Position correction jig and semiconductor equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a position correction jig and semiconductor equipment, and the position correction jig comprises a correction main body and an installation seat. The correction main body is arranged on the mounting seat, and an alignment reference is arranged on the correction main body; the mounting base is provided with a mounting structure used for being mounted on a machine table. The position correction jig can be used for directly calibrating the position of the transmission device, the correction precision of the transmission device is improved, and the correction efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a position correction fixture and semiconductor equipment. Background Art

[0002] In semiconductor processing technology, a transfer device is usually required to transport components. For example, in equipment such as heating, cooling, diffusion, oxidation, physical vapor deposition, etching and chemical vapor deposition, a transfer device is required to transfer the corresponding wafers to the process chamber of the corresponding equipment.

[0003] The position accuracy of the transmission device directly affects the transmission accuracy of the components, which in turn affects the processing technology of the components, and thus affects the processing quality and yield rate. Therefore, the position of the transmission device needs to be regularly corrected.

[0004] The existing position correction method mainly uses a transfer device to transfer a dummy wafer to a rough position, then visually observes the position of the dummy wafer in the chamber, and then adjusts the position of the transfer device based on experience to achieve the correction of the transfer device position.

[0005] For some process equipment, the limited operating space and imprecise visual inspection within the process chambers of these devices result in poor accuracy and inefficient calibration. A 1-2mm error in wafer transfer can compound and lead to unstable process uniformity, resulting in high product scrap rates and prolonged downtime.

[0006] To this end, the present invention provides a position correction jig and a semiconductor device. The jig can be used as a position reference for a transmission device for position correction of the transmission device. Utility Model Content

[0007] The purpose of the utility model is to provide a position correction jig and a semiconductor device, wherein the position correction jig can be used to directly calibrate the position of a transmission device, thereby improving the correction accuracy of the transmission device and improving the correction efficiency.

[0008] The utility model provides a position correction jig, comprising a correction body and a mounting seat;

[0009] The correction body is arranged on the mounting seat, and an alignment reference is arranged on the correction body;

[0010] The mounting seat is provided with a mounting structure for mounting on a machine platform.

[0011] Optionally, the mounting structure is a groove provided on the mounting seat.

[0012] Optionally, the groove is provided at a first end of the mounting seat along the first direction, and the correction body is provided at a second end of the mounting seat along the first direction.

[0013] Optionally, a portion of the second end of the mounting seat passes through the groove along the first direction.

[0014] Optionally, the alignment reference is a first calibration hole opened on the correction body.

[0015] Optionally, a calibration cavity for accommodating a transmission device is provided on the calibration body, and the first calibration hole is in communication with the calibration cavity;

[0016] Alternatively, a calibration cavity for accommodating a transmission device is provided between the calibration body and the mounting seat, and the first calibration hole is communicated with the calibration cavity.

[0017] Optionally, a second calibration hole is provided at the second end of the mounting seat along the first direction, and a central axis of the second calibration hole is collinear with a central axis of the first calibration hole.

[0018] Optionally, the correction body is made of transparent material.

[0019] Optionally, an installation direction marking structure is provided on the correction body and / or the mounting seat.

[0020] The utility model also provides a semiconductor device, comprising the position correction fixture described above.

[0021] In this configuration, the position calibration jig, through the provision of an alignment reference, provides a position reference for the conveyor device, calibrating the conveyor device's position. This standardizes the conveyor device's position calibration, improving the conveyor device's position calibration accuracy and efficiency, and addressing high product scrap rates and frequent downtime caused by inaccurate conveyor device calibration. This also allows semiconductor equipment to be applied to a wider range of products, expanding its scope of application.

[0022] The above-mentioned position correction fixture has a simple position correction process, which helps to significantly reduce the position correction time of the conveyor device, helps to return the machine to production more quickly, and does not rely on the correction experience of the staff during the correction process, which can effectively lower the experience threshold for position correction of the conveyor device. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic diagram of the three-dimensional structure of a position correction fixture according to an embodiment of the present invention Figure 1 ;

[0024] Figure 2 A schematic diagram of the three-dimensional structure of a position correction fixture according to an embodiment of the present invention Figure 2;

[0025] Figure 3 This is a side structural diagram of a position correction jig according to an embodiment of the present invention;

[0026] Figure 4 Schematic diagram of a top view of a position correction fixture according to an embodiment of the present invention.

[0027] Among them, in the accompanying drawings:

[0028] 10-calibration body; 101-calibration seat; 102-first support member; 103-second support member; 11-first calibration hole; 12-calibration cavity; 13-first position mark through hole;

[0029] 20 - mounting seat; 21 - groove; 22 - first through area; 23 - second through area; 24 - second calibration hole; 25 - second position mark through hole;

[0030] a-First direction. DETAILED DESCRIPTION

[0031] The following is a detailed description of the position correction jig and semiconductor device proposed in the present invention, with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It should be noted that the accompanying drawings are highly simplified and not to exact scale, and are intended solely to facilitate and clarify the purpose of illustrating the embodiments of the present invention.

[0032] As used in the present invention, the singular forms "a", "an", and "the" include plural objects, the term "or" is generally used to include the meaning of "and / or", the term "several" is generally used to include the meaning of "at least one", and the terms "at least two" or "a plurality" are generally used to include the meaning of "two or more". In addition, the terms "first", "second", and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features specified as "first", "second", and "third" may explicitly or implicitly include one or at least two of the features. In addition, as used in the present invention, "installed", "connected", "connected", and one element is "set" on another element should be understood in a broad sense, usually only indicating that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the connection, coupling, cooperation or transmission between the two elements can be direct or indirect through an intermediate element, and cannot be understood as indicating or implying the spatial position relationship between the two elements, that is, one element can be in any orientation such as inside, outside, above, below or on one side of another element, unless the content clearly indicates otherwise. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances. In addition, directional terms such as above, below, up, down, upward, downward, left, right, etc. are used relative to the exemplary embodiments as they are shown in the figures, with the upward or upper direction toward the top of the corresponding figure, and the downward or lower direction toward the bottom of the corresponding figure.

[0033] The utility model provides a position correction jig;

[0034] The position correction jig includes a correction body 10 and a mounting seat 20;

[0035] The calibration body 10 is disposed on the mounting seat 20 , and an alignment reference is provided on the calibration body 10 ;

[0036] The mounting base 20 is provided with a mounting structure for mounting on a machine platform.

[0037] The mounting base 20 is used to connect to a machine platform on a semiconductor device to position the position correction jig. In this embodiment, the position correction jig is installed in a process chamber of the semiconductor device, specifically on a chuck.

[0038] Please refer to Figure 1 As shown, in this embodiment, the mounting seat 20 is configured as a disc-shaped structure. Figure 2As shown, the mounting structure on the mounting base 20 is a groove 21 provided on the mounting base 20. The groove 21 is a circular groove, the central axis of the groove 21 is collinear with the central axis of the mounting base 20, and the inner diameter of the groove 21 is adapted to the outer diameter of the wafer chuck in existing semiconductor equipment. The mounting base 20 is inserted from bottom to top onto the chuck through the groove 21, completing the installation of the position correction jig.

[0039] In this embodiment, recess 21 is configured as a circular groove structure adapted to the structure of an existing suction cup. In alternative embodiments, the shape of recess 21 can be adaptively adjusted based on the shape of an existing suction cup. Furthermore, mounting base 20 can be mounted on other components of a semiconductor device, and the corresponding mounting structure on mounting base 20 can be adaptively adjusted based on the specific mounting method. For example, the mounting structure can be a connection hole provided on mounting base 20 or other known connection structure.

[0040] In this embodiment, the mounting base 20 is adapted to the structure of the existing suction cup and is configured as a disc-shaped structure. In other alternative embodiments, the structure of the mounting base 20 can be configured as a rectangular parallelepiped or other special-shaped structures, and the shape of the mounting base 20 can be adaptively adjusted based on actual installation requirements.

[0041] Furthermore, the calibration body 10 is provided with an installation direction marking structure. Figure 1 As shown, in this embodiment, the direction marking structure is four first position marking through holes 13 that are opened on the correction body 10, wherein the four first position marking through holes 13 are distributed in a rectangular shape, and the opening direction of the first position marking through holes 13 is consistent with the axial direction of the mounting seat 20 (also consistent with the first direction a). On the one hand, the four first position marking through holes 13 can achieve weight reduction of the correction body 10 and meet the lightweight design requirements of the position correction jig; on the other hand, the four first position marking through holes 13 are used to mark the installation direction of the position correction jig. For example, when the movement direction of the transmission device is perpendicular to the long side of the rectangle formed by the four first position marking through holes 13, it is determined that the installation direction is correct. When the mounting seat 20 is put on the suction cup, the installation direction of the position correction jig can be adjusted by rotating the mounting seat 20.

[0042] In other alternative embodiments, the installation direction marking structure may also be a marking arrow or a conspicuous mark such as a raised structure or a recessed structure provided on the correction body 10 .

[0043] In other alternative embodiments, the installation direction marking structure may also be provided on the mounting base 20. For example, the installation direction marking structure is a color mark provided on the outer circumference of the mounting base 20. When the color mark is aligned with the conveying direction of the transmission device, the installation direction is confirmed to be correct. Alternatively, the installation direction marking structure may be provided on both the calibration body 10 and the mounting base 20. The specific form and location of the installation direction marking structure can be adaptively adjusted based on actual usage requirements.

[0044] Please continue to refer to Figure 1 and Figure 2 As shown, the groove 21 is provided at the first end of the mounting seat 20 along the first direction a ( Figure 1 and Figure 2 The correction body 10 is arranged at the second end (the lower end of the mounting seat 20) of the mounting seat 20 along the first direction a, wherein the first direction a is parallel to the central axis direction of the mounting seat 20. Figure 1 and Figure 2 The upper end of the middle mounting seat 20).

[0045] Among them, an alignment reference is provided on the calibration body 10, and the alignment reference is used to form a reference when aligning the transmission device. In this embodiment, the alignment reference is a first calibration hole 11 opened on the calibration body 10. The first calibration hole 11 is opened along the first direction a, and the first calibration hole 11 calibrates the center position of the transmission device. When the center of the transmission device coincides with the central axis of the first calibration hole 11, the position of the transmission device is correct. In this embodiment, in order to facilitate position correction, a corresponding through hole is opened at the center position of the transmission device, and a pin is inserted into the first calibration hole 11. If the pin can pass through the through hole on the transmission device, it means that the position correction is correct.

[0046] The position calibration fixture, through the provision of an alignment reference, is used to provide a position reference for the conveyor device, thereby calibrating the conveyor device's position and standardizing the conveyor device's position calibration. This helps improve the conveyor device's position calibration accuracy and efficiency, and alleviates the high product scrap rate and frequent downtime caused by inaccurate conveyor device calibration. It also allows semiconductor equipment to be applied to a wider range of products, thereby expanding its scope of application.

[0047] The above-mentioned position correction fixture has a simple position correction process, which helps to significantly reduce the position correction time of the conveyor device, helps to return the machine to production more quickly, and does not rely on the correction experience of the staff during the correction process, which can effectively lower the experience threshold for position correction of the conveyor device.

[0048] In this embodiment, the position of the transmission device is calibrated by using the first calibration hole 11 as a position reference. In other alternative embodiments, the position reference may also be a scale, a raised structure, a recessed structure, or other eye-catching markings provided on the calibration body 10.

[0049] In this embodiment, the first calibration hole 11 marks the center position of the transmission device. In other alternative embodiments, the first calibration hole 11 marks another position of the transmission device. For example, a through hole is opened at a certain position of the transmission device. When the through hole aligns with the first calibration hole 11, it indicates that the position of the transmission device is accurately calibrated.

[0050] Furthermore, in this embodiment, the calibration body 10 is made of a transparent material. Calibration body 10 is preferably made of a high-temperature resistant transparent material, such as quartz glass or ceramic. The use of a transparent material for calibration body 10 facilitates observation of the position of the transmission device through calibration body 10, facilitating adjustment of the transmission device's position.

[0051] Please refer to Figure 1 and Figure 3 As shown, in the present embodiment, the correction body 10 includes a correction seat 101, a first support member 102 and a second support member 103, wherein the correction seat 101 is a rectangular plate structure as a whole, the first support member 102 and the second support member 103 are long strip structures, the cross-section of the first support member 102 and the second support member 103 is rectangular, and the length of the first support member 102 and the second support member 103 is consistent with the width dimension of the correction seat 101. The first support member 102 and the second support member 103 both extend along the width direction of the correction seat 101. The first support member 102 and the second support member 103 are respectively connected to the bottom of the correction seat 101 on both sides of its length direction. The bottom of the correction seat 101 is located on both sides of its length direction and has rectangular notches respectively, the upper parts of the first support member 102 and the second support member 103 are respectively conformally located in the rectangular notches, and the first support member 102 and the second support member 103 are connected to the correction seat 101 by screws.

[0052] The bottoms of the first support member 102 and the second support member 103 are connected to the second end ( Figure 1 and Figure 2The upper end of the mounting seat 20 in the middle) can be connected specifically by screw connection, bonding or other known connection methods. The arrangement of the first support member 102 and the second support member 103 allows a gap to be provided between the correction seat 101 and the mounting seat 20. The gap forms a correction cavity 12 for accommodating the transmission device, and the correction cavity 12 is a through structure along the width direction of the correction seat 101. After the position correction device is installed, its correction cavity 12 is facing the movement direction of the transmission device, and the transmission device can enter the correction cavity 12. Since the first calibration hole 11 is connected to the correction cavity 12, and the mounting seat 20 is a transparent structure, the position of the transmission device in the correction cavity 12 can be observed from top to bottom, and the first calibration hole 11 is used as a reference to calibrate whether the position of the transmission device is correct.

[0053] Furthermore, the second end ( Figure 1 and Figure 2 A portion of the upper end of the middle mounting seat 20 passes through the groove 21 along the first direction a.

[0054] Please continue to refer to Figure 1 and Figure 2 As shown, in this embodiment, the through area of ​​the second end of the mounting base 20 has two parts, namely a first through area 22 and a second through area 23. Figure 1 As shown, the second end of the mounting base 20 ( Figure 1 and Figure 2 The upper end of the middle mounting seat 20 has symmetrical arched notches on both sides along a radial direction thereof. The setting of the notches makes the mounting seat 20 as a whole have a structure that is thick in the middle and thin on both sides, and forms an arched first through area 22 and a second through area 23.

[0055] The arrangement of the above-mentioned arched notch enables the second end of the mounting seat 20 ( Figure 1 and Figure 2 The end surface of the mounting seat 20 (at the upper end) has a structure similar to the cross-section of a waist-shaped hole (arc-shaped at both ends and a straight line in the middle), and the distance between the two straight sides of the second end of the mounting seat 20 is the same as the width of the calibration base 101. When the calibration body 10 is mounted on the mounting seat 20, the two side walls of the calibration body 10 along the width direction are aligned with the two straight sides of the mounting seat 20.

[0056] The arrangement of the first through area 22 and the second through area 23 is conducive to the lightweight design of the position correction fixture. Figure 1 and Figure 2The upper end of the middle mounting seat 20 is a partially through structure, which also makes the second end of the mounting seat 20 not a completely open structure. When the mounting seat 20 is placed on the suction cup of the semiconductor device through the groove 21, the upper end of the suction cup rests on the inner side of the second end of the mounting seat 20, naturally forming an axial positioning.

[0057] In this embodiment, after the correction body 10 is installed on the mounting base 20, the geometric center of the upper end surface (or lower end surface) of the correction base 101 is located on the central axis of the mounting base 20, and the central axis of the first calibration hole 11 is collinear with the central axis of the mounting base 20.

[0058] Therefore, in this embodiment, the first calibration hole 11 is located at the center of the mounting base 20, and the first calibration hole 11 is used to calibrate the center position of the conveying device. In other alternative embodiments, the central axis of the first calibration hole 11 may not be colinear with the central axis of the mounting base 20, the first calibration hole 11 may not be opened at the geometric center of the upper end surface of the calibration base 101, and the first calibration hole 11 may also calibrate a position outside the center of the conveying device. The setting position of the first calibration hole 11 can be adaptively adjusted based on the calibrated position of the conveying device, or the calibrated position of the conveying device can be adjusted based on the setting position of the first calibration hole 11, and the position of the first calibration hole 11 and the calibrated position of the conveying device affect each other.

[0059] Please refer to Figure 2 and Figure 4 As shown, in this embodiment, the second end ( Figure 1 and Figure 2 A second calibration hole 24 is provided at the upper end of the middle mounting seat 20 . The second calibration hole 24 is arranged opposite to the first calibration hole 11 , that is, the central axis of the second calibration hole 24 and the first calibration hole 11 are collinear.

[0060] The second calibration hole 24 is collinear with the central axis of the mounting base 20. Since the second calibration hole 24 is directly provided on the mounting base 20, the second calibration hole 24 can be used to calibrate the installation position of the calibration body 10. That is, after the calibration body 10 is installed on the mounting base 20, if the first calibration hole 11 and the second calibration hole 24 are aligned, it means that the installation position of the calibration body 10 is correct. Otherwise, the calibration body 10 has a deviation and the position of the calibration body 10 needs to be adjusted. Preferably, the first calibration hole 11 and the second calibration hole 24 have the same aperture. In actual operation, the installation position of the calibration body 10 can be detected by a pin, and the outer diameter of the pin is preferably the same as the aperture of the first calibration hole 11 and the second calibration hole 24. After the calibration body 10 is installed on the mounting base 20, the position of the calibration body 10 can be detected by a pin passing through the second calibration hole 24. If the pin can also pass through the second calibration hole 24, it means that the position of the calibration body 10 is correct. Otherwise, it means that the position of the calibration body 10 has a deviation and needs to be adjusted.

[0061] Furthermore, the provision of second calibration hole 24 also ensures calibration accuracy. For example, when calibrating the position of a transmission device, if the pin can simultaneously pass through first calibration hole 11, second calibration hole 24, and the through hole in the transmission device, it indicates that the position of the transmission device has been accurately calibrated. First calibration hole 11 and second calibration hole 24 serve as guides for the pin, preventing it from deflecting, thereby ensuring calibration accuracy.

[0062] Please continue to refer to Figure 2 and Figure 4 As shown, in this embodiment, the second end ( Figure 1 and Figure 2 Four second position mark through holes 25 are provided at the upper end of the middle mounting seat 20. The four second position mark through holes 25 correspond axially to the four first position mark through holes 13 on the calibration body 10. Preferably, the diameter of the second position mark through holes 25 is the same as that of the first position mark through holes 13.

[0063] The setting of the above-mentioned second position mark through hole 25, on the one hand, is conducive to achieving a lightweight design of the position correction fixture; on the other hand, the second position mark through hole 25 corresponds to the position of the first position mark through hole 13, and is also used to mark the installation direction of the correction body 10 to prevent the correction body 10 from being installed in the reverse direction.

[0064] In this embodiment, the calibration cavity 12 is disposed between the calibration body 10 and the mounting base 20. In other alternative embodiments, the calibration cavity 12 may be directly provided on the calibration base 101 or directly provided on the mounting base 20.

[0065] In other alternative embodiments, a plurality of process through holes may be reserved on the correction seat 101 , for example, two connection holes may be reserved on both sides of the upper end surface of the correction seat 101 in its length direction to meet actual connection requirements.

[0066] In this embodiment, the calibration body 10 and the mounting base 20 are arranged separately. This arrangement allows calibration bodies 10 of different specifications to be freely combined with mounting bases 20 of different specifications to meet the position calibration requirements of transmission devices of different specifications. In other alternative embodiments, the calibration base 101, the first support member 102, and the second support member 103 can be integrally formed to achieve greater overall consistency of the position calibration jig.

[0067] This embodiment also provides a semiconductor device including the aforementioned position correction jig. The position correction jig is installed in a process chamber of the semiconductor device, for example, by being mounted on a chuck or other components in the process chamber. The specific installation position can be adaptively adjusted based on the actual semiconductor structure.

[0068] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0069] The above description is only a description of the preferred embodiment of the present invention and does not limit the scope of the present invention. Any changes and modifications made by ordinary technicians in the field of the present invention based on the above disclosure shall fall within the scope of protection of the claims.

Claims

1. A position correction jig, characterized in that: Includes correction body and mounting base; The correction body is arranged on the mounting seat, and an alignment reference is arranged on the correction body; The mounting seat is provided with a mounting structure for mounting on a machine platform.

2. The position correction jig according to claim 1, wherein: The mounting structure is a groove arranged on the mounting seat.

3. The position correction jig according to claim 2, wherein: The groove is arranged at a first end of the mounting seat along the first direction, and the correction body is arranged at a second end of the mounting seat along the first direction.

4. The position correction jig according to claim 3, wherein: A portion of the second end of the mounting seat passes through the groove along the first direction.

5. The position correction jig according to claim 1, wherein: The correction body is made of transparent material.

6. The position correction jig according to claim 1, wherein: The correction body and / or the mounting seat are provided with an installation direction marking structure.

7. The position correction jig according to any one of claims 1 to 6, characterized in that: The alignment reference is a first calibration hole opened on the correction body.

8. The position correction jig according to claim 7, wherein: The calibration body is provided with a calibration cavity for accommodating the transmission device, and the first calibration hole is communicated with the calibration cavity; Alternatively, a calibration cavity for accommodating a transmission device is provided between the calibration body and the mounting seat, and the first calibration hole is communicated with the calibration cavity.

9. The position correction jig according to claim 7, wherein: A second calibration hole is provided at the second end of the mounting seat along the first direction, and a central axis of the second calibration hole is collinear with a central axis of the first calibration hole.

10. A semiconductor device, characterized in that: The method comprises the position correction jig according to any one of claims 1 to 9.

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