Formic acid injection system and vacuum sintering furnace

Abstract

The utility model relates to the technical field of vacuum sintering furnaces, in particular to a formic acid injection system, which is characterized in that a first pressure nitrogen tank is connected with a first switch valve, the first switch valve is connected with a first multi-way valve, a second pressure nitrogen tank is connected with a second switch valve, the second switch valve is connected with the first multi-way valve, and the first multi-way valve is connected with an inlet end of a mixing tank; the formic acid concentration analyzer is arranged at the top of the mixing tank, the outlet end of the mixing tank is connected with the inlet end of the storage tank, the upper part of the gas injection assembly is connected with the inlet end of the mixing tank, and the lower part of the gas injection assembly is arranged at the bottom of the mixing tank. And the pressure in the formic acid tank, the concentration of formic acid and the filling amount of nitrogen are accurately controlled.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum sintering furnaces, in particular to a formic acid injection system and a vacuum sintering furnace. Background Art

[0002] Currently, in the field of semiconductor packaging, the existing online vacuum reflow equipment cannot effectively control the welding bubbles and residual oxygen generated during the soldering process, so the reliability and quality of the welding points cannot be guaranteed, and nitrogen and formic acid gases need to be added at the same time.

[0003] The vacuum sintering furnace of the prior art cannot accurately control the pressure, formic acid concentration and nitrogen filling amount in the formic acid tank. Summary of the Invention

[0004] The utility model provides a formic acid injection system, which is used to solve the problem in the prior art that the pressure in a formic acid tank, the formic acid concentration and the nitrogen filling amount cannot be accurately controlled.

[0005] A formic acid injection system comprises a first pressure nitrogen tank, a second pressure nitrogen tank, a first multi-way valve, a second multi-way valve, a formic acid concentration analyzer, a plurality of formic acid tanks, a mixing tank, a storage tank, a gas injection assembly, a first switch valve, and a second switch valve; the first pressure nitrogen tank is connected to the first switch valve, the first switch valve is connected to the first multi-way valve, the second pressure nitrogen tank is connected to the second switch valve, the second switch valve is connected to the first multi-way valve, the first multi-way valve is connected to the inlet end of the mixing tank, the bottom of the formic acid tank is connected to the second multi-way valve, the second multi-way valve is connected to the bottom of the mixing tank, the formic acid concentration analyzer is arranged at the top of the mixing tank, the outlet end of the mixing tank is connected to the inlet end of the storage tank, the upper part of the gas injection assembly is connected to the inlet end of the mixing tank, and the lower part of the gas injection assembly is arranged at the bottom of the mixing tank.

[0006] According to the formic acid injection system of the present invention, it further includes a formic acid tank switch valve, which is provided in a one-to-one correspondence with the formic acid tanks and is connected to the second multi-way valve.

[0007] According to the formic acid injection system of the present invention, the system further includes a second flow meter, and the outlet end of the mixing tank is connected to the second flow meter and the inlet end of the storage tank.

[0008] According to the formic acid injection system of the present invention, it further includes a third pressure nitrogen tank and a third switch valve; the third pressure nitrogen tank is connected to the third switch valve, and the third switch valve is connected to the first multi-way valve.

[0009] According to the formic acid injection system of the present invention, the pressure of the first pressure nitrogen tank is lower than the pressure of the second pressure nitrogen tank, and the pressure of the second pressure nitrogen tank is lower than the pressure of the third pressure nitrogen tank.

[0010] According to the formic acid injection system of the present invention, the storage tank includes a storage tank body, a temperature sensor, a ceramic heater, a heating layer and an insulation layer; the temperature sensor is arranged inside the storage tank body, the heating layer is arranged on the outer layer of the storage tank body, the insulation layer is arranged on the outer layer of the heating layer, and the ceramic heater heats the heating layer.

[0011] According to the formic acid injection system of the present invention, it also includes a second pressure sensor, a second safety pressure relief valve, a storage tank inlet pipe and a storage tank outlet pipe; the second pressure sensor, the second safety pressure relief valve, the storage tank inlet pipe and the storage tank outlet pipe are arranged on the top of the storage tank body, and the storage tank inlet pipe is arranged at the inlet end of the storage tank.

[0012] According to the formic acid injection system of the present invention, the formic acid tank includes a first low liquid level sensor, a first high liquid level sensor and a formic acid inlet pipe; the first low liquid level sensor is arranged at the lower part of the formic acid tank, the first high liquid level sensor is arranged at the upper part of the formic acid tank, and the formic acid inlet pipe is arranged at the top of the formic acid tank.

[0013] According to the formic acid injection system of the present invention, the mixing tank also includes a second low liquid level sensor, a first safety pressure relief valve, a first pressure sensor and a second high liquid level sensor. The second low liquid level sensor is arranged at the bottom side of the mixing tank, the second high liquid level sensor is arranged in the middle of the mixing tank, the first pressure sensor is arranged at the top of the mixing tank, and the first safety pressure relief valve is arranged at the top of the mixing tank.

[0014] According to the formic acid injection system of the present invention, the gas injection assembly includes a one-way valve, a connecting pipe and a circular pipe; the one-way valve is connected to the connecting pipe and the circular pipe in sequence, the circular pipe is arranged at the inner bottom of the mixing tank, and the circular pipe is provided with multiple through holes.

[0015] A vacuum sintering furnace comprises the formic acid injection system mentioned above.

[0016] The multiple-pressure nitrogen tanks of this utility model can flexibly adjust the pressure within the mixing tank. Initially, a high-pressure nitrogen tank is added to quickly raise the pressure within the mixing tank, allowing nitrogen and formic acid to mix thoroughly. When the target pressure is approached, a lower-pressure nitrogen tank and a formic acid concentration analyzer are used for fine-tuning, thereby precisely controlling the pressure within the formic acid tank, formic acid concentration, and nitrogen charge volume. Multiple formic acid tanks provide formic acid supply to the mixing tank, offering the advantages of stable supply and convenient maintenance and replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the formic acid injection system;

[0019] Figure 2 It is a schematic diagram of the three-dimensional structure of the mixing tank;

[0020] Figure 3 It is a structural schematic diagram of the enlarged view of local A;

[0021] Figure 4 Schematic diagram of the three-dimensional structure of the storage tank

[0022] Figure 5 It is a cross-sectional structural diagram of a storage tank;

[0023] Figure 6 It is a schematic diagram of the three-dimensional structure of the nitrogen tank;

[0024] Figure 1: 1st pressure nitrogen tank; 2nd pressure nitrogen tank; 3rd pressure nitrogen tank; 4th formic acid tank; 5th mixing tank; 6th storage tank; 7th first four-way valve; 8th second four-way valve; 9th first flow meter; 10th mixed gas switch valve; 11th first switch valve; 12th first inlet pipe; 21th second switch valve; 22th second inlet pipe; 31th third switch valve; 32th third inlet pipe; 41th formic acid tank switch valve; 42th first low liquid level sensor; 43th first A high liquid level sensor; 51. A first pressure sensor; 52. A formic acid concentration analyzer; 53. A mixing tank inlet pipe; 54. A mixing tank outlet pipe; 55. A first safety pressure relief valve; 56. A second low liquid level sensor; 57. A second high liquid level sensor; 61. A second pressure sensor; 62. A second safety pressure relief valve; 63. A storage tank inlet pipe; 64. A storage tank outlet pipe; 65. A temperature sensor; 66. A ceramic heater; 67. A heating layer; 68. An insulation layer; 69. A second flow meter. DETAILED DESCRIPTION

[0025] The following embodiments of the present invention are described in further detail with reference to the accompanying drawings and examples. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0026] In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the embodiments of the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, and therefore should not be understood as limiting the embodiments of the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0027] In the description of the embodiments of the present invention, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the embodiments of the present invention based on specific circumstances.

[0028] In the embodiments of the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, a first feature being "above," "above," or "above" a second feature may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below," "below," or "below" a second feature may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is lower in level than the second feature.

[0029] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the embodiment of the utility model. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and the features of different embodiments or examples without contradiction.

[0030] The following combination Figure 1-6A formic acid injection system according to an embodiment of the present invention is described, comprising a first pressure nitrogen tank 1, a second pressure nitrogen tank 2, a first multi-way valve 7, a second multi-way valve 8, a formic acid concentration analyzer 52, multiple formic acid tanks 4, a mixing tank 5, a storage tank 6, a gas injection assembly, a first switch valve 11 and a second switch valve 21; the first pressure nitrogen tank 1 is connected to the first switch valve 11, the first switch valve 11 is connected to the first multi-way valve 7, the second pressure nitrogen tank 2 is connected to the second switch valve 21, the second switch valve 21 is connected to the first multi-way valve 7, the first multi-way valve 7 is connected to the inlet end of the mixing tank 5, the bottom of the formic acid tank 4 is connected to the second multi-way valve 8, the second multi-way valve 8 is connected to the bottom of the mixing tank 5, the formic acid concentration analyzer 52 is arranged at the top of the mixing tank 5, the outlet end of the mixing tank 5 is connected to the inlet end of the storage tank 6, the upper part of the gas injection assembly is connected to the inlet end of the mixing tank 5, and the lower part of the gas injection assembly is arranged at the bottom of the mixing tank 5. The first multi-way valve 7 is preferably a four-way valve, i.e., the first four-way valve 7. The second multi-way valve 8 is preferably a four-way valve, i.e., the second four-way valve 8. The first four-way valve 7 is sequentially connected to the first flowmeter 9 and the inlet of the mixing tank 5. The inlet of the mixing tank 5 is provided with a mixing tank inlet pipe 53. The outlet of the mixing tank 5 is provided with a mixing tank outlet pipe 54. The top of the first pressure nitrogen tank 1 is also provided with a first inlet pipe 12 for nitrogen charging. The top of the second pressure nitrogen tank 2 is provided with a second inlet pipe 22 for nitrogen charging. The third pressure nitrogen tank 3 is provided with a third inlet pipe 32 for nitrogen charging.

[0031] In some embodiments, a formic acid tank on / off valve 41 is further included. Each formic acid tank 4 is associated with a corresponding formic acid tank, and each formic acid tank on / off valve 41 is connected to the second multi-way valve 8. In other words, each formic acid tank on / off valve 41 controls a corresponding formic acid tank 4. This eliminates the need to replace the formic acid tank 4 for extended periods, improving the efficiency of the vacuum sintering furnace.

[0032] In some embodiments, a second flow meter 69 is further included, and the outlet of the mixing tank 5 is connected to the second flow meter 69 and the inlet of the storage tank 6. A mixed gas switching valve 10 is further included, and the mixed gas switching valve 10 is connected to the second flow meter.

[0033] In some embodiments, a third pressure nitrogen tank 3 and a third switch valve 31 are further included; the third pressure nitrogen tank 3 is connected to the third switch valve 31 , and the third switch valve 31 is connected to the first multi-way valve 7 , that is, the first four-way valve 7 .

[0034] In some embodiments, the pressure of the first pressure nitrogen tank 1 is lower than the pressure of the second pressure nitrogen tank 2 , and the pressure of the second pressure nitrogen tank 2 is lower than the pressure of the third pressure nitrogen tank 3 .

[0035] In some embodiments, the storage tank 6 includes a storage tank body, a temperature sensor 65, a ceramic heater 66, a heating layer 67 and an insulation layer 68; the temperature sensor 65 is arranged inside the storage tank body, the heating layer 67 is arranged on the outer layer of the storage tank body, the insulation layer 68 is arranged on the outer layer of the heating layer 67, and the ceramic heater 66 heats the heating layer 67.

[0036] In some embodiments, the storage tank body further includes a second pressure sensor 61, a second safety pressure relief valve 62, a storage tank inlet pipe 63, and a storage tank outlet pipe 64. The second pressure sensor 61, the second safety pressure relief valve 62, the storage tank inlet pipe 63, and the storage tank outlet pipe 64 are disposed on the top of the storage tank body, and the storage tank inlet pipe 63 is disposed at the inlet end of the storage tank 6. The storage tank outlet pipe 64 is connected to the vacuum sintering furnace.

[0037] In some embodiments, the formic acid tank 4 includes a first low liquid level sensor 42, a first high liquid level sensor 43 and a formic acid inlet pipe; the first low liquid level sensor 42 is set at the lower part of the formic acid tank 4, the first high liquid level sensor 43 is set at the upper part of the formic acid tank 4, and the formic acid inlet pipe is set at the top of the formic acid tank 4.

[0038] In some embodiments, the mixing tank 5 also includes a second low liquid level sensor 56, a first safety pressure relief valve 55, a first pressure sensor 51 and a second high liquid level sensor 57. The second low liquid level sensor 56 is arranged at the bottom of the side of the mixing tank 5, the second high liquid level sensor 57 is arranged in the middle of the mixing tank 5, the first pressure sensor 51 is arranged at the top of the mixing tank 5, and the first safety pressure relief valve 55 is arranged at the top of the mixing tank 5.

[0039] In some embodiments, the gas injection assembly includes a one-way valve, a connecting pipe and a circular pipe; the one-way valve is connected to the connecting pipe and the circular pipe in sequence, the circular pipe is arranged at the inner bottom of the mixing tank, and the circular pipe is provided with multiple through holes.

[0040] A vacuum sintering furnace comprises the formic acid injection system mentioned above.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.

Claims

1. A formic acid injection system, characterized in that: The invention comprises a first pressure nitrogen tank, a second pressure nitrogen tank, a first multi-way valve, a second multi-way valve, a formic acid concentration analyzer, multiple formic acid tanks, a mixing tank, a storage tank, a gas injection assembly, a first switch valve and a second switch valve; the first pressure nitrogen tank is connected to the first switch valve, the first switch valve is connected to the first multi-way valve, the second pressure nitrogen tank is connected to the second switch valve, the second switch valve is connected to the first multi-way valve, the first multi-way valve is connected to the inlet end of the mixing tank, the bottom of the formic acid tank is connected to the second multi-way valve, the second multi-way valve is connected to the bottom of the mixing tank, the formic acid concentration analyzer is arranged at the top of the mixing tank, the outlet end of the mixing tank is connected to the inlet end of the storage tank, the upper part of the gas injection assembly is connected to the inlet end of the mixing tank, and the lower part of the gas injection assembly is arranged at the bottom of the mixing tank.

2. The formic acid injection system according to claim 1, characterized in that: It also includes a formic acid tank switch valve, which is arranged in a one-to-one correspondence with the formic acid tanks and is connected to the second multi-way valve.

3. The formic acid injection system according to claim 1, characterized in that: The device further comprises a second flow meter, wherein the outlet end of the mixing tank is connected to the second flow meter and the inlet end of the storage tank.

4. The formic acid injection system according to claim 1, characterized in that: It also includes a third pressure nitrogen tank and a third switch valve; the third pressure nitrogen tank is connected to the third switch valve, and the third switch valve is connected to the first multi-way valve.

5. The formic acid injection system according to claim 4, characterized in that: The pressure of the first-pressure nitrogen tank is lower than the pressure of the second-pressure nitrogen tank, and the pressure of the second-pressure nitrogen tank is lower than the pressure of the third-pressure nitrogen tank.

6. The formic acid injection system according to claim 1, characterized in that: The storage tank includes a storage tank body, a temperature sensor, a ceramic heater, a heating layer and a thermal insulation layer; the temperature sensor is arranged inside the storage tank body, the heating layer is arranged on the outer layer of the storage tank body, the thermal insulation layer is arranged on the outer layer of the heating layer, and the ceramic heater heats the heating layer.

7. The formic acid injection system according to claim 6, characterized in that: It also includes a second pressure sensor, a second safety pressure relief valve, a storage tank inlet pipe and a storage tank outlet pipe; the second pressure sensor, the second safety pressure relief valve, the storage tank inlet pipe and the storage tank outlet pipe are set on the top of the storage tank body, and the storage tank inlet pipe is set at the inlet end of the storage tank.

8. The formic acid injection system according to claim 1, characterized in that: The formic acid tank includes a first low liquid level sensor, a first high liquid level sensor and a formic acid inlet pipe; the first low liquid level sensor is arranged at the lower part of the formic acid tank, the first high liquid level sensor is arranged at the upper part of the formic acid tank, and the formic acid inlet pipe is arranged at the top of the formic acid tank.

9. The formic acid injection system according to claim 1, characterized in that: The mixing tank also includes a second low liquid level sensor, a first safety pressure relief valve, a first pressure sensor and a second high liquid level sensor. The second low liquid level sensor is arranged at the bottom side of the mixing tank, the second high liquid level sensor is arranged in the middle of the mixing tank, the first pressure sensor is arranged at the top of the mixing tank, and the first safety pressure relief valve is arranged at the top of the mixing tank.

10. The formic acid injection system according to claim 1, wherein: The gas injection assembly includes a one-way valve, a connecting pipe and a circular pipe; the one-way valve is connected to the connecting pipe and the circular pipe in sequence, the circular pipe is arranged at the inner bottom of the mixing tank, and the circular pipe is provided with a plurality of through holes.

11. A vacuum sintering furnace, characterized in that: The invention comprises the formic acid injection system according to any one of claims 1 to 10.

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