Testing device

Abstract

The utility model relates to the technical field of packaging test equipment, and particularly discloses a test device, which comprises a test seat and a pressure head assembly, the test seat is provided with a test probe; the pressure head assembly can adsorb a to-be-tested workpiece and can be close to or far away from the test seat, and when the pressure head assembly is close to the test seat, the pins are electrically connected with the test probes; the pressing head assembly comprises a moving part, a first insulating heat conduction part, a second insulating heat conduction part and a suction nozzle, and the first insulating heat conduction part is connected with the moving part at the first connecting part and used for abutting against the pin; the second insulating heat conduction piece is connected with the moving piece at the second connecting part and is used for pressing against the top surface of the packaging body; and the suction nozzle is connected with the moving part at the third connecting part and is used for adsorbing the top surface of the packaging body. The above settings can improve the test efficiency and the accuracy of the test result.

Description

Technical Field

[0001] The utility model relates to the technical field of packaging test equipment, in particular to a testing device. Background Art

[0002] Packaging testing is actually post-packaging testing. The process of confirming the structure and electrical functions of manufactured semiconductor components to ensure that the semiconductor components meet the system requirements is called post-packaging testing.

[0003] During the packaging test process, the pins of the package and the test probes need to be electrically connected to complete the performance test of the package. However, during the test process, in order to avoid the influence of static electricity on the test, especially under high voltage conditions, the pressure head structure of the conventional pressing package cannot meet the thermal conductivity and insulation requirements, resulting in poor test results, affecting test efficiency and the accuracy of test results.

[0004] Therefore, it is urgent to develop a testing device to solve the problems of low testing efficiency and even poor accuracy of test results. Utility Model Content

[0005] The purpose of the utility model is to provide a testing device to solve the problems of low testing efficiency and even poor accuracy of test results in packaging testing in the prior art.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A test device comprising a test socket and a pressure head assembly, wherein the test socket is provided with a test probe; the pressure head assembly can absorb a workpiece to be tested having a package body and pins, and can move closer to or further away from the test socket. When the pressure head assembly approaches the test socket, it can drive the workpiece to be tested into the test socket, and the pins and the test probes are electrically connected;

[0008] The pressure head assembly includes:

[0009] A moving member, wherein the moving member is provided with a first connecting portion, a second connecting portion and a third connecting portion;

[0010] a first insulating heat-conducting member, connected to the moving member at a first connecting portion and configured to press against the pin;

[0011] a second insulating heat-conducting member connected to the moving member at a second connecting portion and configured to press against a top surface of the package body;

[0012] A suction nozzle is connected to the moving part at the third connection portion and is used for sucking the top surface of the package body.

[0013] As an optional technical solution of the testing device, the movable member is provided with a vent hole, the vent hole forms the third connecting portion, and the inlet end of the suction nozzle is inserted into and interference-fitted in the vent hole.

[0014] As an optional technical solution for a testing device, the vent expands outward at the outlet to form an outward expansion channel, the outward expansion channel forms the second connecting portion, the second insulating heat conductive part is provided with a through adsorption channel, the plug-in portion at the upper end of the second insulating heat conductive part is interference fit on the inner side of the outward expansion channel, and the suction nozzle is passed through the adsorption channel.

[0015] As an optional technical solution for a testing device, the adsorption channel includes an upper channel, a middle channel and a lower channel that are connected in sequence, and the inner diameters of the upper channel, the middle channel and the lower channel increase in sequence; the suction nozzle includes a connecting tube and an adsorption head, the adsorption head is sleeved on the lower end of the connecting tube, the outer side wall of the connecting tube protrudes outward to form a tube limiting portion for limiting the adsorption head, the adsorption end of the adsorption head has a deformation portion, the connecting tube is inserted into the vent, and the part of the connecting tube away from the adsorption head with the tube limiting portion as the boundary is located in the upper channel, the adsorption head outside the tube limiting portion and the deformation portion is located in the middle channel, part of the deformation portion is located in the lower channel, and part of it is located outside the lower channel.

[0016] As an optional technical solution for a testing device, the outer tube diameter of the upper part of the second insulating heat-conducting part is shrunk to form the plug-in part, and the second insulating heat-conducting part forms a stop surface perpendicular to the center line of the adsorption channel at the lower end of the plug-in part. The lower end surface of the movable part extends downward to form a mounting tube, and the mounting tube is arranged around the outer periphery of the vent hole, and the stop surface abuts against the lower end surface of the mounting tube.

[0017] As an optional technical solution for a testing device, one of the indenter assembly and the test seat is provided with a guide pin, and the other is provided with a guide groove. When the indenter assembly is close to the test seat, the guide pin is inserted into the guide groove.

[0018] As an optional technical solution of the testing device, the bottom surface of the movable member is concavely provided with an annular groove to form the first connecting portion, the first insulating heat-conducting member is provided with a crimping channel and has a cylindrical structure, the first insulating heat-conducting member is interference-fitted in the annular groove, the second insulating heat-conducting member is passed through the crimping channel, the bottom surfaces of the two side walls opposite to each other along the first direction of the lower end of the first insulating heat-conducting member respectively extend downward to form two crimping protrusions, the two crimping protrusions correspond to the two rows of pins of the workpiece to be tested, and the two crimping protrusions are arranged to crimp the two rows of pins to the two rows of test probes when the pressure head assembly approaches the test seat;

[0019] and / or,

[0020] The bottom surfaces of the two side walls opposite to each other at the lower end of the first insulating heat-conducting member along the second direction each extend downward to form two stop protrusions, and a second guide slope is provided on each opposite side of the two stop protrusions, and the distance between the two second guide slopes gradually increases in the direction approaching the test seat.

[0021] As an optional technical solution for the test device, a first guiding slope is provided at the lower end of each of the two crimping protrusions on the opposite side, and the distance between the two first guiding slopes gradually increases in the direction approaching the test seat.

[0022] As an optional technical solution for the testing device, the outer side surfaces of the two side walls of the top of the first insulating heat-conducting component along the second direction are respectively extended outward to form two extended portions, and the extended portions are located in the annular groove.

[0023] As an optional technical solution of the testing device, the movable member is provided with a mounting channel, the press head assembly further includes a heating member, the heating member is provided in the mounting channel and is used to generate heat, and the first insulating heat-conducting member and the second insulating heat-conducting member can both transfer the heat generated by the heating member to the workpiece to be tested; and / or

[0024] The movable part is provided with a vent hole, the vent hole forms the third connecting portion, the inlet end of the suction nozzle is plugged into the vent hole, and the movable part is provided with a cold air channel, the cold air channel is connected to an external refrigeration device and the vent hole.

[0025] The beneficial effects of the utility model are:

[0026] The utility model provides a test device, which includes a test seat and a pressure head assembly. When the pressure head assembly is close to the test seat, it can contact the pins of the workpiece to be tested with the test probe, wherein the pressure head assembly includes a moving part, a first insulating heat conductive part, a second insulating heat conductive part and a suction nozzle. The suction nozzle can adsorb the workpiece to be tested so that the top surface of the package body in the workpiece to be tested abuts the second insulating heat conductive part. The first insulating heat conductive part is used to press the pins so that a more stable electrical connection is completed between the pins and the test probe to complete the electrical performance test. In addition, the first insulating heat conductive part and the second insulating heat conductive part have insulating heat conductive properties, so that when heat passes through the moving part, it can be quickly transferred to the workpiece to be tested and its pins through the first insulating heat conductive part and the second insulating heat conductive part to complete the high and low temperature test of the workpiece to be tested, which helps to improve the test efficiency and the accuracy of the test results. In addition, the first insulating heat conductive part and the second insulating heat conductive part can heat the package body and the pins of the workpiece to be tested synchronously, so that the temperature of the package body and the pins is the same, avoiding the temperature difference between the two to have an adverse effect on the test results. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a schematic structural diagram of a testing device in an embodiment of the present utility model;

[0028] Figure 2 This is a cross-sectional view of a testing device in an embodiment of the present utility model;

[0029] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0030] Figure 4 This is a structural diagram of the moving part, the second insulating heat-conducting part, the adsorption head, and the workpiece to be measured in an embodiment of the present utility model;

[0031] Figure 5 This is a schematic structural diagram of the first insulating heat-conducting member in an embodiment of the present utility model;

[0032] Figure 6 This is a schematic structural diagram of the second insulating heat-conducting member in an embodiment of the present utility model;

[0033] Figure 7 It is a schematic diagram of the assembly structure of the moving part and the first insulating heat-conducting part in an embodiment of the utility model.

[0034] In the picture:

[0035] X, first direction; Y, second direction; Z, third direction;

[0036] 1. Workpiece to be tested; 11. Package body; 12. Pins;

[0037] 1000, test socket;

[0038] 2000, press head assembly;

[0039] 100, moving part; 110, vent hole; 120, outward expansion channel; 130, mounting tube; 140, annular groove;

[0040] 200, first insulating heat conducting member; 210, crimping channel; 220, crimping protrusion; 221, first guiding slope; 222, avoidance slope; 230, stop protrusion; 231, second guiding slope; 240, extension portion;

[0041] 300, second insulating heat-conducting member; 310, adsorption channel; 311, upper channel; 312, middle channel; 313, lower channel; 320, plug-in portion; 330, stop surface;

[0042] 400, suction nozzle; 410, connecting tube; 411, tube limiting portion; 420, adsorption head; 421, deformation portion; 500, heating element. DETAILED DESCRIPTION

[0043] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0044] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the devices or elements referred to must have a specific position, be constructed and operated in a specific position, and therefore should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions, and the first feature being "above", "above" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. The first feature being "below", "below" and "below" the second feature includes the first feature being directly below and obliquely below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0045] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0046] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0047] like Figures 1 to 7As shown, this embodiment provides a test device to improve test efficiency and the accuracy of test results. The test device includes a test socket 1000 and a pressure head assembly 2000; the test socket 1000 is provided with a test probe; the pressure head assembly 2000 can absorb the workpiece 1 to be tested having a package body 11 and pins 12, and can approach or move away from the test socket 1000. When the pressure head assembly 2000 approaches the test socket 1000, it can drive the workpiece 1 to be tested into the test socket 1000, and the pins 12 and the test probe are electrically connected; the pressure head assembly 2000 includes a moving part 100, a first insulating heat-conducting part 200, a second insulating heat-conducting part 300 and a suction nozzle 400, wherein the moving part 100 is provided with a first connecting part, a second connecting part and a third connecting part. Three connecting parts; the first insulating thermal conductive part 200 is connected to the movable part 100 at the first connecting part, and the first insulating thermal conductive part 200 is used to press the pin 12; the second insulating thermal conductive part 300 is connected to the movable part 100 at the second connecting part, and the second insulating thermal conductive part 300 is used to press the top surface of the packaging body 11; the suction nozzle 400 is connected to the movable part 100 at the third connecting part, and the suction nozzle 400 is used to adsorb the top surface of the packaging body 11; among the movable part 100, the first insulating thermal conductive part 200 and the second insulating thermal conductive part 300, at least the first insulating thermal conductive part 200 and the second insulating thermal conductive part 300 are made of ceramic material.

[0048] The first insulating heat-conducting member 200 and the second insulating heat-conducting member 300 are both made of PCD ceramic, zirconia ceramic, SIC ceramic, Si3N4 ceramic, BeO ceramic or AIN ceramic.

[0049] The suction nozzle 400 in the test device can absorb the workpiece 1 to be tested so that the top surface of the packaging body 11 in the workpiece 1 to be tested abuts against the second insulating thermal conductive member 300, thereby positioning the workpiece 1 to be tested relative to the pressure head assembly 2000. When the pressure head assembly 2000 is close to the test socket 1000, the pin 12 of the workpiece 1 to be tested can be brought into contact with the test probe, wherein the first insulating thermal conductive member 200 is used to crimp the pin 12 so that a more stable electrical connection is achieved between the pin 12 and the test probe to complete the electrical performance test. In addition, since at least the first insulating thermal conductive member 200 and the second insulating thermal conductive member 300 are made of ceramic material among the movable member 100, the heat can be quickly transferred to the workpiece 1 to be tested and its pin 12 through the first insulating thermal conductive member 200 and the second insulating thermal conductive member 300 made of ceramic material when the heat passes through the movable member 100, thereby completing the high and low temperature test of the workpiece 1 to be tested. Ceramic has good insulation and good thermal conductivity, which prevents static electricity from affecting the test results while helping to improve the test efficiency and the accuracy of the test results. In addition, the first insulating thermal conductive member 200 and the second insulating thermal conductive member 300 can heat the package body 11 and the pin 12 of the workpiece 1 to be tested simultaneously, so that the temperature of the package body 11 and the pin 12 are the same, avoiding the temperature difference between the two to have an adverse effect on the test results.

[0050] Combine Figures 3 to 5 As shown, in some embodiments, the workpiece 1 to be measured is a chip, including a package body 11 and pins 12, wherein the pins 12 are located around the package body 11. To adapt to this structure, the relative positions of the first insulating thermal conductive member 200 and the second insulating thermal conductive member 300 need to be reasonably arranged. In some embodiments, the bottom surface of the movable part 100 is concavely provided with an annular groove 140 to form a first connecting portion, the first insulating thermal conductive part 200 is provided with a crimping channel 210 and has a cylindrical structure, the upper end of the first insulating thermal conductive part 200 is interference fit in the annular groove 140, the second insulating thermal conductive part 300 is passed through the crimping channel 210, and the bottom surfaces of the two opposite side walls along the first direction X of the lower end of the first insulating thermal conductive part 200 respectively extend downward to form two crimping protrusions 220, the two crimping protrusions 220 correspond to the two rows of pins 12 of the workpiece 1 to be tested, and the two crimping protrusions 220 are arranged to crimp the two rows of pins 12 onto the two rows of test probes when the pressure head assembly 2000 is close to the test seat 1000. Among them, the setting of the annular groove 140, on the one hand, provides position guidance for the installation of the first insulating heat-conducting part 200, thereby improving assembly efficiency; on the other hand, it can achieve interference fit between the movable part 100 and the first insulating heat-conducting part 200, thereby improving connection strength, avoiding the use of screws in a narrow installation space, improving installation efficiency, and reducing assembly difficulty.

[0051] Generally, the movable part 100 is driven by a mechanism such as a robotic arm. After the movable part 100 is moved to the top of the workpiece 1 to be tested, it is moved downward. When the suction nozzle 400 contacts the workpiece 1 to be tested, the suction nozzle 400 works and sucks the workpiece 1 to be tested, and then transfers the workpiece 1 to be tested to the top of the test socket 1000, and then moves downward so that the pin 12 of the workpiece 1 to be tested is electrically connected to the test probe. However, if the relative position between the two deviates when the suction nozzle 400 adsorbs the workpiece 1 to be tested, it will affect the precise connection between the pin 12 and the test probe. To this end, in some embodiments, a first guide bevel 221 is provided at the lower end of each side opposite to the two crimping protrusions 220, and the distance between the two first guide bevels 221 gradually increases in the direction close to the test socket 1000. In particular, when the suction nozzle 400 adsorbs the workpiece 1 to be tested, the two first guide bevels 221 are clamped on both sides of the two rows of pins 12. This arrangement allows the movable part 100 to move downwards. If there is a small deviation between the workpiece 1 to be tested and the suction nozzle 400 in the first direction X, the first guide slope 221 and the pin 12 cooperate to push the workpiece 1 to be tested to move, thereby making the relative position between the workpiece 1 to be tested and the suction nozzle 400 accurate, so that the pin 12 of the workpiece 1 to be tested and the test probe can be accurately docked.

[0052] Furthermore, the bottom surfaces of the two side walls of the lower end of the first insulating heat-conducting member 200 that are opposite to each other in the second direction Y each extend downward to form two stop protrusions 230. A second guide slope 231 is provided on each side opposite to the other of the two stop protrusions 230. The distance between the two second guide slopes 231 gradually increases as it approaches the test socket 1000. With the above structure, before adsorbing the workpiece 1 to be tested, the movable member 100 is located directly above the workpiece 1 to be tested. During the downward movement of the movable member 100, if there is a small deviation between the workpiece 1 to be tested and the suction nozzle 400 in the second direction Y, the second guide slope 231 and the package body 11 cooperate to push the workpiece 1 to be tested to move, thereby making the relative position between the workpiece 1 to be tested and the suction nozzle 400 accurate, so that the pin 12 of the workpiece 1 to be tested and the test probe can be accurately connected. The first direction X and the second direction Y are perpendicular.

[0053] Combine Figure 5 and Figure 7 As shown, to improve the heat conduction effect between the first insulating heat-conducting member 200 and the moving member 100, in some embodiments, the outer side surfaces of the two side walls of the top of the first insulating heat-conducting member 200 along the second direction Y are respectively extended outward to form two extension portions 240, and the extension portions 240 are located in the annular groove 140. Due to the presence of the extension portions 240, the contact area between the first insulating heat-conducting member 200 and the moving member 100 is increased, thereby making it easier for heat to be transferred from the moving member 100 to the first insulating heat-conducting member 200.

[0054] The movable member 100 is provided with a mounting channel, and the pressure head assembly 2000 further includes a heating member 500, which is disposed within the mounting channel. The heating member 500 is used to generate heat, and the first insulating heat-conducting member 200 and the second insulating heat-conducting member 300 can both transfer the heat generated by the heating member 500 to the workpiece 1 to be measured. This arrangement allows the heat of the heating member 500 to be fully absorbed by the movable member 100, thereby improving the utilization rate of the heat generated by the heating member 500. The heating member 500 is in the shape of an elongated strip, arranged along the second direction Y, and at least partially located on the upper side of the first insulating heat-conducting member 200, so as to facilitate faster heat transfer to the first insulating heat-conducting member 200.

[0055] In other embodiments, the heating component may be implemented by other external heating mechanisms and is not necessarily disposed inside the moving part 100 .

[0056] To facilitate installation of the suction nozzle 400, in some embodiments, the movable member 100 is provided with a vent hole 110, which forms a third connection portion, and the inlet end of the suction nozzle 400 is inserted into and interference-fitted into the vent hole 110. This arrangement fully utilizes the inherent structure of the movable member 100, avoids the need for an additional ventilation line, reduces costs, and improves the appearance of the movable member 100.

[0057] The vent 110 expands outward at the outlet to form an outward expansion channel 120, which forms a second connecting portion. The second insulating and thermally conductive member 300 is provided with a through-going adsorption channel 310. The plug-in portion 320 at the upper end of the second insulating and thermally conductive member 300 is interference-fitted with the inner side of the outward expansion channel 120, and the suction nozzle 400 is disposed within the adsorption channel 310. This arrangement ensures the connection strength between the second insulating and thermally conductive member 300 and the movable member 100, avoids the need for a screw connection mechanism in a narrow space, and improves assembly convenience and efficiency.

[0058] Combine Figure 4As shown, in the third direction Z perpendicular to the first direction X and the second direction Y, in order to ensure the relative position accuracy between the suction nozzle 400 and the second insulating heat-conducting member 300, in some embodiments, the adsorption channel 310 includes an upper channel 311, a middle channel 312 and a lower channel 313 connected in sequence, and the inner diameters of the upper channel 311, the middle channel 312 and the lower channel 313 increase in sequence; the suction nozzle 400 includes a connecting tube 410 and an adsorption head 420, and the adsorption head 420 is sleeved on the lower end of the connecting tube 410, and connected The outer wall of the tube 410 bulges outward to form a tube limiting portion 411 for limiting the adsorption head 420. The adsorption end of the adsorption head 420 has a deformation portion 421. The connecting tube 410 is inserted into the vent 110, and the part of the connecting tube 410 away from the adsorption head 420 with the tube limiting portion 411 as the boundary is located in the upper channel 311. The adsorption head 420 outside the tube limiting portion 411 and the deformation portion 421 is located in the middle channel 312, and part of the deformation portion 421 is located in the lower channel 313, and part of it is located outside the lower channel 313. During assembly, it is only necessary to abut the tube limit portion 411 against the step between the upper channel 311 and the middle channel 312; at the same time, part of the deformation portion 421 is located in the lower channel 313, so that in the process of the movable part 100 moving down and approaching the workpiece 1 to be measured, the deformation portion 421 located outside the lower channel 313 first contacts the packaging body 11 of the workpiece 1 to be measured, and the movable part 100 continues to move downward to cause the deformation portion 421 to deform and abut against the upper surface of the packaging body 11, so that the packaging body 11 can block the opening of the adsorption head 420 for subsequent successful adsorption; at the same time, the abutment of the lower end of the second insulating heat conductive part 300 and the packaging body 11 is the limit position for the movable part 100 to continue to move downward, so as to avoid damage to the adsorption head 420; finally, the diameter of the lower channel 313 is the largest, so that after the deformation portion 421 is deformed outward, it avoids interference with the side wall of the lower channel 313. It should be noted that, during the downward movement of the moving part 100, the pressure generated by the abutment between the lower end of the second insulating heat-conducting part 300 and the packaging body 11 can be used as feedback to determine the extreme downward position of the moving part 100, that is, during the downward movement of the moving part 100, after the pressure generated by the abutment between the lower end of the second insulating heat-conducting part 300 and the packaging body 11 is equal to the preset pressure value, the moving part 100 stops moving downward.

[0059] In addition, after the workpiece 1 to be tested is transferred to the test socket 1000, when the pin 12 and the test probe are in contact, in order to ensure good contact between the two, the movable part 100 continues to move downward, so that the test probe moves downward elastically. During this process, the first insulating thermal conductive part 200 abuts against the upper side of the pin 12 to prevent the pin 12 from warping up.

[0060] To facilitate low-temperature testing, in some embodiments, the movable member 100 is provided with a cold air channel that connects the external refrigeration equipment and the vent 110. This configuration allows the cold air generated by the external refrigeration equipment to pass through the cold air channel, thereby reducing the temperature of the movable member 100. The heat of the workpiece 1 to be tested is transferred to the movable member 100 via the first insulating heat-conducting member 200 and the second insulating heat-conducting member 300, thereby achieving rapid cooling of the workpiece 1 to be tested. At the same time, the cold air enters the vent 110 through the vent channel and can be directly released to the surface of the workpiece 1 to be tested through the suction nozzle 400, thereby achieving higher cooling efficiency.

[0061] Because the test socket 1000 is provided with a test slot and the test probe is located at the bottom of the test slot, when the cold air flows out through the adsorption head 420, it flows outward along the gap between the adsorption head 420 and the package body 11, thereby diffusing into the entire test slot, thereby simultaneously cooling the package body 11 and the pins 12, thereby improving the temperature consistency between the two.

[0062] In this embodiment, the cold air can also provide positive air pressure when the suction nozzle 400 releases the workpiece 1 to be measured, thereby reducing the supply of positive air pressure at room temperature and lowering costs.

[0063] A avoidance slope 222 is provided at the lower end of each of the two crimping protrusions 220 on the opposite side, and the distance between the two avoidance slopes 222 gradually decreases in the direction approaching the test seat 1000, so that when the workpiece 1 to be tested moves downward, there can be a sufficient safety distance between the crimping protrusion 220 and the wall of the test slot to avoid collision.

[0064] Combine Figure 4 and Figure 6 As shown, in the third direction Z, in order to ensure the relative position relationship between the second insulating heat-conducting member 300 and the movable member 100, in some embodiments, the outer tube diameter of the upper part of the second insulating heat-conducting member 300 is shrunk to form a plug-in portion 320, and the second insulating heat-conducting member 300 forms a stop surface 330 perpendicular to the center line of the adsorption channel 310 at the lower end of the plug-in portion 320, and the lower end surface of the movable member 100 extends downward to form a mounting tube 130, which is arranged around the outer periphery of the vent hole 110, and the stop surface 330 abuts against the lower end surface of the mounting tube 130.

[0065] To ensure precise docking with the test socket 1000 during the downward movement of the indenter assembly 2000, in some embodiments, one of the indenter assembly 2000 and the test socket 1000 is provided with a guide pin and the other with a guide slot. When the indenter assembly 2000 approaches the test socket 1000, the guide pin engages with the guide slot. The guide slots provided on the movable member 100 and the guide pins provided on the test socket 1000 minimize energy consumption of the movable member 100 during movement, thereby reducing testing costs.

[0066] Obviously, the above embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. Those skilled in the art will appreciate that other variations or modifications can be made based on the above description. It is not necessary and impossible to enumerate all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A testing device, comprising a test seat (1000) and a pressure head assembly (2000), wherein the test seat (1000) is provided with a test probe; the pressure head assembly (2000) can absorb a workpiece (1) to be tested having a package body (11) and pins (12), and can approach or move away from the test seat (1000); when the pressure head assembly (2000) approaches the test seat (1000), it can drive the workpiece (1) to be tested into the test seat (1000), and the pins (12) and the test probe are electrically connected; It is characterized in that The pressure head assembly (2000) comprises: A moving member (100), wherein the moving member (100) is provided with a first connecting portion, a second connecting portion, and a third connecting portion; a first insulating heat-conducting member (200), the first insulating heat-conducting member (200) being connected to the moving member (100) at a first connecting portion and being used to press against the pin (12); a second insulating heat-conducting member (300), the second insulating heat-conducting member (300) being connected to the moving member (100) at a second connecting portion and being used to press against the top surface of the packaging body (11); A suction nozzle (400) is connected to the moving part (100) at a third connection portion and is used for adsorbing the top surface of the packaging body (11).

2. The testing device according to claim 1, characterized in that The movable member (100) is provided with a vent hole (110), the vent hole (110) forming the third connecting portion, and the inlet end of the suction nozzle (400) is plugged into and interference-fitted in the vent hole (110).

3. The testing device according to claim 2, characterized in that The vent hole (110) expands outward at the outlet to form an outward expansion channel (120), and the outward expansion channel (120) forms the second connecting portion. The second insulating heat-conducting member (300) is provided with a through adsorption channel (310). The plug-in portion (320) at the upper end of the second insulating heat-conducting member (300) is interference-fitted with the inner side of the outward expansion channel (120), and the suction nozzle (400) is inserted into the adsorption channel (310).

4. The testing device according to claim 3, characterized in that: The adsorption channel (310) includes an upper channel (311), a middle channel (312) and a lower channel (313) which are connected in sequence, and the inner diameters of the upper channel (311), the middle channel (312) and the lower channel (313) increase in sequence; the suction nozzle (400) includes a connecting tube (410) and an adsorption head (420), the adsorption head (420) is sleeved on the lower end of the connecting tube (410), the outer side wall of the connecting tube (410) is convex outward to form a tube limiting portion (411) for limiting the adsorption head (420), and the adsorption head (420) is provided on the outer side wall of the connecting tube (410). The adsorption end of (420) has a deformation portion (421), the connecting tube (410) is inserted into the vent hole (110), and the portion of the connecting tube (410) away from the adsorption head (420) with the tube limiting portion (411) as the boundary is located in the upper channel (311), the adsorption head (420) outside the tube limiting portion (411) and the deformation portion (421) is located in the middle channel (312), and part of the deformation portion (421) is located in the lower channel (313), and part of it is located outside the lower channel (313).

5. The testing device according to claim 3, characterized in that: The outer tube diameter of the upper part of the second insulating heat-conducting member (300) is contracted to form the plug-in portion (320); the second insulating heat-conducting member (300) forms a stop surface (330) perpendicular to the center line of the adsorption channel (310) at the lower end of the plug-in portion (320); the lower end surface of the movable member (100) extends downward to form a mounting tube (130); the mounting tube (130) is arranged around the outer periphery of the vent hole (110), and the stop surface (330) abuts against the lower end surface of the mounting tube (130).

6. The testing device according to any one of claims 1 to 5, characterized in that: One of the press head assembly (2000) and the test seat (1000) is provided with a guide pin, and the other is provided with a guide groove. When the press head assembly (2000) is close to the test seat (1000), the guide pin is inserted into the guide groove.

7. The testing device according to any one of claims 1 to 5, characterized in that: The bottom surface of the movable part (100) is concavely provided with an annular groove (140) to form the first connecting portion, the first insulating heat-conducting part (200) is provided with a crimping channel (210) and has a cylindrical structure, the first insulating heat-conducting part (200) is interference-fitted in the annular groove (140), the second insulating heat-conducting part (300) is passed through the crimping channel (210), the bottom surfaces of the two side walls of the lower end of the first insulating heat-conducting part (200) opposite to each other in the first direction (X) respectively extend downward to form two crimping protrusions (220), the two crimping protrusions (220) correspond to the two rows of pins (12) of the workpiece (1) to be tested, and the two crimping protrusions (220) are arranged to crimp the two rows of pins (12) onto the two rows of test probes when the pressure head assembly (2000) is close to the test seat (1000); and / or, The bottom surfaces of the two side walls opposite to each other along the second direction (Y) at the lower end of the first insulating heat-conducting member (200) each extend downward to form two stop protrusions (230), and a second guide inclined surface (231) is provided on each opposite side of the two stop protrusions (230), and the distance between the two second guide inclined surfaces (231) gradually increases in a direction approaching the test seat (1000).

8. The testing device according to claim 7, characterized in that: A first guiding inclined surface (221) is respectively provided at the lower end of the two pressing protrusions (220) on the opposite side, and the distance between the two first guiding inclined surfaces (221) gradually increases in a direction approaching the test seat (1000).

9. The testing device according to claim 7, characterized in that: The outer side surfaces of the two side walls of the top of the first insulating heat-conducting member (200) along the second direction (Y) are respectively extended outward to form two extended portions (240), and the extended portions (240) are located in the annular groove (140).

10. The testing device according to any one of claims 1 to 5, characterized in that: The movable member (100) is provided with a mounting channel, the pressing head assembly (2000) further comprises a heating member (500), the heating member (500) is provided in the mounting channel and is used to generate heat, and the first insulating heat-conducting member (200) and the second insulating heat-conducting member (300) are both capable of transferring the heat generated by the heating member (500) to the workpiece (1) to be measured; and / or The movable part (100) is provided with a vent hole (110), the vent hole (110) forms the third connecting portion, the inlet end of the suction nozzle (400) is plugged into the vent hole (110), and the movable part (100) is provided with a cold air channel, the cold air channel is connected to an external refrigeration device and the vent hole (110).

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