Assembly equipment for mounting chuck and glass substrate

Abstract

The utility model relates to assembling equipment for mounting a chuck and a glass substrate. The assembling equipment comprises a shell, a conveying assembly, a first dust removal assembly, a second dust removal assembly and an assembling assembly, an assembling cavity is formed in the shell, and the conveying assembly comprises a plurality of rolling wheels. The first dust removal assembly comprises a dust suction hood and a magnet, the dust suction hood covers the periphery of the roller, the magnet is arranged on the dust suction hood, and the magnet and / or the dust suction hood are / is used for adsorbing foreign matter generated by friction between the chuck and the roller. The second dust removal assembly comprises a dust collection piece, and the surface of the dust collection piece is coated with mucilage glue used for sticking foreign matter. The assembling assembly is used for attaching the chuck to the glass substrate. By means of the structure, the situation that in the assembling process of the chuck and the glass substrate, foreign matter is left on the glass substrate, and consequently the follow-up evaporation quality is affected can be avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of display device manufacturing, in particular to an assembly device for installing a chuck and a glass substrate. Background Art

[0002] Evaporation is an important process in the display panel manufacturing process, which is to deposit an organic film layer on a glass substrate by evaporation. Before evaporation, the glass substrate needs to be fixed on a chuck to meet the requirements of the evaporation process. To this end, before evaporation, assembly equipment is required to install the glass substrate on the chuck. Figure 1 As shown, an existing assembly device includes a shell 1′, rollers 2′ and an air pipe 3′. An assembly chamber 11′ is formed inside the shell 1′, and the chuck 4′ and the glass substrate 5′ are assembled in the assembly chamber 11′, that is, the back of the chuck 4′ is attached to the glass substrate 5′. There are multiple rollers 2′, and the multiple rollers 2′ are arranged in sequence in the horizontal direction in the assembly chamber 11′ so that the chuck 4′ can be transported by the rollers 2′. The air pipe 3′ is provided on the side wall of the shell 1′, and is used to input gas into the assembly chamber 11′. Under the action of the air pressure, the glass substrate 5′ can be evenly attached to the chuck 4′.

[0003] Existing assembly equipment has the following drawbacks: Because the chuck 4' is large and heavy, and both the chuck 4' and the roller 2' are made of metal, friction between the chuck 4' and the roller 2' during transportation generates metal shavings. The airflow within the assembly chamber 11' can carry these shavings onto the glass substrate 5', affecting the quality of the evaporation process. Utility Model Content

[0004] The purpose of the utility model is to provide an assembly device for installing a chuck and a glass substrate, which can collect foreign matter in an assembly chamber to prevent the foreign matter from being left on the glass substrate and affecting the subsequent evaporation quality.

[0005] To achieve this purpose, the present invention adopts the following technical solutions:

[0006] An assembly device for mounting a chuck and a glass substrate is provided, comprising:

[0007] A housing, wherein an assembly chamber for assembling the chuck and the glass substrate is provided in the housing;

[0008] A conveying assembly, the conveying assembly being disposed in the assembly chamber, the conveying assembly comprising a plurality of rollers for carrying the chuck, the plurality of rollers being sequentially spaced apart along a conveying direction of the chuck;

[0009] a first dust removal assembly, the first dust removal assembly comprising a dust hood and a magnet, the dust hood being arranged on the periphery of the roller, the magnet being arranged on the dust hood, the magnet and / or the dust hood being used to absorb foreign matter generated by friction between the chuck and the roller;

[0010] a second dust removal assembly, the second dust removal assembly comprising a dust collecting sheet disposed at the bottom of the assembly chamber, the surface of the dust collecting sheet being coated with adhesive for catching foreign matter;

[0011] An assembly component is used to attach the chuck to the glass substrate.

[0012] As an optional solution for assembly equipment for installing a chuck and a glass substrate, the dust hood includes a cylinder, an upper end cover and a lower end cover, the roller is rotatably arranged in the cylinder, the top and bottom ends of the cylinder have openings, the upper end cover is detachably arranged at the top of the cylinder and is used to seal the corresponding openings, the upper end cover is provided with an avoidance hole for the top of the roller to pass through, and the lower end cover is detachably arranged at the bottom end of the cylinder and is used to seal the corresponding openings.

[0013] As an optional solution for the assembly equipment for mounting the chuck and the glass substrate, the magnets are provided at least at the top and bottom ends of the cylinder, and the edges of the upper end cover and the lower end cover are respectively inserted between the cylinder and the corresponding magnets.

[0014] As an optional solution for the assembly equipment for mounting the chuck and the glass substrate, the upper end cover includes an upper cover plate and an upper enclosure plate, the upper cover plate is arranged to cover the opening, one end of the upper enclosure plate is arranged around the periphery of the upper cover plate, and the other end of the upper enclosure plate is inserted between the cylinder and the magnet;

[0015] The lower end cover includes a lower cover plate and a lower enclosure plate. The lower cover plate covers the opening. One end of the lower enclosure plate is arranged around the periphery of the lower cover plate, and the other end of the lower enclosure plate is inserted between the cylinder and the magnet.

[0016] As an optional solution for the assembly equipment for mounting the chuck and the glass substrate, the dust-absorbing sheet is a double-sided tape.

[0017] As an optional solution for assembly equipment for installing a chuck and a glass substrate, the assembly component includes an extrusion piece and a gas pipe. The extrusion piece is arranged to be raised and lowered at the top of the assembly chamber, and is used to squeeze the periphery of the glass substrate to fit the chuck. The gas pipe is connected to the assembly chamber and is used to input gas into the assembly chamber.

[0018] As an optional solution for the assembly equipment for installing the chuck and the glass substrate, the gas pipe is arranged at the bottom of the assembly chamber, and a baffle is also provided in the assembly chamber. The baffle is spaced apart from the bottom inner wall of the shell, and the baffle is opposite to the gas outlet end of the gas pipe.

[0019] As an optional solution for the assembly equipment for mounting the chuck and the glass substrate, a plurality of air holes for gas circulation are evenly distributed on the baffle.

[0020] As an optional solution for the assembly equipment for mounting the chuck and the glass substrate, the gas pipe is arranged on the top of the assembly chamber.

[0021] As an optional solution for the assembly equipment for mounting the chuck and the glass substrate, a plurality of the gas pipes are arranged at intervals on the housing.

[0022] Compared with the prior art, the present invention has the following advantages:

[0023] The utility model relates to an assembly device for installing a chuck and a glass substrate, wherein a first dust removal component and a second dust removal component are arranged in an assembly chamber. The first dust removal component is covered on the periphery of the roller, and it absorbs foreign matter generated by the friction between the chuck and the roller by magnetic attraction, so as to prevent the foreign matter from falling onto the glass substrate with the airflow. The second dust removal component is arranged at the bottom of the assembly chamber, and foreign matter that is not absorbed by the first dust removal component and other foreign matter that does not have magnetic attraction properties can be promptly collected by the second dust removal component by adhesion after falling into the assembly chamber, so as to prevent the foreign matter from falling onto the glass substrate with the airflow. This structure can prevent foreign matter from being left on the glass substrate during the assembly process of the chuck and the glass substrate, thereby affecting the subsequent evaporation quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The present invention will be described in further detail below with reference to the accompanying drawings and embodiments.

[0025] Figure 1 It is a schematic diagram of an assembly device in the prior art.

[0026] Figure 2 This is a schematic diagram of an assembly device for installing a chuck and a glass substrate according to a first embodiment of the present invention.

[0027] Figure 3 This is a schematic diagram of the first dust removal component of Example 1 of the present utility model.

[0028] Figure 4 This is a cross-sectional view of the first dust removal component of Example 1 of the present invention.

[0029] Figure 5This is a schematic diagram of an assembly device for installing a chuck and a glass substrate according to a second embodiment of the present invention.

[0030] Figure 6 This is a schematic diagram of an assembly device for installing a chuck and a glass substrate according to a third embodiment of the present invention.

[0031] Figure 1 middle:

[0032] 1′, housing; 11′, assembly chamber; 2′, roller; 3′, air pipe; 4′, chuck; 5′, glass substrate.

[0033] Figures 2 to 6 middle:

[0034] 1. Housing; 11. Assembly chamber; 2. Conveying assembly; 21. Roller; 22. Drive shaft; 3. First dust removal assembly; 31. Dust hood; 311. Cylinder; 312. Upper end cover; 3121. Upper cover plate; 3122. Upper enclosure plate; 3123. Avoidance hole; 313. Lower end cover; 3131. Lower cover plate; 3132. Lower enclosure plate; 32. Magnet; 4. Second dust removal assembly; 5. Assembly assembly; 51. Extrusion member; 52. Drive member; 53. Air pipe; 6. Baffle; 61. Air hole; 7. Support column

[0035] 100. Chuck; 200. Glass substrate. DETAILED DESCRIPTION

[0036] The advantages and features of the present invention and methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in a variety of different forms. These embodiments are provided merely to complete the disclosure of the present invention and enable those skilled in the art to fully understand the scope of the present invention. The present invention is limited only by the scope of the claims. The same reference numerals represent the same components throughout the specification.

[0037] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0038] Example 1

[0039] like Figures 2 to 4As shown, this embodiment provides an assembly device for installing a chuck and a glass substrate (hereinafter referred to as the assembly device), which is used to assemble the chuck 100 and the glass substrate 200 together. Before evaporation, the glass substrate 200 needs to be fixed on the chuck 100 so that the glass substrate 200 can be transported during evaporation. The chuck 100 is a metal plate that serves to fix the glass substrate 200. When assembling the glass substrate 200, the back side (non-evaporation side) of the glass substrate 200 is bonded and fixed to the chuck 100. At this time, the glass substrate 200 is located at the top and the chuck 100 is located at the bottom. After the assembly is completed, the chuck 100 is turned over so that the chuck 100 is located at the top and the glass substrate 200 is located at the bottom. During evaporation, the chuck 100 and the glass substrate 200 pass over the crucible, and the organic gas in the crucible is ejected upward and deposited on the front side (evaporation side) of the glass substrate 200 to form an organic film layer.

[0040] The assembly equipment includes a shell 1, a conveying component 2, a first dust removal component 3, a second dust removal component 4 and an assembly component 5. The shell 1 is a hollow rectangular structure, and an assembly chamber 11 is provided in the shell 1. The assembly chamber 11 is used to assemble the chuck 100 and the glass substrate 200. Correspondingly, along the length direction of the shell 1 (the X direction in the figure), an entrance and an exit are provided at both ends of the shell 1 for transporting the chuck 100 and the glass substrate 200 in and out. The conveying component 2 is installed in the assembly chamber 11, and the conveying component 2 is used to transport the chuck 100 and the glass substrate 200. The conveying component 2 includes a plurality of rollers 21, and the rollers 21 are used to carry the chuck 100. The plurality of rollers 21 are arranged in sequence along the conveying direction of the chuck 100 (the X direction in the figure). The two ends of the conveying component 2 face the entrance and exit of the shell 1 respectively. The assembly component 5 is used to apply pressure to the glass substrate 200 to fit the chuck 100 with the glass substrate 200. In this embodiment, the chuck 100 and the glass substrate 200 are pre-assembled outside the assembly equipment, that is, the glass substrate 200 is placed on the top surface of the chuck 100, and adhesive is provided between the glass substrate 200 and the chuck 100, and the chuck 100 and the glass substrate 200 are fixed by the adhesive. Subsequently, the chuck 100 is transported to the assembly chamber 11 through the entrance of the housing 1, and the glass substrate 200 is pressed by the assembly component 5 so that the chuck 100 and the glass substrate 200 are fitted and fixed. After the assembly is completed, the chuck 100 is transported to the next station through the exit of the housing 1. During the transportation of the chuck 100, the chuck 100 and the roller 21 will rub against each other and produce foreign matter (such as metal chips). The first dust removal component 3 and the second dust removal component 4 are installed in the assembly chamber 11, both of which are used to collect foreign matter to prevent foreign matter from being left on the glass substrate 200.

[0041] Specifically, the first dust removal component 3 includes a dust hood 31 and a magnet 32. The dust hood 31 is made of an iron-based material so that it can be adsorbed by the magnet 32. For example, the dust hood 31 is made of ordinary carbon steel plate. The number of dust hoods 31 is the same as the number of rollers 21, that is, each roller 21 is provided with a corresponding dust hood 31. The dust hood 31 is arranged on the periphery of the roller 21, and the magnet 32 ​​is arranged on the dust hood 31, so that the dust hood 31 is also magnetic. When foreign matter is generated by friction between the chuck 100 and the roller 21, the foreign matter can be adsorbed by the magnet 32 ​​and the dust hood 31 to prevent the foreign matter from falling into other areas. Correspondingly, the chuck 100 and the roller 21 are both made of iron-based materials, and the foreign matter generated by friction between the two is metal chips, and the foreign matter can be adsorbed by the magnet 32 ​​and the dust hood 31 to achieve the purpose of dust removal.

[0042] Specifically, the conveying assembly 2 further includes a bracket (not shown in the figure), which is mounted on the housing 1. The bracket is used to support the roller 21, and the dust cover 31 is mounted and fixed on the bracket.

[0043] The dust hood 31 includes a cylinder 311, an upper end cover 312 and a lower end cover 313. The cylinder 311 is a square cylinder, and has openings at the top and bottom ends of the cylinder 311 along the height direction of the shell 1 (Z direction in the figure). The roller 21 is rotatably arranged in the cylinder 311 through the drive shaft 22. One end of the drive shaft 22 is connected to the motor transmission to drive the roller 21 to rotate through the motor. The upper end cover 312 is detachably connected to the top of the cylinder 311 and is used to block the opening at the top of the cylinder 311. The upper end cover 312 includes an integrally formed upper cover plate 3121 and an upper enclosure plate 3122. The upper cover plate 3121 covers the opening at the top of the shell 1, and the upper enclosure plate 3122 is a square cylindrical structure and is coaxial with the cylinder 311. One end of the upper enclosure 3122 is connected to the periphery of the upper cover 3121, that is, the upper enclosure 3122 is arranged around the periphery of the upper cover 3121. The end of the upper enclosure 3122 facing away from the upper cover 3121 forms a free end, and the free end of the upper enclosure 3122 extends toward the interior of the cylinder 311. The upper cover 3121 is provided with an escape hole 3123, which is used to avoid the roller 21. The top of the roller 21 passes through the escape hole 3123 and extends to the outside of the dust cover 31, so that the chuck 100 can be placed on the roller 21. The overall shape of the lower end cover 313 is the same as that of the upper end cover 312. The lower end cover 313 includes an integrally formed lower cover plate 3131 and a lower enclosure plate 3132 . The lower cover plate 3131 covers the opening at the bottom end of the shell 1 , and the lower enclosure plate 3132 surrounds the circumference of the lower cover plate 3131 . The free end of the lower enclosure plate 3132 extends toward the interior of the cylinder 311 .

[0044] The magnet 32 ​​is installed inside the cylinder 311. There are multiple magnets 32, with magnets 32 installed at least at the top and bottom ends of the cylinder 311. The magnet 32 ​​near the top of the cylinder 311 is spaced apart from the inner wall of the cylinder 311 to form an upper plug-in groove therebetween; the magnet 32 ​​near the bottom of the cylinder 311 is spaced apart from the inner wall of the cylinder 311 to form a lower plug-in groove therebetween. The free end of the upper panel 3122 (i.e., the edge of the upper end cover 312) is plugged into and fixed to the upper plug-in groove. It can also be understood that the free end of the upper panel 3122 is plugged into and fixed to the cylinder 311 and the magnet 32. Similarly, the free end of the lower panel 3132 (i.e., the edge of the lower end cover 313) is plugged into and fixed to the lower plug-in groove. It can also be understood that the free end of the lower panel 3132 is plugged into and fixed to the cylinder 311 and the magnet 32. During the operation of the conveying assembly 2, foreign matter generated between the roller 21 and the chuck 100 is easily adsorbed on the upper end cover 312 and the lower end cover 313. By connecting the upper end cover 312 and the lower end cover 313 to the cylinder 311 by plugging, the upper end cover 312 and the lower end cover 313 can be regularly removed for cleaning, thereby promptly removing foreign matter adsorbed on the upper end cover 312, the lower end cover 313 and the magnet 32.

[0045] Specifically, the second dust removal assembly 4 includes a dust collecting sheet, which is positioned at the bottom of the assembly chamber 11. The surface of the dust collecting sheet is coated with adhesive for trapping foreign matter. It is understood that foreign matter not absorbed by the first dust removal assembly 3 will fall to the bottom of the assembly chamber 11. Therefore, the dust collecting sheet is provided to allow any falling foreign matter to be caught by the sheet, thereby collecting the foreign matter. Because the dust collecting sheet collects foreign matter through adhesion, it can be collected by the sheet regardless of whether the foreign matter has magnetic properties, thereby achieving the dust removal purpose. Optionally, the dust collecting sheet is double-sided tape, one side of which can be bonded to the bottom of the assembly chamber 11, while the other side can be used to trap foreign matter. After a certain period of collection, the dust collecting sheet can be replaced. Of course, in some embodiments, the dust collecting sheet can be configured as a soft film, with one side secured to the bottom of the assembly chamber 11 by Velcro, magnets, or the like, and the other side coated with adhesive for trapping foreign matter.

[0046] Specifically, the assembly assembly 5 includes an extrusion member 51 and an air pipe 53. The extrusion member 51 is arranged at the top of the assembly chamber 11 in a manner such that it can be raised and lowered. The extrusion member 51 is an elastic plate and is fixedly connected to the inner wall of the housing 1 via a driver 52. The driver 52 can be a pneumatic cylinder, an electric telescopic member, or the like. The extrusion member 51 is mounted at the output end of the driver 52 so that the driver 52 drives the extrusion member 51 to move upward and downward. When assembling the glass substrate 200, the extrusion member 51 compresses the four corners and the center of the glass substrate 200 to secure the entire glass substrate 200 to the chuck 100. It should be noted that the glass substrate 200 has a waste area. After processing, the glass substrate 200 is cut along the waste area to remove the waste material. After cutting, multiple display panels can be formed. The extrusion member 51 compresses the waste area of ​​the glass substrate 200 to prevent contact marks from forming on the display panels. Multiple extrusion members 51 are provided, and the multiple extrusion members 51 are evenly distributed within the projection of the waste area. Multiple gas supply pipes 53 are spaced apart at the bottom of the housing 1. The gas supply pipes 53 communicate with the assembly chamber 11, allowing gas to be supplied into the assembly chamber 11. It should be noted that when the glass substrate 200 is mounted on the chuck 100, the surrounding environment is at a low pressure. To ensure a smooth fit between the glass substrate 200 and the chuck 100, gas is supplied to the assembly chamber 11, thereby compressing the glass substrate 200 using air pressure.

[0047] Specifically, the assembly equipment also includes a baffle 6 and a support column 7. The baffle 6 is arranged at the bottom of the assembly chamber 11 and is spaced from the inner wall of the shell 1. The baffle 6 is mounted on the inner wall of the shell 1 through the support column 7. The baffle 6 is arranged horizontally, and the baffle 6 is directly opposite to the gas outlet end of the gas pipe 53. In this embodiment, there is one baffle 6, and all the gas pipes 53 are located below the baffle 6. This structure allows the gas ejected from the gas pipe 53 to be blocked by the baffle 6, and the gas flows upward from the periphery of the baffle 6 to weaken the kinetic energy of the airflow, thereby preventing foreign matter on the first dust removal component 3 from being blown off due to excessive airflow.

[0048] In this embodiment, a first dust removal assembly 3 and a second dust removal assembly 4 are provided in the assembly chamber 11. The first dust removal assembly 3 is covered on the outer periphery of the roller 21 and magnetically absorbs foreign matter generated by the friction between the chuck 100 and the roller 21 to prevent the foreign matter from falling onto the glass substrate 200 with the airflow. The second dust removal assembly 4 is provided at the bottom of the assembly chamber 11. Foreign matter not absorbed by the first dust removal assembly 3 and other foreign matter without magnetic attraction properties that fall into the assembly chamber 11 can be promptly collected by the second dust removal assembly 4 through adhesion to prevent the foreign matter from falling onto the glass substrate 200 with the airflow. This structure can prevent foreign matter from being left on the glass substrate 200 during the assembly process of the chuck 100 and the glass substrate 200, thereby affecting the subsequent evaporation quality.

[0049] Example 2

[0050] like Figure 5 As shown (part of the number refer to Figure 2 ), this embodiment provides an assembly device, the structure of which is similar to that of the first embodiment, except that: a plurality of air holes 61 for gas circulation are evenly distributed on the baffle 6. It can be understood that when the gas is sprayed directly onto the chuck 100, the larger airflow can easily blow off the foreign matter adsorbed on the first dust removal component 3, thereby causing the foreign matter to move with the airflow to the glass substrate 200. When the gas is completely blocked by the baffle 6, the airflow will be sprayed toward the bottom of the assembly chamber 11, and the larger airflow can easily blow off the foreign matter on the second dust removal component 4, thereby causing the foreign matter to move with the airflow to the glass substrate 200. By providing a plurality of air holes 61, the gas can be diverted, that is, part of the gas is blocked by the baffle 6 and changes its flow direction, while the other part of the gas is ejected upward through the air holes 61. This is conducive to reducing the kinetic energy of the airflow and avoiding blowing off foreign matter on the first dust removal component 3 and the second dust removal component 4.

[0051] Example 3

[0052] like Figure 6 As shown (part of the number refer to Figure 2 ), this embodiment provides an assembly device having a structure similar to that of the first embodiment, except that an air delivery pipe 53 is disposed at the top of the assembly chamber 11. It will be appreciated that placing the air delivery pipe 53 at the top of the assembly chamber 11 facilitates the downward ejection of gas, directly impacting the glass substrate 200, while preventing the airflow from directly impacting the first dust removal assembly 3 and the second dust removal assembly 4. Furthermore, under the action of the airflow, foreign matter not firmly absorbed by the first dust removal assembly 3 can move downward and be collected by the second dust removal assembly 4, thereby improving the overall dust removal efficiency of the assembly device.

[0053] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic features of the present invention. Therefore, it should be understood that the above embodiments are illustrative and not restrictive in all aspects.

Claims

1. An assembly device for mounting a chuck and a glass substrate, characterized in that: include: A housing, wherein an assembly chamber for assembling the chuck and the glass substrate is provided in the housing; A conveying assembly, the conveying assembly being disposed in the assembly chamber, the conveying assembly comprising a plurality of rollers for carrying the chuck, the plurality of rollers being sequentially spaced apart along a conveying direction of the chuck; a first dust removal assembly, the first dust removal assembly comprising a dust hood and a magnet, the dust hood being arranged on the periphery of the roller, the magnet being arranged on the dust hood, the magnet and / or the dust hood being used to absorb foreign matter generated by friction between the chuck and the roller; a second dust removal assembly, the second dust removal assembly comprising a dust collecting sheet disposed at the bottom of the assembly chamber, the surface of the dust collecting sheet being coated with adhesive for catching foreign matter; An assembly component is used to attach the chuck to the glass substrate.

2. The assembly equipment for mounting a chuck and a glass substrate according to claim 1, wherein: The dust hood includes a cylinder, an upper end cover and a lower end cover. The roller is rotatably arranged in the cylinder. The top and bottom ends of the cylinder have openings. The upper end cover is detachably arranged at the top of the cylinder and is used to seal the corresponding openings. The upper end cover is provided with an avoidance hole for the top of the roller to pass through. The lower end cover is detachably arranged at the bottom end of the cylinder and is used to seal the corresponding openings.

3. The assembly equipment for mounting a chuck and a glass substrate according to claim 2, wherein: The magnets are provided at least at the top and bottom ends of the cylinder, and the edges of the upper end cover and the lower end cover are respectively inserted between the cylinder and the corresponding magnets.

4. The assembly equipment for mounting a chuck and a glass substrate according to claim 3, wherein: The upper end cover includes an upper cover plate and an upper enclosure plate, wherein the upper cover plate covers the opening, one end of the upper enclosure plate surrounds the periphery of the upper cover plate, and the other end of the upper enclosure plate is inserted between the cylinder and the magnet; The lower end cover includes a lower cover plate and a lower enclosure plate. The lower cover plate covers the opening. One end of the lower enclosure plate is arranged around the periphery of the lower cover plate, and the other end of the lower enclosure plate is inserted between the cylinder and the magnet.

5. The assembly equipment for mounting a chuck and a glass substrate according to claim 1, wherein: The dust-absorbing sheet is a double-sided tape.

6. The assembly device for mounting a chuck and a glass substrate according to any one of claims 1 to 5, characterized in that: The assembly component includes an extrusion piece and a gas pipe. The extrusion piece can be raised and lowered and is set at the top of the assembly chamber. The extrusion piece is used to squeeze the periphery of the glass substrate to fit it with the chuck. The gas pipe is connected to the assembly chamber and is used to input gas into the assembly chamber.

7. The assembly equipment for mounting a chuck and a glass substrate according to claim 6, wherein: The air delivery pipe is arranged at the bottom of the assembly chamber. A baffle is also arranged in the assembly chamber. The baffle is spaced apart from the bottom inner wall of the shell and faces the air outlet end of the air delivery pipe.

8. The assembly equipment for mounting a chuck and a glass substrate according to claim 7, wherein: The baffle is evenly distributed with a plurality of air holes for gas circulation.

9. The assembly equipment for mounting a chuck and a glass substrate according to claim 6, wherein: The air delivery pipe is arranged on the top of the assembly chamber.

10. The assembly equipment for mounting a chuck and a glass substrate according to claim 6, wherein: A plurality of gas delivery pipes are arranged on the shell at intervals.

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