Switching equipment for surface treatment of semiconductor equipment accessories
By designing the exchange equipment for surface treatment of semiconductor equipment accessories, the conveying components and buffer room are used to realize automated material exchange between the dust-free workshop and the ordinary workshop, solving the problem of inefficient manual transportation efficiency, improving transportation efficiency and reducing costs.
Patent Information
- Application Number
- CN202422765564.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-13
- Publication Date
- 2025-08-26
- Estimated Expiration
- 2034-11-13
AI Technical Summary
In the prior art, the transport of semiconductor equipment accessories between dust-free workshops and ordinary workshops mainly relies on manual operations, resulting in low efficiency and high cost, making it difficult to achieve automation.
A switching device for surface treatment of semiconductor equipment accessories is designed. By setting up conveying components between ordinary workshops and dust-free workshops, including guide rails, push rod main body, push rod transmission motor and push hook lift cylinders, the automatic transmission of materials between the two workshops and dust cleaning is realized, and automatic material exchange is achieved using the buffer room.
It realizes automatic material exchange between semiconductor equipment accessories between dust-free workshops and ordinary workshops, reduces labor intensity, improves efficiency, and meets the cleanliness requirements of dust-free workshops.
Smart Images
Figure CN223267680U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of dust-free workshop transportation, in particular to exchange equipment for surface treatment of semiconductor equipment accessories. Background Art
[0002] In the production of semiconductor equipment, dust-free workshops are generally required to ensure its precision. When semiconductor equipment accessories need to be transferred from ordinary workshops at the front end to dust-free workshops, transfer vehicles are generally required. Currently, most companies use manual transfer methods. Compared with automated systems, manual operation usually has lower initial investment and maintenance costs. Especially for some small and medium-sized enterprises, manual operation is a more economical choice. However, as automation becomes more and more sophisticated and complete, manual transfer methods are particularly time-consuming, labor-intensive, and inefficient.
[0003] Based on this, we now provide exchange equipment for surface treatment of semiconductor equipment parts, which can eliminate the disadvantages of existing devices. Utility Model Content
[0004] The purpose of the utility model is to provide an exchange device for surface treatment of semiconductor equipment accessories to solve the problems in the background technology.
[0005] To achieve the above objectives, the present invention provides the following technical solutions:
[0006] The exchange equipment for surface treatment of semiconductor equipment parts includes a production line tank body, the production line tank body is provided with several conveying components on one side, and the conveying component is provided with an exchange vehicle body;
[0007] The conveying assembly includes a guide rail, a push rod body is provided on the upper surface of the guide rail, one end of the push rod body is slidably connected to a guide slider, a rack is provided on one side of the guide rail, and the other end of the guide rail is fixedly connected to a push rod transmission motor, a push hook lifting cylinder is provided on one side of the push rod transmission motor, a push hook is provided at the output end of the push hook lifting cylinder, and a guide assembly is provided on one side of the push hook lifting cylinder.
[0008] On the basis of the above technical solutions, the present invention also provides the following optional technical solutions:
[0009] In an optional solution: the guide assembly includes a push hook guide rod, one end of the push hook guide rod is fixedly connected to the guide rail, and the other end of the push hook guide rod is slidably connected to the push hook.
[0010] In an optional solution: a plurality of gears are rotatably provided on the push rod transmission motor, each of the gears is transmission-connected to each other, and the output end of the push rod transmission motor is transmission-connected to adjacent gears.
[0011] In an optional solution: a flying bar is provided above the exchange vehicle body, a workpiece is provided at the lower end of the flying bar, and the workpiece is provided inside the adjacent exchange vehicle body.
[0012] In an optional solution: the production line tank is respectively arranged inside the ordinary workshop and the dust-free workshop, and an automatic rolling shutter door of the ordinary workshop is arranged on the side adjacent to the dust-free workshop.
[0013] In an optional solution, an automatic rolling door of the clean room is provided on the side adjacent to the ordinary workshop.
[0014] In an optional solution: one end of the push rod transmission motors on the two production line tanks is arranged to pass through the outside of the corresponding workshop, and the adjacent ends of the push rod transmission motors are provided with push hook handles.
[0015] In an optional solution: a buffer room is provided between the dust-free workshop and the ordinary workshop, and a purifier is provided in the buffer room.
[0016] Compared with the prior art, the beneficial effects of the present invention are as follows:
[0017] The utility model sets up a conveying component, wherein a buffer room is set up between the ordinary workshop and the dust-free workshop. The conveying component between the two workshops is used to transfer the exchange cart loaded with materials to the buffer part for cleaning, and then automatically transfer it to the dust-free workshop. The set conveying component can effectively transfer materials between the two workshops. At the same time, the setting of the buffer room can automatically clean the dust on the materials to meet the standards of the dust-free workshop, and then transfer them to the inside of the dust-free workshop. Through the exchange cart system, the automatic operation of the rack exchange between the ordinary workshop production line and the dust-free workshop production line is realized, thereby realizing automation, reducing labor intensity and saving labor. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 It is a schematic diagram of the overall structure of the utility model.
[0019] Figure 2 This is a schematic structural diagram of the push rod assembly of the present utility model.
[0020] Figure 3 This is a schematic structural diagram of the exchange vehicle of the present utility model.
[0021] Figure 4 It is a schematic diagram of the overall side structure of the utility model.
[0022] Notes on the accompanying figures: 1. Exchange vehicle body; 2. Workpiece; 3. Flying bus; 4. Automatic rolling door for ordinary workshop; 5. Automatic rolling door for dust-free workshop; 6. Production line tank; 7. Push rod transmission motor; 8. Push hook handle; 9. Rack; 10. Push rod body; 11. Guide rail; 12. Guide slider; 13. Push hook guide rod; 14. Push hook lifting cylinder; 15. Push hook; 16. Gear. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical solutions and advantages of the present invention more clear, the present invention is further described in detail below with reference to the accompanying drawings and embodiments.
[0024] In one embodiment, Figures 1-4 As shown, the exchange equipment for surface treatment of semiconductor equipment parts includes a production line tank body 6, the production line tank body 6 is provided with several conveying components and one side thereof, and the exchange vehicle body 1 is provided on the conveying component;
[0025] The conveying assembly includes a guide rail 11, a push rod body 10 is provided on the upper surface of the guide rail 11, one end of the push rod body 10 is slidably connected to a guide slider 12, a rack 9 is provided on one side of the guide rail 11, and the other end of the guide rail 11 is fixedly connected to a push rod transmission motor 7, a push hook lifting cylinder 14 is provided on one side of the push rod transmission motor 7, a push hook 15 is provided on the output end of the push hook lifting cylinder 14, and a guide assembly is provided on one side of the push hook lifting cylinder 14;
[0026] In this embodiment, the material exchange between the ordinary workshop and the clean room is achieved through the conveying component.
[0027] In one embodiment, Figure 1 As shown, the guide assembly includes a push hook guide rod 13 , one end of which is fixedly connected to the guide rail 11 , and the other end of which is slidably connected to the push hook 15 .
[0028] In one embodiment, Figure 1 As shown, a plurality of gears 16 are rotatably provided on the push rod transmission motor 7, and each of the gears 16 is transmission-connected to each other. The output end of the push rod transmission motor 7 is transmission-connected to the adjacent gears 16, and the transmission of the gears 16 drives the operation of the entire conveying assembly.
[0029] In one embodiment, Figure 1 As shown, a flying bar 3 is provided above the exchange vehicle body 1 , a workpiece 2 is provided at the lower end of the flying bar 3 , and the workpiece 2 is provided inside the adjacent exchange vehicle body 1 .
[0030] In one embodiment, Figure 1As shown, the production line tank body 6 is respectively arranged inside the ordinary workshop and the dust-free workshop. An ordinary workshop automatic rolling shutter door 4 is provided on the adjacent side of the ordinary workshop and the dust-free workshop for easy opening for material transportation.
[0031] In one embodiment, Figure 1 As shown, a dust-free workshop automatic rolling shutter door 5 is provided on the side adjacent to the ordinary workshop, which is convenient for opening to transfer materials.
[0032] In one embodiment, Figure 1 As shown, one end of the push rod transmission motor 7 on the two production line troughs 6 is arranged on the outside of the corresponding workshop, and a push hook handle 8 is provided at the adjacent end of the push rod transmission motor 7. The push hook handle 8 is hooked by using the push hook 15 to pull the material in the buffer room to the designated workshop.
[0033] In one embodiment, Figure 1 As shown, a buffer room is provided between the dust-free workshop and the ordinary workshop, and a purifier is provided in the buffer room to clean the materials.
[0034] The above embodiment discloses an exchange device for surface treatment of semiconductor equipment accessories, wherein, when the production line crane lifts the workpiece 2 and the flying bar 3 onto the exchange vehicle body 1, the automatic rolling door 4 of the ordinary workshop rises, and the push rod transmission motor 7 drives in the forward direction to drive the push rod body 10 to push the exchange vehicle body 1 into the buffer room. After reaching the sensing position, the push rod transmission motor 7 stops, and the push hook lifting cylinder 14 is actuated to lift the push hook 15 upwards, so that the push hook 15 is separated from the push hook handle 8. The push rod transmission motor 7 drives in the reverse direction to retract the push rod body 10 from the buffer room to the original position. The automatic rolling door of the ordinary workshop 4 is automatically lowered and stops for 10 seconds, waiting for the purification system to purify the dust in the buffer room. Then the automatic rolling shutter door 5 of the clean room is opened. After the automatic rolling shutter door 5 of the clean room is opened, the push rod drive motor 7 drives forward to drive the push rod body 10, so that the push rod body 10 is extended into the buffer room. After reaching the sensing position, the push rod drive motor 7 stops, and the push hook lifting cylinder 14 moves downward, causing the push hook 15 to move downward and hook the push hook handle 8. Then the push rod drive motor 7 drives in the reverse direction to drive the push rod body 10, dragging the exchange car into the clean room. After reaching the sensing position, the push rod drive motor 7 stops. Then the crane of the clean room production line lifts the workpiece 2 and the fly bar 3 into the clean room production line for processing. The above actions push the fly bar workpiece from the ordinary workshop into the clean room. When the fly bar needs to be sent back from the clean room to the ordinary workshop, the exchange system is reversed to send the fly bar out.
[0035] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of the present application. Therefore, the scope of protection of the present application should be based on the scope of protection of the claims.
Claims
1. An exchange device for surface treatment of semiconductor equipment parts, comprising a production line tank (6), wherein the production line tank (6) is provided with a plurality of conveying components and one side thereof is provided with an exchange vehicle body (1); It is characterized by: The conveying assembly includes a guide rail (11), a push rod body (10) is provided on the upper surface of the guide rail (11), one end of the push rod body (10) is slidably connected to a guide slider (12), a rack (9) is provided on one side of the guide rail (11), the other end of the guide rail (11) is fixedly connected to a push rod transmission motor (7), a push hook lifting cylinder (14) is provided on one side of the push rod transmission motor (7), a push hook (15) is provided at the output end of the push hook lifting cylinder (14), and a guide assembly is provided on one side of the push hook lifting cylinder (14).
2. The semiconductor device component surface treatment exchange device according to claim 1, characterized in that: The guide assembly comprises a push hook guide rod (13), one end of the push hook guide rod (13) is fixedly connected to the guide rail (11), and the other end of the push hook guide rod (13) is slidably connected to the push hook (15).
3. The semiconductor device component surface treatment exchange device according to claim 1, characterized in that: A plurality of gears (16) are rotatably provided on the push rod transmission motor (7), each of the gears (16) is in transmission connection with each other, and the output end of the push rod transmission motor (7) is in transmission connection with adjacent gears (16).
4. The semiconductor device component surface treatment exchange device according to claim 1, characterized in that: A fly bar (3) is arranged above the exchange vehicle body (1), a workpiece (2) is arranged at the lower end of the fly bar (3), and the workpiece (2) is arranged inside the adjacent exchange vehicle body (1).
5. The semiconductor device component surface treatment exchange equipment according to claim 1, characterized in that: The production line tank (6) is respectively arranged inside a common workshop and a dust-free workshop, and a common workshop automatic rolling shutter door (4) is arranged on the adjacent side of the common workshop and the dust-free workshop.
6. The semiconductor device component surface treatment exchange device according to claim 5, characterized in that: A dust-free workshop automatic rolling shutter door (5) is provided on one side of the dust-free workshop adjacent to the ordinary workshop.
7. The semiconductor device component surface treatment exchange equipment according to claim 1, characterized in that: One end of the push rod transmission motor (7) on the two production line tank bodies (6) is arranged outside the corresponding workshop, and a push hook handle (8) is provided at the adjacent end of the push rod transmission motor (7).
8. The semiconductor device component surface treatment exchange equipment according to claim 5, characterized in that: A buffer room is provided between the dust-free workshop and the ordinary workshop, and a purifier is provided in the buffer room.