Photoresist nozzle assembly tool and photoetching system

Abstract

The utility model relates to the field of semiconductor integrated circuit manufacturing equipment, and discloses a photoresist nozzle assembling tool and a photoetching system.The photoresist nozzle assembling tool comprises a tool main body used for containing a photoresist nozzle, and the tool main body comprises at least two assembling unit bodies which are arranged in a sleeving mode and connected; the friction structures are located between every two adjacent assembly unit bodies; the connecting part is connected with the inner wall of the assembly unit body at the bottom; the rotating component with scales is connected with one end of the connecting component; the connecting part and the assembling unit body at the bottom relatively move in the axial direction of the tool main body through rotation of the rotating part; and the overlapping area of the assembly unit body at the bottom and the connected assembly unit body is rotationally adjusted through the rotating part. When the assembling tool is used for installing the photoresist nozzle, the photoresist nozzle can be rotatably installed by controlling fixed torsion, and the problems of photoresist leakage and product defects caused by insufficient installation of the photoresist nozzle and damage to the photoresist nozzle caused by excessive installation are solved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor integrated circuit manufacturing equipment, and in particular to a photoresist nozzle assembly tool and a photolithography system. Background Art

[0002] Photolithography is a key technology in semiconductor integrated circuit manufacturing. It uses light to transfer a pattern onto a photoresist (photoresist) through a mask. Etching and other subsequent processes then form the desired structure on a silicon wafer. Photoresist can be applied by spin coating, which involves spraying the photoresist onto the silicon wafer using a photoresist nozzle.

[0003] The current assembly tool used to install and remove photoresist nozzles consists of a sleeve that fits the nozzle's shape. The user inserts the tool onto the nozzle and rotates it clockwise or counterclockwise to install and remove the nozzle. This assembly tool lacks any standardized installation criteria, which can lead to under-installation, resulting in leaks and product defects. Alternatively, over-installation can damage the nozzle's orifice and cause significant equipment downtime.

[0004] Therefore, how to solve the above technical problems should be the focus of those skilled in the art. Utility Model Content

[0005] The purpose of the present application is to provide a photoresist nozzle assembly tool and a photolithography system, which can maintain the photoresist nozzle in the required standard size to avoid dripping and breaking.

[0006] To solve the above technical problems, the present application provides a photoresist nozzle assembly tool, comprising:

[0007] A tool body for accommodating a photoresist nozzle includes at least two sleeved and connected assembly units;

[0008] A friction structure is located between two adjacent assembly units;

[0009] A connecting component connected to the inner wall of the assembly unit at the bottom;

[0010] a rotating component with a scale connected to one end of the connecting component;

[0011] The connecting component and the assembly unit body at the bottom move relative to each other in the axial direction of the tool body through the rotation of the rotating component; the overlapping area between the assembly unit body at the bottom and the connected assembly unit body is adjusted by the rotation of the rotating component.

[0012] Optionally, the friction structure includes any one or any combination of the following:

[0013] Friction plates, friction coatings, and protrusions.

[0014] Optionally, the convex portion includes any one or any combination of the following:

[0015] Bumps, serrations, steps.

[0016] Optionally, the friction coefficient of the friction structure is equal everywhere in the axial direction of the tool body.

[0017] Optionally, the friction coefficient of the friction structure changes gradually in the axial direction of the tool body.

[0018] Optionally, the connection method between the connecting component and the assembly unit at the bottom includes any one of the following:

[0019] Threaded connection, snap connection, sliding connection.

[0020] Optionally, the connecting component includes any one of the following:

[0021] A screw rod, a rod body with a gear on the outer wall, a rod body with a slide bar on the outer wall, and a rod body with a track on the outer wall.

[0022] Optionally, the shape of the assembly unit body includes a cylinder.

[0023] Optionally, it also includes:

[0024] A visual window is provided on the tool body, wherein the visual window is embedded in the opening.

[0025] The present application also provides a photolithography system, comprising any one of the above-mentioned photoresist nozzle assembly tools.

[0026] A photoresist nozzle assembly tool provided in the present application includes: a tool body for accommodating a photoresist nozzle, including at least two sleeved and connected assembly units; a friction structure located between two adjacent assembly units; a connecting component connected to the inner wall of the assembly unit at the bottom; a rotating component with a scale connected to one end of the connecting component; the connecting component and the assembly unit at the bottom undergo relative movement in the axial direction of the tool body through the rotation of the rotating component; the overlapping area between the assembly unit at the bottom and the connected assembly unit is adjusted by rotating the rotating component.

[0027] It can be seen that the photoresist nozzle assembly tool in this application includes a tool body, a connecting component and a rotating component with a scale. The rotating component is connected to one end of the connecting component, and the connecting component is connected to the inner wall of the assembly unit body at the bottom of the tool body. When the rotating component is rotated, the rotating component drives the connecting component to move, and then drives the overlapping area between the assembly unit body at the bottom and the connected assembly unit body to change. Therefore, the amount of rotation of the rotating component is related to the size of the overlapping area between the assembly unit body at the bottom and the connected assembly unit body. There is a friction structure between two adjacent assembly units, and the size of the overlapping area between the assembly unit body at the bottom and the connected assembly unit body can represent the size of the friction force. Therefore, the size of the friction force can be adjusted with the help of the scale on the rotating component. When the assembly tool in this application is used to install the photoresist nozzle, if the rotational force during installation is greater than the friction force, sliding will occur and rotation will be impossible. When the rotational force is less than the friction force, the assembly unit at the bottom drives the assembly unit above to rotate. When the rotational force is equal to the friction force, the installation of the photoresist nozzle is achieved, that is, the fixed torque is controlled to rotate and install the photoresist nozzle, avoiding photoresist dripping and product defects caused by insufficient installation of the photoresist nozzle, and damage to the photoresist nozzle caused by excessive installation.

[0028] In addition, the present application also provides a lithography system having the above-mentioned assembly tool. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the embodiments of the present application or the technical solutions of the prior art, the following is a brief introduction to the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0030] Figure 1 This is a schematic diagram of the structure of a currently used photoresist nozzle;

[0031] Figure 2 A schematic diagram of an assembly tool currently used to assemble a photoresist nozzle;

[0032] Figure 3 A schematic diagram of a photoresist nozzle assembly tool provided in an embodiment of the present application;

[0033] Figure 4 for Figure 3 A local enlarged view of the middle region A along the axial direction;

[0034] Figure 5 A top view of an assembly unit provided in an embodiment of the present application;

[0035] Figure 6This is a partial enlarged view of the photoresist liquid column in the photoresist nozzle observed through the visual window;

[0036] In the figure, 1. tool body, 11. assembly unit, 2. friction structure, 3. connecting part, 4. rotating part, 41. scale, 5. viewing window. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the present application, the present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. Obviously, the embodiments described are only a part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making any creative efforts are within the scope of protection of the present application.

[0038] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0039] Currently commonly used photoresist nozzles are Figure 1 As shown in the figure, the whole is in the shape of a dropper. Figure 2 As shown, the shape of the photoresist nozzle fits perfectly. Current assembly tools lack any quantifiable installation standards, which can lead to under-installation of the photoresist nozzle, causing photoresist dripping and product defects. Over-installation can also damage the nozzle orifice and cause prolonged equipment downtime.

[0040] In view of this, this application provides a photoresist nozzle assembly tool, please refer to Figure 3 、 Figure 4 and Figure 5 ,include:

[0041] A tool body 1 for accommodating a photoresist nozzle includes at least two sleeved and connected assembly units 11;

[0042] The friction structure 2 is located between two adjacent assembly units 11;

[0043] A connecting component 3 connected to the inner wall of the assembly unit 11 at the bottom;

[0044] a rotating component 4 having a scale 41 connected to one end of the connecting component 3;

[0045] The connecting component 3 and the assembly unit body 11 at the bottom move relative to each other in the axial direction Z of the tool body 1 through the rotation of the rotating component 4; the overlapping area between the assembly unit body 11 at the bottom and the connected assembly unit body 11 is adjusted by the rotation of the rotating component 4.

[0046] It should be noted that in this embodiment, there is no specific limitation on the number of assembly units 11 in the main tool. For example, the number of assembly units 11 can be 2, 3, 4, etc.

[0047] When the tool body 1 is placed in a vertical direction, the assembly units 11 are arranged in order from bottom to top. The assembly unit 11 at the bottom is the assembly unit 11 at the bottom.

[0048] It should also be noted that, in this embodiment, the shape of the assembly unit 11 is not limited and can be determined according to the shape of the photoresist nozzle.

[0049] As an implementable embodiment, the shape of the assembly unit 11 includes a cylinder, which is compatible with the currently commonly used photoresist nozzle and is simple to process and manufacture.

[0050] The shape of the rotating component 4 can be circular, and the scale 41 is located on the outer surface of the rotating component 4. The scale 41 can be provided on the rotating component 4 in the form of a vertical line.

[0051] The magnitude of the force corresponding to each rotation of the rotating component 4 or each rotation of the scale 41 is determined in advance. When the rotating component 4 rotates, the relative magnitude of the applied torque can be determined by the scale 41.

[0052] When the photoresist nozzle assembly tool is placed in a vertical position, the rotating component 4 is connected to the lower end of the connecting component 3. When the rotating component 4 is rotated, the connecting component 3 and the lowermost assembly unit 11 move relative to each other in the axial direction Z, thereby causing the lowermost assembly unit 11 to move relative to the upper assembly unit 11, thereby adjusting the overlapping area between the lowermost assembly unit 11 and the upper assembly unit 11.

[0053] There are friction components between two adjacent assembly units 11. The larger the overlapping area between the two adjacent assembly units 11, the greater the friction force. This friction force is also the rotational force when the photoresist head assembly tool in this application installs the photoresist head.

[0054] It should be noted that the friction structure 2 is not limited in this embodiment and depends on the specific situation.

[0055] As an implementable embodiment, the friction structure 2 includes any one or any combination of the following:

[0056] Friction plates, friction coatings, and protrusions.

[0057] The materials of the friction plate, friction coating and protrusion are not limited in this application and can be selected according to the required friction coefficient.

[0058] When the friction structure 2 includes a friction coating, the friction coating may be applied to two upper and lower adjacent assembly unit bodies 11 , the outer wall of one assembly unit body 11 , or the inner wall of the other assembly unit body 11 .

[0059] When the friction structure 2 includes a convex portion, the convex portion may be located in two upper and lower adjacent assembly unit bodies 11 , on the outer wall of one assembly unit body 11 , or on the inner wall of the other assembly unit body 11 .

[0060] It should be pointed out that the structure of the protrusion in this embodiment is not limited and can be set at will.

[0061] As an implementation method, the convex portion includes any one or any combination of the following:

[0062] Bumps, serrations, steps.

[0063] The shape of the protrusion includes but is not limited to any one of a cylinder, a sphere, a hemisphere, a semi-ellipsoid, and an ellipsoid, or any combination thereof.

[0064] As an embodiment, the friction coefficient of the friction structure 2 is equal at all locations along the axial direction Z of the tool body 1. However, this application does not specifically limit this. In other embodiments of this application, the friction coefficient of the friction structure 2 gradually changes along the axial direction Z of the tool body 1. In this case, a larger friction force can be obtained by changing a smaller overlapping area, or a fine adjustment of the friction force can be achieved by adjusting a smaller overlapping area, thereby improving the accuracy of the friction force.

[0065] In the axial direction Z of the tool body 1 , when the friction coefficient of the friction structure 2 changes gradually, the friction coefficient may gradually increase or gradually decrease.

[0066] In this embodiment, there is no limitation on the connection method between the connecting component 3 and the assembly unit body 11 at the bottom, and it can be set at will.

[0067] As an implementable embodiment, the connection method between the connecting component 3 and the assembly unit 11 at the bottom includes any of the following:

[0068] Threaded connection, snap connection, sliding connection.

[0069] It should be noted that the structure of the connecting component 3 is not limited in this embodiment and can be set at will.

[0070] As an implementable embodiment, the connecting component 3 includes any of the following:

[0071] A screw rod, a rod body with a gear on the outer wall, a rod body with a slide bar on the outer wall, and a rod body with a track on the outer wall.

[0072] The outer surface of the screw rod has threads, and correspondingly, the inner wall of the bottom assembly unit body 11 has threads matching the threads on the outer surface of the screw rod, so that the connecting component 3 and the bottom assembly unit body 11 are threadedly connected.

[0073] When the connecting component 3 is a rod with a gear on its outer wall, the inner wall of the bottom assembly unit body 11 has a matching gear, so that the connecting component 3 is engaged with the bottom assembly unit body 11 .

[0074] When the connecting component 3 is a rod with a slide bar on its outer wall, the inner wall of the bottom assembly unit 11 has a track matching the slide bar, so that the connecting component 3 is slidably connected to the bottom assembly unit 11 .

[0075] When the connecting component 3 is a rod with a track on its outer wall, the inner wall of the bottom assembly unit 11 has a slide bar matching the track, so that the connecting component 3 is slidably connected to the bottom assembly unit 11 .

[0076] In this embodiment, the photoresist nozzle assembly tool includes a tool body 1, a connecting component 3, and a rotating component 4 with a scale 41. The rotating component 4 is connected to one end of the connecting component 3, and the connecting component 3 is connected to the inner wall of the assembly unit 11 at the bottom of the tool body 1. When the rotating component 4 is rotated, the rotating component 4 drives the connecting component 3 to move, thereby driving the overlapping area between the assembly unit 11 at the bottom and the connected assembly unit 11 to change. Therefore, the amount of rotation of the rotating component 4 is related to the size of the overlapping area between the assembly unit 11 at the bottom and the connected assembly unit 11. There is a friction structure 2 between two adjacent assembly units 11, and the size of the overlapping area between the assembly unit 11 at the bottom and the connected assembly unit 11 can represent the size of the friction force. Therefore, the size of the friction force can be adjusted with the help of the scale 41 on the rotating component 4. When the assembly tool in the present application is used to install the photoresist nozzle, if the rotational force during installation is greater than the friction force, sliding will occur and rotation will be impossible. When the rotational force is less than the friction force, the assembly unit 11 at the bottom drives the assembly unit 11 above to rotate. When the rotational force is equal to the friction force, the installation of the photoresist nozzle is achieved, that is, the fixed torque is controlled to rotate and install the photoresist nozzle, avoiding photoresist dripping and product defects caused by insufficient installation of the photoresist nozzle, and damage to the photoresist nozzle caused by excessive installation.

[0077] The photoresist nozzle assembly tool in this application allows engineers to maintain the photoresist nozzle according to standardized standards during the maintenance process to avoid dripping and breakage, reduce human operational errors in preventive maintenance by equipment engineers, and increase effective monitoring of equipment operations, thereby making the maintenance effect and photolithography process more stable and safe.

[0078] Based on the above embodiments, in one embodiment of the present application, please refer to Figure 3 and Figure 6 , the photoresist nozzle assembly tool may also include:

[0079] The tool body 1 is provided with a visual window 5 , and the visual window 5 is embedded in the opening.

[0080] The visual window 5 can be a magnifying glass.

[0081] The photoresist nozzle can be inspected through the visual window 5 to observe information such as the position of the photoresist liquid column in the photoresist nozzle.

[0082] The present application also provides a photolithography system, comprising the photoresist nozzle assembly tool described in any of the above embodiments.

[0083] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0084] The above is a detailed introduction to the photoresist nozzle assembly tool and lithography system provided by the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only intended to help understand the solution and core ideas of the present application. It should be noted that, for those skilled in the art, without departing from the principles of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the scope of protection of the present application.

Claims

1. A photoresist nozzle assembly tool, characterized in that: include: A tool body for accommodating a photoresist nozzle includes at least two sleeved and connected assembly units; A friction structure is located between two adjacent assembly units; A connecting component connected to the inner wall of the assembly unit at the bottom; a rotating component with a scale connected to one end of the connecting component; The connecting component and the assembly unit body at the bottom move relative to each other in the axial direction of the tool body through the rotation of the rotating component; the overlapping area between the assembly unit body at the bottom and the connected assembly unit body is adjusted by the rotation of the rotating component.

2. The photoresist nozzle assembly tool according to claim 1, wherein: The friction structure includes any one or any combination of the following: Friction plates, friction coatings, and protrusions.

3. The photoresist nozzle assembly tool according to claim 2, wherein: The convex portion includes any one or any combination of the following: Bumps, serrations, steps.

4. The photoresist nozzle assembly tool according to claim 1, wherein: The friction coefficient of the friction structure is equal everywhere in the axial direction of the tool body.

5. The photoresist nozzle assembly tool according to claim 1, wherein: The friction coefficient of the friction structure gradually changes in the axial direction of the tool body.

6. The photoresist nozzle assembly tool according to claim 1, wherein: The connection method between the connecting component and the assembly unit body at the bottom includes any one of the following: Threaded connection, snap connection, sliding connection.

7. The photoresist nozzle assembly tool according to claim 1, wherein: The connecting member includes any one of the following: A screw rod, a rod body with a gear on the outer wall, a rod body with a slide bar on the outer wall, and a rod body with a track on the outer wall.

8. The photoresist nozzle assembly tool according to claim 1, wherein: The shape of the assembly unit body includes a cylinder.

9. The photoresist nozzle assembly tool according to any one of claims 1 to 8, wherein: Also includes: A visual window is provided on the tool body, wherein the visual window is embedded in the opening.

10. A photolithography system, characterized in that: The invention comprises a photoresist nozzle assembly tool as described in any one of claims 1 to 9.

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