Radio frequency generator

Abstract

The utility model discloses a radio frequency generator, and relates to the technical field of radio frequency. Comprising a generator shell, a front baffle is installed on one side of the generator shell, a rear cover plate is fixedly connected to the side, opposite to the front baffle, of the generator shell, a water cooling plate is jointly and fixedly connected between the front baffle and the rear cover plate, and two symmetrically-distributed water connectors are arranged on the surface of the rear cover plate. As the basis of a direct current part and a radio frequency part of the radio frequency generator, the water-cooling pipe is arranged in the water-cooling plate and is communicated with the outside through the water joints, and cooling water is injected into the water-cooling plate through one water joint in the operation process of the radio frequency generator, so that the water-cooling plate is cooled. And the cooling water absorbing heat flows out from the other water joint, so that the working environment in the radio frequency generator is kept at a relatively stable working temperature, and the service life of precise components in the radio frequency generator is prolonged.

Description

Technical Field

[0001] The utility model relates to the field of radio frequency technology, in particular to a radio frequency generator. Background Art

[0002] At present, the number of IoT devices in the world has reached nearly 15 billion, among which a large number of devices use radio frequency identification technology for data transmission and management, which has promoted the widespread use of RF generators. Especially in the 13.56MHz frequency band, due to its strong penetration, moderate transmission distance, and strong anti-interference ability, it is widely used in various industrial and commercial scenarios. In semiconductor FAB factories, 13.56MHz RF generators play a key role and are widely used in plasma etching, chemical vapor deposition (CVD), physical vapor deposition (PVD), cleaning and ion implantation processes in wafer manufacturing. These processes require stable RF energy to ensure the high performance and stability of semiconductor devices. Existing RF generators have exposed at least the following defects in use:

[0003] In actual use, a large amount of heat is generated inside the RF generator. The heat accumulates inside the generator, causing the internal temperature of the generator to rise. Changes in ambient temperature may cause malfunctions of the precision components installed inside the RF generator, affecting the normal operation of the RF. Therefore, a RF generator is developed. Utility Model Content

[0004] The main purpose of the present invention is to provide a radio frequency generator that can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A radio frequency generator comprises a generator housing, a front baffle being mounted on one side of the generator housing, a rear cover being fixedly connected to the side of the generator housing facing away from the front baffle, a horizontally placed water-cooling plate being fixedly connected between the front baffle and the rear cover, a continuous water-cooling pipe being arranged inside the water-cooling plate, two symmetrically distributed water joints being provided on the surface of the rear cover, each of the water joints penetrating the rear cover, and the two water joints being connected to both ends of the water-cooling pipe, a DC part of the radio frequency generator being mounted on the top side of the water-cooling plate, and a radio frequency part of the radio frequency generator being mounted on the bottom side of the water-cooling plate, and a plurality of heat dissipation holes being provided on the surfaces of the front baffle and the rear cover.

[0007] Preferably, the water-cooling plate is fixedly connected to a head isolation plate on the side facing the RF part of the RF generator, and a plurality of RF cooling fans are fixedly connected between the inner walls of the head isolation plate. The water-cooling plate is fixedly connected to a DC isolation plate on the side facing the DC part of the RF generator, and a plurality of front panel cooling fans are fixedly connected between the inner walls of the DC isolation plate.

[0008] Preferably, a tail isolation plate is fixedly connected to the side of the water-cooling plate facing the RF part of the RF generator, and a power detection box module is installed between the tail isolation plate and the rear cover plate. The surface of the water-cooling plate facing the RF part of the RF generator is provided with an RF filter board, a harmonic suppression board, an RF power synthesis module, an RF power board, a peak detection board and an RF driver board that are electrically connected to each other.

[0009] Preferably, an EMI isolation plate is fixedly connected to the side of the water-cooling plate facing the DC part of the RF generator, an EMI filter plate is arranged between the EMI isolation plate and the rear cover plate, and a DC drive board, a DC power board, a power transformer, a DC control board and a main control board that are electrically connected to each other are arranged on the surface of the water-cooling plate facing the DC part of the RF generator.

[0010] Preferably, a control panel is installed on the outside of the front baffle, and a group of user communication interfaces are arranged on the outside of the rear cover, and the control panel and the user communication interfaces are both electrically connected to the RF part and the DC part of the RF generator.

[0011] Compared with the prior art, the present invention has the following beneficial effects:

[0012] The utility model uses the water-cooling plate as the basis of the DC part and the RF part of the RF generator. A water-cooling pipe is arranged inside the water-cooling plate and is connected to the outside through a water joint. During the operation of the RF generator, cooling water is injected into the water-cooling plate through one of the water joints, and the cooling water that has absorbed heat flows out from the other water joint, thereby maintaining a relatively stable working temperature in the working environment of the RF generator and extending the service life of the precision components inside the RF generator. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 It is an isometric view of the present utility model;

[0014] Figure 2 This is a schematic structural diagram of the radio frequency device of the present utility model;

[0015] Figure 3 This is a schematic diagram of the front baffle structure of the present utility model;

[0016] Figure 4This is a schematic diagram of the rear cover structure of the present utility model.

[0017] In the figure: 1. Water cooling plate; 2. Rear cover; 3. AC contactor; 4. Auxiliary relay; 5. Passive PFC inductor; 6. EMI filter board; 7. EMI isolation board; 8. Three-phase rectifier bridge; 9. DC driver board; 10. DC power board; 11. Transformer cooling fan; 12. Power transformer; 13. DC control board; 14. Main control board; 15. Auxiliary power board; 16. DC isolation board; 17. Front panel cooling fan; 18. Front baffle; 19. Power detection box module; 20. Tail isolation board; 21. Wire trough isolation board; 22. RF filter board; 23. Harmonic suppression board; 24. RF power synthesis module; 25. RF power board; 26. Peak detection board; 27. RF driver board; 28. RF cooling fan; 29. ​​Control panel; 30. Water connector; 31. User communication interface. DETAILED DESCRIPTION

[0018] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0019] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," "the other end," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0020] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc. should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0021] See also Figures 1-4 , the utility model provides a technical solution:

[0022] A radio frequency generator includes a generator housing, a front baffle 18 is installed on one side of the generator housing, and a rear cover 2 is fixedly connected to the side of the generator housing facing away from the front baffle 18. A horizontally placed water-cooling plate 1 is fixedly connected between the front baffle 18 and the rear cover 2. A continuous water-cooling pipe is arranged inside the water-cooling plate 1. Two symmetrically distributed water joints 30 are provided on the surface of the rear cover 2. Each water joint 30 passes through the rear cover 2, and the two water joints 30 are connected to the two ends of the water-cooling pipe. The DC part of the radio frequency generator is installed on the top side of the water-cooling plate 1, and the radio frequency part of the radio frequency generator is installed on the bottom side of the water-cooling plate 1. Multiple heat dissipation holes are provided on the surfaces of the front baffle 18 and the rear cover 2. A head isolation plate is fixedly connected to the side of the water-cooling plate 1 facing the RF generator's RF portion. Multiple RF cooling fans 28 are fixedly connected between the inner walls of the head isolation plate. A DC isolation plate 16 is fixedly connected to the side of the water-cooling plate 1 facing the RF generator's DC portion. Multiple front panel cooling fans 17 are fixedly connected between the inner walls of the DC isolation plate 16. In this embodiment, during operation of the RF generator, cooling water is injected into the water-cooling plate 1 through one of the water connectors 30. This cooling water absorbs heat from within the generator housing and then flows out through the other water connector 30, dissipating the heat generated by the device's operation out of the generator housing.

[0023] A tail isolation plate 20 is fixedly connected to the side of the water-cooled plate 1 facing the RF part of the RF generator. A power detection box module 19 is installed between the tail isolation plate 20 and the rear cover plate 2. The surface of the water-cooled plate 1 facing the RF part of the RF generator is provided with an RF filter plate 22, a harmonic suppression plate 23, an RF power synthesis module 24, an RF power plate 25, a peak detection plate 26, and an RF driver board 27 that are electrically connected to each other. An EMI isolation plate 7 is fixedly connected to the side of the water-cooled plate 1 facing the DC part of the RF generator. An EMI filter plate 6 is provided between the EMI isolation plate 7 and the rear cover plate 2. The surface of the water-cooled plate 1 facing the DC part of the RF generator is provided with a DC driver board 9, a DC power board 10, a power transformer 12, a DC control board 13, and a main control board 14 that are electrically connected to each other. In addition, a transformer cooling fan 11 is provided on one side of the power transformer 12 to accelerate heat dissipation. In this embodiment, an AC contactor 3, auxiliary relay 4, three-phase rectifier bridge 8, DC control board 13, auxiliary power board 15, DC isolation board 16, and passive PFC inductor 5 are also provided between the EMI isolation board 7 and the rear cover 2. When the device is started, when three-phase AC power is input to the RF generator, the AC power first passes through the EMI filter board 6. After passing through the contactor, the AC power is sent to the three-phase rectifier bridge 8 for rectification to obtain DC power. The auxiliary power board 15 then generates 25V, +15V, and -15V DC power, which is then supplied to the main control board 14, RF driver board 27, and DC control board 13. The rectified DC power then passes through the passive PFC inductor 5 to improve the power factor, increase energy efficiency, and reduce harmonic interference. Subsequently, the DC power from the passive PFC inductor 5 is sent to the DC power board 10. After the above series of processing, the DC power sent from the DC power board 10 is sent to the power transformer 12, and finally an adjustable DC power supply of 0 to 300V is generated, which is then directly supplied to the RF part. The RF driver board 27 amplifies the 13.56Mhz signal provided by the main control board 14 to drive four RF power tubes, with two power tubes forming one path, generating two paths of RF power. These two paths of RF power are sent to the RF power board 25, which obtains 0 to 300V DC power from the DC part to provide sufficient energy for the RF power tube. The generated RF power is then sent to the RF power synthesis module 24, which synthesizes the two paths of RF power into one path. The synthesized RF power is then sent to the RF filter board 22 for filtering. In order to prevent the generation of harmonics, a harmonic suppression board 23 is designed next to the RF filter board 22 to reduce the harmonic components. After a series of processing, the RF power is sent to the power detection box module 19. The power detection box module 19 feeds the real-time detected power signal back to the main control board 14, allowing the main control board 14 to control the output RF power in real time. Ultimately, the RF power is output to the vacuum chamber.

[0024] A control panel 29 is mounted on the outside of the front bezel 18, and a user communication interface 31 is located on the outside of the rear cover 2. Both the control panel 29 and the user communication interface 31 are electrically connected to the RF and DC components of the RF generator. The control panel 29 includes a display panel and control buttons for convenient operator control of the device's operation. The user communication interface 31 is used to connect to external circuits for power supply and three-phase current signals. In this embodiment, the inner wall of the generator housing is provided with multiple wire trough isolation panels 21 to facilitate wiring and prevent entanglement.

[0025] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the accompanying embodiments and their equivalents.

Claims

1. A radio frequency generator, comprising a generator housing, characterized in that: A front baffle (18) is installed on one side of the generator housing, and a rear cover (2) is fixedly connected to the side of the generator housing facing away from the front baffle (18). A horizontally placed water-cooling plate (1) is fixedly connected between the front baffle (18) and the rear cover (2). A continuous water-cooling pipe is arranged inside the water-cooling plate (1). Two symmetrically distributed water joints (30) are provided on the surface of the rear cover (2). Each of the water joints (30) passes through the rear cover (2), and the two water joints (30) are connected to the two ends of the water-cooling pipe. The DC part of the radio frequency generator is installed on the top side of the water-cooling plate (1), and the radio frequency part of the radio frequency generator is installed on the bottom side of the water-cooling plate (1). The surfaces of the front baffle (18) and the rear cover (2) are both provided with a plurality of heat dissipation holes.

2. The radio frequency generator according to claim 1, wherein: A head isolation plate is fixedly connected to the side of the water-cooling plate (1) facing the RF part of the RF generator, and a plurality of RF cooling fans (28) are fixedly connected between the inner walls of the head isolation plate. A DC isolation plate (16) is fixedly connected to the side of the water-cooling plate (1) facing the DC part of the RF generator, and a plurality of front panel cooling fans (17) are fixedly connected between the inner walls of the DC isolation plate (16).

3. The radio frequency generator according to claim 1, wherein: A tail isolation plate (20) is fixedly connected to the side of the water-cooling plate (1) facing the radio frequency part of the radio frequency generator, a power detection box module (19) is installed between the tail isolation plate (20) and the rear cover plate (2), and a radio frequency filter plate (22), a harmonic suppression plate (23), a radio frequency power synthesis module (24), a radio frequency power plate (25), a peak detection plate (26), and a radio frequency driving plate (27) are arranged on the surface of the side of the water-cooling plate (1) facing the radio frequency part of the radio frequency generator.

4. The radio frequency generator according to claim 1, wherein: An EMI isolation plate (7) is fixedly connected to the side of the water-cooling plate (1) facing the DC part of the radio frequency generator, an EMI filter plate (6) is arranged between the EMI isolation plate (7) and the rear cover plate (2), and a DC drive plate (9), a DC power plate (10), a power transformer (12), a DC control plate (13) and a main control plate (14) that are electrically connected to each other are arranged on the surface of the side of the water-cooling plate (1) facing the DC part of the radio frequency generator.

5. The radio frequency generator according to claim 1, characterized in that: A control panel (29) is installed on the outside of the front baffle (18), and a group of user communication interfaces (31) are arranged on the outside of the rear cover (2), and the control panel (29) and the user communication interfaces (31) are both electrically connected to the radio frequency part and the direct current part of the radio frequency generator.

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