Multi-axis high-precision air floating motion platform

Abstract

The utility model provides a multi-axis high-precision air-floating motion platform which comprises two mounting tables, a plurality of air-floating mechanisms and a plurality of air-floating mechanisms, wherein the two mounting tables are arranged in parallel at intervals in the X-axis direction; the main beam is located between the two mounting tables and arranged in the Y-axis direction; the first linear motor is used for driving the main beam to do linear motion in the X-axis direction, and a rotor of the first linear motor is fixedly connected with the main beam; the air flotation device is arranged between the tail end of the main beam and the mounting table; the machine head is arranged on the main beam in a sliding mode, and a second linear motor used for driving the machine head to do linear motion in the Y-axis direction is arranged between the machine head and the main beam; the mass center of the rotor of the first motor, the mass center of the rotor of the second linear motor, the mass center of the main beam and the mass center of the machine head are located in the same plane, and the advantages of stable movement, high movement precision and the like are achieved.

Description

Technical Field

[0001] The utility model relates to the field of machine tool equipment, in particular to a multi-axis high-precision air-floating motion platform. Background Art

[0002] Motion platforms are part of machine tool processing equipment. Their kinematic performance determines the processing capacity and efficiency of machine tools. Multi-axis motion platforms are currently widely used in various high-end precision machining applications. However, the motion mechanism of a multi-axis motion platform requires extensive reciprocating motion in the X and Y axes. This is particularly true under high acceleration. Due to the inadequate overall structural design of the motion mechanism, it can easily cause the mechanism to partially warp or deform relative to the X or Y axes, causing the machining path determined by the motion mechanism to deviate. This, in turn, reduces the precision of the multi-axis motion platform, making it unable to meet the precision requirements of applications such as photolithography machines and photovoltaic panels. Utility Model Content

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art and provides a multi-axis high-precision air-floating motion platform with smooth motion and high precision.

[0004] The utility model provides a multi-axis high-precision air-floating motion platform, comprising: two mounting platforms arranged in parallel and spaced relation in the X-axis direction; a main beam arranged along the Y-axis direction between the two mounting platforms; a first linear motor for driving the main beam to perform linear motion in the X-axis direction, wherein the mover of the first linear motor is fixedly connected to the main beam; an air-floating device arranged between the end of the main beam and the mounting platform; at least one machine head slidably arranged on the main beam, wherein a second linear motor for driving the machine head to perform linear motion in the Y-axis direction is provided between the machine head and the main beam; wherein the center of mass of the mover of the first motor, the mover of the second linear motor, the main beam, and the machine head are respectively located in the same plane.

[0005] In some embodiments, the geometric centers of the mover of the first motor, the mover of the second linear motor, the main beam and the machine head are located in the same plane.

[0006] In some embodiments, the stator of the first linear motor includes a stator center plate fixed on a mounting platform and two first magnetic rails symmetrically fixed on two side surfaces of the stator center plate.

[0007] In some embodiments, the mover of the first linear motor includes a mover housing having a U-shaped groove and a first mover coil fixed on two opposite side walls of the U-shaped groove; the stator of the first linear motor is inserted into the U-shaped groove of the mover of the first linear motor.

[0008] In some embodiments, a dust baffle is provided on the mounting platform and is located on the inner side of the stator center plate; flexible dust covers are provided between the machine head and the end of the main beam and between adjacent machine heads.

[0009] In some embodiments, the air flotation device includes a first air flotation nozzle arranged between the bottom side of the main beam and the top end surface of the mounting platform, and a second air flotation nozzle arranged between the end side of the main beam and the vertical end surface of the mounting platform.

[0010] In some embodiments, the stator of the second linear motor includes a second magnetic rail fixed on the main beam, and the mover of the second linear motor includes a second mover coil fixed on the machine head.

[0011] In some embodiments, a slide rail and a slide seat matching the slide rail are fixedly provided on the main beam, and the slide seat is fixedly connected to the machine head.

[0012] In some embodiments, the main beam has a channel for reducing mass.

[0013] In some embodiments, the machine head includes a machine head base slidably connected to the main beam in the Y-axis direction, a lifting motor fixed on the machine head base, and a storage platform driven by the lifting motor.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] The motion platform of the present invention is provided with an air flotation device between the end of the main beam and the mounting platform to form an air flotation sliding fit, so that the main beam has almost no friction during the X-axis movement, the movement accuracy is high and the movement response speed is fast; and, by arranging the center of mass of the mover of the first motor, the mover of the second linear motor, the main beam 4 and the head 6 to be located in the same plane, the structure of the motion platform is more reasonable, which can avoid the motion accuracy of the motion platform being affected by the local warping or deformation of the main beam caused by unreasonable structural settings during the movement of the motion platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of a multi-axis high-precision air-floating motion platform.

[0017] Figure 2 This is a schematic diagram of the main structure of a multi-axis high-precision air-floating motion platform.

[0018] Figure 3 It is a schematic diagram of the three-dimensional structure of the stator of the first linear motor.

[0019] Figure 4 It is a schematic diagram of the main structure of the stator of the first linear motor.

[0020] Figure 5 It is a schematic diagram of the three-dimensional structure in which the movers of the two first linear motors are fixed on the main beam 4.

[0021] Figure 6 It is a schematic diagram of the three-dimensional structure in which two machine heads 6 are installed on the main beam 4.

[0022] Figure 7 yes Figure 6 Schematic diagram of the main structure.

[0023] Figure 8 It is a schematic diagram of the three-dimensional structure of the nose 6. DETAILED DESCRIPTION

[0024] To further illustrate the technical means and effects employed by this application to achieve its intended purpose, the following detailed description of the specific implementation methods, structures, features, and effects of this application is provided in conjunction with the accompanying drawings and preferred embodiments. In the following description, different references to "one embodiment" or "embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics of one or more embodiments may be combined in any suitable manner.

[0025] like Figure 1 As shown, the utility model discloses a multi-axis high-precision air-floating motion platform, comprising: a base 1, the upper surface of the base 1 being a processing table 11 for processing a workpiece; a mounting table 2 is respectively provided on two opposite sides of the processing table 11, and the two mounting tables 2 are arranged parallel and spaced apart in the X-axis direction; a main beam 4 is located between the two mounting tables 2 and arranged along the Y-axis direction, the main beam 4 has a groove body for reducing mass, and the main beam 4 has a small mass while ensuring rigidity, which is conducive to reducing the motion inertia of the main beam 4 when performing linear motion relative to the mounting table 2 in the X-axis direction, thereby improving motion accuracy; a first linear motor for driving the main beam 4 to perform linear motion in the X-axis direction, the mover of the first linear motor is fixedly connected to the main beam 4; an air-floating device is provided between the end of the main beam 4 and the mounting table 2, and the air-floating device is used to make the end of the main beam 4 slide relative to the mounting table 2, thereby significantly improving motion accuracy and response speed; at least one head 6 is slidably provided on the main beam 4, and a second linear motor is provided between the head 6 and the main beam 4 for driving the head 6 to perform linear motion in the Y-axis direction.

[0026] Further integration Figure 2-Figure 4 As shown, both ends of the main beam 4 are respectively moved linearly relative to the mounting platform 2 by a first linear motor, thereby providing the main beam 4 with the machine head 6 to move linearly in the X-axis direction.

[0027] The stator of the first linear motor includes a stator center plate 31 fixed on the mounting platform 2 and two first magnetic rails 32 symmetrically fixed on two side surfaces of the stator center plate 31 .

[0028] The stator of the first linear motor is used to generate a magnetic field to drive the mover of the first linear motor to perform linear motion. The mover of the first linear motor includes a mover housing 33 with a U-shaped groove and two first mover coils 34 fixed on two opposite side walls of the U-shaped groove.

[0029] The stator of the first linear motor is inserted into the U-shaped slot of the mover of the first linear motor. Therefore, even if the first mover coil 34 uses a coil with an iron core to improve the performance of the first linear motor, the magnetic attraction forces generated by the first magnetic rails 32 and the corresponding first mover coils 34 on different sides of the stator center plate 31 are equal in magnitude but opposite in direction, thereby offsetting each other. This ensures that the magnetic attraction generated by the stator of the first linear motor on the mover of the first linear motor does not affect the smooth operation of the first linear motor.

[0030] In addition, in order to prevent debris generated during the machining process on the machining table 11 from affecting the first linear motor, a dust baffle 21 is provided on each mounting table 2 and located on the inner side of the stator center plate 31 .

[0031] Further integration Figure 2 、 Figure 6 and Figure 7 As shown, the flotation device includes a first flotation nozzle 51 arranged between the bottom side of the main beam 4 and the top surface of the mounting platform 2. The first flotation nozzle 51 is used to generate a downward flotation force in the Z-axis direction. When the downward flotation force generated by the first flotation nozzles 51 at both ends of the main beam 4 is large enough, the two ends of the main beam 4 form an air-floating sliding fit relative to the mounting platform 2, so that the first linear motor drives the main beam 4 to move in the X-axis direction with almost no friction, high movement accuracy and fast movement response speed.

[0032] The air flotation device also includes a second air flotation nozzle 52, positioned between the side surface of the main beam 4 and the vertical end surface of the mounting platform 2. This second air flotation nozzle 52 generates an air flotation force in the Y-axis direction. The second air flotation nozzles 52, located on the sides of the two end sections of the main beam 4, generate air flotation forces of equal magnitude but opposite directions, ensuring smooth and reliable movement of the main beam 4 on the two mounting platforms 2 without collision.

[0033] Further integration Figure 5 and Figure 8 As shown, the second linear motor is used to drive the machine head 6 to perform linear motion in the Y-axis direction on the main beam 4 as required. The stator of the second linear motor includes a second magnetic rail 71 fixed to the main beam 4, and the mover of the second linear motor includes a second mover coil 72 fixed to the machine head 6. The second magnetic rail 71 drives the second mover coil 72, causing the machine head 6 to slide linearly relative to the main beam 4.

[0034] Two parallel slide rails 41 are provided at different heights on the vertical side of the main beam 4. Each slide rail 41 is provided with a plurality of slide seats 42, which are slidably connected to the corresponding slide rail 41. The machine head 6 is fixedly connected to the slide seats 42, thereby achieving a sliding connection between the machine head 6 and the main beam 4 in the Y-axis direction.

[0035] In order to improve the stability of the machine head 6 during the X-axial movement driven by the main beam 4 and the Y-axial movement of the machine head 6 relative to the main beam 4, and to avoid the local warping or deformation of the main beam 4 due to unreasonable structural settings during the movement, thereby affecting the movement accuracy of the motion platform, the utility model arranges the mover of the first motor, the mover of the second linear motor, the main beam 4 and the center of mass of the machine head 6 to be located in the same plane.

[0036] For ease of implementation, the geometric centers of the first motor mover, the second linear motor mover, the main beam 4, and the machine head 6 can be approximately considered to be their corresponding centers of mass. Therefore, it is sufficient to set the geometric centers of the first motor mover, the second linear motor mover, the main beam 4, and the machine head 6 to be located in the same plane.

[0037] For example, Figure 7 As shown, the geometric centers of the mover of the first motor, the mover main beam 4 of the second linear motor and the machine head 6 are all located on the same axis A-A' in their orthographic projections in the Y-axis direction, that is, the geometric centers of the mover of the first motor, the mover main beam 4 of the second linear motor and the machine head 6 are all located in a plane passing through the axis A-A'.

[0038] In addition, the number of the heads 6 can be one or more. When a plurality of heads 6 are provided, each head 6 can be used to provide parallel work to improve the working efficiency of the motion platform.

[0039] In addition, flexible dust covers 49 are provided between the machine head 6 and the end of the main beam 4, and between adjacent machine heads 6. The flexible dust covers 49 are used to block the debris generated when the workpiece is processed on the processing table 11, preventing the debris from entering between the slide rail 41 and the sliding seat 42 or between the second magnetic rail 71 and the second mover coil 72, thereby ensuring that the machine head 6 has stable and reliable operating performance.

[0040] Further integration Figure 6-Figure 8 As shown, the machine head 6 includes a machine head base 61 that is slidably connected to the main beam 4 in the Y-axis direction, a lifting motor 62 fixed to the machine head base 61, and a storage platform 63 driven by the lifting motor 62. The lifting motor 62 drives the storage platform 63 to move up and down in the Z-axis relative to the machine head base 61, so that the motion platform has three-axis motion along the X-axis, Y-axis, and Z-axis.

[0041] The second movable coil 72 of the second linear motor is fixed on the back side of the head seat 61, and a fixing position 64 is provided on the back side of the head seat 61. The fixing position 64 is fixedly connected to the sliding seat 42, so that the head seat 61 is slidably connected to the main beam 4, which is easy to install and convenient to maintain.

[0042] The motion platform disclosed in this utility model can be widely used in high-precision processing environments such as semiconductors and photovoltaics. For example, the motion platform is used to perform laser scribing on photovoltaic thin films: a laser emitter is installed at the bottom of the headstock 61 of each head 6, and the photovoltaic film is placed on the processing table 11 of the base 1. The head 6 is moved to split the photovoltaic film into sub-cells approximately 5mm to 10mm wide, which are connected in series.

[0043] The above description is only a preferred embodiment of the present application and is not intended to limit the present application. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A multi-axis high-precision air-floating motion platform, characterized in that: include: Two mounting platforms are arranged parallel and spaced apart along the X-axis; a main beam is arranged along the Y-axis between the two mounting platforms; A first linear motor is used to drive the main beam to perform linear motion in the X-axis direction, and the mover of the first linear motor is fixedly connected to the main beam; an air flotation device is arranged between the end of the main beam and the mounting platform; at least one machine head is slidably arranged on the main beam, and a second linear motor is provided between the machine head and the main beam to drive the machine head to perform linear motion in the Y-axis direction; wherein the mover of the first motor, the mover of the second linear motor, the main beam and the machine head are respectively located in the same plane with their respective centers of mass located in the same plane.

2. The multi-axis high-precision air-floating motion platform according to claim 1, characterized in that: The geometric centers of the mover of the first motor, the mover of the second linear motor, the main beam and the machine head are located in the same plane.

3. The multi-axis high-precision air-floating motion platform according to claim 1, characterized in that: The stator of the first linear motor includes a stator center plate fixed on the mounting platform and two first magnetic rails symmetrically fixed on two side surfaces of the stator center plate.

4. The multi-axis high-precision air-floating motion platform according to claim 3, characterized in that: The mover of the first linear motor includes a mover housing with a U-shaped groove and a first mover coil fixed on two opposite side walls of the U-shaped groove; the stator of the first linear motor is inserted into the U-shaped groove of the mover of the first linear motor.

5. The multi-axis high-precision air-floating motion platform according to claim 3, characterized in that: A dustproof baffle is provided on the mounting platform and is located on the inner side of the stator center plate; flexible dustproof covers are provided between the machine head and the end of the main beam and between adjacent machine heads.

6. The multi-axis high-precision air-floating motion platform according to claim 1, characterized in that: The air flotation device comprises a first air flotation nozzle arranged between the bottom side surface of the main beam and the top end surface of the mounting platform, and a second air flotation nozzle arranged between the end side surface of the main beam and the vertical end surface of the mounting platform.

7. The multi-axis high-precision air-floating motion platform according to claim 1, characterized in that: The stator of the second linear motor includes a second magnetic rail fixed on the main beam, and the mover of the second linear motor includes a second mover coil fixed on the machine head.

8. The multi-axis high-precision air-floating motion platform according to claim 1, characterized in that: A slide rail and a slide seat matched with the slide rail are fixedly provided on the main beam, and the slide seat is fixedly connected with the machine head.

9. The multi-axis high-precision air-floating motion platform according to claim 1, characterized in that: The main beam has a channel body for reducing weight.

10. The multi-axis high-precision air-floating motion platform according to any one of claims 1 to 9, characterized in that: The machine head comprises a machine head base connected to the main beam in a Y-axis sliding manner, a lifting motor fixed on the machine head base and a storage platform driven by the lifting motor.

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