Chip test fixing mechanism

Abstract

The utility model discloses a chip test fixing mechanism, and relates to the technical field of failure analysis test mechanisms. Comprising a bearing plate, a lifting assembly is arranged at the top of the bearing plate, the lifting assembly comprises a supporting plate, the supporting plate is fixed to the top of the bearing plate, and a fixing ring is rotationally installed in the middle of the top of the supporting plate. A chip is placed on the top of the placing plate, the rotating shaft rod descends to drive the linkage head to descend, when the linkage head descends to the bottom, the linkage head makes contact with the clamping heads fixedly installed at the two ends of the top of the fixing ring, the fixing ring is driven to rotate, and the side, connected with the top of the fixing ring, of the linkage rod is driven to rotate towards the two ends of the fixing ring. When the linkage rod rotates at the two ends of the fixing ring, the sliding plate can be pulled to slide towards the middle of the supporting plate, and the two sides of a chip placed on the placing plate are fixed, so that the chip can be fixed, and the chip is prevented from moving during scanning.

Description

Technical Field

[0001] The utility model relates to the technical field of analysis and testing mechanisms, in particular to a chip testing and fixing mechanism. Background Art

[0002] Chip failure analysis testing is a test method used to determine the cause of chip failure. During chip failure analysis testing, various instruments and techniques, such as scanning electron microscopes (SEMs), transmission electron microscopes (TEMs), fault analysis electron microscopes (FIBs), and infrared thermography (IR), are typically used to observe the internal structure of the chip and analyze circuit connections, transistor performance, and problems between lines and gaps. An existing scanning electron microscope (Publication No.: CN214441735U) used for wafer inspection has at least the following defects:

[0003] When scanning chip failure tests, the chip needs to be clamped and fixed. If the chip is not properly fixed on the sample stage, it may move or shake slightly during electron beam scanning. This movement may cause the image to lose focus, making it difficult to obtain a clear image. Therefore, a chip test fixing mechanism is proposed. Utility Model Content

[0004] The main purpose of the present invention is to provide a chip testing and fixing mechanism, which can effectively solve the problems in the background technology.

[0005] In order to achieve the above purpose, the technical solution adopted by the utility model is:

[0006] A chip testing fixing mechanism comprises a carrier plate, a lifting assembly is provided on the top of the carrier plate, the lifting assembly comprises a support plate, the support plate and the top of the carrier plate are fixed to each other, a fixing ring is rotatably installed in the middle of the top of the support plate, an axle is installed on the internal thread of the support plate, a placement plate is rotatably installed on the top of the axle, clamps are fixedly installed at both ends of the top of the fixing ring, linkage heads are fixedly installed at both ends of the middle of the outer wall of the axle, a clamping assembly is provided on the top of the support plate, the clamping assembly comprises a slide, and the slide is fixed to both sides of the top of the support plate.

[0007] Preferably, a slide is slidably mounted on the outside of the slideway, a chuck is slidably mounted on the inside of the top of the slide, a linkage rod is provided between the slide and the fixed ring, and the linkage rod is rotationally connected to the slide and the fixed ring.

[0008] Preferably, lifting rods are fixedly installed at the bottoms of both ends of the placement plate, and the bottoms of the lifting rods are fixed to the support plate.

[0009] Preferably, rotating rods are fixedly mounted on both ends of the outer bottom of the shaft rod, and the rotating rods are arranged at the bottom of the support plate.

[0010] Preferably, threaded rods are rotatably mounted inside the two ends of the supporting plate, and a base is threadedly mounted on the bottom of the outer wall of the threaded rod.

[0011] Preferably, a torsion bar is rotatably mounted inside the top of the first side of the supporting plate, and the torsion bar is engaged with the top of the threaded rod.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] The utility model places the chip on the top of the placement plate, rotates the shaft rod to descend, and drives the linkage head to descend. When the linkage head descends to the bottom, it will contact the clamping heads fixedly installed at both ends of the top of the fixed ring, driving the fixed ring to rotate, and driving the side connected to the linkage rod and the top of the fixed ring to rotate toward the two ends of the fixed ring. When the linkage rod rotates at both ends of the fixed ring, it pulls the slide plate to slide toward the middle of the support plate, thereby fixing both sides of the chip placed on the placement plate. In this way, the chip can be fixed to prevent the chip from moving during scanning. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a three-dimensional diagram of the utility model;

[0015] Figure 2 This is a three-dimensional diagram of the clamping assembly of the present utility model;

[0016] Figure 3 This is a three-dimensional diagram of the lifting assembly of the utility model;

[0017] Figure 4 It is a three-dimensional diagram of the base of the present utility model.

[0018] In the figure: 1. Loading plate; 2. Clamping assembly; 201. Slide; 202. Slide plate; 203. Clamp; 204. Linkage rod; 3. Lifting assembly; 301. Support plate; 302. Fixed ring; 303. Rotating rod; 304. Shaft; 305. Placement plate; 306. Clamp; 307. Linkage head; 308. Lifting rod; 4. Base; 5. Threaded rod; 6. Torsion bar. DETAILED DESCRIPTION

[0019] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0020] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "front end," "rear end," "both ends," "one end," "the other end," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc. should be understood in a broad sense. For example, "connected" can mean a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be internal communication between two components. Those skilled in the art will be able to understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0022] When the chip needs to be clamped, the chip testing and fixing mechanism provided by the present invention is compared with a scanning electron microscope for detecting wafers with publication number CN214441735U. When the fixing ring 302 rotates, the device will drive the linkage rod 204 and the side connected to the top of the fixing ring 302 to rotate toward the two ends of the fixing ring 302. When the linkage rod 204 rotates at the two ends of the fixing ring 302, it will pull the slide 202 to slide toward the middle of the support plate 301, and fix the two sides of the chip placed on the placement plate 305, so that the chip can be fixed.

[0023] Example

[0024] See also Figure 1-Figure 4 , the utility model provides a technical solution:

[0025] A chip testing fixing mechanism includes a carrier plate 1, a lifting assembly 3 is provided on the top of the carrier plate 1, the lifting assembly 3 includes a support plate 301, the support plate 301 and the top of the carrier plate 1 are fixed, a fixing ring 302 is rotatably installed in the middle of the top of the support plate 301, an internal thread of the support plate 301 is installed with a shaft rod 304, a placing plate 305 is rotatably installed on the top of the shaft rod 304, a clamping head 306 is fixedly installed at both ends of the top of the fixing ring 302, and a linkage head 307 is fixedly installed at both ends of the middle of the outer wall of the shaft rod 304, a clamping assembly 2 is provided on the top of the support plate 301, the clamping assembly 2 includes a slide 201, the slide 201 and the two sides of the top of the support plate 301 are fixed, a slide plate 202 is slidably installed on the outside of the slide 201, a clamping head 203 is slidably installed on the top of the slide plate 202, a linkage rod 204 is provided between the slide plate 202 and the fixing ring 302, and the linkage rod 204 is rotatably connected to the slide plate 202 and the fixing ring 302.

[0026] In this embodiment, when the chip needs to be clamped, the chip is placed on the top of the placement plate 305 and the shaft rod 304 is rotated to descend. When the shaft rod 304 descends, it will drive the linkage head 307 to descend. When the linkage head 307 descends to the bottom, it will contact the clamping heads 306 fixedly installed at both ends of the top of the fixed ring 302, driving the fixed ring 302 to rotate. When the fixed ring 302 rotates, it will drive the side connected to the linkage rod 204 and the top of the fixed ring 302 to rotate toward the two ends of the fixed ring 302. When the linkage rod 204 rotates at both ends of the fixed ring 302, it will pull the slide plate 202 to slide toward the middle of the support plate 301, fixing both sides of the chip placed on the placement plate 305. In this way, the chip can be fixed to prevent the chip from moving during scanning.

[0027] Among them reference Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 It can be seen that in the present application, lifting rods 308 are fixedly installed at the bottom of both ends of the placing plate 305, the bottom of the lifting rod 308 is fixed to the support plate 301, and rotating rods 303 are fixedly installed at both ends of the outer bottom of the shaft rod 304. The rotating rod 303 is arranged at the bottom of the support plate 301, and the threaded rod 5 is installed internally and rotatably at both ends of the supporting plate 1. The bottom thread of the outer wall of the threaded rod 5 is threadedly installed with a base 4, and the top of the first side of the supporting plate 1 is rotatably installed with a torsion rod 6, and the torsion rod 6 is engaged with the top of the threaded rod 5.

[0028] In this embodiment, when the chip needs to be clamped, the rotating rods 303 fixedly installed at both ends of the bottom of the outer side of the shaft 304 can be conveniently twisted to allow the shaft 304 to rotate, and the lifting rods 308 fixedly installed at both ends of the bottom of the placement plate 305 can limit the lifting of the placement plate 305 when the placement plate 305 is lifted or lowered. By twisting the torsion rod 6 rotatably installed inside the top of the first side of the supporting plate 1, the torsion rod 6 will engage with the top of the threaded rod 5, drive the threaded rod 5 to rotate, and allow the threaded rod 5 to rise inside the base 4 to adjust the height of the supporting plate 1 for use in conjunction with a scanning electron microscope.

[0029] Working principle: By placing the chip on the top of the placement plate 305, rotating the shaft 304 to descend, the shaft 304 will drive the linkage head 307 to descend, and when the linkage head 307 descends to the bottom, it will contact the clamping heads 306 fixed at both ends of the top of the fixed ring 302, driving the fixed ring 302 to rotate. When the fixed ring 302 rotates, it will drive the linkage rod 204 and the side of the connection between the top of the fixed ring 302 and the top of the fixed ring 302 to rotate toward the two ends of the fixed ring 302. When the linkage rod 204 rotates at both ends of the fixed ring 302, it will pull the slide 202 to slide toward the middle of the support plate 301, and adjust the two sides of the chip placed on the placement plate 305. The chip can be fixed so as to prevent it from moving during scanning. The rotating rods 303 fixedly installed at both ends of the bottom of the shaft 304 can be easily twisted to allow the shaft 304 to rotate. The lifting rods 308 fixedly installed at both ends of the bottom of the placement plate 305 can limit the lifting of the placement plate 305 when the placement plate 305 is lifted. By twisting the torsion rod 6 rotatably installed inside the top of the first side of the carrier plate 1, the torsion rod 6 will engage with the top of the threaded rod 5 to drive the threaded rod 5 to rotate, allowing the threaded rod 5 to rise inside the base 4 to adjust the height of the carrier plate 1 for use in conjunction with a scanning electron microscope.

[0030] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The above embodiments and descriptions are merely illustrative of the principles of the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and improvements are intended to fall within the scope of the present invention. The scope of protection claimed in this invention is defined by the appended claims and their equivalents.

Claims

1. A chip test fixing mechanism, comprising a carrier plate (1), characterized in that: A lifting assembly (3) is provided on the top of the supporting plate (1), and the lifting assembly (3) includes a support plate (301), the support plate (301) and the top of the supporting plate (1) are fixed to each other, a fixing ring (302) is rotatably installed in the middle of the top of the supporting plate (301), a shaft (304) is installed on the internal thread of the supporting plate (301), a placement plate (305) is rotatably installed on the top of the shaft (304), a clamping head (306) is fixedly installed at both ends of the top of the fixing ring (302), and a linkage head (307) is fixedly installed at both ends of the middle of the outer wall of the shaft (304), and a clamping assembly (2) is provided on the top of the supporting plate (301), and the clamping assembly (2) includes a slideway (201), and the slideway (201) and the two sides of the top of the supporting plate (301) are fixed to each other.

2. The chip test fixing mechanism according to claim 1, characterized in that: A slide plate (202) is slidably mounted on the outside of the slideway (201), a chuck (203) is slidably mounted on the inside of the top of the slide plate (202), a linkage rod (204) is provided between the slide plate (202) and the fixed ring (302), and the linkage rod (204) is rotatably connected to the slide plate (202) and the fixed ring (302).

3. The chip test fixing mechanism according to claim 1, characterized in that: Lifting rods (308) are fixedly installed at the bottoms of both ends of the placement plate (305), and the bottoms of the lifting rods (308) are fixed to the support plate (301).

4. The chip test fixing mechanism according to claim 1, characterized in that: Rotating rods (303) are fixedly mounted on both ends of the outer bottom of the shaft (304), and the rotating rods (303) are arranged at the bottom of the support plate (301).

5. The chip test fixing mechanism according to claim 1, characterized in that: Threaded rods (5) are rotatably mounted inside the two ends of the bearing plate (1), and a base (4) is threadedly mounted on the bottom of the outer wall of the threaded rod (5).

6. The chip test fixing mechanism according to claim 1, characterized in that: A torsion bar (6) is rotatably mounted inside the top of the first side of the carrier plate (1), and the torsion bar (6) is engaged with the top of the threaded rod (5).

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