Jig

Abstract

The utility model discloses a jig. The jig comprises a carrying table and a clamping piece, wherein the carrying table is used for carrying a substrate; the clamping piece comprises a limiting part and a guiding part, the guiding part is used for controlling the limiting part to move in the horizontal direction through mutual action of the guiding part and the limiting part, and the limiting part is used for limiting the position of the substrate on the carrying table. According to the application, the substrate is fixed through the horizontally moving limiting part, so that the stress of clamping and pressing up and down by a clamp in the previous design can be reduced, the stress borne by the substrate is reduced, and the situations of damage and rupture of the substrate are avoided or reduced.

Description

Technical Field

[0001] The present application relates to the field of semiconductor packaging technology, and in particular to a fixture. Background Art

[0002] In the front-end packaging process of some power modules, it is necessary to stack substrates. For example, in the front-end packaging process of automotive power modules, it is necessary to stack direct bonded copper ceramic substrates (DBC substrates) to obtain a double-sided heat dissipation power module. During the stacking process, it is necessary to fix the substrate with a jig, such as using a clip to fix the substrate on the jig from top to bottom, so as to control the warping of the substrate when the temperature changes, so as to perform front-end process operations such as welding and reflow soldering while controlling the warping of the substrate. Among them, when fixing the DBC substrate, the clip is usually clamped on the ceramic layer of the DBC substrate.

[0003] The applicant discovered from ultrasonic scanning microscope (SAT) testing results on power modules that the substrate often shows signs of chipping near the location where it is clamped. This is because, in order to secure the substrate from shifting and control warping during temperature changes, the clamps exert a strong clamping force and generate high clamping stress. This causes the ceramic layer of the DBC substrate to be affected by the clamping force, resulting in chipping and cracking. The degree of chipping and cracking is positively correlated with the magnitude of the clamping stress.

[0004] refer to Figure 1 and Figure 2 , Figure 1 An existing fixture 10 is shown. The fixture 10 is similar to a flat plate and is provided with a plurality of clips 11. The clips 11 can be used to Figure 2 The substrate 12 shown is clamped and fixed on the fixture 10, and the position where the substrate 12 is clamped from top to bottom by the clamp 11 is easily damaged or cracked due to the strong clamping force of the clamp 11, forming Figure 2 The damage shown is 121. Utility Model Content

[0005] The purpose of this application is to provide a fixture for protecting a substrate.

[0006] A jig proposed in the present application includes: a carrier for carrying a substrate; a clamping member including a limiting portion and a guiding portion, wherein the guiding portion is used to control the horizontal movement of the limiting portion by interacting with the limiting portion, and the limiting portion is used to limit the position of the substrate on the carrier.

[0007] In some optional embodiments, the guide portion is used to control the limiting portion to move in a second direction by applying a force in a first direction, the first direction is perpendicular to the second direction, and the second direction is a direction away from the carrier.

[0008] In some optional embodiments, the bottom of the limiting portion has a first inclined surface, the angle between the first inclined surface and the second direction is an acute angle, the top of the guide portion has a second inclined surface that contacts the first inclined surface, and the first inclined surface and the second inclined surface cooperate to convert the movement of the guide portion in the first direction into the movement of the limiting portion in the second direction.

[0009] In some optional embodiments, the fixture further includes an elastic element configured to be compressed when the limiting portion moves in the second direction, thereby applying an elastic restoring force to the limiting portion, wherein the direction of the elastic restoring force is opposite to the second direction. Optionally, the elastic element may be a spring.

[0010] In some optional embodiments, the fixture further includes a guide rail, the limiting portion is slidably connected to the guide rail in a horizontal direction, and the elastic element is disposed between the limiting portion and the guide rail.

[0011] In some optional embodiments, the limiting portion has a fixing hole on a side facing away from the carrier, one end of the elastic element is disposed in the fixing hole, and the other end of the elastic element abuts against the guide rail.

[0012] In some optional embodiments, the guide rail includes a cavity that accommodates at least a portion of the limiting portion, the side wall of the cavity has a horizontally extending tapping bar, the side wall of the limiting portion has a horizontally extending sliding groove, the tapping bar is embedded in the sliding groove, and the sliding groove and the tapping bar can slide relative to each other.

[0013] In some optional embodiments, the limiting portion has a tongue on a side facing the carrier, and a gap for limiting the substrate is formed between the tongue and the carrier, and the height of the gap is slightly greater than the thickness of the substrate at a corresponding position.

[0014] In some optional embodiments, the carrier interacts with a plurality of the clamping members.

[0015] In some optional embodiments, the plurality of clamping members is an even number and is symmetrically arranged in pairs.

[0016] In order to solve the problem that the substrate is easily damaged or cracked due to the clamping force of the clamp, the present application proposes a fixture, which includes a clamping member including a limiting part and a guiding part. The guiding part controls the limiting part to move in the horizontal direction, and the horizontally movable limiting part is used to limit the substrate on the carrier. Since the substrate is fixed by the horizontally movable limiting part, the stress of the vertical pressing can be reduced compared to the stress of the upper and lower clamping of the clamp in the previous design, thereby reducing the force on the substrate, avoiding or reducing the occurrence of damage or cracking of the substrate, and at the same time fixing the substrate and controlling the warping of the substrate when the temperature changes. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Other features, objects and advantages of the present application will become more apparent upon reading the detailed description of non-limiting embodiments made with reference to the following drawings:

[0018] Figure 1 It is a structural diagram of an existing fixture with a clamp;

[0019] Figure 2 This is a schematic structural diagram of an existing substrate that is damaged or cracked due to the clamping force of a clamp;

[0020] Figure 3-4 Schematic diagrams of the longitudinal cross-sectional structure of an embodiment 3a of the jig according to the present application in a first state and a second state respectively;

[0021] Figure 5-7 Schematic diagrams of the three-dimensional structure of an embodiment 5a of the fixture according to the present application in the first state and the second state, and a schematic diagram of the top view of the structure in the first state;

[0022] Figure 8 is a schematic diagram of the exploded structure of an embodiment 8a of the jig according to the present application;

[0023] Figure 9-10 They are schematic diagrams of the first and second actual products corresponding to the fixture according to the present application.

[0024] Description of reference numerals / symbols:

[0025] 10- fixture; 11- clip; 12- substrate; 121- damaged part; 20- carrier; 30- substrate; 40- clamping member; 41- limiting portion; 41-1- first limiting portion; 41-2- second limiting portion; 411- first inclined surface; 412- fixing hole; 413- slide groove; 414- tongue; 414-1- first tongue; 414-2- second tongue; 42- guide portion; 421- second inclined surface; 43- elastic element; 44- guide rail; 441- cavity; 442- striking bar; F1- first direction; F2- second direction; F2-1- third direction; F2-2- fourth direction; θ- angle. DETAILED DESCRIPTION

[0026] The following describes the specific embodiments of the present application in conjunction with the accompanying drawings and examples. Those skilled in the art will readily understand the technical problems solved by the present application and the technical effects produced by the present application through the contents of this specification. It should be understood that the specific embodiments described herein are merely intended to explain the relevant inventions and creations, and are not intended to limit the inventions and creations. Furthermore, for ease of description, only the portions relevant to the relevant inventions and creations are shown in the accompanying drawings.

[0027] It should be readily understood that the meanings of “on,” “over,” and “over…” in this application should be interpreted in the broadest sense, such that “on” not only means “directly on something,” but also means “on something” including intermediate components or layers therebetween.

[0028] Furthermore, for ease of description, spatially relative terms such as "below," "beneath," "lower," "above," and "upper" may be used herein to describe the relationship of one element or component to another element or component illustrated in the drawings. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90° or at other orientations), and the spatially relative descriptors used herein should be interpreted accordingly.

[0029] It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings of the specification are only used to match the contents recorded in the specification for the understanding and reading of those skilled in the art, and are not used to limit the limiting conditions for the implementation of this application. Therefore, they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size should still fall within the scope of the technical content disclosed in this application without affecting the efficacy and purpose that can be achieved by this application. At the same time, terms such as "on", "first", "second" and "one" quoted in this specification are only for the convenience of description and are not used to limit the scope of the implementation of this application. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of this application without substantially changing the technical content.

[0030] It should also be noted that the longitudinal section corresponding to the embodiment of the present application may be a section corresponding to the front view direction, the transverse section may be a section corresponding to the right view direction, and the horizontal section may be a section corresponding to the top view direction.

[0031] In addition, the embodiments and features of the embodiments of the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0032] refer to Figure 3-4 , Figure 3-4 Schematic diagrams of the longitudinal cross-sectional structure of an embodiment 3a of the fixture according to the present application in the first state and the second state respectively.

[0033] like Figure 3-4 As shown, the fixture 3a of the embodiment of the present application includes: a carrier 20 for supporting a substrate 30, and a clamping member 40 for restraining the substrate 30 on the carrier 20. The clamping member 40 includes a limiting portion 41 and a guiding portion 42. The guiding portion 42 is used to control the horizontal movement of the limiting portion 41 by interacting with the limiting portion 41. The limiting portion 41 is used to restrain the position of the substrate 30 on the carrier 20.

[0034] Here, the carrier 20 is a platform structure for carrying the substrate 30, and has a platform upper surface. The substrate 30 can be placed on the upper surface of the carrier 20. The material of the carrier 20 includes but is not limited to metal.

[0035] Here, substrate 30 is a substrate composed of a conductive material and a dielectric material (Dielectric), wherein the conductive material and the dielectric material are not limited. Exemplarily, substrate 30 can be a ceramic substrate with a ceramic material as the dielectric material, such as a direct bonded copper ceramic substrate (DBC substrate) or a directly sputtered copper ceramic substrate (DSC substrate). Ceramic substrates have advantages such as high thermal conductivity, good heat resistance, high mechanical strength, and low thermal expansion coefficient, and are commonly used materials for power semiconductor device packaging.

[0036] Here, the clamp 40 is a component used to secure the substrate 30, performing a similar function to the clamps in existing jigs. However, unlike clamps, the clamp 40 is designed as a two-piece combination of a guide portion 42 and a limit portion 41. The two components interact to restrict and secure the substrate 30. Furthermore, the limit portion 41 moves horizontally, allowing it to limit the substrate 30 laterally. Compared to the top-down clamping reinforcement method used in existing jigs, the clamp 40 reduces the vertical clamping force applied to the substrate 30, thereby preventing damage or cracking of the substrate 30 due to excessive clamping force. It also controls warping of the substrate 30 during temperature fluctuations.

[0037] In some optional embodiments, the guide portion 42 is used to control the limiting portion 41 to move in the second direction F2 by applying a force in the first direction F1 , where the first direction F1 is perpendicular to the second direction F2 , and the second direction F2 is a direction away from the carrier. Figure 3 and Figure 4 Here, the second direction F2 is a direction away from the carrier 20 in the horizontal direction, including but not limited to the following: Figure 3-4 The first direction F1 may be a direction perpendicular to the second direction F2 in the horizontal direction, may be a vertical downward direction, or may be as shown in FIG. Figure 3-4 For example, in order to match other components of the jig and to facilitate manipulation, the first direction F1 is preferably a vertically upward direction.

[0038] In some optional embodiments, the limiting portion 41 and the guiding portion 42 cooperate via inclined surfaces. That is, the bottom of the limiting portion 41 has a first inclined surface 411, and the angle θ between the first inclined surface 411 and the second direction F2 is acute. The top of the guiding portion 42 has a second inclined surface 421 that contacts the first inclined surface 411. The first inclined surface 411 and the second inclined surface 421 cooperate to convert the movement of the guiding portion 42 in the first direction F1 into movement of the limiting portion 41 in the second direction F2. When the guiding portion 42 moves in the first direction F1, a force component perpendicular to the first inclined surface 411 is applied to the second inclined surface 421 via the first inclined surface 411. The second inclined surface 421 receives this force component and converts it into a horizontal force in the second direction F2, thereby causing the limiting portion 41 to move laterally. In other embodiments, the limiting portion 41 and the guiding portion 42 may also achieve force direction conversion by other means besides inclined surface connection, which is not limited herein.

[0039] In some optional embodiments, the side of the limiting portion 41 facing the carrier 20 has a tongue portion 414, and a gap is formed between the tongue portion 414 and the carrier 20 to restrain the substrate 30. The edge of the substrate 30 is restrained within the gap between the tongue portion 414 and the carrier 20, thereby restraining the substrate 30 on the carrier 20 and controlling and reducing warping of the substrate 30 during temperature changes.

[0040] In some optional embodiments, the height of the gap between tongue 414 and stage 20 is slightly greater than the thickness of the corresponding position of substrate 30. The substrate 30 may have different thicknesses at different locations. The corresponding position of substrate 30 referred to herein may be the position where the substrate 30 falls under tongue 414. The "slightly greater" here may mean greater than, but the difference between the two is within a controlled matching range, for example, within 200 μm, 150 μm, 100 μm, 60 μm, 50 μm, or 30 μm.

[0041] In some optional embodiments, the thickness of the tongue portion 414 gradually increases in the second direction F2. That is, the closer to the substrate 30, the smaller the thickness of the tongue portion 414, and the farther away from the substrate 30, the thicker the tongue portion 414. This can prevent the stopper 41 from causing obstruction during subsequent packaging operations.

[0042] In some optional embodiments, in the second direction F2, the length of the tongue portion 414 is less than the movable distance of the stop portion 41. This ensures that after the stop portion 41 moves outward from the substrate 30 to its proper position, the tongue portion 414 is no longer above the substrate 30, thereby not hindering the placement and removal of the substrate 30.

[0043] In some optional embodiments, the bottom surface of tongue 414 that contacts substrate 30 is provided with a buffer material, or tongue 414 itself is provided with a buffer material to reduce stress applied to substrate 30. Optionally, the buffer material has a lower hardness than the colored porcelain material. For example, the buffer material may be a metal material with a lower hardness than the ceramic material.

[0044] In some optional embodiments, the fixture 3a of the present application further includes an elastic element 43, which is used to apply an elastic restoring force to the limiting portion 41, and the direction of the elastic restoring force is opposite to the second direction F2. Figure 3 In the embodiment, the limiting portion 41 is in the original position; Figure 4 In the embodiment, a force is applied to push the guide portion 42 upward, so that the limit portion 41 moves to the right. At this time, the elastic element 4 is compressed and accumulates elastic force. If the guide portion 42 is released at this time, the elastic element 43 is used to apply an elastic restoring force to the limit portion 41, so that the limit portion 41 moves to the left and returns to the position as shown in FIG. Figure 3 The original position shown. Figure 3In the first state shown, the limiting portion 41 can limit and fix the substrate 30; Figure 4 In the second state shown, the limiting portion 41 is away from the substrate 30 , and the substrate 30 can be placed on the stage 20 or removed.

[0045] In some optional embodiments, the jig 3a of the present application further includes a guide rail 44 for assisting the horizontal movement of the limiting portion 41. For example, the limiting portion 41 can be slidably connected to the guide rail 44 in the horizontal direction, and the elastic element 43 is disposed between the limiting portion 41 and the guide rail 44.

[0046] In some optional embodiments, the limiting portion 41 has a fixing hole 412 on a side facing away from the carrier 20 , one end of the elastic element 43 can be disposed in the fixing hole 412 , and the other end of the elastic element 43 abuts against the guide rail 44 .

[0047] In some optional embodiments, the elastic element 43 may be a spring, which is compressed when the limiting portion 41 moves in the second direction F2. Of course, the elastic element 43 herein may also be another object with elastic properties other than a spring.

[0048] refer to Figure 5-7 , Figure 5-7 They are respectively schematic diagrams of the three-dimensional structures of an embodiment 5a of the fixture according to the present application in the first state and the second state, and a schematic diagram of the top view of the structure in the first state.

[0049] and Figure 3-4 The cross-sectional structure diagram shown is different. Figure 5-6 The figure shows a schematic diagram of the three-dimensional structure. Figure 7 It shows Figure 5 The corresponding top view structural diagram can more clearly illustrate the structure and working principle of the fixture 5a of the present application from an overall perspective.

[0050] like Figure 5 As shown, two symmetrically positioned stoppers 41 restrain the substrate 30 on the stage 20. At this point, the tongues 414 of the stoppers 41 rest above the edges of the substrate 30, restraining the substrate 30 from above. For ease of explanation, the two stoppers 41 are designated as the first stopper 41-1 and the second stopper 41-2, respectively. The first stopper 41-1 is located on the right side, and the second stopper 41-2 is located on the left side. The first stopper 41-1 and the second stopper 41-2 are positioned opposite each other and in opposite directions, restraining the substrate 30 from the left and right sides.

[0051] like Figure 6 As shown, the two symmetrically arranged limit portions 41 move to the left and right respectively and away from the substrate 30, wherein the first limit portion 41-1 moves along the third direction F2-1 (equivalent to Figure 3-4 The second limiting portion 41-2 moves to the right along the opposite fourth direction F2-2 and away from the substrate 30. At this time, the first tongue 414-1 of the first limiting portion 41-1 and the second tongue 414-2 on the second limiting portion 41-2 are also away from the substrate 30. At this time, the substrate 30 is no longer restricted, so the substrate 30 can be removed from the carrier 20 or placed on the carrier 20.

[0052] In some optional embodiments, such as Figure 7 As shown, in another horizontal direction F3 perpendicular to the third direction F2-1, the width of the tongue portion 414 is smaller than the width of the limiting portion 41. By reducing the width of the tongue portion 414, the pressure area of ​​the tongue portion 414 on the substrate 30 can be reduced.

[0053] In some optional embodiments, the carrier 20 can interact with multiple clamping members 40. Further, the multiple clamping members 40 can be an even number and symmetrically arranged in pairs. Figure 5-7 As shown, the two clamping members 40 are symmetrically arranged on both sides of the carrier 20.

[0054] refer to Figure 8 , Figure 8 It is a schematic diagram of the explosion structure of an embodiment 8a of the fixture according to the present application. Figure 8 The fixture 8a shown is similar to Figure 3-4 The fixture 3a shown is different in that:

[0055] Figure 8 In the illustrated fixture 8a, the guide rail 44 includes a cavity 441 that accommodates at least a portion of the stopper 41. The sidewalls of the cavity 441 have horizontally extending snap bars 442. The sidewalls of the stopper 41 also have horizontally extending grooves 413. When the stopper 41 is at least partially positioned within the cavity 441, the snap bars 442 can be inserted into the grooves 413, and the grooves 413 and the snap bars 442 can slide relative to each other. This allows the stopper 41 to move horizontally along the second direction F2.

[0056] In some optional embodiments, such as Figure 8 As shown, the tongue portion 414 can be arranged on the upper side of the front end of the limiting portion 41, and the shape of the tongue portion 414 can be roughly L-shaped.

[0057] refer to Figure 9-10 , Figure 9-10 They are schematic diagrams of the first and second actual products corresponding to the fixture according to the present application.

[0058] like Figure 9 The fixture shown has four clamping members 40 arranged in pairs on the upper and lower sides thereof.

[0059] like Figure 10 The jig shown has four clamping members 40 arranged in pairs on its upper and lower sides, and two clamping members 40 arranged in pairs on its left and right sides.

[0060] In summary, combined with Figure 3-8 This application describes the structure of the fixture of this application through multiple embodiments. The main inventive concept of this application is to use a clamping member 40 to fix the substrate and control the warping of the substrate 30 when the temperature changes. Specifically, the clamping movement path of the clamping member 40 is changed, and the clamping member 40 is controlled to limit the position of the substrate 30 in a lateral manner. Because the clamping member 40 moves in a lateral manner rather than a vertical clamping reinforcement, the downward pressure can be reduced compared to the clamps of existing fixtures, thereby preventing damage or cracking of the substrate 30.

[0061] Furthermore, the clamping member 40 can be designed as a two-piece combination of a guide portion 42 and a limit portion 41. When the guide portion 42 is pushed from the bottom of the fixture, the guide portion 42 pushes the limit portion 41, causing it to move horizontally outward, allowing the placement of components such as the substrate 30. Furthermore, the clamping member 40 can also include an elastic member 43. When the guide portion 42 is released, the elastic member 43 returns the limit portion 41 to its original position, thereby limiting the position of the substrate 30. Furthermore, the clamping member 40 can also include a guide rail 44. The additional guide rail 44 is configured to facilitate the horizontal movement of the limit portion 41.

[0062] The fixture of the present application is applicable to a variety of power module products, for example, it is applicable to a power module packaging structure that requires double-sided heat dissipation and cooling.

[0063] The fixture of the present application can be applied to products of various thicknesses, such as substrates with a thickness of 0.11 mm or 0.1 mm, and can achieve an extremely high yield level without reducing UPH (production capacity) and controlling the warpage of the same substrate.

[0064] Although the present application has been described and illustrated with reference to specific embodiments of the present application, these descriptions and illustrations do not limit the present application. It will be clearly understood by those skilled in the art that various changes may be made and equivalent elements may be substituted within the embodiments without departing from the true spirit and scope of the present application as defined by the appended claims. The illustrations may not necessarily be drawn to scale. Due to variables in the manufacturing process, etc., there may be differences between the technical reproduction in the present application and the actual implementation. There may be other embodiments of the present application that are not specifically described. The description and illustrations should be regarded as illustrative, not restrictive. Modifications may be made to adapt specific circumstances, materials, compositions of matter, methods or processes to the objectives, spirit and scope of the present application. All such modifications fall within the scope of the appended claims. Although the methods disclosed herein have been described with reference to specific operations performed in a specific order, it should be understood that these operations may be combined, subdivided or reordered to form equivalent methods without departing from the teachings of the present application. Therefore, unless specifically indicated herein, the order and grouping of operations do not limit the present application.

Claims

1. A fixture, characterized in that: include: A carrier, for carrying a substrate; The clamping member includes a limiting portion and a guiding portion, wherein the guiding portion is used to control the limiting portion to move in a horizontal direction by interacting with the limiting portion, and the limiting portion is used to limit the position of the substrate on the carrier.

2. The fixture according to claim 1, characterized in that: The guiding portion is used to control the limiting portion to move toward a second direction by applying a force in a first direction, the first direction is perpendicular to the second direction, and the second direction is a direction away from the carrier.

3. The fixture according to claim 2, characterized in that: The bottom of the limiting portion has a first inclined surface, and the angle between the first inclined surface and the second direction is an acute angle. The top of the guide portion has a second inclined surface that contacts the first inclined surface. The first inclined surface and the second inclined surface cooperate to convert the movement of the guide portion in the first direction into the movement of the limiting portion in the second direction.

4. The fixture according to claim 2, characterized in that: It also includes an elastic element, which is used to be compressed when the limiting portion moves in the second direction, thereby applying an elastic restoring force to the limiting portion, and the direction of the elastic restoring force is opposite to the second direction.

5. The fixture according to claim 4, characterized in that: It also includes a guide rail, the limiting portion is slidably connected to the guide rail in a horizontal direction, and the elastic element is arranged between the limiting portion and the guide rail.

6. The fixture according to claim 5, characterized in that: The limiting portion has a fixing hole on a side facing away from the carrier. One end of the elastic element is arranged in the fixing hole, and the other end of the elastic element abuts against the guide rail.

7. The fixture according to claim 5, characterized in that: The guide rail includes a concave cavity that accommodates at least part of the limiting portion, the side wall of the concave cavity has a horizontally extending tapping bar, the side wall of the limiting portion has a horizontally extending sliding groove, the tapping bar is embedded in the sliding groove, and the sliding groove and the tapping bar can slide relative to each other.

8. The fixture according to claim 2, characterized in that: The limiting portion has a tongue portion on a side facing the carrier, and a gap for limiting the substrate is formed between the tongue portion and the carrier, and the height of the gap is slightly greater than the thickness of the corresponding position of the substrate.

9. The fixture according to claim 1, characterized in that: The carrier interacts with a plurality of the clamping members.

10. The fixture according to claim 1, characterized in that: The plurality of clamping members is an even number and is symmetrically arranged in pairs.

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