Sintering device for silicon spar green body

Abstract

The utility model relates to the technical field of silicon spar green body production, in particular to a sintering device for a silicon spar green body, which comprises a kiln body, a kiln car support, a fan and an air return pipe, and a heating cavity is formed in the kiln body; the kiln car support is used for bearing a silicon spar green body with two open ends; the fan is supported on the kiln body, and the inlet end of the fan is communicated with the heating cavity; one end of the air return pipe is connected to the outlet end of the fan, and the other end of the air return pipe is communicated with the heating cavity and faces the open end face of the silicon spar green body, so that a heat exchange channel is formed in the silicon spar green body. And a hardware basis is provided for rapid and efficient sintering of the silicon spar blank.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon crystal green body production, in particular to a sintering device for silicon crystal green body. Background Art

[0002] Through high-temperature treatment, the silicon crystal stone green body can be sintered and the structure densified, thereby obtaining a green body mainly composed of silicate crystal phase, the material of which is between ordinary sintered bricks and ceramics.

[0003] In the current silicon spar green body production process, the green body is extruded and has a porous internal structure. Due to the large size of silicon spar green body products, in order to improve sintering efficiency, the sintering process is often carried out in a vertical close-packed manner. The force is more concentrated at the support points, and higher temperature uniformity is required. Therefore, in order to reduce the temperature difference between the inside and outside of the body during sintering and cooling, and avoid stress concentration and cracking in the body, a slow rise and fall heat treatment method is adopted to prepare the silicon spar green body. This results in low sintering efficiency of the silicon spar green body. Utility Model Content

[0004] (1) Technical issues to be resolved

[0005] In view of the above-mentioned shortcomings and deficiencies of the prior art, the present invention provides a sintering device for silicon crystal green compacts, which solves the technical problem of low sintering efficiency of silicon crystal green compacts in the prior art.

[0006] (2) Technical solution

[0007] In order to achieve the above-mentioned purpose, the main technical solutions adopted by this utility model include:

[0008] In the first aspect, the utility model provides a sintering device for silicon crystal green bodies, comprising a kiln body, a kiln car support, a fan and a return air duct, wherein a heating cavity is formed inside the kiln body; the kiln car support is used to support the silicon crystal green body, and a passage passing through from both ends is provided inside the silicon crystal green body; the fan is supported on the kiln body, and the inlet end of the fan is connected to the heating cavity; one end of the return air duct is connected to the outlet end of the fan, and the other end of the return air duct is connected to the heating cavity and faces the open end face of the silicon crystal green body to form a heat exchange channel between the two open ends of the silicon crystal green body.

[0009] (3) Beneficial effects

[0010] The beneficial effect of the utility model is that in the sintering device for silicon crystal green bodies of the utility model, the return air duct, under the action of the fan, circulates the hot air in the kiln body to the open end face of the silicon crystal green body, and flows through the internal cavity of the silicon crystal green body under the action of pressure, thereby improving the heating uniformity of the silicon crystal green body. In this way, even if the silicon crystal is supported in the kiln in the same manner as in the prior art, since the heating temperature of the silicon crystal green body becomes more uniform, even if the silicon crystal green body is heated at a relatively fast heating rate, it is not easy for the silicon crystal green body to crack at the stress concentration point, and the temperature consistency inside and outside the green body is maintained, avoiding shrinkage or expansion cracking caused by uneven heating; under the same principle, the green body can also be cooled evenly and quickly during the cooling stage, avoiding cracking of the green body caused by uneven shrinkage or expansion stress during the cooling process; in summary, the sintering device of the present invention improves the temperature uniformity of the green body in the entire sintering process, reduces the cracking of the product, and reduces the heating and cooling time, thereby improving the sintering efficiency and the yield, and providing a hardware foundation for the rapid and efficient sintering of silicon crystal green body. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is one of the structural schematic diagrams of the sintering device for silicon crystal green body of the utility model;

[0012] Figure 2 This is the second structural diagram of the sintering device for silicon crystal green body of the utility model;

[0013] Figure 3 This is a schematic structural diagram of the heat-resistant tube and diverter grid of the utility model.

[0014] [Description of Reference Numerals]

[0015] 10. Silicon crystal green body;

[0016] 1. Kiln body;

[0017] 2. Kiln car support;

[0018] 3. Fan;

[0019] 4. Return air duct;

[0020] 5. Bell mouth;

[0021] 6. Heat-resistant pipe;

[0022] 7. Diverter grille;

[0023] 8. Deflector;

[0024] 9. Flow detection module. DETAILED DESCRIPTION

[0025] In order to better explain the present invention, and to facilitate understanding, the following Figure 1-Figure 3 , through the specific implementation method, the utility model is described in detail. Among them, the directional nouns such as "upper" and "lower" mentioned in this article are Figure 2 The orientation is referenced.

[0026] Example 1:

[0027] Reference Figure 1-Figure 3 An embodiment of the present invention provides a sintering device for silicon spar green bodies, comprising a kiln body 1, a kiln car support 2, a fan 3 and a return air duct 4. A heating cavity is formed inside the kiln body 1; the kiln car support 2 is used to support the silicon spar green body 10, and the silicon spar green body 10 is provided with a passage passing through from both ends; the fan 3 is supported on the kiln body 1, and the inlet end of the fan 3 is connected to the heating cavity; one end of the return air duct 4 is connected to the outlet end of the fan 3, and the other end of the return air duct 4 is connected to the heating cavity and faces the open end face of the silicon spar green body 10 to form a heat exchange channel between the two open ends of the silicon spar green body 10.

[0028] In this embodiment, the return air duct 4, under the action of the fan 3, circulates the hot air in the kiln body 1 to the open end surface of the silicon spar green body 10, and under the action of pressure, it flows through the internal cavity of the silicon spar green body 10, thereby improving the heating uniformity of the silicon spar green body 10. In this way, even if the silicon spar is supported in the kiln in the same manner as the prior art, because the heating temperature of the silicon spar green body 10 becomes more uniform, even if the silicon spar green body 10 is heated at a relatively fast heating rate, it is not easy to cause the silicon spar green body 10 to crack at the stress concentration point, maintaining the consistency of the temperature inside and outside the body, avoiding shrinkage or expansion cracking caused by uneven heating, improving the sintering efficiency and yield, and thus providing a hardware foundation for the rapid and efficient sintering of silicon spar blanks. Using the sintering kiln in this embodiment, the sintering efficiency of silicon spar blanks is significantly improved.

[0029] Specifically, traditional sintering methods often struggle to ensure temperature uniformity within the silicon spar green body 10. The sintering kiln of the present invention, through the ingenious combination of the fan 3 and the return air duct 4, circulates hot air within the silicon spar green body 10, forming a heat exchange channel. This design allows the hot air to more evenly penetrate the green body, thereby improving heating uniformity.

[0030] Due to the improved heating uniformity, stress concentration caused by temperature gradients during the sintering process of the silicon crystal green body 10 is effectively alleviated. This means that even at a relatively fast heating rate, the green body is less likely to crack at stress concentration points. This improvement not only improves the safety of the sintering process but also reduces the scrap rate caused by cracking.

[0031] Because hot air can be more efficiently transferred to the interior of the silicon crystal green body 10, the entire sintering process is accelerated. This not only shortens the production cycle, but also improves equipment utilization and production capacity. Furthermore, by reducing the need for repeated sintering or repair work caused by uneven heating, overall production efficiency is further improved.

[0032] Improved heating uniformity and reduced cracking risk directly lead to higher yields. High-quality silicon crystal products can better meet market demand and bring higher economic benefits to enterprises.

[0033] Moreover, the sintering device is not only beneficial to improving the temperature uniformity of the silicon crystal green body 10 during the heating process, but also, in the cooling process, under the same principle, the silicon crystal green body 10 can be cooled evenly and quickly in the cooling stage, avoiding cracking caused by uneven shrinkage or expansion stress during the cooling process; in summary, the use of the sintering device of the present invention improves the temperature uniformity of the silicon crystal green body 10 in the entire sintering process, reduces the cracking of the product, and reduces the heating and cooling time.

[0034] The sintering furnace of this utility model provides a solid hardware foundation for the rapid and efficient sintering of silicon crystal stone blanks. Its unique design makes the sintering process more controllable and predictable, creating favorable conditions for process optimization and automated production.

[0035] In summary, the present invention achieves efficient and uniform heating and cooling of the silicon spar green body 10 through an innovative hot air circulation design, significantly improving sintering efficiency and yield. This innovation not only solves the technical difficulties of traditional sintering methods, but also significantly improves the efficiency of silicon spar product production.

[0036] Example 2:

[0037] Reference Figure 1-Figure 3 In addition to all the technical solutions of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0038] The sintering device for silicon crystal green body also includes a bell mouth 5, the small end of the bell mouth 5 is connected to the outlet end of the return air duct 4, and the large end of the bell mouth 5 is connected to the heating cavity. The shape of the large end of the bell mouth 5 matches the shape of the end face of the kiln car support 2, so as to form a first air outlet area at the large end of the bell mouth 5 that matches the open end face of the silicon crystal green body 10.

[0039] In this embodiment, the small end of the bell mouth 5 is connected to the outlet end of the return air duct 4, while the large end is connected to the heating cavity, ensuring that the hot air output by the fan 3 can enter the heating cavity smoothly and orderly after passing through the return air duct 4, avoiding sudden diffusion or turbulence of the airflow.

[0040] The shape of the larger end of the bell mouth 5 is designed to match the shape of the end face of the kiln car support 2. This is done to form a first air outlet area at the larger end of the bell mouth 5 that corresponds to the open end face of the silicon spar green body 10. This shape matching ensures that hot air is blown more directly and evenly toward the open end face of the silicon spar green body 10, thereby improving heating efficiency.

[0041] Due to the shape and guiding effect of bell mouth 5, the hot air forms a stream after flowing out of return air duct 4, directly impacting the open end surface of silicon spar green body 10. This stream helps the hot air penetrate deeper into the green body, forming a more uniform heat exchange path. Furthermore, the design of bell mouth 5 reduces the ineffective diffusion of hot air within the heating cavity, thereby improving heat utilization.

[0042] The introduction of the bell-mouth design (5) significantly improves the efficiency of the sintering furnace in heating the silicon spar green body (10). Due to the more uniform and thorough heating, the green body is less likely to experience problems such as cracking or deformation caused by uneven temperatures during the sintering process. This not only increases the success rate of sintering but also reduces the scrap rate, resulting in higher economic benefits for the company.

[0043] The bell mouth 5 further improves the heating and cooling uniformity and sintering efficiency of the silicon crystal green body 10 by optimizing the distribution and guidance of the hot air, providing a strong guarantee for the high-quality production of silicon crystal products.

[0044] Example 3:

[0045] Reference Figure 1-Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0046] The sintering device for silicon crystal green body also includes a plurality of heat-resistant tubes 6, which are all supported on the inner wall of the kiln body 1 and pass through the kiln body 1. The plurality of heat-resistant tubes 6 are distributed in an array to form an array of air outlets that match the open end face of the silicon crystal green body 10, and the array of air outlets faces the open end face of the silicon crystal green body 10; the heat-resistant tubes 6 are configured as ceramic tubes.

[0047] In this embodiment, the heat-resistant tube 6 is made of ceramic material because ceramic material has excellent high temperature resistance and chemical stability. During the sintering process, the temperature inside the kiln is extremely high, and the ceramic tube can effectively withstand the harsh conditions and ensure long-term stable operation.

[0048] Multiple heat-resistant tubes 6 are supported on the inner wall of the kiln body 1 and extend through the body. These tubes 6 are arranged in a matrix to form an array of air outlets that align with the open end faces of the silicon spar green bodies 10. This layout ensures that hot air evenly and fully covers the open end faces of the silicon spar green bodies 10, improving the uniformity and efficiency of heating and cooling.

[0049] By adjusting the number and arrangement of the heat-resistant tubes 6, the shape, size, and distribution density of the air outlets can be flexibly controlled to accommodate silicon spar green bodies 10 of different sizes and shapes. This design allows hot air to be blown more precisely toward the open end face of the green body, forming a more uniform heat exchange channel.

[0050] Example 4:

[0051] Reference Figure 1-Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0052] The sintering device for silicon crystal green body also includes a diverter grid 7, the inlet end of the diverter grid 7 matches the large end of the bell mouth 5 and can be supported on the kiln body 1, and the outlet end of the diverter grid 7 matches the open end face of the silicon crystal green body 10; the diverter grid 7 is set as a ceramic grid.

[0053] In this embodiment, the diverter grid 7 is made of ceramic material. The ceramic grid can withstand the high temperature generated during the sintering process and ensure long-term stable operation.

[0054] The inlet end of the diverter grille 7 mates with the large end of the bell mouth 5, ensuring that hot air can smoothly enter the diverter grille 7 from the bell mouth 5. At the same time, the diverter grille 7 is firmly supported on the kiln body 1, maintaining its positional stability. The outlet end of the diverter grille 7 mates with the open end surface of the silicon spar green body 10, ensuring that the hot air is evenly distributed across the open end surface of the green body. This design allows the hot air to form a uniform airflow layer after flowing out of the diverter grille 7, further improving the uniformity of heating and cooling.

[0055] The diverter grid 7 can further divert and homogenize the hot air flowing out of the bell mouth 5. When the hot air passes through the diverter grid 7, it will be dispersed into multiple small air streams, which can more evenly cover the open end surface of the silicon crystal green body 10. At the same time, the diverter grid 7 can also play a certain blocking role, preventing the hot air from directly impacting the green body surface and causing uneven temperature. This buffering effect helps to reduce the stress concentration caused by excessive temperature gradients, thereby reducing the risk of green body cracking, and further improving the sintering efficiency and yield of the silicon crystal green body.

[0056] Example 5:

[0057] Reference Figure 1-Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0058] The diverter grid 7 is located between the inlet end of the heat-resistant tube 6 and the large end of the bell mouth 5 .

[0059] In this embodiment, the implementation forms of setting the bell mouth 5, heat-resistant tube 6 and diverter grid 7 in Examples 2, 3 and 4 are integrated, which is conducive to further improving the uniformity of heating and cooling of the silicon crystal stone billet, thereby improving the sintering efficiency and yield of the silicon crystal stone billet, which will not be described in detail here.

[0060] Example 6:

[0061] Reference Figure 1-Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0062] The inlet end of the fan 3 and the outlet end of the return air duct 4 are connected to both sides of the kiln body 1, and correspond to the two ends of the silicon crystal green body 10 respectively, that is, there is a certain distance between the inlet end and the outlet end of the fan 3 along the length direction of the green body, which effectively avoids the fan 3 directly drawing away the air input by the return air duct 4, thereby ensuring the fluidity of the hot air output by the return air duct 4 in the kiln body 1, improving the heating effect of the green body, and further improving the sintering efficiency and yield of the silicon crystal green body.

[0063] Specifically, the inlet end of the fan 3 can be set on one side of the top of the kiln body 1, and the outlet end of the return air duct 4 can be set on the other side wall of the kiln body 1 to ensure that the hot air has a sufficient flow length in the kiln body 1 to ensure the fluidity of the hot air.

[0064] Example 7:

[0065] Reference Figure 1-Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0066] The sintering device for silicon crystal green body also includes a guide plate 8, which is arranged on the inner wall of the kiln body 1, and the guide plate 8 is close to the inlet end of the return air duct 4, so that the guide plate 8 and the inner wall of the kiln body 1 form an air intake area connected to the inlet of the return air duct 4, wherein the air intake area is close to the end of the silicon crystal green body 10 away from the outlet end of the return air duct 4.

[0067] In this embodiment, the air inlet area formed by the guide plate 8 and the kiln body 1 is close to the end of the silicon crystal green body 10 away from the outlet end of the return air duct 4, which can further prevent the fan 3 from directly drawing away the air input by the return air duct 4, thereby ensuring the fluidity of the hot air output by the return air duct 4 in the kiln body 1, improving the heating effect of the green body, and further improving the sintering efficiency and yield of the silicon crystal green body.

[0068] Example 8:

[0069] Reference Figure 1-Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0070] The sintering device for silicon crystal green body further includes a flow detection module 9, which is connected between the inlet end of the return air duct 4 and the outlet end of the fan 3; the flow detection module 9 is configured as a Venturi tube.

[0071] In this embodiment, the flow detection module 9 is used to detect the air flow in the return air duct 4, and by adjusting the power of the fan 3, the blank can always be heated by hot air with appropriate flow and flow rate, which is beneficial to further improve the uniformity of heating and cooling of the blank.

[0072] Specifically, the flow detection module 9 is connected between the inlet end of the return air duct 4 and the outlet end of the fan 3. This arrangement enables the flow detection module 9 to directly measure the flow rate of hot air discharged from the fan 3 and before entering the return air duct 4, ensuring the accuracy of the flow detection.

[0073] Venturi tubes offer advantages such as a wide measurement range, easy installation, large pressure differential, high accuracy, and excellent stability. They calculate flow rate by measuring the pressure differential of the fluid in the pipe, based on strict fluid mechanics. In sintering equipment, Venturi tubes can more accurately measure the flow of hot air, providing the system with real-time flow data.

[0074] Example 9:

[0075] Reference Figure 1-Figure 3 In addition to all the technical solutions of any of the above embodiments, the embodiments of the present invention further have the following technical solutions:

[0076] The sintering device for silicon crystal green bodies further includes a heat insulation layer wrapped around the outside of the return air duct 4; the heat insulation layer is configured as a ceramic fiber blanket.

[0077] In this embodiment, the heat insulation layer is used to reduce heat loss when hot air flows through the heat regeneration pipe, thereby further improving the sintering efficiency.

[0078] Ceramic fiber blankets have extremely low thermal conductivity, effectively blocking heat transfer and reducing heat loss during the sintering process. The high porosity of ceramic fiber blankets separates the air into nearly static, small pores. The pressure within these pores, combined with the solid fibers, forms a dense shield, hindering the intrusion of hot air and further enhancing the thermal insulation effect. Ceramic fiber blankets can withstand high temperatures, are non-flammable, and do not produce harmful gases, making them suitable for the high-temperature conditions encountered during the sintering of silicon spar green bodies.

[0079] Ceramic fiber blankets offer high tensile strength and excellent resistance to airflow erosion, capable of withstanding the mechanical stress and airflow impacts that may occur during the sintering process. They are also easy to cut and install, and can be customized to the shape and size of the return air duct, ensuring a tight fit between the insulation layer and the duct. Maintenance and replacement are also relatively easy, reducing maintenance costs and downtime.

[0080] Specifically, the thermal insulation layer effectively reduces heat loss from the return air duct 4 to the surrounding environment, improving heat utilization during the sintering process. The return air duct 4 is susceptible to deformation or damage due to thermal stress in high-temperature environments. The thermal insulation layer reduces the temperature gradient in the return air duct 4, alleviating the effects of thermal stress on the duct, thereby extending its service life. By reducing heat loss and protecting the return air duct 4, the thermal insulation layer helps maintain a stable temperature environment during the sintering process, improving sintering efficiency and yield rate.

[0081] It can be understood that, except for any conflicting parts, the above-mentioned embodiments 1-9 can be freely combined to form other implementation methods of the present invention.

[0082] In the description of this utility model, it should be understood that the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of this utility model, "plurality" means two or more, unless otherwise specifically defined.

[0083] In this utility model, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, or indirect connection through an intermediate medium; internal communication between two components, or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on specific circumstances.

[0084] In the present invention, unless otherwise expressly specified or limited, when a first feature is “above” or “below” a second feature, it may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Moreover, when a first feature is “above,” “above,” or “above” a second feature, it may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is “below,” “below,” or “below” a second feature, it may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0085] The term "comprise" or any other similar term is intended to cover non-exclusive inclusion, such that a process, article, or apparatus / device that comprises a list of elements includes not only those elements but also other elements not expressly listed or inherent to such process, article, or apparatus / device.

[0086] Thus far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art may make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will fall within the scope of protection of the present invention.

Claims

1. A sintering device for silicon crystal green body, characterized in that: include: A kiln body (1) is provided with a heating cavity formed therein; A kiln car support (2) is used to support a silicon crystal green body (10), wherein the silicon crystal green body (10) is provided with a channel running through from both ends; A fan (3) is supported on the kiln body (1), and an inlet end of the fan (3) is communicated with the heating cavity; A return air duct (4), one end of which is connected to the outlet end of the fan (3), and the other end of which is communicated with the heating cavity and faces the open end face of the silicon crystal green body (10) to form a heat exchange channel between the two open ends of the silicon crystal green body (10).

2. The sintering device for silicon crystal green body according to claim 1, characterized in that: The invention also includes a bell mouth (5), the small end of the bell mouth (5) is connected to the outlet end of the return air duct (4), and the large end of the bell mouth (5) is connected to the heating cavity. The shape of the large end of the bell mouth (5) matches the shape of the end face of the kiln car support (2), so as to form a first air outlet area at the large end of the bell mouth (5) that matches the open end face of the silicon crystal green body (10).

3. The sintering device for silicon crystal green body according to claim 2, characterized in that: It also includes a plurality of heat-resistant tubes (6), each of which is supported on the inner wall of the kiln body (1) and passes through the kiln body (1), and the plurality of heat-resistant tubes (6) are distributed in an array to form an array of gas outlets matching the open end surface of the silicon crystal green body (10), and the array of gas outlets faces the open end surface of the silicon crystal green body (10); The heat-resistant tube (6) is configured as a ceramic tube.

4. The sintering device for silicon crystal green body according to claim 3, characterized in that: It also includes a diverter grid (7), the inlet end of the diverter grid (7) matches the large end of the bell mouth (5) and can be supported on the kiln body (1), and the outlet end of the diverter grid (7) matches the open end surface of the silicon crystal green body (10); The diverter grid (7) is configured as a ceramic grid.

5. The sintering device for silicon crystal green body according to claim 4, characterized in that: The diverter grid (7) is located between the inlet end of the heat-resistant tube (6) and the large end of the bell mouth (5).

6. The sintering device for silicon crystal green body according to any one of claims 1 to 5, characterized in that: The inlet end of the fan (3) and the outlet end of the return air duct (4) are connected to both sides of the kiln body (1) and correspond to the two ends of the silicon crystal green body (10) respectively.

7. The sintering device for silicon crystal green body according to claim 6, characterized in that: The invention also includes a guide plate (8), which is arranged on the inner wall of the kiln body (1), and the guide plate (8) is close to the inlet end of the return air duct (4), so that the guide plate (8) and the inner wall of the kiln body (1) form an air intake area connected to the inlet of the return air duct (4), wherein the air intake area is closer to the end of the silicon crystal green body (10) away from the outlet end of the return air duct (4).

8. The sintering device for silicon crystal green body according to claim 1, characterized in that: It also includes a flow detection module (9), which is connected between the inlet end of the return air duct (4) and the outlet end of the fan (3); The flow detection module (9) is configured as a Venturi tube.

9. The sintering device for silicon crystal green body according to claim 1, characterized in that: It also includes a heat insulation layer wrapped around the outside of the return air duct (4); The heat insulation layer is configured as a ceramic fiber blanket.

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