includes a mounting sleeve 10 and a connecting sleeve 11, and the mounting sleeve 10 is circumferentially provided with two or more mounting holes 12 corresponding to the position of the accommodating groove 7, and sliding members 13 are placed in the mounting holes 12; the sealing cover 3 is located in the mounting sleeve 10, and the side surface of the sealing cover 3 cooperates with the sliding member 13 for squeezing one side of the sliding member 13 into the accommodating groove 7, and the connecting sleeve 11 passes through the middle of the limiting support 9 and is connected to the bottom cover 2; the first elastic member 5 is located between the sealing cover 3 and the bottom cover 2, and the sealing cover 3 is clamped or fixedly connected to the first elastic member 5; the second elastic member 6 is located between the limiting support 9 and the bottom cover 2.

[0031] like Figure 1 、 Figure 3 、 Figure 5 、 Figure 7 、 Figure 9As shown, during installation, the first elastic member 5 can be placed in the middle of the bottom cover 2, the second elastic member 6 can be placed on the outside of the first elastic member 5, and then the sealing cover 3 can be placed on the first elastic member 5 (the first elastic member 5 and the sealing cover 3 can be fixedly connected or snap-fitted, wherein when snap-fitted, a closing edge can be provided at the front end edge of the through hole of the mounting sleeve 10 to limit the position of the ferrule 4), and then the housing 1 is sleeved on the outside of the bottom cover 2 from top to bottom, and finally the ferrule 4 with the sliding member 13 installed is inserted into the through hole of the housing 1 to connect the connecting sleeve 11 to the bottom cover 2. The limiting support 9 is mainly used to install the first elastic member 5. The limiting support 9 can be a rib on the inner wall of the housing 1, or a support formed by the connection between the narrow upper and wide lower inner walls.

[0032] In one embodiment, Figures 1 to 9 As shown, the inclined groove 8 is located below the receiving groove 7. The shape of the sealing cover 3 in the present invention matches the shape of the joint and the sealing ring 20 of the exhaust gas discharge pipe 18. Specifically, Figure 1 As shown, the sealing cover 3 is provided with two circular grooves 21. The upper circular groove 21 can accommodate the joint flange 19 of the exhaust gas discharge pipe 18, and the lower circular groove 21 can accommodate the sealing ring 20. When in use, push the ferrule 4 to the position shown in FIG. Figure 1 In the position, the second elastic member 6 is in a compressed state, the first elastic member 5 is in an extended state, and the sealing cover 3 squeezes the sliding member 13 into and is stuck in the receiving groove 7. After removing the exhaust gas discharge pipe 18, immediately put one end of the sealing cover 3 in this scheme on the pipe joint, and at the same time hold the housing 1 of the device and press it toward the pipe joint. The sealing cover 3 compresses the first elastic member 5 and moves toward the rear end of the housing 1 (the end of the bottom cover 2). The mounting holes 12 of the sealing cover 3 and the sliding member 13 are staggered, and the flange 19 of the pipe joint and the outer edge of the sealing cover 3 are located below the mounting hole 12. In this process, under the action of thrust, the reaction force of the first elastic member 5 on the bottom cover 2, and the elastic stress of the extension of the second elastic member 6, the ferrule 4 and the base 2 move toward the rear end of the housing 1 together. In the process of moving the ferrule 4 toward the rear end of the housing 1, it drives the sliding member 13 through the inclined groove 8. When the sliding member 13 moves to one side to fit the inner wall of the pipe, the other side contacts the side of the pipe joint inward, such as Figure 2As shown, the second elastic member 6 is located between the limiting support 9 and the bottom cover 2. The elastic stress generated by the second elastic member 6 can squeeze the bottom cover 2 and the ferrule 4 downward, and after the first elastic member 5 is compressed, the elastic stress generated can squeeze the sealing cover 3 upward. Therefore, the pipe joint is clamped between the sliding member 13 and the sealing cover 3 under the cooperation of the elastic force of the first elastic member 5 and the second elastic member 6 and the force of the inner wall of the shell 1, thereby achieving the effect of quickly sealing the pipe joint. When removing this device, by pressing the bottom cover 2 toward the front end of the shell 1 (the entrance end of the exhaust gas discharge pipe 18), the bottom cover 2 overcomes the elastic force of the second elastic member 6 and drives the ferrule 4 and the sealing cover 3 to move upward until the mounting hole 12 corresponds to the position of the receiving groove 7. Due to the upward force of the first elastic member 5 squeezing the sealing cover 3, the sliding member 13 is subjected to the side pressure of the sealing cover 3 and re-enters the receiving groove 7 along the slide groove, no longer squeezing the flange 19 of the pipe joint, thereby achieving unlocking and resetting to Figure 1 In this embodiment, the pipe joint can be taken out. Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 、 Figure 9 As shown, the sliding member 13 is a ball, as shown in FIG. Figure 7 、 Figure 8 As shown, the sliding member 13 is arc-shaped with the bottom matching the inclined groove 8.

[0033] Better, such as Figure 5 、 Figure 6 、 Figure 7 、 Figure 8 、 Figure 9 As shown, a locking cover 14 is also included, which is installed on the bottom cover 2 and is used to lock the position of the bottom cover 2. In this embodiment, the diameter of the locking cover 14 is larger than the diameter of the through hole of the outer shell 1. A connector 15 is provided on the side of the locking cover 14 facing the bottom cover 2, and a corresponding connecting hole 16 is provided on the outer side of the bottom cover 2. Specifically, in this embodiment, the locking cover 14 is in the shape of a cover, and the internal depth matches the exposed length of the bottom cover 2 in the locked and blocked state. After the exhaust pipe joint is blocked by the device, the locking cover 14 is screwed to the bottom of the bottom cover 2. Since the diameter of the locking cover 14 is larger than the diameter of the through hole of the outer shell 1, the outer edge of the locking cover 14 is against the bottom of the outer shell 1. Therefore, the bottom cover 2 cannot be pushed toward the pipe joint, thereby locking the pipe joint flange 19 in the blocked state, and avoiding the situation where the device falls off due to contact during the transfer of the exhaust pipe.

[0034] In another embodiment, Figure 10 、 Figure 11As shown, the inclined groove 8 is located above the receiving groove 7. The shape of the sealing cover 3 in the present invention matches the shape of the joint of the exhaust gas discharge pipe 18 and the sealing ring 20. Specifically, the sealing cover 3 is provided with two circular grooves 21. The upper circular groove 21 can accommodate the joint flange 19 of the exhaust gas discharge pipe 18, and the lower circular groove 21 can accommodate the sealing ring 20. When in use, push the ferrule to the position shown in FIG. Figure 10 At the position where it is located, the first elastic member 5 squeezes the sealing cover 3 upwards, and the side of the sealing cover 3 squeezes the sliding member 13 into and is stuck in the receiving groove 7. The second elastic member 6 is a tension spring, and the two ends of the second elastic member 6 are respectively stuck on the limiting support 9 and the bottom cover 2. After removing the exhaust gas discharge pipe 18, immediately put one end of the sealing cover 3 in this device on the pipe joint, and at the same time hold the outer shell 1 of this device and press it toward the pipe joint. The sealing cover 3 compresses the first elastic member 5 and moves toward the rear end of the outer shell 1 (the end of the bottom cover 2). After the sealing cover 3 overcomes the elastic force of the first elastic member 5 and moves inward, it is staggered with the mounting hole 12 of the sliding member 13. The flange 19 of the pipe joint and the outer edge of the sealing cover 3 are located below the mounting hole 12. Then press the bottom cover 2 toward the front end of the outer shell 1 (the end where the exhaust gas discharge pipe 18 enters). During the movement of the ferrule 4 toward the front end of the outer shell 1, it drives the sliding member 13 through the inclined slot 8, as shown in FIG. Figure 11 As shown, when the sliding member 13 moves to one side and fits against the inner wall of the pipe, the other side contacts the side of the pipe joint inward. Under the elastic force of the first elastic member 5 and the second elastic member 6 and the force of the inner wall of the housing 1, the pipe joint is clamped between the sliding member 13 and the sealing cover 3, achieving the effect of quickly sealing the pipe joint. When removing the device, by pulling or holding the housing 1 of the device and continuing to squeeze it toward the pipe joint, the bottom cover 2 moves toward the rear end of the housing 1, driving the ferrule 4 to move toward the rear end until the mounting hole 12 corresponds to the position of the receiving groove 7. The first elastic member 5 squeezes the sealing cover 3 toward the front end of the housing 1 to generate a force. The sliding member 13 is subjected to the side pressure of the sealing cover 3 and re-enters the receiving groove 7 along the slide groove. It no longer squeezes the flange 19 of the pipe joint, achieving unlocking, so that the pipe joint can be removed. In this embodiment, the sliding member 13 is a ball.

[0035] Better, such as Figure 11 As shown, a locking cover 14 is also included, which is installed below the bottom cover 2 and is used to lock the position of the bottom cover 2. In this embodiment, the outer edge of the locking cover 14 is provided with an external thread, and the inner edge of the bottom of the shell 1 is provided with a corresponding internal thread. After the exhaust pipe joint is sealed by the device, the locking cover 14 is screwed onto the bottom of the bottom cover 2. The locking cover 14 abuts the bottom of the shell 1. Therefore, the bottom cover 2 cannot be moved toward the rear end of the shell 1, and the flange 19 of the sealed pipe joint is locked. This prevents the device from being touched and falling off during the transfer of the exhaust pipe. It also prevents the device from falling off due to curiosity or misoperation by people other than the operator.

[0036] The cost of clean water and non-woven fabrics in the existing technology is relatively high and they are consumables. The device can be recycled, has a long service life, good explosion-proof performance and low cost.

[0037] Most pumpingline pipelines are internally doped with media such as high-concentration chlorine and hydrofluoric acid, which can also oxidize metals. Therefore, stainless steel and high-strength PVC materials can be used. Among them, considering the explosion-proof performance of this product, the outer shell 1, bottom cover 2, sealing cover 3, and ferrule 4 are preferably made of stainless steel 316 or 401 quenched material. In the above embodiment, the mounting sleeve 10 and the connecting sleeve 11 can be integrally formed, and the two can also be connected by threads. The diameter of the ball can be selected to be 12 mm, and the mounting hole 12 is only slightly larger than the ball so that the ball can move in and out. The size of the ball should be suitable for being able to clamp the flange 19 of the exhaust pipe joint. The manufacturing processes involved in the above-mentioned components include lathe turning, grinder rounding, boring cylinder with a boring machine, milling with a milling machine, etc. These manufacturing processes are all conventional technologies, and the specific process will not be described in detail here. In addition, preferably, the side of the mounting sleeve 10 is in contact with the inner wall of the housing 1 so that the side of the mounting sleeve 10 can slide along the inner wall of the housing 1 to prevent the ferrule 4 from shaking left and right. In addition, the side of the bottom cover 2 is in contact with the inside of the housing 1, and the effect is the same.

[0038] Preferably, as shown in Figures 1 to 11, both the first elastic member 5 and the second elastic member 6 are conical springs. Because the outer diameter increases during compression, to prevent interference between the springs during extrusion, the conical spring has a larger diameter at one end and a smaller diameter at the other. During compression, the smaller spring coil fits within the larger coil, helping to reduce the overall size of the device. The elastic forces of the first and second elastic members 5, 6 have been measured and calculated to achieve the desired coordination described in the aforementioned embodiment.

[0039] The first elastic member 5 is not only used to clamp the exhaust gas discharge pipe 18 joint and reset the sealing cover 3, but also, if the operator fails to seal in time, after the sealing is completed, it cooperates with the locking cover 14 to prevent the ferrule 4 from having or not having much space to move up and down. Even if the explosive material in the exhaust gas discharge pipe 18 joint explodes, under the action of the spring, the gap between the sealing cover 3 and the bottom cover 2 can become a buffer and force release area for the explosion impact (the present device can complete the sealing within 10 seconds. The explosion is a special case. Under normal circumstances, the pipeline will be immediately moved out of the workshop after disassembly, so it will not affect the dust-free environment of the workshop, and even if it explodes, it will not cause harm to the operator. Since the exhaust gas discharge pipe 18 joint and the sealing ring 20 on the joint are respectively fitted with the inside of the two grooves in the sealing cover 3, the sealing effect can still be maintained after the explosion). Preferably, in the first embodiment, the cooperation between the locking cover 14 and the bottom cover 2 is sufficient to prevent the sliding part from sliding back into the chute 8 after the ferrule 4 and the bottom cover 2 move. A 3-5mm clearance can be reserved between the locking cover 14 and the bottom cover 2. This does not require locking, but can also serve as a force-relieving space to mitigate the impact of the explosion and prevent harm to personnel. A pressure valve can also be provided, connected to the bottom of the sealing cover. The pressure valve will release pressure according to the internal pressure to prevent excessive pressure. This solution is a safety measure that prevents personal injury while also preventing pipeline deformation caused by the impact of the explosion.

[0040] Better, such as Figures 1 to 11 As shown, a grip portion 17 is provided on the side of the housing 1. The grip portion 17 is an annular groove on the side of the housing 1, which is used to facilitate the application of force by the operator's fingers when pressing the bottom cover 2. The grip portion 17 can also be a handle, bump, etc. connected to the side of the housing 1 to facilitate the operator's finger pressure.

[0041] Better, such as Figure 2 、 Figure 4 、 Figure 6 、 Figure 9 、 Figure 11 As shown, the receiving groove 7 can be an annular groove arranged along the inner wall of the housing 1 to facilitate the sliding member 13 of the mounting sleeve 10 to slide in and out of the annular groove. In one embodiment, two or more circumferentially distributed concave slots can also be used, with the slots opening toward the center of the housing 1. The number of slots matches the number of sliding members 13 and their positions correspond. In this approach, a guide device, such as a guide rod or guide groove, is preferably installed between the mounting sleeve 10 and the interior of the housing 1 to ensure that the circumferentially distributed slots correspond to the positions of the sliding members 13. In this embodiment, an annular groove is preferably used.

Claims

1. An explosion-proof pipeline sealing device, characterized in that: The invention comprises a housing (1), a bottom cover (2), a sealing cover (3), a ferrule (4), a first elastic member (5) and a second elastic member (6); a through hole is provided in the middle of the housing (1); a receiving groove (7) is provided on the inner wall of the housing (1) at one end of the through hole; an inclined groove (8) is provided between one end of the receiving groove (7) and the inner wall; a position limiting support (9) is provided on the inner wall of the through hole; the ferrule (4) comprises a mounting sleeve (10) and a connecting sleeve (11); the mounting sleeve (10) is provided with two or more ferrules that are connected to the receiving groove (7) in the circumference; ) positions, and the mounting holes (12) are each provided with a sliding member (13); the sealing cover (3) is located in the mounting sleeve (10), and the side surface of the sealing cover (3) cooperates with the sliding member (13) to squeeze one side of the sliding member (13) into the receiving groove (7), and the connecting sleeve (11) is connected to the bottom cover (2); the first elastic member (5) is located between the sealing cover (3) and the bottom cover (2); and the second elastic member (6) is located between the limiting support platform (9) and the bottom cover (2).

2. The explosion-proof pipeline sealing device according to claim 1, characterized in that: The accommodating groove (7) is an annular groove or two or more clamping grooves distributed circumferentially along the inner wall of the shell (1).

3. The explosion-proof pipeline sealing device according to claim 1 or 2, characterized in that: The sliding member (13) is a ball or an arc with a bottom that matches the inclined groove (8).

4. The explosion-proof pipeline sealing device according to claim 1 or 2, characterized in that: The first elastic member (5) and the second elastic member (6) are both conical springs.

5. The explosion-proof pipeline sealing device according to claim 3, characterized in that: The first elastic member (5) and the second elastic member (6) are both conical springs.

6. The explosion-proof pipeline sealing device according to claim 1, 2 or 5, characterized in that: It also includes a locking cover (14) which is installed below the bottom cover (2) and is used to lock the position of the bottom cover (2).

7. The explosion-proof pipeline sealing device according to claim 3, characterized in that: It also includes a locking cover (14) which is installed below the bottom cover (2) and is used to lock the position of the bottom cover (2).

8. The explosion-proof pipeline sealing device according to claim 4, characterized in that: It also includes a locking cover (14) which is installed below the bottom cover (2) and is used to lock the position of the bottom cover (2).

9. The explosion-proof pipeline sealing device according to claim 1, 2, 5, 7 or 8, characterized in that: A hand-held portion (17) is provided on the side of the housing (1).

10. The explosion-proof pipeline sealing device according to claim 3, characterized in that: A hand-held portion (17) is provided on the side of the housing (1).

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