Speckle generating device based on ultraviolet etching

Abstract

The utility model belongs to the technical field of etching, and particularly relates to a speckle generating device based on ultraviolet etching, which comprises a sample table. The top of the sample table is in sliding connection with a lifting table; the side wall of the lifting platform is fixedly connected with a collimation beam expanding lens; the top of the collimation beam expanding lens is fixedly connected with a light inlet; a mask plate is detachably mounted in the collimation beam expanding lens; an imaging lens is detachably mounted at the bottom of the collimation beam expanding lens; a clamping assembly is arranged at the top of the sample table; an adsorption assembly is arranged at the top of the sample table; according to the step, a speckle manufacturing structure is formed by arranging the sample table, the lifting table, the collimation beam expander, the light inlet, the mask plate and the imaging lens, the function of manufacturing speckles in a photoetching mode is achieved, the problem that discrete and uneven black speckles are manufactured on primer through a manual control method is solved, the speckle manufacturing precision is improved, and the production efficiency is improved. The situation that the speckles are connected together is reduced, and the speckle manufacturing efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of etching, in particular to a speckle generating device based on ultraviolet etching. Background Art

[0002] Digital image correlation method is a new method of analyzing material strain using images. It uses two digital images before and after the specimen is deformed to obtain the deformation information of the area of ​​interest through correlation calculation.

[0003] The basic principle is to divide the region of interest in the image before deformation into grids, treat each sub-region as a rigid motion, and then perform correlation calculations on each sub-region through a certain search method according to a pre-defined correlation function. In the deformed image, find the region with the maximum mutual pivot coefficient with the sub-region, that is, the position of the sub-region after deformation, and then obtain the displacement of the sub-region. By calculating all sub-regions, the deformation information of the entire field can be obtained.

[0004] Before digital image correlation processing, the specimen needs to be coated with characteristic speckles. In existing speckle production technology, a layer of white primer is first sprayed on the specimen surface, and then a discrete, uneven layer of black speckles is sprayed on the primer using manual control. This method is low-cost but extremely difficult to control the yield rate. When manually spraying the black speckles, even the slightest force can easily cause the speckles to connect together, while a slightly lighter spray can easily result in insufficient characteristic points.

[0005] To this end, the utility model provides a speckle generating device based on ultraviolet etching. Utility Model Content

[0006] In order to make up for the deficiencies of the prior art, at least one technical problem raised in the background technology is solved.

[0007] The technical solution adopted by the utility model to solve its technical problems is: the speckle generating device based on ultraviolet etching described in the utility model comprises a sample stage; the top of the sample stage is slidably connected to a lifting platform; the side wall of the lifting platform is fixedly connected to a collimating beam expander; the top of the collimating beam expander is fixedly connected to a light inlet; a mask is detachably installed inside the collimating beam expander; an imaging lens is detachably installed at the bottom of the collimating beam expander; a clamping component is provided on the top of the sample stage; an adsorption component is provided on the top of the sample stage; the sample stage is connected to a pressing component through the clamping component; in this step, a speckle production structure is formed by arranging the sample stage, the lifting platform, the collimating beam expander, the light inlet, the mask and the imaging lens, so as to realize the function of producing speckles by photolithography, solve the problem of producing discrete and uneven black speckles on the primer by manual control method, improve the accuracy of speckle production, reduce the situation where speckles are connected together, and improve the efficiency of speckle production.

[0008] Preferably, the clamping assembly includes a fixing seat, a screw and a clamping plate; the fixing seat is fixedly connected to the top of the sample stage; multiple groups of fixing seats are arranged on the top of the sample stage; the screw is threadedly connected to the side wall of the fixing seat; the ends of the screw close to each other are rotatably connected to the clamping plate; the clamping plate slides on the top of the fixing seat; this step constitutes a sample clamping structure through the arrangement of the fixing seat, the screw and the clamping plate, realizes the function of clamping and fixing the sample, solves the problem of sample offset when speckle is produced on the top of the sample stage, improves the accuracy of speckle production, and improves adaptability to samples of different sizes.

[0009] Preferably, the pressing assembly includes a pressing rod, a first spring and a pressing plate; the pressing rod is slidably connected to the middle of the clamping plate; the pressing plate is fixedly connected to the bottom end of the pressing rod; the first spring is sleeved on the outer side wall of the pressing rod away from the pressing plate; one end of the first spring is fixedly connected to the top of the pressing rod; the other end of the first spring is fixedly connected to the top of the clamping plate; this step constitutes a pressing fixing structure through the arrangement of the pressing rod, the first spring and the pressing plate, realizes the function of fixing the sample, solves the problem that the sample deviates on the top of the sample stage, resulting in a decrease in the accuracy of speckle production, and improves the stability of the sample when it is fixed on the top of the sample stage.

[0010] Preferably, the adsorption assembly includes a push rod, a suction cup and a second spring; the push rod is slidably connected to the top of the sample stage; multiple groups of push rods are arranged on the top of the sample stage; the push rod is arranged between a pair of fixing seats; the suction cup is fixedly connected to the top of the push rod; one end of the second spring is fixedly connected to the bottom end of the push rod; the other end of the second spring is fixedly connected to the inside of the sample stage; this step forms an adsorption and fixing structure through the arrangement of the push rod, the suction cup and the second spring, realizes the function of adsorbing and fixing the sample, improves the stability of the sample when speckle production is performed on the top of the sample stage, and improves the accuracy of speckle production.

[0011] Preferably, foot pads are fixedly connected to the bottom of the sample stage; the foot pads are arranged in multiple groups at the bottom of the sample stage and are evenly distributed at the four corners of the bottom of the sample stage; in this step, the foot pads support the sample stage through the arrangement of the foot pads, thereby reducing the situation where the device is offset due to external force, and improving the stability of the device during operation.

[0012] Preferably, the side wall of the clamping plate close to the pressure rod is fixedly connected with a gasket; the gasket is set on multiple groups of side walls of the clamping plates; in this step, through the setting of the gasket, the gasket contacts the side wall of the sample, cushions the sample, and reduces scratches caused by contact between the sample and the clamping plate.

[0013] Preferably, the pressing plate is made of silicone material; when the pressing plate is made of silicone material, the friction between the sample and the first spring is increased when it comes into contact with the sample, thereby improving the stability of the pressing plate when pressing the sample.

[0014] The beneficial effects of the utility model are as follows:

[0015] 1. The speckle generation device based on ultraviolet lithography described in this utility model comprises a sample stage, a lifting platform, a collimating beam expander, a light inlet, a mask, and an imaging lens, forming a speckle production structure. This implements the function of producing speckle using photolithography, eliminating the problem of manually controlling the production of discrete and uneven black speckles on primers. This improves the precision of speckle production, reduces the occurrence of connected speckles, and enhances the efficiency of speckle production.

[0016] 2. The speckle pattern generation device based on UV lithography described in the present invention comprises a sample clamping structure composed of a fixed base, a screw, and a clamping plate. This structure clamps and secures the sample, solves the problem of sample displacement during speckle pattern generation on top of the sample stage, improves the accuracy of speckle pattern generation, and enhances adaptability to samples of varying sizes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The present invention will be further described below with reference to the accompanying drawings.

[0018] Figure 1 It is a three-dimensional diagram of the utility model;

[0019] Figure 2 This is a schematic diagram of the structure of the collimating beam expander and the sample stage in the utility model;

[0020] Figure 3 This is a schematic diagram of the structure of the cooperation between the fixing seat and the pressure rod in the utility model;

[0021] Figure 4 It is a structural schematic diagram of the cooperation between the ejector rod and the sample stage in the utility model.

[0022] In the figure: 1. Sample stage; 11. Lifting platform; 12. Collimating beam expander; 13. Light inlet; 14. Mask; 15. Imaging lens; 2. Fixed seat; 21. Screw; 22. Clamping plate; 3. Pressure rod; 31. First spring; 32. Pressure plate; 4. Push rod; 41. Suction cup; 42. Second spring; 5. Foot pad; 6. Gasket. DETAILED DESCRIPTION

[0023] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0024] like Figures 1 to 4As shown, a speckle generating device based on ultraviolet etching according to an embodiment of the present invention comprises a sample stage 1; a lifting platform 11 is slidably connected to the top of the sample stage 1; a collimating beam expander 12 is fixedly connected to the side wall of the lifting platform 11; a light inlet 13 is fixedly connected to the top of the collimating beam expander 12; a mask plate 14 is detachably installed inside the collimating beam expander 12; an imaging lens 15 is detachably installed at the bottom of the collimating beam expander 12; a clamping assembly is provided on the top of the sample stage 1; an adsorption assembly is provided on the top of the sample stage 1; the sample stage 1 is connected to a pressing assembly through the clamping assembly; during operation, an ultraviolet laser machine with a wavelength of 365nm is connected to the collimating beam expander 12 through the light inlet 13, and a light spot with a diameter of 8mm is expanded into a parallel beam with a diameter of 32mm. A mask plate 14 with a speckle image groove pre-made is installed inside the collimating beam expander 12. The mask plate 14 is made of a metal sheet, and the position where the speckle is required is hollowed out to allow the ultraviolet light to pass through. The imaging lens 15 Parallel ultraviolet light is diverged or focused. A concave lens is selected for a large sample, and a convex lens is selected for a small sample. A layer of white primer is sprayed on the surface of the sample, and then a layer of black photoresist is applied. The position of the lifting platform 11 is adjusted, and the sample is placed on the top of the sample platform 1 and fixed using a clamping component, a pressing component, and an adsorption component. The ultraviolet laser is turned on and the photoresist is cured with ultraviolet light. The photoresist is cured under the irradiation of ultraviolet light. After complete curing, the laser is turned off, and the uncured photoresist on the sample is cleaned to expose the white primer, and the speckle production is completed. In this step, a speckle production structure is formed by the arrangement of the sample platform 1, the lifting platform 11, the collimating beam expander 12, the light inlet 13, the mask 14, and the imaging lens 15, realizing the function of producing speckles using a photolithography method, solving the problem of producing discrete and uneven black speckles on the primer using a manual control method, improving the accuracy of speckle production, reducing the situation where speckles are connected together, and improving the efficiency of speckle production.

[0025] like Figure 3 As shown, the clamping assembly includes a fixing seat 2, a screw rod 21 and a clamping plate 22; the fixing seat 2 is fixedly connected to the top of the sample stage 1; multiple groups of fixing seats 2 are arranged on the top of the sample stage 1; the screw rod 21 is threadedly connected to the side wall of the fixing seat 2; the ends of the screw rod 21 close to each other are rotatably connected to the clamping plate 22; the clamping plate 22 slides on the top of the fixing seat 2; during operation, the sample is placed on the fixing seat 2 on the top of the sample stage 1, and after moving the sample to a suitable position, the screw rod 21 is twisted to drive the clamping plate 22 to approach the sample and clamp the sample to the top of the sample stage 1; this step forms a sample clamping structure through the arrangement of the fixing seat 2, the screw rod 21 and the clamping plate 22, realizes the function of clamping and fixing the sample, solves the problem of sample offset when making speckle on the top of the sample stage 1, improves the accuracy of speckle production, and improves adaptability to samples of different sizes.

[0026] like Figure 3When the cam 32 is in the unlock position, the lever 33 is in the unlock position, and the first spring 31 is in the unlock position, so that the cam 32 can be unlocked and the push rod 33 is unlocked.

[0027] like Figure 4 As shown, the adsorption assembly includes a push rod 4, a suction cup 41 and a second spring 42; the push rod 4 is slidably connected to the top of the sample stage 1; multiple groups of push rods 4 are arranged on the top of the sample stage 1; the push rod 4 is arranged between a pair of fixing seats 2; the suction cup 41 is fixedly connected to the top of the push rod 4; one end of the second spring 42 is fixedly connected to the bottom end of the push rod 4; the other end of the second spring 42 is fixedly connected to the inside of the sample stage 1; during operation, the sample is placed on the top of the sample stage 1, the suction cup 41 contacts and adsorbs the bottom of the sample, the sample presses the suction cup 41 downward, drives the push rod 4 downward and compresses the second spring 42. After the speckle pattern is completed, the sample is taken away, and the second spring 42 drives the push rod 4 and the suction cup 41 to reset; this step forms an adsorption and fixing structure through the arrangement of the push rod 4, the suction cup 41 and the second spring 42, which realizes the function of adsorbing and fixing the sample, improves the stability of the sample when speckle pattern is produced on the top of the sample stage 1, and improves the accuracy of speckle pattern production.

[0028] like Figure 1 As shown, the bottom of the sample stage 1 is fixedly connected with a foot pad 5; multiple groups of foot pads 5 are arranged at the bottom of the sample stage 1, and are evenly distributed at the four corners of the bottom of the sample stage 1; during operation, the sample stage 1 is placed on the work surface, and the foot pads 5 support the sample stage 1. The foot pads 5 increase the friction between the sample stage 1 and the placement surface, and the foot pads 5 weaken the vibration transmitted from the outside world; in this step, through the setting of the foot pads 5, the foot pads 5 support the sample stage 1, reduce the situation where the device is offset due to external force, and improve the stability of the device during operation.

[0029] like Figure 3As shown, the side wall of the clamping plate 22 close to the pressure rod 3 is fixedly connected with a gasket 6; the gasket 6 is set on the side walls of multiple groups of clamping plates 22; during operation, when the clamping plate 22 clamps the sample, the gasket 6 contacts the side wall of the sample and plays a buffering role; this step is achieved by setting the gasket 6, and the gasket 6 contacts the side wall of the sample to buffer the sample, thereby reducing the situation where the sample is scratched due to contact with the clamping plate 22.

[0030] like Figure 3 As shown, the pressing plate 32 is made of silicone material; during operation, the pressing plate 32 is made of silicone material, and when in contact with the sample, it increases the friction between the sample and the first spring 31, thereby improving the stability of the pressing plate 32 when pressing the sample.

[0031] During operation, a UV laser with a wavelength of 365nm is connected to the collimating beam expander 12 through the light inlet 13, and the spot with a diameter of 8mm is expanded into a parallel beam with a diameter of 32mm. A mask plate 14 with a pre-made speckle image groove is installed inside the collimating beam expander 12. The mask plate 14 is made of a thin metal plate, and the position where the speckle is required is hollowed out to allow the UV light to pass through. The imaging lens 15 diverges or focuses the parallel UV light. A concave lens is selected for a large sample, and a convex lens is selected for a small sample. A layer of White primer, then apply a layer of black photoresist, adjust the position of the lifting platform 11, place the sample on the top of the sample platform 1, use the clamping component, the pressing component and the adsorption component to fix the sample, turn on the ultraviolet laser to cure the photoresist with ultraviolet light, the photoresist is cured under the irradiation of ultraviolet light, after it is completely cured, turn off the laser, clean the uncured photoresist on the sample, leak out the white primer, and the speckle production is completed; the sample is placed on the fixing seat 2 on the top of the sample platform 1, and after moving the sample to the appropriate position, screw the screw 21 to drive the clamp The holding plate 22 approaches the sample and clamps the sample on the top of the sample stage 1; the pressure rod 3 is lifted upward to move the pressure plate 32 upward, the first spring 31 is stretched, and the sample is placed on the top of the fixing seat 2. The pressure rod 3 is released, and the first spring 31 drives the pressure rod 3 and the pressure plate 32 to move downward. The pressure plate 32 presses the sample on the top of the fixing seat 2 to fix it; the sample is placed on the top of the sample stage 1, and the suction cup 41 contacts and adsorbs the bottom of the sample. The sample presses the suction cup 41 downward, drives the ejector rod 4 downward, and compresses the second spring 42. After the speckle pattern is formed, the sample is removed, and the second spring 42 drives the push rod 4 and the suction cup 41 to reset; the sample stage 1 is placed on the work surface, and the foot pad 5 supports the sample stage 1. The foot pad 5 increases the friction between the sample stage 1 and the placement surface, and the foot pad 5 reduces the vibration transmitted from the outside world; when the clamping plate 22 clamps the sample, the gasket 6 contacts the side wall of the sample, playing a buffering role; the pressing plate 32 is made of silicone material, and when in contact with the sample, it increases the friction between the sample and the first spring 31, thereby improving the stability of the pressing plate 32 when pressing the sample.

[0032] The above shows and describes the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the appended claims and their equivalents.

Claims

1. A speckle generation device based on ultraviolet etching, comprising a sample stage (1); characterized in that: The top of the sample stage (1) is slidably connected to a lifting platform (11); a collimating beam expander (12) is fixedly connected to the side wall of the lifting platform (11); a light inlet (13) is fixedly connected to the top of the collimating beam expander (12); a mask plate (14) is detachably mounted inside the collimating beam expander (12); an imaging lens (15) is detachably mounted at the bottom of the collimating beam expander (12); a clamping assembly is provided on the top of the sample stage (1); an adsorption assembly is provided on the top of the sample stage (1); and the sample stage (1) is connected to a material pressing assembly via the clamping assembly.

2. The speckle generating device based on ultraviolet etching according to claim 1, characterized in that: The clamping assembly comprises a fixed seat (2), a screw rod (21) and a clamping plate (22); the fixed seat (2) is fixedly connected to the top of the sample stage (1); multiple groups of the fixed seat (2) are arranged on the top of the sample stage (1); the screw rod (21) is threadedly connected to the side wall of the fixed seat (2); the ends of the screw rod (21) close to each other are rotatably connected to the clamping plate (22); the clamping plate (22) slides on the top of the fixed seat (2).

3. The speckle generating device based on ultraviolet etching according to claim 2, characterized in that: The pressing assembly includes a pressing rod (3), a first spring (31) and a pressing plate (32); the pressing rod (3) is slidably connected to the middle of the clamping plate (22); the pressing plate (32) is fixedly connected to the bottom end of the pressing rod (3); the first spring (31) is sleeved on the outer side wall of the pressing rod (3) away from the pressing plate (32); one end of the first spring (31) is fixedly connected to the top end of the pressing rod (3); and the other end of the first spring (31) is fixedly connected to the top of the clamping plate (22).

4. The speckle generating device based on ultraviolet etching according to claim 2, characterized in that: The adsorption assembly comprises a push rod (4), a suction cup (41) and a second spring (42); the push rod (4) is slidably connected to the top of the sample stage (1); multiple groups of push rods (4) are arranged on the top of the sample stage (1); the push rod (4) is arranged between a pair of fixed seats (2); the suction cup (41) is fixedly connected to the top of the push rod (4); one end of the second spring (42) is fixedly connected to the bottom end of the push rod (4); and the other end of the second spring (42) is fixedly connected to the inside of the sample stage (1).

5. The speckle generating device based on ultraviolet etching according to claim 1, characterized in that: The bottom of the sample stage (1) is fixedly connected with a foot pad (5); multiple groups of the foot pads (5) are arranged at the bottom of the sample stage (1) and are evenly distributed at the four corners of the bottom of the sample stage (1).

6. The speckle generating device based on ultraviolet etching according to claim 3, characterized in that: The side wall of the clamping plate (22) close to the pressure rod (3) is fixedly connected with a gasket (6); the gasket (6) is arranged on the side walls of multiple groups of clamping plates (22).

7. The speckle generating device based on ultraviolet etching according to claim 3, characterized in that: The pressing plate (32) is made of silica gel.

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