Lifting rotary carrying table

Abstract

The utility model relates to the technical field of wafer detection and processing, and relates to a lifting rotary platform deck. According to the utility model, the bearing table is used for bearing and positioning a product, and the plurality of clamping parts are used for positioning and clamping the edge of the product on the bearing table, so that multi-point positioning and clamping of the product are completed, and the positioning effect is good; the driver drives the supporting frame connected with the rotating table to rotate, and the lifting assembly drives the product on the bearing table to do lifting motion, so that the position of the product is adjusted vertically and rotationally, and the wafer positioning device has the advantages of being high in positioning speed and accurate in wafer positioning.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer detection and processing, and relates to a lifting and rotating carrier. Background Art

[0002] Wafer dispensing technology is a critical technology in the advanced electronics manufacturing industry. It is widely used in chip packaging and integrated circuit equipment. Its purpose is to reduce the probability of component failure caused by factors such as thermal fluctuations, drops, and vibrations during product use, thereby extending the service life of the product.

[0003] The existing wafer dispensing carrier can basically only rotate, cannot move or adjust the height, and cannot be adjusted for different dispensing machines according to the actual processing process; at the same time, the existing wafer dispensing carrier generally adopts vacuum adsorption positioning, which generates a large rotational torque during rotation and is prone to shaking, causing uneven coating layer, affecting the processing effect. Utility Model Content

[0004] The technical problem to be solved by the utility model is to provide a lifting and rotating carrier which can perform multi-point positioning and clamping on a product, has a good positioning effect, and can quickly adjust the position of the product up and down and in rotation.

[0005] In order to solve the above technical problems, the technical solutions adopted by the present invention are as follows:

[0006] A lifting and rotating platform, comprising:

[0007] The bearing assembly includes a support frame, a bearing platform for placing the product is provided on the support frame, and a plurality of clamping components are evenly provided on the edge of the support frame, and the plurality of clamping components are used to position and clamp the edge of the product on the bearing platform;

[0008] The rotating assembly includes a rotating frame, a rotating table is provided on the rotating frame, the supporting frame is drivingly connected to the rotating end of the rotating table, and a driver is provided on the rotating frame, the driver is drivingly connected to the rotating table, and the driver is used to drive the supporting frame connected to the rotating table to rotate;

[0009] The lifting component is connected to the rotating frame in a driving manner, and is used to drive the rotating frame and the products on the supporting platform to perform lifting movements.

[0010] In one embodiment of the present invention, the clamping component includes a mounting frame, which is arranged on the edge of the support frame. A support block is provided on the mounting frame, and a pressing component is provided on one side of the support block. The pressing component is used to press the edge of the product against the support surface of the support block.

[0011] In one embodiment of the present invention, the support surface is arranged opposite to the support surface of the support platform, and the mounting frame is made of elastic material, so that the support surface of the support block fits with the bottom surface of the product.

[0012] In one embodiment of the present invention, the pressing component includes a rotating shaft and a pressing plate, a slot is provided on the support block, the rotating shaft is passed through the slot, the middle part of the pressing plate is connected to the rotating shaft, a torsion spring is provided between the rotating shaft and the pressing plate, and the free end of the pressing plate is provided with a pressing block that abuts against the product surface.

[0013] In one embodiment of the present invention, the rotating platform includes a base, a rotating rod is rotatably provided on the base, one end of the rotating rod is connected to the rotating end of the rotating platform, and the other end is connected to the driver through a coupling.

[0014] In one embodiment of the present invention, the supporting platform includes a substrate, a mounting groove is provided on the substrate, a porous ceramic plate is provided on the mounting groove, air holes are provided on the bottom surface of the mounting groove, and the air holes are connected to the air supply component.

[0015] In one embodiment of the present invention, the air supply component includes an air supply rack, which is arranged on the rotating rack. A rotating air supply joint is provided on the air supply rack. The rotating rod is passed through the rotating air supply joint. An air supply channel is provided in the rotating rod. One end of the air supply channel is connected to the air hole, and the other end is connected to the rotating air supply joint.

[0016] In one embodiment of the present utility model, the driver includes a drive frame, which is arranged on a rotating frame. A drive motor is provided on the drive frame. The output shaft of the drive motor passes through the drive frame and is driven and connected to the rotating table. A detection component is provided on the drive frame, and the detection component is used to detect the rotation of the rotating table.

[0017] In one embodiment of the present utility model, the detection component includes a detection frame, the detection frame is arranged on the driving frame, the detection frame is provided with a detection sensor, the rotating table is provided with a detection plate, the detection plate is provided with a detection groove, and the detection groove is arranged opposite to the detection sensor.

[0018] In one embodiment of the present invention, the lifting assembly includes a lifting frame, a lifting cylinder is provided on the lifting frame, the lifting cylinder is connected to the lifting plate, the lifting plate is connected to the rotating frame, and the lifting cylinder drives the product on the rotating frame to perform lifting and lowering movements.

[0019] Beneficial effects of the utility model:

[0020] The carrying platform of the utility model carries and positions the product, and multiple clamping components position and clamp the edge of the product on the carrying platform, thereby completing multi-point positioning and clamping of the product, and the positioning effect is good; the driver drives the support frame connected to the rotating platform to rotate, and the lifting component drives the product on the carrying platform to perform lifting and lowering movements, thereby completing the up and down and rotational adjustment of the product position, which has the advantages of fast positioning speed and accurate wafer positioning. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of a lifting and rotating platform of the present utility model.

[0022] Figure 2 It is a schematic diagram of the rotating assembly of the present utility model.

[0023] Figure 3 It is a cross-sectional view of the present utility model.

[0024] Figure 4 It is a schematic diagram of the clamping component of the present utility model.

[0025] Explanation of the numbers in the figure: 1. Carrying platform; 11. Base plate; 12. Porous ceramic plate; 2. Clamping component; 21. Mounting frame; 22. Support block; 23. Support surface; 24. Rotating shaft; 25. Pressing plate; 26. Pressing block; 3. Rotating table; 31. Base; 32. Rotating rod; 4. Rotating frame; 5. Lifting assembly; 51. Lifting frame; 52. Lifting cylinder; 53. Lifting plate; 6. Detection plate; 61. Detection frame; 62. Detection sensor; 7. Driver; 71. Drive frame; 72. Drive motor; 73. Coupling; 8. Rotating air supply joint; 81. Air supply channel. DETAILED DESCRIPTION

[0026] The present invention will be further described below with reference to the accompanying drawings and specific embodiments so that those skilled in the art can better understand the present invention and implement it. However, the embodiments are not intended to limit the present invention.

[0027] Reference Figure 1-4 As shown, a lifting and rotating platform includes:

[0028] The bearing assembly includes a support frame, on which a bearing platform 1 for placing products is provided, and a plurality of clamping parts 2 are evenly provided on the edge of the support frame, and the plurality of clamping parts 2 are used to position and clamp the edge of the product on the bearing platform 1;

[0029] The rotating assembly includes a rotating frame 4, on which a rotating table 3 is provided. The supporting frame is drivingly connected to the rotating end of the rotating table 3. The rotating frame 4 is provided with a driver 7, which is drivingly connected to the rotating table 3. The driver 7 is used to drive the supporting frame connected to the rotating table 3 to rotate;

[0030] The lifting assembly 5 is connected to the rotating frame 4 in a driving manner. The lifting assembly 5 is used to drive the rotating frame 4 and the products on the supporting platform 1 to perform lifting movements.

[0031] The carrier platform 1 of the present invention carries and positions the product, and multiple clamping components 2 position and clamp the edges of the product on the carrier platform 1, thereby completing multi-point positioning and clamping of the product, and the positioning effect is good; the driver 7 drives the support frame connected to the rotating table 3 to rotate, and the lifting component 5 drives the product on the carrier platform 1 to perform lifting and lowering movements, thereby completing the up and down and rotational adjustment of the product position, which has the advantages of fast positioning speed and accurate wafer positioning.

[0032] In one embodiment of the present invention, the clamping component 2 includes a mounting frame 21, the mounting frame 21 is arranged on the edge of the support frame, a support block 22 is provided on the mounting frame 21, and a pressing component is provided on one side of the support block 22, and the pressing component is used to press the edge of the product onto the support surface 23 of the support block 22.

[0033] Specifically, the wafer product is placed on the porous ceramic plate 12 on the rotating table 3, and the edge of the wafer product is placed on the support surface 23 of the support block 22 for support. One end of the pressing plate 25 is pressed to separate the pressing block 26 from the support block 22. Under the action of the torsion spring, the pressing block 26 is always pressed against the product surface, thereby completing the multi-point positioning and clamping of the wafer product.

[0034] In one embodiment of the present invention, the support surface 23 is arranged opposite to the support surface of the support platform 1, and the mounting frame 21 is made of elastic material, so that the support surface 23 of the support block 22 fits the bottom surface of the product.

[0035] Specifically, the support surface 23 is arranged opposite to the support surface of the support platform 1, and the mounting frame 21 is made of elastic material, that is, the height of the support surface 23 is slightly higher than the support surface of the support platform 1. Before the product is placed on the support platform 1, its edge first contacts the support block 22. Under the action of the product's own weight and the fact that the mounting frame 21 is made of elastic material, the material is slowly dropped onto the support platform 1 to ensure the stability of the material connection. The product's own weight is slightly greater than the elastic supporting force of the mounting frame 21, so that the support surface 23 on the support block 22 is completely in contact with the product to form a surface support, thereby ensuring the positioning effect.

[0036] In one embodiment of the present invention, the pressing component includes a rotating shaft 24 and a pressing plate 25, a slot is provided on the support block 22, the rotating shaft 24 is passed through the slot, the middle part of the pressing plate 25 is connected to the rotating shaft 24, a torsion spring is provided between the rotating shaft 24 and the pressing plate 25, and the free end of the pressing plate 25 is provided with a pressing block 26 that abuts against the product surface, and the pressing block 26 is always pressed against the product surface under the action of the torsion spring.

[0037] Specifically, pressing one end of the pressing plate 25 separates the pressing block 26 from the supporting block 22 , and the pressing block 26 is always pressed against the product surface under the action of the torsion spring, thereby completing the multi-point positioning and clamping of the wafer product.

[0038] In one embodiment of the present invention, the rotating platform 3 includes a base 31 , on which a rotating rod 32 is rotatably provided. One end of the rotating rod 32 is connected to the rotating end of the rotating platform 3 , and the other end is connected to the driver 7 through a coupling 73 .

[0039] Specifically, one end of the rotating rod 32 is connected to the rotating end of the rotating platform 3, and the other end is connected to the driver 7 through the coupling 73. The rotating rod 32 can improve the rotation accuracy of the supporting platform 1 and ensure the accuracy of product rotation adjustment.

[0040] In one embodiment of the present invention, the support platform 1 includes a substrate 11, a mounting groove is provided on the substrate 11, a porous ceramic plate 12 is provided on the mounting groove, and air holes are provided on the bottom surface of the mounting groove, and the air holes are connected to the air supply component.

[0041] Specifically, the porous ceramic plate 12 has tiny holes. After the air supply component is connected to the air suction and blowing equipment, the air is sucked to generate negative pressure to adsorb and position the product when positioning the product. After the product is inspected or processed, the porous ceramic plate 12 is blown to clean it, which facilitates the continuous processing of wafer products and improves the processing quality.

[0042] In one embodiment of the present utility model, the air supply component includes an air supply rack, which is arranged on the rotating rack 4, and a rotating air supply joint 8 is provided on the air supply rack. The rotating rod 32 is passed through the rotating air supply joint 8, and an air supply channel 81 is provided in the rotating rod 32. One end of the air supply channel 81 is connected to the air hole, and the other end is connected to the rotating air supply joint 8.

[0043] Specifically, one end of the air supply channel 81 is connected to the air hole, and the other end is connected to the rotating air supply joint 8. The rotating rod 32 is passed through the rotating air supply joint 8 and is connected to the air suction and blowing equipment through the rotating air supply joint 8, so that the air supply channel 81 forms an air suction and blowing channel. When positioning the product, the suction generates negative pressure to adsorb and position the product. After the product is inspected or processed, the air is blown to clean the porous ceramic plate 12, which facilitates continuous processing of wafer products and improves processing quality.

[0044] In one embodiment of the present utility model, the driver 7 includes a drive frame 71, which is arranged on the rotating frame 4. The drive frame 71 is provided with a drive motor 72. The output shaft of the drive motor 72 passes through the drive frame 71 and is drive-connected to the rotating table 3. The drive frame 71 is provided with a detection component, which is used to detect the rotation of the rotating table 3.

[0045] Specifically, the output shaft of the drive motor 72 passes through the drive frame 71 and is driven and connected to the rotating table 3. The drive motor 72 drives the support frame connected to the rotating rod 32 to rotate, so that the wafer product on the carrier 1 rotates, thereby completing the rotation and adjustment of the wafer position of the wafer product, which has the advantages of fast positioning speed and accurate wafer positioning; the detection component detects the rotation of the rotating table 3, so that the wafer product on the carrier 1 is rotated at a precise angle, thereby improving the detection accuracy of the adjusted product.

[0046] In one embodiment of the present utility model, the detection component includes a detection frame 61, the detection frame 61 is arranged on the driving frame 71, the detection frame 61 is provided with a detection sensor 62, the rotating table 3 is provided with a detection plate 6, the detection plate 6 is provided with a detection groove, and the detection groove is arranged opposite to the detection sensor 62.

[0047] Specifically, a detection groove is provided on the detection plate 6, and the detection groove is arranged opposite to the detection sensor 62. The detection plate 6 is arranged on the rotating rod 32. The driving motor 72 drives the rotating rod 32 of the rotating table 3 to rotate, thereby driving the detection plate 6 to rotate. The detection sensor 62 detects the detection groove on the detection plate 6 to confirm the rotation angle, number of circles and other parameters of the product on the carrier 1, so that the wafer product on the carrier 1 can be rotated at a precise angle, thereby improving the detection accuracy of the adjusted product.

[0048] In one embodiment of the present invention, the lifting assembly 5 includes a lifting frame 51, and a lifting cylinder 52 is provided on the lifting frame 51. The lifting cylinder 52 is driven and connected to the lifting plate 53. The lifting plate 53 is connected to the rotating frame 4. The lifting cylinder 52 drives the product on the rotating frame 4 to perform lifting and lowering movements.

[0049] Specifically, the lifting cylinder 52 drives the product on the rotating frame 4 to do the lifting movement, thereby driving the product on the supporting platform 1 to move up and down, which can more conveniently and quickly adjust the position of the product, and can adjust the product posture online in real time, making subsequent processing more accurate.

[0050] Usage process

[0051] The wafer product is placed on the porous ceramic plate 12 on the rotating table 3, and the edge of the wafer product is placed on the supporting surface 23 of the supporting block 22 for support. One end of the pressing plate 25 is pressed to separate the pressing block 26 from the supporting block 22. The pressing block 26 is always pressed against the product surface under the action of the torsion spring, thereby completing the positioning and clamping of the wafer product. The lifting cylinder 52 drives the product on the rotating frame 4 to perform lifting and lowering movements. The output shaft of the driving motor 72 passes through the driving frame 71 and is connected to the rotating table 3. The driving motor 72 drives the support frame connected to the rotating rod 32 to rotate, so that the wafer product on the carrier table 1 is rotated, thereby completing the up and down and rotation adjustment of the wafer product, which has the advantages of fast positioning speed and accurate wafer positioning.

[0052] The above-described embodiments are merely preferred embodiments for the purpose of fully illustrating the present invention, and the scope of protection of the present invention is not limited thereto. Equivalent substitutions or modifications made by those skilled in the art based on the present invention are within the scope of protection of the present invention. The scope of protection of the present invention shall be subject to the claims.

Claims

1. A lifting and rotating platform, characterized in that: include: The bearing assembly includes a support frame, a bearing platform for placing the product is provided on the support frame, and a plurality of clamping components are evenly provided on the edge of the support frame, and the plurality of clamping components are used to position and clamp the edge of the product on the bearing platform; The rotating assembly includes a rotating frame, a rotating table is provided on the rotating frame, the supporting frame is drivingly connected to the rotating end of the rotating table, and a driver is provided on the rotating frame, the driver is drivingly connected to the rotating table, and the driver is used to drive the supporting frame connected to the rotating table to rotate; The lifting component is connected to the rotating frame in a driving manner, and is used to drive the rotating frame and the products on the supporting platform to perform lifting movements.

2. The lifting and rotating platform according to claim 1, characterized in that: The clamping component includes a mounting frame, which is arranged on the edge of the support frame. A support block is provided on the mounting frame. A pressing component is provided on one side of the support block, and the pressing component is used to press the edge of the product against the support surface of the support block.

3. The lifting and rotating platform according to claim 2, characterized in that: The supporting surface is arranged opposite to the supporting surface of the supporting platform, and the mounting frame is made of elastic material, so that the supporting surface of the supporting block is in contact with the bottom surface of the product.

4. The lifting and rotating platform according to claim 2, characterized in that: The pressing component includes a rotating shaft and a pressing plate. A slot is provided on the support block. The rotating shaft is passed through the slot. The middle part of the pressing plate is connected to the rotating shaft. A torsion spring is provided between the rotating shaft and the pressing plate. The free end of the pressing plate is provided with a pressing block that abuts against the product surface.

5. The lifting and rotating platform according to claim 1, characterized in that: The rotating platform comprises a base, a rotating rod is rotatably provided on the base, one end of the rotating rod is connected to the rotating end of the rotating platform, and the other end is connected to the driver through a coupling.

6. The lifting and rotating platform according to claim 5, characterized in that: The supporting platform includes a base plate, a mounting groove is provided on the base plate, a porous ceramic plate is provided on the mounting groove, and air holes are provided on the bottom surface of the mounting groove, and the air holes are connected to the air supply component.

7. The lifting and rotating platform according to claim 6, characterized in that: The air supply component includes an air supply rack, which is arranged on the rotating rack. A rotating air supply joint is provided on the air supply rack. The rotating rod is passed through the rotating air supply joint. An air supply channel is provided inside the rotating rod. One end of the air supply channel is connected to the air hole, and the other end is connected to the rotating air supply joint.

8. The lifting and rotating platform according to claim 1, characterized in that: The driver includes a drive frame, which is arranged on the rotating frame. A drive motor is provided on the drive frame. The output shaft of the drive motor passes through the drive frame and is driven and connected to the rotating table. A detection component is provided on the drive frame, and the detection component is used to detect the rotation of the rotating table.

9. The lifting and rotating platform according to claim 8, characterized in that: The detection component includes a detection frame, which is arranged on the driving frame and provided with a detection sensor. The rotating table is provided with a detection plate, which is provided with a detection groove, and the detection groove is arranged opposite to the detection sensor.

10. The lifting and rotating stage according to claim 1, wherein: The lifting assembly includes a lifting frame, on which a lifting cylinder is provided. The lifting cylinder is drivingly connected to a lifting plate, and the lifting plate is connected to a rotating frame. The lifting cylinder drives the product on the rotating frame to perform lifting motion.

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