Connector for inspection

Abstract

And the connector for inspection is arranged between the inspection device and the inspected device. The connector comprises a shell, a signal conductive part, an insulation supporting part and an air insulation part. The signal conductive portion is disposed in the through hole of the housing in the vertical direction and is spaced apart from the through hole. The insulating support part surrounds the signal conductive part between the through hole and the signal conductive part, so that the signal conductive part is coaxial with the central axis of the through hole. The thickness of the insulating support part is smaller than that of the shell. The air insulation portion is a space formed by an inner peripheral surface of the through hole, an outer peripheral surface of the signal conductive portion, and an upper surface or a lower surface of the insulation support portion.

Description

Technical Field

[0001] The present invention relates to a connector for inspection, which is arranged between an inspection device and an inspected device and is used for inspecting the inspected device. Background Art

[0002] Connectors that connect inspection equipment to the device under test (DUT) are used in the field to inspect devices such as semiconductor devices. These connectors electrically connect the inspection equipment to the device under test. Pogo pins or conductive rubber sheets are known as such connectors. These sheets have a conductive portion with a plurality of conductive particles arranged vertically and elastically deformable by pressure from the device under test.

[0003] Semiconductor devices used in mobile communication devices require inspection of their high-frequency RF (radio frequency) characteristics. Conductive rubber sheets, due to their thinness, offer superior RF characteristics to pogo pins, and are therefore used for RF inspection of semiconductor devices. For example, Japanese Patent Publication No. 2004-335450 proposes a connector capable of handling high-frequency signals. Summary of the Invention

[0004] [Problems to be solved by the invention]

[0005] When inspecting high-frequency RF characteristics, to prevent signal loss, distortion, and crosstalk, the conductive portion must be coaxially arranged on a frame. To achieve this coaxial arrangement, conventional conductive rubber sheets have an insulating portion that maintains the coaxial arrangement. If the conductive rubber sheet used for inspection exhibits an impedance that does not match the impedance of the device under inspection and the impedance of the inspection equipment, the sheet can experience significant signal loss due to signal reflection. To achieve impedance matching, conventional conductive rubber sheets utilize a frame made of metal, with the conductive portion supported by an insulating portion that surrounds and insulates the conductive portion from the frame.

[0006] However, in conventional conductive rubber sheets, the insulating portion, which completely surrounds the conductive portion and has a high dielectric constant, degrades the signal transmission characteristics of the conductive portion, making impedance matching difficult. Furthermore, when pressure is applied to the conductive portion by the terminal of the device under inspection, the insulating portion restricts its expansion, preventing the conductive portion from maintaining adequate elastic recovery force.

[0007] Regarding the coaxial configuration of the conductive portion used to inspect high-frequency RF characteristics, a fixed distance must be maintained between the frame and the conductive portion to achieve proper impedance matching. When the terminals of the device under inspection have a fine pitch, the diameter of the conductive portion must not exceed a specified size to prevent short circuits between the frame and the conductive portion. Conversely, to increase the contact area between the terminals of the device under inspection and the inspection equipment, the conductive portion must have a larger diameter within a range that prevents short circuits with the frame. However, previous conductive rubber sheets failed to fully meet these two design requirements.

[0008] One embodiment of the present invention provides a connector for inspection that prevents signal loss, distortion, and crosstalk when inspecting high-frequency RF characteristics. Another embodiment of the present invention provides a connector for inspection that achieves a low dielectric constant around a conductive portion, thereby facilitating impedance matching. Another embodiment of the present invention provides a connector for inspection that increases the elastic restoring force and diameter of a coaxially arranged conductive portion.

[0009] [Technical means to solve the problem]

[0010] Embodiments of the present invention relate to a connector for inspection, which is configured between an inspection device and a device under inspection for inspecting the device under inspection. According to one embodiment, the connector includes a housing, a signal conductive portion, an insulating support portion, and an air-insulating portion. The housing has a first through-hole extending vertically therethrough. The signal conductive portion is configured to conduct electricity vertically and is configured vertically within the first through-hole, spaced apart from the inner circumference of the first through-hole. The insulating support portion is configured to surround the signal conductive portion circumferentially along the central axis of the first through-hole, between the first through-hole and the signal conductive portion. The insulating support portion is configured to support and insulate the signal conductive portion so that the signal conductive portion is coaxially positioned with the central axis. The vertical thickness of the insulating support portion is smaller than the vertical thickness of the housing. The air-insulating portion is located between the inner circumference of the first through-hole and the outer circumference of the signal conductive portion. The air-insulating portion is a space formed by the inner circumference of the first through-hole, the outer circumference of the signal conductive portion, and the upper or lower surface of the insulating support portion.

[0011] In one embodiment, the air insulating portion may be formed in at least one of the upper end and the lower end of the first through hole as an annular groove circumferentially surrounding the outer peripheral surface of the signal conductive portion.

[0012] In one embodiment, the air insulating portion may include a first air insulating portion located at an upper end of the first through-hole and a second air insulating portion located at a lower end of the first through-hole. The connector of one embodiment may further include an elastic portion formed in the first air insulating portion so as to be spaced from the outer circumference of the signal conductive portion and formed along the inner circumference of the first through-hole.

[0013] In one embodiment, the elastic portion may include silicone rubber or silicone rubber containing a plurality of pores.

[0014] The connector of one embodiment may further include an elastic portion, which is arranged in the first air insulation portion to surround the outer peripheral surface of the signal conductive portion and includes a plurality of air holes.

[0015] In one embodiment, the housing may have a second through-hole that is horizontally spaced from the first through-hole and extends vertically therethrough. The connector in one embodiment may further include a grounding conductive portion configured to be vertically disposed in the second through-hole and capable of conducting electricity in the vertical direction.

[0016] In one embodiment, an upper end of the ground conductive portion may protrude relative to an upper surface of the housing, and a lower end of the ground conductive portion may protrude relative to a lower surface of the housing.

[0017] In one embodiment, the signal conductive portion includes: a plurality of first conductive particles aggregated to enable vertical electrical conduction; and a first elastic material to retain the plurality of first conductive particles in the vertical direction. The ground conductive portion includes: a plurality of second conductive particles aggregated to enable vertical electrical conduction; and a second elastic material to retain the plurality of second conductive particles in the vertical direction.

[0018] The connector of one embodiment may further include an insulating sheet, which is coupled to a portion near the lower end of the signal conductive portion to vertically support the signal conductive portion and is coupled to the lower surface of the housing. The insulating support portion and the signal conductive portion are integrally formed, and the signal conductive portion and the insulating sheet are integrally formed, thereby forming a conductive module that is removably coupled to the housing. The insulating support portion can be engaged with the first through-hole.

[0019] In one embodiment, the signal conductive portion includes: a hidden portion surrounded by an insulating support portion; and an exposed portion, which is not surrounded by the insulating support portion but is surrounded by an air insulation portion, has a diameter that is the same as or larger than the diameter of the hidden portion, and forms the upper end or lower end of the signal conductive portion.

[0020] In one embodiment, the diameter of the exposed portion may be within a range of 1 to 2.5 times or less of the diameter of the concealed portion.

[0021] In one embodiment, the shell includes a first shell and a second shell stacked and joined in the up-down direction. A portion of the first through-hole is formed in the first shell, and the remaining portion of the first through-hole is formed in the second shell. The insulating support portion and the concealed portion are arranged in a portion of the first through-hole, and the exposed portion is arranged in the remaining portion of the first through-hole. In a state where the first shell and the second shell are stacked in the up-down direction, the air insulating portion is formed to surround the exposed portion. The connector of one embodiment may further include a grounding conductive portion, which is arranged in the up-down direction at the second through-hole of the shell and is constructed to be able to conduct electricity in the up-down direction. The grounding conductive portion may include a first portion arranged in the first shell, and a second portion arranged in the second shell and joined to the first portion.

[0022] In one embodiment, the shell includes a first shell, a second shell, and a third shell that are stacked and joined in the up-down direction. The middle portion of the first through-hole is formed in the first shell, the upper portion of the first through-hole located above the middle portion is formed in the second shell, and the lower portion of the first through-hole located below the middle portion is formed in the third shell. The insulating support portion and the concealed portion are arranged in the middle portion of the first through-hole, and the exposed portion is arranged in the upper portion of the first through-hole and the lower portion of the first through-hole. When the first shell, the second shell, and the third shell are stacked in the up-down direction, the air insulating portion is formed to surround the exposed portion. The connector of one embodiment may further include a grounding conductive portion, which is arranged in the up-down direction at the second through-hole of the shell and is constructed to be able to conduct electricity in the up-down direction. The grounding conductive portion includes a first portion arranged on the first shell, a second portion arranged on the second shell and joined to the first portion, and a third portion arranged on the third shell and joined to the first portion. The connector of one embodiment may further include an elastic portion formed along an inner peripheral surface of an upper portion of the first through hole of the second housing so as to be spaced apart from an outer peripheral surface of the signal conductive portion.

[0023] In one embodiment, the thickness of the insulating support portion in the up-down direction may be in the range of 50% to 90% of the thickness of the housing in the up-down direction.

[0024] In one embodiment, the insulating support portion may include any one of silicone rubber, polyimide resin, polyetherimide resin, and polytetrafluoroethylene resin.

[0025] In one embodiment, the housing comprises a metal material or a non-metal material. The metal material may be aluminum or stainless steel. The non-metal material may be polyimide resin or standard epoxy resin.

[0026] [Effects of the Invention]

[0027] According to one embodiment of the present invention, the insulating support portion supporting the signal conductive portion is disposed only within a portion of the first through-hole. The signal conductive portion not surrounded by the insulating support portion is surrounded by an air-insulated portion filled with air having a low dielectric constant. This achieves a low dielectric constant around the signal conductive portion, reducing signal loss within the signal conductive portion and enabling proper impedance matching.

[0028] According to one embodiment of the present invention, the portion of the signal conductive portion surrounded by the air-insulated portion can be elastically deformed without being constrained by the insulating support portion. Consequently, the signal conductive portion can be configured to have diameters as large as possible at its upper and lower ends without short-circuiting with the housing, while also exhibiting an appropriate elastic restoring force. Furthermore, the area of ​​the signal conductive portion that contacts the terminals of the device under inspection and the terminals of the inspection apparatus can be increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 FIG. 1 schematically illustrates an example of using a connector according to an embodiment.

[0030] Figure 2 1 is a cross-sectional view illustrating a portion of a connector according to a first embodiment of the present disclosure.

[0031] Figure 3 It is an icon Figure 2 A cross-sectional perspective view of a portion of the connector is shown.

[0032] Figure 4 is a cross-sectional view illustrating another example of the connector according to the first embodiment.

[0033] Figure 5 2 is a cross-sectional view illustrating a portion of a connector according to a second embodiment of the present disclosure.

[0034] Figure 6 It is an icon Figure 5 A cross-sectional perspective view of a portion of the connector is shown.

[0035] Figure 7 is a cross-sectional view illustrating another example of the connector according to the second embodiment.

[0036] Figure 8 1 is a cross-sectional view illustrating a portion of a connector according to a third embodiment of the present disclosure.

[0037] Figure 9 It is an icon Figure 8 A cross-sectional perspective view of a portion of the connector is shown.

[0038] Figure 10 is a cross-sectional view illustrating another example of the connector according to the third embodiment.

[0039] Figure 11 4 is a cross-sectional view illustrating a portion of a connector according to a fourth embodiment of the present disclosure.

[0040] Figure 12 It is an icon Figure 11 A cross-sectional perspective view of a portion of the connector is shown.

[0041] Figure 13 It is a cross-sectional view showing a portion of a connector according to a fifth embodiment of the present disclosure.

[0042] Figure 14 It is an icon Figure 13 A top view of a portion of the connector is shown.

[0043] Figure 15 is a cross-sectional view illustrating another example of the connector according to the fifth embodiment.

[0044] Figure 16 It is a cross-sectional view showing a portion of a connector according to a sixth embodiment of the present disclosure.

[0045] Figure 17 It is an icon Figure 16 An exploded cross-sectional view of a portion of the connector is shown.

[0046] Figure 18 is a cross-sectional view illustrating a portion of a connector according to a seventh embodiment of the present disclosure.

[0047] Figure 19 It is an icon Figure 18 An exploded cross-sectional view of a portion of the connector is shown.

[0048] Figure 20 is a sectional view illustrating another example of the connector according to the seventh embodiment.

[0049] Figure 21 is a cross-sectional view illustrating a portion of a connector according to an eighth embodiment of the present disclosure.

[0050] Figure 22 It is an icon Figure 21 An exploded cross-sectional view of a portion of a connector is shown.

[0051] Figure 23 is a sectional view illustrating another example of the connector according to the eighth embodiment.

[0052] Figure 24 is a cross-sectional view showing a portion of a connector according to a ninth embodiment of the present invention.

[0053] Figure 25 It is an icon Figure 24 An exploded cross-sectional view of a portion of the connector is shown. DETAILED DESCRIPTION

[0054] The embodiments of the present invention are provided for the purpose of illustrating the technical concept of the present invention. The scope of the present invention is not limited to the embodiments and the detailed description of the embodiments.

[0055] Unless otherwise defined, all technical and scientific terms used herein have the meanings commonly understood by those with common knowledge in the technical field to which the present invention belongs. All terms used in the present invention are selected to more clearly describe the present invention and are not selected to limit the scope of the present invention.

[0056] Expressions such as “including,” “having,” and “having” used in the present invention should be understood as open-ended terms that may include other embodiments, unless otherwise mentioned in the sentence or text containing the corresponding expression.

[0057] Unless otherwise mentioned, singular expressions described in the present invention may include plural meanings, and the same applies to singular expressions recited in claims of the invention.

[0058] The expressions “first”, “second”, etc. used in the present invention are used to distinguish a plurality of components from each other, and are not used to limit the order or importance of these components.

[0059] In the present invention, when referring to a situation where a certain component is "connected" or "combined" to other components, it should be understood that the certain component can be directly connected or combined with the other components, or can be connected or linked to the other components through a new other component as a medium.

[0060] As used herein, the directional designation "upward" refers to the orientation of the connector relative to the inspection device, while the directional designation "downward" refers to the direction opposite to upward. As used herein, the directional designation "upward and downward" encompasses both upward and downward directions, but should not necessarily refer to a specific direction.

[0061] The embodiments are described with reference to the examples shown in the accompanying drawings. In the accompanying drawings, identical or corresponding components are denoted by the same reference numerals. Furthermore, when describing the following embodiments, repeated descriptions of identical or corresponding components may be omitted. However, even if the description of a component is omitted, it does not mean that such component is not included in a particular embodiment.

[0062] The embodiments described below and the examples shown in the accompanying drawings relate to an inspection connector (hereinafter referred to as a connector) for inspecting a device under inspection. The connector of the embodiments is positioned between an inspection device and the device under inspection during inspection, thereby enabling inspection of the device under inspection. As an example, the connector of the embodiments can be used for final inspection of semiconductor devices in a subsequent step during their manufacturing. However, the use of the connector of the embodiments for inspection is not limited to this inspection.

[0063] Figure 1 An example of using a connector according to one embodiment is illustrated. Figure 1 The diagram schematically shows the shapes of the connector, inspection equipment, and device under inspection.

[0064] Reference Figure 1 The connector 10 of one embodiment is a sheet-like structure, which is arranged between the inspection device 20 and the device under inspection 30. As an example, the connector 10 can be located on the inspection device 20 through a test socket 40. The test socket 40 is detachably mounted on the inspection device 20. The test socket 40 receives the device under inspection 30, which is transported to the inspection device 20 by manual operation or a transport device, in its interior, so that the device under inspection 30 is aligned with the connector 10. When inspecting the device under inspection 30, the connector 10 contacts the inspection device 20 and the device under inspection 30 in the vertical direction VD, so that the inspection device 20 and the device under inspection 30 are electrically connected to each other. As an example, for high-frequency RF inspection of the device under inspection 30, the connector 10 can be arranged between the device under inspection 30 and the inspection device 20.

[0065] The device under inspection 30 may be a semiconductor device in which a semiconductor IC (Integrated Circuit) chip and multiple terminals are encapsulated into a hexahedral shape using a resin material. As an example, the device under inspection 30 may be a semiconductor device used in a mobile communication device, but is not limited to this. The device under inspection 30 has multiple terminals on its bottom side. The multiple terminals of the device under inspection 30 may be signal terminals 31 and ground terminals 32. The device under inspection 30 may have only signal terminals 31, or may have both signal terminals 31 and ground terminals 32.

[0066] Inspection device 20 can inspect various operational characteristics of a device under inspection 30. Inspection device 20 may include a board for performing inspections, which may include an inspection circuit 21 for inspecting the device under inspection. Inspection circuit 21 also includes multiple terminals 22 electrically connected to terminals of the device under inspection via connector 10. Terminals 22 of inspection device 20 can transmit electrical test signals and receive response signals.

[0067] The signal terminal 31 of the device under inspection 30 is electrically connected to one of the terminals 22 of the inspection device 20 via the connector 10, and the ground terminal 32 of the device under inspection 30 is electrically connected to the other of the terminals 22 of the inspection device 20 via the connector 10. When inspecting the device under inspection, the connector 10 electrically connects the terminals 31 and 32 of the device under inspection with the terminals 22 of the inspection device corresponding to the terminals 31 and 32 in the vertical direction VD, and the device under inspection 30 is inspected using the inspection device 20 via the connector 10.

[0068] The connector 10 includes a housing 100, a signal conductive portion 200, and an insulating support portion 300. The housing 100 can be attached to the test socket 40 and arranged in the horizontal direction HD. The housing 100 can constitute the main body of the connector, in which the signal conductive portion 200 is arranged in the vertical direction VD. In the connector 10, the signal conductive portion 200 and the insulating support portion 300 may include an elastic material. The signal conductive portion 200 is constructed to be conductive in the vertical direction VD. The signal conductive portion 200 can contact the signal terminal 31 of the device under inspection 30 at its upper end and can contact the terminal 22 of the inspection device 20 at its lower end. The insulating support portion 300 supports the signal conductive portion 200 in the vertical direction VD, thereby insulating the signal conductive portion 200 from the housing 100.

[0069] When inspecting the device under inspection 30, pressure P can be applied to the connector 10 through the device under inspection 30 by a mechanical device or manually. Through the pressure P, the terminals 31 and 32 of the device under inspection can be in contact with the connector 10 in the up-down direction VD, and the connector 10 can be in contact with the terminal 22 of the inspection device in the up-down direction VD. As the signal terminal 31 of the device under inspection subjected to the pressure P presses the signal conductive part 200 downward, the signal conductive part 200 can be elastically deformed in the following manner, that is, it contracts in the up-down direction and expands in the horizontal direction. As the pressure P is applied to the connector 10, the signal conductive part 200 is pressed in the up-down direction, and the signal conductive part 200 is in contact with the signal terminal 31 of the device under inspection and the terminal 22 of the inspection device. If the pressure P is removed from the connector 10, the signal conductive part 200 can return to its original shape.

[0070] The connector 10 may include a plurality of signal conductive portions 200. The planar arrangement of the signal conductive portions 200 may vary depending on the arrangement of the terminals of the device under inspection 30. For example, the signal conductive portions 200 may be arranged in a matrix or in a pair of matrixes within the housing 100.

[0071] Reference Figures 2 to 25 A connector according to an embodiment will be described. Figures 2 to 25 The shapes of the components of the connector are schematically shown. Figures 2 to 25 The shapes shown are merely examples chosen for understanding the embodiments.

[0072] Figure 2 is a cross-sectional view illustrating a portion of a connector according to a first embodiment of the present invention, Figure 3 It is an icon Figure 2 A cross-sectional perspective view of a portion of the connector is shown. Figure 4 1 is a cross-sectional view illustrating another example of the connector according to the first embodiment. Figures 2 to 4 The connector according to the first embodiment will be described.

[0073] Reference Figure 2 and Figure 3 According to one embodiment, the connector 10 includes: a housing 100; a signal conductive portion 200 configured to conduct electricity along a vertical direction VD; and an insulating support portion 300 that supports the signal conductive portion 200 to insulate the signal conductive portion 200 relative to the housing 100.

[0074] The housing 100 is a structure for arranging the signal conductive portion 200 along the vertical direction VD. The housing 100 can be formed into a relatively thin, flat plate and arranged in the horizontal direction HD, which is perpendicular to the vertical direction VD. The housing 100 can be made of a metal material or a high-hardness non-metallic material. The metal material constituting the housing 100 can be, but is not limited to, aluminum or stainless steel. The non-metallic material constituting the housing 100 can be, but is not limited to, polyimide resin (PI resin) or standard epoxy resin (FR4 resin).

[0075] In order to arrange the signal conductive portion 200 in the housing 100, the housing 100 has a first through hole 110 formed along the vertical direction VD. The first through hole 110 penetrates the housing 100 along the vertical direction VD. The first through hole 110 passes through the housing 100 from the bottom surface of the housing 100 to the top surface of the housing 100 along the vertical direction VD.

[0076] The signal conductive portion 200 is disposed in the first through-hole 110 along the vertical direction VD, coaxially with the central axis CA of the first through-hole 110. The signal conductive portion 200 is disposed in the first through-hole 110 so as to be spaced apart from the inner circumference of the first through-hole 110 (for example, such that the outer circumference of the signal conductive portion is spaced apart from the inner circumference of the first through-hole in a radial direction relative to the central axis CA). The signal conductive portion 200 is configured to conduct electricity in the vertical direction, enabling signal transmission in the vertical direction VD between the inspection apparatus and the device under inspection. The signal conductive portion 200 may have a cylindrical shape extending in the vertical direction VD.

[0077] The signal conductive portion 200 contacts the signal terminals of the device under inspection at its upper end and contacts the terminals of the inspection apparatus at its lower end. Thus, a vertical conductive path is formed between the signal terminals of the device under inspection and the terminals of the inspection apparatus corresponding to each signal conductive portion 200, using the signal conductive portion 200 as a medium. Test signals from the inspection apparatus can be transmitted from the terminals of the inspection apparatus to the terminals of the device under inspection via the signal conductive portion 200, and response signals from the device under inspection can also be transmitted from the terminals of the device under inspection to the terminals of the inspection apparatus via the signal conductive portion 200.

[0078] The signal conductive portion 200 is not only electrically conductive in the vertical direction but also can shrink and expand under pressure. The signal conductive portion 200 includes a plurality of first conductive particles 211 and a first elastic material 212 .

[0079] The plurality of first conductive particles 211 are aggregated in a columnar shape so as to be conductive in the vertical direction VD, and adjacent first conductive particles 211 can contact each other so as to be conductive in any direction. The plurality of first conductive particles 211 aggregated in a vertical direction so as to be conductive function as a conductor for transmitting signals between the terminals of the inspection device and the signal terminals of the device under inspection. The first conductive particles 211 may comprise a highly conductive metal material. Alternatively, the first conductive particles 211 may be in the form of a core comprising an elastic resin material or a metal material coated with the highly conductive metal material.

[0080] The first elastic material 212 is in a hardened state and has elasticity. The first elastic material 212 holds the first conductive particles 211 in the vertical direction VD, thereby aggregating the first conductive particles 211 in a columnar shape. The first elastic material 212 can fill the spaces between the first conductive particles 211. The first elastic material 212 and the first conductive particles 211 are integrally formed, thereby forming the signal conductive portion 200. The first elastic material 212 may have insulating properties. As an example, the first elastic material 212 may be hardened silicone rubber, but is not limited thereto.

[0081] The signal conductive portion 200, comprising the first elastic material 212, is elastic and can deform elastically in the vertical direction VD and the horizontal direction HD. During inspection of a device under inspection, pressure from the device's signal terminals presses downward against the signal conductive portion 200. When the signal conductive portion is pressurized, the signal conductive portion 200 can elastically deform to slightly expand in the horizontal direction HD and compress downward. Upon removal of the pressure, the signal conductive portion 200 can return to its original shape (i.e., the unpressurized state) from the pressurized state. The signal conductive portion 200 is reversibly deformable between the unpressurized and pressurized states.

[0082] The signal conductive portion 200 is positioned coaxially with the central axis CA of the first through-hole 110 by the insulating support portion 300. The insulating support portion 300 is configured to position the signal conductive portion 200 coaxially with the central axis CA within the first through-hole 110. Furthermore, the insulating support portion 300 is configured to support the signal conductive portion 200 in the vertical direction VD and insulate the signal conductive portion 200 from the housing 100.

[0083] The insulating support portion 300 is positioned between the outer circumferential surface of the signal conductive portion 200 and the inner circumferential surface of the first through-hole 110. The insulating support portion 300 is formed to fill the annular space formed between the inner circumferential surface of the first through-hole 110 and the circumferential surface of the signal conductive portion 200. The insulating support portion 300 can have a tubular shape corresponding to the annular space. The insulating support portion 300 is formed to surround the signal conductive portion 200 along the circumferential direction CD of the central axis CA, between the inner circumferential surface of the first through-hole 110 and the outer circumferential surface of the signal conductive portion 200. The width W1 of the insulating support portion 300 in the radial direction RO outward relative to the central axis CA can be constant along the circumferential direction CD. Therefore, the signal conductive portion 200 supported by the insulating support portion 300 can be positioned coaxially with the central axis CA in the first through-hole 110.

[0084] The insulating support portion 300 may include a material having insulating and elastic properties. For example, the insulating support portion 300 may include silicone rubber, polyimide resin (PI resin), polyetherimide resin (Ultem resin), and polytetrafluoroethylene resin (Teflon resin), but is not limited thereto.

[0085] The insulating support portion 300 has a thickness T1 in the vertical direction. The thickness T1 of the insulating support portion can be defined as the distance between the two vertical surfaces of the insulating support portion 300 (the upper and lower surfaces of the insulating support portion). The insulating support portion 300 has a thickness T1 in the vertical direction that is less than the thickness T2 of the housing 100 in the vertical direction. The thickness T2 of the housing 100 in the vertical direction can be defined as the vertical distance between the upper and lower surfaces of the housing. In the connector of the embodiment, the thickness T1 of the insulating support portion can be within a range of 50% to 90% of the thickness T2 of the housing.

[0086] Because the thickness T1 of the insulating support portion is less than the thickness T2 of the housing, a portion of the outer circumference of the signal conductive portion 200 is exposed within the first through-hole 110, not surrounded by the insulating support portion 300. Consequently, an air-filled space is formed along the exposed portion of the outer circumference of the signal conductive portion 200 not surrounded by the insulating support portion 300. This exposed portion is separated from the inner circumference of the first through-hole 110 by the unoccupied space in the radial direction inward of the central axis. In the present invention, this air-filled space within the first through-hole 110 is referred to as the air-insulated portion.

[0087] Reference Figure 2 and Figure 3 , the air insulating portion 400 can be located at the upper end of the first through hole 110 and can be formed in a manner open to the upper side. Therefore, the air insulating portion 400 is filled with air. The air insulating portion 400 is located between the inner circumferential surface of the first through hole 110 and the outer circumferential surface of the signal conductive portion 200 in the horizontal direction. The air insulating portion 400 can be a space defined by a portion of the inner circumferential surface of the first through hole 110, a portion of the outer circumferential surface of the signal conductive portion 200, and the surface of the insulating support portion 300 in the upper and lower directions (for example, the upper surface of the insulating support portion). The air insulating portion 400 surrounds a portion of the signal conductive portion 200 that is not surrounded by the insulating support portion 300 (for example, a portion of the outer circumferential surface adjacent to the upper end of the signal conductive portion) along the circumferential direction CD.

[0088] like Figure 2 and Figure 3 As shown, the air insulating portion 400 can be formed as an annular groove that surrounds the outer circumference of the signal conductive portion 200 near the upper end of the first through-hole 110 along the circumferential direction CD. In the annular groove-shaped air insulating portion 400, the air insulating portion 400 has a width W2 in the outer radial direction RO. The annular air insulating portion 400 surrounds the signal conductive portion 200 with its center located along the central axis CA of the first through-hole. Since the vertical thickness T1 of the insulating support portion is 50% to 90% of the thickness T2 of the housing, the vertical thickness T3 of the air insulating portion can be within a range of 10% to 50% of the vertical thickness T2 of the housing.

[0089] The outer circumference of the signal conductive portion 200 can be divided into a portion surrounded by the insulating support portion 300 and a portion surrounded by the air-insulating portion 400. Therefore, the signal conductive portion 200 can include a concealed portion 220, which is surrounded by the insulating support portion 300, and an exposed portion 230, which is not surrounded by the insulating support portion but is surrounded by the air-insulating portion 400. The concealed portion 220 and the exposed portion 230, positioned vertically, form the signal conductive portion. The concealed portion 220 is concealed by the insulating support portion 300 and is not exposed. The exposed portion 230 can be the portion of the signal conductive portion excluding the concealed portion 220. The diameter of the signal conductive portion in the exposed portion 230 can be equal to or greater than the diameter of the signal conductive portion in the concealed portion 220. The outer circumference of the exposed portion 230 faces the inner circumference of the first through-hole 110 along the outer radial direction RO. The upper end surface of the exposed portion 230 forms the upper end of the signal conductive portion 200.

[0090] The signal conductive portion 200 is supported by the insulating support portion 300 and is coaxially arranged with the central axis CA within the first through-hole 110. The vertical center axis of the signal conductive portion 200, supported by the insulating support portion 300, is coaxial with the central axis CA of the first through-hole 110. Furthermore, the tubular insulating support portion 300 and the annular air insulation portion 400 are coaxially arranged with the central axis CA. This coaxial arrangement of the signal conductive portion 200 reduces signal loss and distortion during high-frequency inspection of the device under inspection, thereby preventing crosstalk.

[0091] The dielectric constant of the portion surrounding the signal conductive portion 200, which is coaxial with the signal conductive portion 200, affects the signal transmission performance and impedance matching of the signal conductive portion 200. The lower the dielectric constant of this portion, the lower the signal loss of the signal conductive portion 200, and the better the impedance matching between the signal conductive portion 200 and the impedance of the device under inspection and the inspection circuit of the inspection apparatus.

[0092] According to a connector of one embodiment, the insulating support portion 300, which has a relatively high dielectric constant, does not have a thickness corresponding to the vertical height of the first through-hole 110 (or the thickness of the housing), and is disposed only in a portion of the first through-hole 110 in the vertical direction. Because the insulating support portion 300 only occupies a portion of the first through-hole 110, an air insulating portion 400 is disposed in the remaining portion of the first through-hole 110. The air insulating portion 400 is filled with air having a dielectric constant significantly lower than that of the insulating support portion, for example, air having a dielectric constant of approximately 1. Therefore, in the connector of one embodiment, the portion surrounding the signal conductive portion 200 along the circumference of the central axis CA has a very low dielectric constant, and the signal conductive portion 200 can have reduced signal loss and improved high-frequency characteristics, thereby exhibiting better impedance matching.

[0093] The portion of the signal conductive portion 200 not surrounded by the insulating support portion 30 (e.g., the exposed portion 230) is surrounded by the air insulating portion 400. Therefore, when pressure is applied to the signal conductive portion during device inspection, the exposed portion 230 surrounded by the air insulating portion 400 can easily expand horizontally without being constrained by the insulating support portion, and the signal conductive portion 200 can have good elastic restoring force.

[0094] Furthermore, the exposed portion 230 of the signal conductive portion 200 is separated from the inner circumference of the first through-hole 110 by the air insulating portion 400. Therefore, the signal conductive portion 200 can maintain a fixed distance from the inner circumference of the first through-hole 110 to achieve impedance matching, while maintaining a relatively large diameter while preventing short circuits with the housing. This larger diameter allows the signal conductive portion 200 to contact the terminals of the device under inspection and the terminals of the inspection apparatus with a wider contact area, resulting in improved signal conductivity.

[0095] Figure 4 Another example of the connector according to the first embodiment is shown in FIG. Figure 4 The air insulating portion 400 may be located at the lower end of the first through-hole 110. The air insulating portion 400 may be a space defined by a portion of the inner circumference of the first through-hole 110, a portion of the outer circumference of the signal conductive portion 200, and the upper and lower surfaces of the insulating support portion 300 (e.g., the lower surface of the insulating support portion). The air insulating portion 400 may be formed as an annular groove surrounding the outer circumference of the signal conductive portion 200 along the circumferential direction CD at the lower end of the first through-hole 110. The signal conductive portion 200 has an exposed portion 230 forming the lower end of the signal conductive portion. The exposed portion 230 is not surrounded by the insulating support portion, but is surrounded by the air insulating portion 400.

[0096] Figures 2 to 4The connector of the illustrated embodiment can be manufactured in various ways according to various pitches of terminals of the device to be inspected.

[0097] For example, a flat housing 100 may be prepared, and first through-holes 110 may be formed in the housing 100 by drilling or laser treatment at locations where signal conductive portions are to be formed. If the housing 100 is made of aluminum, the housing 100 may be anodized to form an insulating oxide film on the inner circumference of the first through-holes 110 and on the surface of the housing 100, thereby improving the strength and durability of the connector.

[0098] As an example, a structure in which the signal conductive part 200 and the insulating support part 300 are integrated is fitted into the first through hole 110 of the housing 100, thereby manufacturing a connector. The signal conductive part 200 and the insulating support part 300 can be formed into one piece by a molding die. A liquid molding material in which the first conductive particles are dispersed in the first elastic material in a liquid state is injected into the molding die, and the signal conductive part 200 can be molded using a magnetic field. Thereafter, the liquid elastic material constituting the insulating support part 300 and the signal conductive part 200 are arranged in the molding die, and the signal conductive part 200 and the insulating support part 300 can be molded into one piece. In the case where the elastic material constituting the insulating support part 300 is the same as the first elastic material of the signal conductive part 200, the signal conductive part 200 and the insulating support part 300 can also be molded into one piece using a single molding die.

[0099] As another example, after forming housing 100 with first through-hole 110, a cylindrical elastic body can be formed in first through-hole 110 using the elastic material of insulating support 300, leaving a space that can be formed into an air-insulating portion. Subsequently, through-holes can be formed vertically in the elastic body filling first through-hole 110 using a laser. Signal conductive portion 200, which is formed separately from the insulating support, can also be inserted into these through-holes.

[0100] Figure 5 is a cross-sectional view illustrating a portion of a connector according to a second embodiment of the present invention, Figure 6 It is an icon Figure 5 A cross-sectional perspective view of a portion of the connector is shown. Figure 7 1 is a cross-sectional view showing another example of the connector according to the second embodiment. Figures 5 to 7 , the connector of the second embodiment is described.

[0101] The connector 10 of the second embodiment has a similar configuration to that of the connector of the first embodiment. The connector 10 of the second embodiment includes the housing 100 and the signal conductive portion 200. The insulating support portion 300 of the connector 10 of the second embodiment is located approximately in the middle of the first through-hole 110. Therefore, the air insulating portion 400 of the connector 10 of the second embodiment includes a pair of air insulating portions 410 and 420 located at the upper and lower ends of the first through-hole 110, respectively.

[0102] The pair of air insulating portions 410 and 420 are the first air insulating portion 410 located at the upper end of the first through-hole 110 and the second air insulating portion 420 located at the lower end of the first through-hole 110. The insulating support portion 300 can be positioned within the first through-hole 110 such that the first air insulating portion 410 and the second air insulating portion 420 have the same thickness in the vertical direction. The exposed portion of the signal conductive portion that is not surrounded by the insulating support portion 300 and is exposed includes a first exposed portion 231 and a second exposed portion 232. The first exposed portion 231 is located at the upper end of the first through-hole, and the second exposed portion 232 is located at the lower end of the first through-hole.

[0103] Reference Figure 7 , the signal conductive portion 200 can be constructed as follows: the diameter of the portion surrounded by the air insulation portion is larger than the diameter of the portion surrounded by the insulating support portion. Therefore, the first exposed portion 231 and the second exposed portion 232 have a diameter D2 that is larger than the diameter D1 of the concealed portion 220. The diameter D2 of the first exposed portion 231 and the second exposed portion 232 can be in the range of more than 1 times and less than 2.5 times the diameter D1 of the concealed portion. Since the diameter D2 of the first exposed portion 231 and the second exposed portion 232 is larger than the diameter D1 of the concealed portion 220, the cross-sectional area of ​​the upper and lower ends of the signal conductive portion is larger than the cross-sectional area of ​​the portion surrounded by the insulating support portion 300 (i.e., the concealed portion). Therefore, the upper end of the signal conductive portion 200 can contact the signal terminal of the device under inspection with a wider contact area, and the lower end of the signal conductive portion 200 can contact the terminal of the inspection device with a wider contact area. Because the air-insulated portions surround the first exposed portion 231 and the second exposed portion 232, the signal conductive portion 200 not only achieves excellent impedance matching due to the air-insulated portions, but also allows for contact with the terminals over a wider contact area. Consequently, the diameters of the upper and lower ends of the signal conductive portion can be increased without short-circuiting the signal conductive portion with the housing.

[0104] Figures 5 to 7 The connector shown can be connected with Figures 2 to 4 The connector shown is manufactured in a similar manner. Figure 7In the example of the connector shown, a cylindrical elastic body can be formed within the first through-hole 110 of the housing 100 by leaving a space for forming an air-insulated portion using the elastic material of the insulating support portion 300. Through-holes are formed vertically in this elastic body using a laser. Thereafter, the signal conductive portion 200, which is formed recessed in the middle portion and molded separately from the insulating support portion, can be fitted into the through-holes of the elastic body.

[0105] Figure 8 is a cross-sectional view illustrating a portion of a connector according to a third embodiment of the present invention, Figure 9 It is an icon Figure 8 A cross-sectional perspective view of a portion of the connector is shown. Figure 10 1 is a cross-sectional view showing another example of the connector according to the third embodiment. Figures 8 to 10 , the connector of the third embodiment is described.

[0106] The connector of the third embodiment has Figure 7 Compared to the aforementioned embodiment, the connector 10 of the third embodiment includes an elastic portion 510 disposed at the upper end of the first through hole 110 .

[0107] At Figure 8 and Figure 9 In the connector of the third embodiment shown, the air insulating portion includes a first air insulating portion 410 located at the upper end of the first through-hole 110 and a second air insulating portion 420 located at the lower end of the first through-hole 110. An elastic portion 510 is provided within the first air insulating portion 410 surrounding the first exposed portion 231. The elastic portion 510 has an annular shape corresponding to the annular shape of the first air insulating portion 410. The elastic portion 510 is formed along the inner circumference of the first through-hole 110, spaced from a portion of the outer circumference of the signal conductive portion 200 (the outer circumference of the first exposed portion 231) in a radial direction RO outward relative to the central axis CA. Therefore, the elastic portion 510 can occupy a portion of the space formed by the first air insulating portion 410.

[0108] As an example, the elastic portion 510 may include hardened silicone rubber. Alternatively, the elastic portion 510 may include the same material as the insulating support portion 300. When inspecting the device under inspection, the terminals of the device under inspection (e.g., Figure 1 The signal terminals of the device under inspection (DUT) shown in the figure are misaligned with the signal conductive portion in the vertical direction, causing the terminals of the DUT to abut against the housing. The elastic portion 510 prevents the terminals of the DUT from directly abutting against the housing. When the signal terminals of the DUT are misaligned with the signal conductive portion, the signal terminals come into contact with the elastic portion 510 provided at the upper end of the first through-hole 110. Therefore, the elastic portion 510 prevents the terminals of the DUT from being damaged by the housing 100.

[0109] Reference Figure 10 , the elastic portion 510 may include silicone rubber containing a plurality of pores 511. The elastic portion 510 containing a plurality of pores 511 may be formed of liquid silicone rubber to which a foaming agent is added. As an example, when forming the elastic portion 510, the foaming agent reacts chemically with the liquid silicone rubber to generate gas. The generated gas squeezes out the liquid material in the liquid silicone rubber, thereby causing a local lack of liquid resin during the molding process of the elastic portion, thereby forming a plurality of pores 511 of various sizes throughout the elastic portion. The elastic portion 510 containing a plurality of pores 511 may have a lower dielectric constant than the dielectric constant of the elastic portion without pores.

[0110] At Figures 8 to 10 In the illustrated embodiment, the first exposed portion 231 and the second exposed portion 232 have a diameter greater than the diameter of the concealed portion 220. Therefore, the signal conductive portion 200 can contact the terminals of the device under inspection and the terminals of the inspection device with a wider contact surface. As an example, the connector 10 provided with the elastic portion 510 can be effectively used to inspect devices under inspection whose terminals have a narrow pitch. In addition, the connector 10 provided with the elastic portion 510 can prevent a short circuit between the signal conductive portion and the housing while increasing the cross-sectional area of ​​the upper and lower ends of the signal conductive portion. As another example, the elastic portion 510 can also be used to Figure 2 and Figure 6 In the illustrated embodiment, it is provided at the upper end of the first through hole.

[0111] Figures 8 to 10 The connector shown can be connected with Figures 2 to 7 The elastic portion 510 can be formed by surrounding the inner peripheral surface of the first through hole 110 with a liquid elastic material constituting the elastic portion 510 using a molding die.

[0112] Figure 11 1 is a cross-sectional view showing a portion of a connector according to a fourth embodiment of the present invention. Figure 12 Yes Figure 11 A cross-sectional perspective view of a portion of the connector is shown. Figures 11 to 12 , the connector of the fourth embodiment is described.

[0113] The connector of the fourth embodiment has Figure 7 Compared to the above embodiment, the connector 10 of the fourth embodiment includes an elastic portion 520 located at the upper end of the first through hole 110 to prevent the terminal of the device under inspection from being damaged.

[0114] exist Figure 11 and Figure 12In the connector of the fourth embodiment shown, the air insulating portion includes a first air insulating portion 410 located at the upper end of the first through hole 110 and a second air insulating portion 420 located at the lower end of the first through hole 110. A terminal (e.g., Figure 1 The elastic portion 520 (shown as a signal terminal of the device under inspection) is damaged. The elastic portion 520 has an annular shape corresponding to the annular shape of the first air insulating portion 410. The elastic portion 520 is arranged on the first air insulating portion 410 so as to surround a portion of the outer circumference of the signal conductive portion 200 (the outer circumference of the first exposed portion 231). Therefore, the elastic portion 520 can occupy the entire space formed by the first air insulating portion 410.

[0115] The elastic part 520 may include a material having a plurality of pores 521 and having elasticity and insulation. The elastic part 520 may include silicone rubber having pores 521, but is not limited thereto. The elastic part 520 having a plurality of pores 521 may be formed by Figure 10 The illustrated elastic portion 510 is formed in a similar manner.

[0116] The elastic portion 520 includes pores 521, thereby having a relatively low dielectric constant. Since the elastic portion 520 surrounds the outer peripheral surface of the first exposed portion 231, it can prevent the first conductive particles from being separated from the first exposed portion 231 due to the pressure during inspection of the device under inspection. In addition, the elastic portion 520 can prevent the terminals of the device under inspection from being damaged by the housing. In addition, as Figure 11 and Figure 12 As shown, the signal conductive portion 200 has a first exposed portion 231 and a second exposed portion 232, each having a diameter greater than that of the concealed portion 220. A member having a lower dielectric constant due to the elastic portion 520 having pores 521 can be disposed around the signal conductive portion 200. As another example, the elastic portion 520 can also be disposed at Figure 2 and Figure 6 In the illustrated embodiment, it is provided at the upper end of the first through hole.

[0117] Figure 11 and Figure 12 The connector shown can be connected with Figures 2 to 7 The connector can be manufactured in a similar manner to the connector shown in FIG. The elastic portion 520 can be formed using a molding die by a liquid elastic material and a foaming agent so as to occupy the space of the air insulating portion.

[0118] Figure 13 is a cross-sectional view showing a portion of a connector according to a fifth embodiment of the present invention. Figure 14 It is an icon Figure 13 A top view of a portion of the connector is shown. Figure 151 is a cross-sectional view showing another example of the connector of the fifth embodiment. Figures 13 to 15 , the connector of the fifth embodiment is described.

[0119] At Figures 13 to 15 In the connector of the fifth embodiment shown, the housing and the signal conductive portion are similarly constructed to those of the above-described embodiment. The connector 10 of the fifth embodiment includes a ground conductive portion 600, which is connected to the ground terminal (e.g., Figure 1 The ground terminal 32 of the device under inspection shown and the terminal contact of the inspection apparatus are constructed so as to be electrically conductive in the vertical direction VD.

[0120] The housing 100 has a second through-hole 120 in which the ground conductive portion 600 is disposed. The second through-hole 120 is spaced apart from the first through-hole 110 in the horizontal direction HD and is formed along the vertical direction VD. The second through-hole 120 extends through the housing 100 in the vertical direction VD, extending from the bottom surface of the housing 100 to the top surface of the housing 100.

[0121] The ground conductive portion 600 is arranged in the second through-hole 120 along the vertical direction VD. The ground conductive portion 600 can conduct electricity in the vertical direction. The ground conductive portion 600 includes a plurality of second conductive particles 611 and a second elastic material 612. The plurality of second conductive particles 611 are aggregated in a columnar shape so as to conduct electricity in the vertical direction VD. Adjacent second conductive particles 611 are in contact with each other so as to conduct electricity in any direction. The second conductive particles 611 of the ground conductive portion can be the same as or different from the first conductive particles of the signal conductive portion 200. The second elastic material 612 is in a hardened state and has elasticity. The second elastic material 612 holds the second conductive particles 611 in the vertical direction VD so that the second conductive particles 611 are aggregated in a columnar shape. The second elastic material 612 can be filled between the second conductive particles 611. The second elastic material 612 can be the same as or different from the first elastic material of the signal conductive portion.

[0122] Reference Figure 13The upper end of the ground conductive portion 600 protrudes relative to the upper surface of the housing 100, and the lower end of the ground conductive portion 600 protrudes relative to the lower surface of the housing 100. Therefore, the ground conductive portion 600 has an upper protrusion 621 and a lower protrusion 622. In addition, the upper and lower ends of the signal conductive portion 200 can be positioned at the same level as the upper and lower ends of the ground conductive portion 600. The upper protrusion 621 and the lower protrusion 622 allow the ground conductive portion 600 to expand horizontally, thereby improving the elastic restoring force of the ground conductive portion 600. That is, when inspecting a device under inspection, when the ground terminal of the device under inspection applies pressure to the ground conductive portion 600, the ground conductive portion can elastically deform in the horizontal direction at the upper protrusion 621 and the lower protrusion 622. As another example, the upper and lower ends of the ground conductive portion 600 can also be positioned at the same level as the upper and lower surfaces of the housing 100.

[0123] When the housing 100 is made of the metal material, the second conductive particles 611 of the ground conductive portion 600 can contact the second through-holes 120, and the housing 100 is in electrical contact with the ground conductive portion 600. Therefore, the housing 100 can also function as a shielding plate.

[0124] Reference Figure 15 , a connector 10 may include a first area A1 where the signal conductive portion 200 is arranged, and a second area A2 where the signal conductive portion 200 and the ground conductive portion 600 are arranged. The first area A1 may include multiple signal conductive portions 200. In the second area A2, multiple ground conductive portions 600 may be arranged around a single signal conductive portion 200. Alternatively, a region where multiple ground conductive portions 600 are concentrated may be provided in the connector 10. The region including multiple signal conductive portions 200, the region including the signal conductive portion 200 and multiple ground conductive portions 600, and the region including multiple ground conductive portions 600 may be provided in the connector 10 according to the design of the terminal configuration of the device under inspection.

[0125] At Figures 13 to 15In the connector shown, the signal conductive portion, the insulating support portion, and the air insulating portion can be formed by a method similar to the manufacturing method in the above embodiment. As an example, the second through hole 120 can be formed in the housing 100 together with the first through hole 110. The second through hole 120 can be formed in the housing 100 by drilling or laser. The ground conductive portion 600 can be formed after the signal conductive portion and the insulating support portion are formed, or it can be formed separately from the signal conductive portion and the insulating support portion. As an example, a liquid molding material in which the second conductive particles are dispersed in the liquid second elastic material is injected into the second through hole 120, and the second conductive particles are aggregated in the second through hole 120 in the vertical direction by applying a magnetic field, thereby forming the ground conductive portion 600 in the housing 100. Alternatively, the ground conductive portion 600 formed separately using a molding die can also be fitted into the second through hole 120.

[0126] Figure 16 is a cross-sectional view illustrating a portion of a connector according to a sixth embodiment of the present invention, Figure 17 It is an icon Figure 16 An exploded cross-sectional view of a portion of the connector is shown. Figures 16 and 17 , the connector of the sixth embodiment is described.

[0127] At Figure 16 and Figure 17 In the connector of the sixth embodiment shown, the signal conductive portion is Figure 5 The signal conductive portion of the aforementioned embodiment is similarly configured. The signal conductive portion 200 is coaxially arranged in the first through-hole 110 via the insulating support portion 300. The first air insulating portion 410 is formed at the upper end of the first through-hole 110, and the second air insulating portion 420 is formed at the lower end of the first through-hole 110. The first air insulating portion 410 is formed by a portion of the inner circumference of the first through-hole 110, a portion of the outer circumference of the signal conductive portion 200 (the outer circumference of the first exposed portion 231), and the upper surface of the insulating support portion 300. The second air insulating portion 420 is formed by a portion of the inner circumference of the first through-hole 110, a portion of the outer circumference of the signal conductive portion 200 (the outer circumference of the second exposed portion 232), and the lower surface of the insulating support portion 300.

[0128] In the connector 10 of the sixth embodiment, the signal conducting portion 200 capable of conducting electricity in the vertical direction can be combined with the housing 100 through a modular structure. Figure 16 and Figure 17 The connector 10 includes an insulating sheet 710 bonded to the lower surface of the housing 100. The upper surface of the insulating sheet 710 is bonded to the lower surface of the housing 100, thereby bonding the insulating sheet 710 to the housing 100. The bonding between the housing 100 and the insulating sheet 710 can be achieved by bonding using an adhesive, but is not limited thereto.

[0129] In the connector 10, the insulating sheet 710 is located on the side facing the inspection device and is arranged along the horizontal direction HD to form a horizontal surface of the connector 10. The insulating sheet 710 is bonded to a portion near the lower end of the signal conductive portion 200 along the horizontal direction HD, thereby supporting the signal conductive portion 200 in the vertical direction VD. Furthermore, the insulating sheet 710 is bonded to a portion near the lower end of the ground conductive portion 600 along the horizontal direction HD, thereby supporting the ground conductive portion 600 in the vertical direction VD. The insulating sheet 710 can be formed as an elastic body and functions to support the signal conductive portion 200 and the ground conductive portion 600 in the vertical direction VD. The insulating sheet 710 can be made of an insulating material such as silicone rubber, polyimide resin, or standard epoxy resin (FR4 resin).

[0130] Figure 16 and Figure 17 This is an example in which the insulating sheet 710 is coupled to the ground conductive portion 600 . As another example, only one signal conductive portion 200 or a plurality of signal conductive portions 200 may be coupled to the insulating sheet 710 .

[0131] In one embodiment of the connector, the signal conductive portion 200 and the insulating sheet 710 may be formed as an integral structure, and the insulating support portion 300 may be formed as an integral structure with the signal conductive portion 200. Thus, the integrated signal conductive portion 200 and the insulating sheet 710 may form a single conductive module 700 that conducts electricity in the vertical direction. The insulating support portion 300 may be integrally formed with the signal conductive portion 200 of this single conductive module. Furthermore, this single conductive module 700 may be detachably coupled to the housing 100.

[0132] The conductive module 700 is manufactured separately from the housing 100 by a molding die. In the molded conductive module 700, the insulating support portion 300 is integrally formed with the signal conductive portion 200. The molded conductive module 700 can be detachably coupled to the housing 100. For example, Figure 17 As shown, when the conductive module 700 is combined with the housing 100, the insulating support portion 300 formed as a whole with the signal conductive portion 200 can be embedded upward from the direction of the first through hole 110 of the housing. The insulating support portion 300 embedded in the first through hole 110 positions the signal conductive portion 200 coaxially with the central axis CA. In addition, when the insulating support portion 300 is embedded in the first through hole 110, as shown in FIG. Figure 16 As shown, the first air insulating portion 410 and the second air insulating portion 420 can be formed at the upper and lower ends of the first through hole, respectively. Therefore, the air insulating portion that reduces the dielectric constant of the signal conductive portion 200 when transmitting signals can be easily formed in the first through hole 110.

[0133] A connector according to one embodiment may include more than one of the above-described conductive modules. Some of the plurality of conductive modules may include an integrally formed signal conductive portion 200 and an insulating sheet 710. Another portion of the plurality of conductive modules may include an integrally formed signal conductive portion 200, a ground conductive portion 600, and an insulating sheet 710. Such conductive modules are detachably coupled to the housing, allowing replacement of only the conductive module having a damaged signal conductive portion among the plurality of signal conductive portions provided by the connector.

[0134] Figure 18 FIG. 1 is a cross-sectional view showing a portion of a connector according to a seventh embodiment of the present invention. Figure 19 It is an icon Figure 18 An exploded cross-sectional view of a portion of the connector is shown. Figure 20 1 is a cross-sectional view showing another example of the connector of the seventh embodiment. Figures 18 to 20 , the connector of the seventh embodiment is described.

[0135] The connector of the seventh embodiment has the same Figure 2 The connector of the embodiment described is similar in structure to that of the embodiment described above, including Figure 13 The ground conductive portion of the connector of the embodiment described above. In the connector 10 of the seventh embodiment, the housing 100 has a two-part laminated structure. Therefore, the laminated structure of the housing allows the air insulation portion, which reduces the dielectric constant of the signal conductive portion during signal transmission, to be easily formed in the first through-hole of the housing.

[0136] Reference Figure 18 and Figure 19 The housing 100 includes a first housing 131 and a second housing 132 stacked in the vertical direction VD. Therefore, in the connector 10, the housing 100 comprises two parts (i.e., the first housing 131 and the second housing 132). The second housing 132 is stacked on the first housing 131, and the lower surface of the second housing 132 and the upper surface of the first housing 131 can be bonded using an adhesive. The second housing 132 can have a thickness that is smaller than the vertical thickness of the first housing 131, for example, a thickness approximately equal to the thickness of the air insulation portion 400.

[0137] The first through-hole 110, in which the signal conductive portion 200 is located, is formed by portions of the first through-hole formed in each of the vertically stacked housings. A portion 111 of the first through-hole 110 is formed in the first housing 131, while the remaining portion 112 of the first through-hole 110 is formed in the second housing 132. The insulating support portion 300 is located in the portion 111 of the first through-hole, supporting the signal conductive portion 200 coaxially with the central axis CA. Therefore, the concealed portion 220 of the signal conductive portion 200 is located in the portion 111 of the first through-hole. The exposed portion 230 of the signal conductive portion 200 is not located in the portion 111 of the first through-hole. When the first and second housings 132 are stacked vertically, the exposed portion 230 of the signal conductive portion is located in the remaining portion 112 of the first through-hole.

[0138] like Figure 18 As shown, when the first housing 131 and the second housing 132 are stacked in the vertical direction VD, the air insulating portion 400 is formed to surround the exposed portion 230 of the signal conductive portion. The air insulating portion 400 is formed by the outer circumferential surface of the exposed portion 230, the upper surface of the insulating support portion 300, and the inner circumferential surface of the remaining portion 112 of the first through-hole. The remaining portion 112 of the first through-hole is formed in the second housing 132, and the insulating support portion 300 is not disposed in the remaining portion 112. As the first housing 131 and the second housing 132 are stacked, the first through-hole 110 of the housing 100 is completely formed, and the air insulating portion 400 is formed by the remaining portion 112 of the first through-hole, where the insulating support portion 300 is not disposed. Therefore, in the connector 10 in which the housing 100 is formed by stacking two parts, the air insulating portion can be easily formed in the first through-hole.

[0139] At Figure 18 and Figure 19 In the connector 10 shown, the ground conductive portion 600 is disposed in the housing 100. As another embodiment, Figure 2 and Figure 3 The housing of the connector shown in the figure without the ground conductive portion can be composed of the first housing and the second housing as described above.

[0140] In a connector in which the ground conductive portion is disposed within a housing, the second through-hole 120 includes a portion 121 formed in the first housing 131 and a remaining portion 122 formed in the second housing 132. Therefore, the ground conductive portion 600 includes a first portion 631 disposed on the portion 121 of the second through-hole in the first housing, and a second portion 632 disposed on the remaining portion 122 of the second through-hole in the second housing. The first portion 631 and the second portion 632 are joined in the vertical direction VD to form the ground conductive portion 600. The ground conductive portion 600 includes the second conductive particles described above. An adhesive may be applied only to the upper surface of the first housing 131 and the lower surface of the second housing 132. To enhance the contact strength between the second conductive particles in the first portion 631 and the second portion 632, the upper end surface of the first portion 631 and the lower end surface of the second portion 632 can be modified by irradiating with UV (ultraviolet light). The first portion 631 and the second portion 632 include a second elastic material that retains second conductive particles. UV irradiation modifies the second elastic material of the first portion 631 and the second portion 632 so that the elastic material molecules possess adhesive functional groups. The molecules of the elastic material of the first portion 631 and the molecules of the elastic material of the second portion 632 chemically bond via the adhesive functional groups, thereby joining the first portion 631 and the second portion 632.

[0141] Figure 20 1 is a cross-sectional view showing another example of the connector of the seventh embodiment. Figure 20 The exposed portion 230 of the signal conductive portion has a diameter greater than that of the concealed portion 220. When the first housing 131 and the second housing 132 are stacked in the vertical direction, the exposed portion 230 of the signal conductive portion is disposed in the remaining portion 112 of the first through-hole of the second housing, and the air insulating portion 400 is formed to surround the exposed portion 230.

[0142] Figure 21 is a cross-sectional view showing a portion of a connector according to an eighth embodiment of the present invention. Figure 22 It is an icon Figure 21 An exploded cross-sectional view of a portion of the connector is shown. Figure 23 1 is a cross-sectional view illustrating another example of the connector of the eighth embodiment. Figures 21 to 23 , the connector of the eighth embodiment is described.

[0143] The connector of the eighth embodiment has the same Figure 5 The connector of the embodiment described is similar in construction to that of the embodiment described above, including reference Figure 13The ground conductive portion of the connector of the illustrated embodiment. In the connector 10 of the eighth embodiment, the housing 100 has a three-part laminated structure. Therefore, the laminated structure of the housing allows air insulation, which reduces the dielectric constant of the signal conductive portion during signal transmission, to be easily formed at the upper and lower ends of the first through-hole of the housing.

[0144] Reference Figure 21 and Figure 22 The housing 100 includes a first housing 131, a second housing 132, and a third housing 133 stacked in the vertical direction VD. Therefore, in the connector 10, the housing 100 includes three parts (i.e., the first housing 131, the second housing 132, and the third housing 133). The second housing 132 is stacked on the first housing 131, and the lower surface of the second housing 132 and the upper surface of the first housing 131 can be bonded using an adhesive. The third housing 133 is stacked below the first housing 131, and the upper surface of the third housing 133 and the lower surface of the first housing 131 can be bonded using an adhesive. The second housing 132 and the third housing 133 have a thickness smaller than the thickness of the first housing 131 in the vertical direction. For example, the second housing 132 can have a thickness approximately equal to the thickness of the first air insulating portion 410, and the third housing 133 can have a thickness approximately equal to the thickness of the second air insulating portion 420.

[0145] The first through-hole 110, in which the signal conductive portion 200 is located, is formed by portions of the first through-hole formed in the vertically stacked housings. The middle portion 113 of the first through-hole 110 is formed in the first housing 131, the upper portion 114 located above the middle portion 113 of the first through-hole is formed in the second housing 132, and the lower portion 115 located below the middle portion 113 of the first through-hole is formed in the third housing 133. The insulating support portion 300 is located in the middle portion 113 of the first through-hole and supports the signal conductive portion 200 coaxially with the central axis CA. Therefore, the concealed portion 220 of the signal conductive portion 200 is located in the middle portion 113 of the first through-hole. The exposed portion of the signal conductive portion 200 is not located in the middle portion 113 of the first through-hole. The exposed portion of the signal conductive portion includes a first exposed portion 231 located at the upper end of the first through-hole and a second exposed portion 232 located at the lower end of the first through-hole. When the first housing 131, the second housing 132, and the third housing 133 are stacked in the vertical direction, the first exposed portion 231 of the signal conductive portion is located at the upper portion 114 of the first through-hole, and the second exposed portion 232 of the signal conductive portion is located at the lower portion 115 of the first through-hole.

[0146] like Figure 21As shown, when the first housing 131, the second housing 132, and the third housing 133 are stacked in the vertical direction VD, the first air insulating portion 410 is formed to surround the first exposed portion 231 of the signal conductive portion, and the second air insulating portion 420 is formed to surround the second exposed portion 232 of the signal conductive portion. The first air insulating portion 410 can be formed by the outer circumference of the first exposed portion 231, the upper surface of the insulating support portion 300, and the inner circumference of the upper portion 114 of the first through-hole. The second air insulating portion 420 can be formed by the outer circumference of the second exposed portion 232, the lower surface of the insulating support portion 300, and the inner circumference of the lower portion 115 of the first through-hole. The insulating support portion 300 is disposed only in the middle portion 113 of the first through-hole. As the first housing 131, second housing 132, and third housing 133 are stacked, the first through-hole 110 of the housing 100 is completely formed, and the upper portion 114 and lower portion 115 of the first through-hole, where the insulating support portion 300 is not provided, form the first air-insulating portion 410 and the second air-insulating portion 420, respectively. Therefore, in the connector 10 in which the housing 100 is formed by stacking three portions, the air-insulating portion can be easily formed at the upper and lower ends of the first through-hole.

[0147] exist Figure 21 and Figure 22 In the connector 10 shown, the ground conductive portion 600 is disposed on the housing 100. As another embodiment, Figure 5 and Figure 7 The housing of the connector shown without the ground conductive portion may include the first housing, the second housing, and the third housing as described above.

[0148] In a connector in which the ground conductive portion is disposed within a housing, the second through-hole 120 includes a middle portion 123 formed in the first housing 131, an upper portion 124 formed in the second housing 132, and a lower portion 125 formed in the third housing 133. Therefore, the ground conductive portion 600 includes a first portion 631 disposed within the middle portion 123 of the second through-hole in the first housing, a second portion 632 disposed within the upper portion 124 of the second through-hole in the second housing, and a third portion 633 disposed within the lower portion 125 of the second through-hole in the third housing. The first portion 631 and the second portion 632 are joined in the vertical direction VD, and the first portion 631 and the third portion 633 are joined in the vertical direction VD, thereby forming the ground conductive portion 600. When the first shell 131, the second shell 132, and the third shell 133 are stacked, the adhesive can be applied only to the upper and lower surfaces of the first shell 131, the lower surface of the second shell 132, and the upper surface of the third shell 133. In order to vertically bond the first portion 631, the second portion 632, and the third portion 633 constituting the ground conductive portion 600, modification by UV irradiation can be used. This UV irradiation forms adhesive functional groups in the molecules of the elastic material.

[0149] Figure 23 1 is a cross-sectional view showing another example of the connector of the eighth embodiment. Figure 23 The first exposed portion 231 and the second exposed portion 232 of the signal conductive portion have diameters greater than the diameter of the concealed portion 220. When the first housing 131, the second housing 132, and the third housing 133 are stacked in the vertical direction, the first exposed portion 231 is positioned above the first through-hole 114 of the second housing, and the second exposed portion 232 is positioned below the first through-hole 115 of the third housing. Furthermore, the first air insulating portion 410 is formed to surround the first exposed portion 231, and the second air insulating portion 420 is formed to surround the second exposed portion 232.

[0150] Figure 24 is a cross-sectional view illustrating a portion of a connector according to a ninth embodiment of the present invention, Figure 25 It is an icon Figure 24 An exploded cross-sectional view of a portion of the connector is shown. Figures 24 and 25 , the connector of the 9th embodiment is described.

[0151] The connector 10 of the ninth embodiment has the same Figures 21 to 23 The connector 10 of the ninth embodiment has a similar structure to that of the connector of the eighth embodiment. The connector 10 of the ninth embodiment includes an elastic portion 510 formed along the inner peripheral surface of the upper portion 114 of the first through hole of the second housing 132. The elastic portion 510 can prevent the terminal of the device under inspection (for example, Figure 1 The signal terminal 31 of the device under inspection is shown to be damaged.

[0152] The elastic portion 510 has the same Figure 8 and Figure 9 The elastic portion 510 has the same structure as described above. The elastic portion 510 is disposed in the second housing 132, which is laminated on the first housing 131, and is formed in the upper portion 114 of the first through-hole of the second housing. Therefore, the elastic portion 510 can be easily provided in a connector having a laminated housing 100 to prevent damage to the signal terminals of the device under inspection.

[0153] The elastic part 510 can be applied to the housing including the first housing and the second housing. Figures 18 to 20 The elastic portion 510 may be formed on Figures 18 to 20The remaining portion 112 of the first through hole in the connector. As an example, in order to form an elastomer that fills the remaining portion 112 of the first through hole or the upper portion 114 of the first through hole, the elastic material of the elastic portion (or the elastic material containing a foaming agent) can be injected into the remaining portion 112 of the first through hole or the upper portion 114 of the first through hole and hardened. Thereafter, through holes are formed in the above-mentioned elastomer along the up and down directions by laser, thereby preparing a second shell 132 to provide the elastic portion 510. As the second shell 132 is stacked on the first shell 131, an elastic portion 510 separated from the outer peripheral surface of the signal conductive portion (for example, the outer peripheral surface of the first exposed portion 231) can be provided in the connector. In addition, Figure 11 The elastic portion 520 containing bubbles can be provided to the connector in a manner similar to the method of providing the elastic portion 510 to the second housing.

[0154] At Figures 18 to 25 In the illustrated connector, the housing 100 has a laminated structure, and therefore, an air insulation portion can be easily formed in the first through-hole 110 .

[0155] For example, while the upper and lower surfaces of the first shell 131 are covered by a molding die, a liquid molding material comprising the first conductive particles dispersed in the liquid first elastic material can be injected into a portion 111 or the middle portion 113 of the first through hole. Subsequently, by applying a magnetic field, the first conductive particles aggregate in the vertical direction, thereby forming the signal conductive portion and the insulating support portion. Subsequently, the liquid molding material is injected into another molding die and a magnetic field is applied, thereby forming the exposed portions located above and below the concealed portion. In this case, if a cylindrical hole larger than the diameter of the concealed portion is provided in the other molding die, an exposed portion having a larger diameter than the diameter of the concealed portion can be formed.

[0156] As another example, in order to form an elastomer that fills a portion 111 or the middle portion 113 of the first through-hole, a liquid elastic material constituting the insulating support portion can be injected and hardened. Thereafter, a through-hole can be formed in the elastomer in the up-down direction by a laser. Thereafter, a molding die covering the through-hole of the elastomer can be provided, and a liquid molding material in which the first conductive particles are dispersed in the liquid first elastic material can be injected into the through-hole. Thereafter, by applying a magnetic field, the first conductive particles are aggregated in the up-down direction, thereby forming the signal conductive portion supported by the insulating support portion. At this time, if a cylindrical hole larger than the diameter of the concealed portion is provided to the other molding die, an exposed portion having a diameter larger than the diameter of the concealed portion can be formed.

[0157] While the technical concepts of the present invention have been described above through the use of some embodiments and examples shown in the accompanying drawings, it should be understood that various substitutions, changes, and modifications may be implemented without departing from the technical concept and scope of the present invention as would be understood by a person having ordinary knowledge in the technical field to which the present invention belongs. Furthermore, such substitutions, changes, and modifications should be considered to fall within the scope of the appended claims.

Claims

1. A connector, the connector being a connector for inspection configured between an inspection device and an inspected device, the connector comprising: The housing has a first through hole extending vertically therethrough; a signal conductive portion configured to conduct electricity in a vertical direction and disposed in the first through hole in a manner spaced apart from the inner peripheral surface of the first through hole in the vertical direction; an insulating support portion formed between the first through hole and the signal conductive portion so as to surround the signal conductive portion along the circumferential direction of the central axis of the first through hole, and configured to support and insulate the signal conductive portion in a manner such that the signal conductive portion is coaxially positioned with the central axis, and having a vertical thickness smaller than a vertical thickness of the housing; as well as The air insulating portion is located between the inner peripheral surface of the first through hole and the outer peripheral surface of the signal conductive portion and is a space formed by the inner peripheral surface of the first through hole, the outer peripheral surface of the signal conductive portion and the upper surface or the lower surface of the insulating support portion. 2 . The connector according to claim 1 , wherein the air insulating portion is formed as an annular groove surrounding an outer peripheral surface of the signal conductive portion along the circumferential direction in at least one of an upper end and a lower end of the first through hole.

3. The connector according to claim 1, wherein the air insulating portion includes a first air insulating portion located at an upper end of the first through hole and a second air insulating portion located at a lower end of the first through hole. The air insulating portion further includes an elastic portion. The elastic portion is formed in the first air insulating portion so as to be spaced apart from an outer peripheral surface of the signal conductive portion and is formed along an inner peripheral surface of the first through hole. The connector according to claim 3 , wherein the elastic portion comprises silicone rubber or silicone rubber containing a plurality of pores.

5. The connector according to claim 1, wherein the air insulating portion includes a first air insulating portion located at an upper end of the first through hole and a second air insulating portion located at a lower end of the first through hole. The air insulating portion further includes an elastic portion that is arranged in the first air insulating portion to surround an outer peripheral surface of the signal conductive portion and includes a plurality of pores.

6. The connector according to claim 1, wherein the housing has a second through hole, the second through hole being spaced apart from the first through hole in the horizontal direction and penetrating in the up-down direction, The connector further includes a ground conductive portion that is disposed in the second through hole along the vertical direction and is configured to be electrically conductive along the vertical direction. 7 . The connector according to claim 6 , wherein an upper end of the ground conductive portion protrudes relative to an upper surface of the housing, and a lower end of the ground conductive portion protrudes relative to a lower surface of the housing.

8. The connector according to claim 6, wherein the signal conducting portion comprises: a plurality of first conductive particles aggregated so as to be able to conduct electricity in the vertical direction; and a first elastic material for holding the plurality of first conductive particles in a vertical direction; The ground conductive portion includes: a plurality of second conductive particles aggregated in a manner capable of conducting electricity in the vertical direction; and a second elastic material that holds the plurality of second conductive particles in the vertical direction.

9. The connector according to claim 1 , further comprising an insulating sheet, the insulating sheet being bonded to a portion near a lower end of the signal conductive portion so as to support the signal conductive portion in the vertical direction and bonded to a lower surface of the housing. The insulating support portion and the signal conductive portion are formed as one body, and the signal conductive portion and the insulating sheet are formed as one body, thereby forming a conductive module that is detachably coupled to the housing. The insulating support portion is fitted into the first through hole.

10. The connector according to claim 1, wherein the signal conducting portion comprises: a concealed portion surrounded by the insulating support portion; and an exposed portion that is not surrounded by the insulating support portion but is surrounded by the air insulating portion, has a diameter that is the same as or larger than that of the concealed portion, and forms an upper end or a lower end of the signal conductive portion. 11 . The connector according to claim 10 , wherein a diameter of the exposed portion is within a range of 1 to 2.5 times or less of a diameter of the concealed portion.

12. The connector according to claim 10, wherein the housing comprises a first housing and a second housing stacked and joined in the vertical direction, A portion of the first through hole is formed in the first housing, and the remaining portion of the first through hole is formed in the second housing. The insulating support portion and the concealed portion are arranged in the portion of the first through hole, and the exposed portion is arranged in the remaining portion of the first through hole. The air insulating portion is formed so as to surround the exposed portion in a state where the first case and the second case are stacked in the up-down direction.

13. The connector according to claim 12, wherein the housing has a second through hole, the second through hole being spaced apart from the first through hole in the horizontal direction and penetrating in the up-down direction, The connector further includes a ground conductive portion, the ground conductive portion being arranged in the second through hole along the vertical direction and configured to be electrically conductive along the vertical direction. The ground conductive portion includes a first portion disposed on the first housing and a second portion disposed on the second housing and joined to the first portion.

14. The connector according to claim 10, wherein the housing comprises a first housing, a second housing, and a third housing that are stacked and joined in the vertical direction, The middle portion of the first through hole is formed in the first shell, the upper portion of the first through hole located above the middle portion is formed in the second shell, and the lower portion of the first through hole located below the middle portion is formed in the third shell. The insulating support portion and the concealed portion are arranged at the middle portion of the first through hole, and the exposed portion is arranged at the upper portion of the first through hole and the lower portion of the first through hole. The air insulating portion is formed so as to surround the exposed portion in a state where the first case, the second case, and the third case are stacked in the up-down direction.

15. The connector according to claim 14, wherein the housing has a second through hole, the second through hole being spaced apart from the first through hole in the horizontal direction and penetrating in the vertical direction. The connector further includes a ground conductive portion, the ground conductive portion being arranged in the second through hole along the vertical direction and configured to be electrically conductive along the vertical direction. The ground conductive portion includes a first portion disposed on the first housing, a second portion disposed on the second housing and joined to the first portion, and a third portion disposed on the third housing and joined to the first portion. 16 . The connector according to claim 14 , further comprising an elastic portion formed along an inner peripheral surface of the upper portion of the first through hole of the second housing so as to be spaced apart from an outer peripheral surface of the signal conductive portion. 17 . The connector according to claim 1 , wherein a thickness of the insulating support portion in the up-down direction is within a range of 50% to 90% of a thickness of the housing in the up-down direction.

18. The connector according to claim 1, wherein the insulating support portion comprises any one of silicone rubber, polyimide resin, polyetherimide resin, and polytetrafluoroethylene resin.

19. The connector according to claim 1, wherein the housing comprises a metallic material or a non-metallic material, The metal material is aluminum or stainless steel, and the non-metal material is polyimide resin or standard epoxy resin.

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