Horizontal adjusting device
By setting up an adjustment structure on the surface of the probe table, the distance between the test machine and the probe table is automatically adjusted, which solves the problem of the relative level of the test machine and the probe table, and improves the degree of automation and stability of the machine.
Patent Information
- Application Number
- CN202422361756.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-26
- Publication Date
- 2025-08-29
- Estimated Expiration
- 2034-09-26
AI Technical Summary
In the prior art, the relative level control between the test machine and the probe table cannot be guaranteed, resulting in damage to parts, prolonging the loading time or even downtime.
A number of adjustment structures are arranged on the surface of the probe table, including a transmission assembly, a limit assembly and a distance measuring assembly, and the relative level is achieved by automatically adjusting the distance between the tester and the probe table.
The automation level adjustment of the test machine and probe table is realized, which improves the utilization rate and stability of the machine, reduces the loading time and avoids downtime.
Smart Images
Figure CN223284258U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of semiconductors, and in particular to a level adjustment device. Background Art
[0002] The current connection method between the test machine and the probe station using a robot is a physical mechanical lock and an air lock. Both are locked after aligning the positioning pins on the test machine and the probe station. Since it is all manually operated, the relative horizontal control of the test machine and the probe station cannot be guaranteed. During locking, parts may be damaged, thereby extending the loading time of the machine and even causing downtime.
[0003] Therefore, how to ensure the relative level of the test machine and probe station, reduce the time for machine loading, and avoid downtime is a problem that needs to be solved at present. Summary of the Invention
[0004] The technical problem to be solved by the utility model is how to ensure the relative level of a test machine and a probe station, and provides a level adjustment device.
[0005] In order to solve the above problems, the utility model provides a horizontal adjustment device, including multiple adjustment structures, which are respectively arranged on the surface of the probe station, and each of the adjustment structures includes: a transmission component, which is used to drive the area to be adjusted of the test machine to move along a first direction to move away from or close to the probe station when an area to be adjusted of the test machine contacts the adjustment structure, and the first direction is a direction perpendicular to the surface of the probe station; a limiting component, located on one side of the transmission component along the second direction, is used to limit the range of movement of the transmission component along the first direction, and the second direction is a direction parallel to the surface of the probe station; a ranging component, located on the other side of the transmission component along the second direction, is used to detect the distance between the test machine and the probe station; multiple adjustment structures can respectively adjust the distance between the corresponding areas of the test machine and the probe station to achieve the relative level of the test machine and the probe station.
[0006] The above technical solution achieves relative leveling between the tester and the probe station by installing multiple adjustment structures on the probe station's surface to adjust the distance between each area of the tester and the probe station. This device solves the relative leveling problem between the tester and the probe station, achieving automated height adjustment and improving the utilization and stability of the machine.
[0007] It should be understood that the above general description and the detailed description below are merely exemplary and explanatory and do not limit the present invention. Technologies, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies, methods, and devices should be considered part of the specification. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] In order to more clearly illustrate the technical solutions in the specific embodiments of the present invention, the following is a brief introduction to the drawings required for the description of the specific embodiments. Obviously, the drawings described below are only some specific embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive work.
[0009] Figure 1 This is a schematic diagram of the working state of an embodiment of the level adjustment device of the present invention.
[0010] Figure 2 This is a structural schematic diagram of the adjustment structure of an embodiment of the level adjustment device of the present invention.
[0011] Figure 3 This is a structural schematic diagram of the status prompt structure of an embodiment of the level adjustment device of the present utility model. DETAILED DESCRIPTION
[0012] The following is a clear and complete description of the technical solutions in the embodiments of the present invention, with reference to the accompanying drawings. Obviously, the described embodiments are only a portion of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments derived by those skilled in the art without inventive effort are within the scope of protection of the present invention.
[0013] In order to ensure the relative level of the test machine and the probe station, reduce the machine loading time and avoid downtime, the utility model provides a level adjustment device, which automatically adjusts the adaptation height according to the distance from the bottom of the test machine to the surface of the probe station, so as to achieve the relative level of the test machine and the probe station, thereby improving the degree of automation of the machine.
[0014] See also Figures 1 to 3 ,in, Figure 1 This is a schematic diagram of the working state of an embodiment of the level adjustment device of the present invention; Figure 2 This is a schematic structural diagram of the adjustment structure of an embodiment of the level adjustment device of the present invention; Figure 3 This is a structural schematic diagram of the status prompt structure of an embodiment of the level adjustment device of the present utility model.
[0015] like Figures 1 to 3As shown, the horizontal adjustment device includes a plurality of adjustment structures 110, which are respectively arranged on the surface of the probe station 120, and is characterized in that each of the adjustment structures 110 includes: a transmission component 21, a limiting component 22, and a distance measuring component 23. When an area to be adjusted of the test machine 130 contacts the adjustment structure 110, the transmission component 21 is used to drive the area to be adjusted of the test machine 130 to move along the first direction D1 to move away from or close to the probe station 120, and the first direction D1 is a direction perpendicular to the surface of the probe station 120. The limiting component 22 is located on one side of the transmission component 21 along the second direction D2, and is used to limit the range of movement of the transmission component 21 along the first direction D1, and the second direction D2 is a direction parallel to the surface of the probe station 120. The distance measuring component 23 is located on the other side of the transmission component 21 along the second direction D2, and is used to detect the distance between the test machine 130 and the probe station 120. The plurality of adjustment structures 110 can respectively adjust the distance between corresponding areas of the tester 130 and the probe station 120 to achieve relative levelness between the tester 130 and the probe station 120 .
[0016] The above technical solution achieves relative leveling between the tester and the probe station by installing multiple adjustment structures on the probe station's surface to adjust the distance between each area of the tester and the probe station. This device solves the relative leveling problem between the tester and the probe station, achieving automated height adjustment and improving the utilization and stability of the machine.
[0017] In some embodiments, the transmission assembly 21 further includes: a transfer module 211, two linkage modules 212, two screw rods 213, and two motors 214. The transfer module 211 is located at the center of the adjustment structure 110. The two linkage modules 212 are relatively arranged on both sides of the transfer module 211 along the second direction D2. Each of the screw rods 213 is connected to a linkage module 212. Each of the motors 214 is connected to a screw rod 213. The motor 214 is used to provide power and drive the transfer module 211 to move along the first direction through the screw rod 213 and the linkage module 212, thereby driving the corresponding area of the testing machine 130 to move along the first direction D1 to move away from or close to the probe station 120.
[0018] In some embodiments, each linkage module 212 further includes: a slide rail 2121, a slider 2122, and a linkage member 2123. The slide rail 2121 is located on one side of the transfer module 211 along the second direction D2 and extends along the first direction D1. The slider 2122 is located on the slide rail 2121 and connected to the transfer module 211. The slider 2122 can move along the slide rail 2121 and drive the transfer module 211 to move along the first direction D1. One end of the linkage member 2123 is connected to the slider 2122, and the other end is connected to the screw rod 213. The linkage member 2123 can move along the first direction D1 under the drive of the screw rod 213.
[0019] In some embodiments, the limit assembly 22 further includes: a first limit sensor 221, a second limit sensor 222, an initialization position sensor 223, a controller (not shown), and a limit module 224. The first limit sensor 221 is located on one side of the transmission assembly 21 along the second direction D2, and is used to detect whether the transmission assembly 21 passes the position of the first limit sensor 221. The second limit sensor 222 is located on the side of the first limit sensor 221 close to the probe station 120 along the first direction D1, and is used to detect whether the transmission assembly 21 passes the position of the second limit sensor 222. The initialization position sensor 223 is located between the first limit sensor 221 and the second limit sensor 222, and is used to detect whether the transmission assembly 21 passes the position of the initialization position sensor 223. The controller is connected to the first limit sensor 221, the second limit sensor 222, and the initialization position sensor 223, and controls the transmission assembly 21 to stop moving according to the detection signals of the first limit sensor 221, the second limit sensor 222, and the initialization position sensor 223. The limiting module 224 is disposed on one side of the linkage member 2123 along the first direction D1 , and is used to limit the movement range of the transmission assembly 21 along the first direction D1 .
[0020] In some embodiments, the transmission assembly 21 further includes a blocking piece 215 located on a side of the linkage member 2123 close to the limit assembly 22. The blocking piece 215 is capable of cutting off the signal of the initialization position sensor 223 when the linkage member 2123 moves along the first direction D1 to the initialization position sensor 223. When the signal of the initialization position sensor 223 is cut off, it means that the initialization position sensor 223 recognizes that the linkage member 2123 has moved to the position of the initialization position sensor 223, which is equivalent to the coordinate origin.
[0021] When the linkage member 2123 moves along the first direction D1 to the first limit sensor 221, the blocking piece 215 cuts off the signal from the first limit sensor 221. The cut-off signal from the first limit sensor 221 indicates that the first limit sensor 221 recognizes that the linkage member 2123 has moved to the position of the first limit sensor 221. When the linkage member 2123 moves along the first direction D1 to the second limit sensor 222, the blocking piece 215 cuts off the signal from the second limit sensor 222. The cut-off signal from the second limit sensor 222 indicates that the second limit sensor 222 recognizes that the linkage member 2123 has moved to the position of the second limit sensor 222. The movement range of the linkage member 2123 is between the first limit sensor 221 and the second limit sensor 222.
[0022] In some embodiments, the distance measuring component 23 includes a suspended distance measuring sensor 231 for detecting the distance between the test machine 130 and the probe station 120 .
[0023] In some embodiments, the distance measuring component 23 further includes a damper 232 disposed on the surface of the transmission component for providing a buffer when the area to be adjusted of the testing machine 130 contacts the corresponding adjustment structure 110 .
[0024] In some embodiments, the suspended distance measuring sensor 231 can determine whether the area to be adjusted of the testing machine 130 contacts the corresponding adjustment structure 110 by detecting the distance between the damper 232 and the suspended distance measuring sensor 231 .
[0025] In some embodiments, a status prompt structure 24 is also included, and the status prompt structure 24 further includes: a display light 241 and a code display screen 242. The display lights 241 of different colors are used to display different working states; the code display screen 242 is used to display the working codes corresponding to different working states. In this embodiment, the display lights 241 include three colors of display lights 241, namely green light, yellow light, and red light. Among them, the green light turns on to indicate that a certain area of the test machine reaches the adjustment structure, and the horizontal adjustment device starts to work; the yellow light turns on to indicate that the leveling is completed, the test machine completes the docking with the probe station, and the overall automation is completed; the red light turns on to indicate that the horizontal adjustment device has an abnormality in its operation. The code display screen 242 can display a code consisting of four or fewer letters or numbers. For example, when the level adjustment device begins operation, the code "C001" or the code "ON" is displayed; when the level adjustment device completes operation, the code "OFF" is displayed. When the level adjustment device is abnormal, an abnormality code such as "E001" or "E002" is used to indicate the device abnormality. The last three digits of the abnormality code can be used to distinguish the abnormality type, allowing for quick problem location. By encoding the last three digits of the abnormality code (E000 to E999), in principle, 1,000 abnormality types can be displayed.
[0026] In some embodiments, the area to be adjusted of the test machine 130 includes the four corners of the test machine 130; there are four adjustment structures 110, which are respectively arranged at the four corners of the probe station 120, and each adjustment structure 110 is used to adjust the relative level of a corresponding corner of the test machine 130 and a corresponding corner of the probe station 120.
[0027] Please continue reading Figures 1 to 3 The working process of the level adjustment device described in the utility model is as follows:
[0028] The tester 130 moves along the first direction D1 to approach the probe station 120. When the first corner of the tester 130 contacts the damper 232 and acts as a buffer, the suspended distance sensor 231 detects the distance between the damper 232 and the suspended distance sensor 231. If the distance decreases, that is, the suspended distance sensor 231 detects that the damper 232 is approaching, it is determined that the tester 130 has reached the adjustment structure 110. At this time, the level adjustment device starts to work, the green light of the status prompt structure 24 lights up, and the code display screen 242 displays a working code, such as the code "ON".
[0029] After the horizontal adjustment device starts working, the motor 214 of the adjustment structure 110 in contact with the test machine 130 starts working, driving the screw rod 213, and then starts to drive the test machine 130 along the first direction D1 to approach the probe station 120 through the linkage module 212 and the transfer module 211.
[0030] The test machine 130 moves under the drive of the transmission component 21. When the baffle 215 of the transmission component 21 reaches the initialization position sensor 222, the baffle 215 blocks the initialization position sensor 222, and the signal of the initialization position sensor 222 is cut off. At this time, the distance from the test machine 130 to the probe station 120 is measured by the suspended distance measuring sensor 231 to obtain a first distance. Then the transmission component 21 changes the direction of movement, drives the test machine 130 to a certain distance away from the probe station 120 along the first direction D1 and arrives at the waiting position, and waits in place. At this time, the distance from the test machine 130 to the probe station 120 is measured by the suspended distance measuring sensor 231 to obtain a second distance. The difference between the second distance and the first distance is the moving distance of the transmission component 21 after reaching the initialization position sensor 222. The moving distance is a set value, and different values can be set according to different processes. Driving the tester 130 away from the probe station 120 along the first direction D1 can shorten the distance between the first corner and other corners of the tester 130, allowing the tester 130 to be leveled as quickly as possible. In other embodiments, when the baffle 215 reaches the initialization position sensor 222, the transmission assembly 21 may stop moving and wait in place.
[0031] After the other three corners of the tester 130 contact the corresponding adjustment structures 110, the same action is repeated until the baffle 215 reaches the waiting position. After all the adjustment structures 110 reach the waiting position, all the adjustment structures 110 operate simultaneously, driving the tester 130 to approach the probe station 120 along the first direction D1 until the baffles 215 of all the adjustment structures 110 simultaneously reach the initialization position sensor 222 for a second time.
[0032] At this time, the signals from the initialization position sensor 222 are checked to see if they are all interrupted to confirm whether the four corners of the tester 130 are in the same horizontal plane. In other embodiments, the suspended distance measuring sensors 231 of the adjustment structures can be used to detect whether the distances between each area of the tester 130 and the probe station 120 are equal to confirm whether the four corners of the tester 130 are in the same horizontal plane.
[0033] After confirming that the four corners of the test machine 130 are in the same horizontal plane, it continues to move a certain distance toward the probe station 120 and stops. At this time, the spring needle at the bottom of the test machine 130 contacts the needle card or transfer plate on the surface of the probe station 120, the yellow light of the status prompt structure 24 lights up, and the code display screen 242 displays the end code, such as the code "OFF", and the overall automation ends.
[0034] If the level adjustment device is abnormal, the red light of the status prompt structure 24 lights up, and the code display screen 242 displays an abnormal code, such as "E001" or "E002", and the problem can be quickly located according to the number of the abnormal code.
[0035] The above technical solution achieves relative leveling between the tester and the probe station by installing multiple adjustment structures on the probe station's surface to adjust the distance between each area of the tester and the probe station. This device solves the relative leveling problem between the tester and the probe station, achieving automated height adjustment and improving the utilization and stability of the machine.
[0036] It should be noted that references in the specification to "one embodiment," "an embodiment," "an exemplary embodiment," "some embodiments," etc. indicate that the described embodiment may include a particular feature, structure, or characteristic, but every embodiment may not necessarily include the particular feature, structure, or characteristic. Moreover, such phrases do not necessarily refer to the same embodiment. In addition, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it is within the knowledge of those skilled in the relevant art to implement such feature, structure, or characteristic in conjunction with other embodiments, whether or not explicitly described.
[0037] Typically, a term can be understood at least in part from its usage in the context. For example, the term "one or more" as used herein depends at least in part on the context and can be used to describe any feature, structure or characteristic in a singular sense, or can be used to describe a feature, structure or combination of features in a plural sense. Similarly, depending at least in part on the context, terms such as "one", "a" or "the" can also be understood to express singular usage or to express plural usage. In addition, the term "based on" can be understood as not necessarily intended to express an exclusive set of factors, but can alternatively, also depending at least in part on the context, allow for the presence of other factors that are not necessarily explicitly described. It should also be noted in this specification that "connected / coupled" refers not only to the direct coupling of one component to another component, but also to the indirect coupling of one component to another component through an intermediate component.
[0038] It should be noted that the terms "including" and "having" and their variations involved in the documents of the present invention are intended to cover non-exclusive inclusions. The terms "first", "second", etc. are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. Unless the context clearly indicates otherwise, it should be understood that the data used in this way can be interchanged under appropriate circumstances. In addition, the embodiments of the present invention and the features in the embodiments can be combined with each other unless there is a conflict. In addition, in the above description, the description of well-known components and technologies has been omitted to avoid unnecessary confusion of the concepts of the present invention. In the above embodiments, each embodiment focuses on the differences from other embodiments, and the same / similar parts between the embodiments can be referred to each other.
[0039] The above is only a preferred embodiment of the present invention. It should be pointed out that ordinary technicians in this technical field can make several improvements and modifications without departing from the principles of the present invention. These improvements and modifications should also be regarded as within the scope of protection of the present invention.
Claims
1. A level adjustment device, comprising a plurality of adjustment structures, each of which is arranged on the surface of a probe station, characterized in that: Each of the regulatory structures comprises: a transmission assembly, configured to drive an area to be adjusted of the test machine to move in a first direction to move away from or closer to the probe station when the area to be adjusted of the test machine contacts the adjustment structure, wherein the first direction is a direction perpendicular to a surface of the probe station; a limiting assembly, located on one side of the transmission assembly along the second direction, for limiting the range of movement of the transmission assembly along the first direction, wherein the second direction is a direction parallel to the surface of the probe station; a distance measuring component, located on the other side of the transmission component along the second direction, for detecting the distance between the test machine and the probe station; The plurality of adjustment structures can respectively adjust the distance between corresponding areas of the test machine and the probe station to achieve relative levelness between the test machine and the probe station.
2. The level adjustment device according to claim 1, characterized in that: The transmission assembly further comprises: A transfer module is located at the center of the regulating structure; Two linkage modules are arranged oppositely on both sides of the transfer module along the second direction; Two screw rods, each of which is connected to one of the linkage modules; Two motors, each of the motors is connected to one of the screw rods; The motor is used to provide power and drive the transfer module to move along the first direction through the lead screw and the linkage module, thereby driving the corresponding area of the test machine to move along the first direction to move away from or closer to the probe station.
3. The level adjustment device according to claim 2, characterized in that: Each linkage module further comprises: a slide rail located on one side of the transfer module along the second direction and extending along the first direction; a slider located on the slide rail and connected to the transfer module, the slider being capable of moving along the slide rail and driving the transfer module to move along the first direction; A linkage member has one end connected to the slider and the other end connected to the screw rod, and the linkage member can move along the first direction under the drive of the screw rod.
4. The level adjustment device according to claim 3, characterized in that: The limiting assembly further comprises: a first limit sensor, located on one side of the transmission assembly along the second direction, for detecting whether the transmission assembly passes the position of the first limit sensor; a second limit sensor, located on a side of the first limit sensor close to the probe station along the first direction, for detecting whether the transmission assembly passes through the position of the second limit sensor; an initialization position sensor, located between the first limit sensor and the second limit sensor, for detecting whether the transmission assembly passes through the position of the initialization position sensor; a controller connected to the first limit sensor, the second limit sensor, and the initialization position sensor, and controlling the transmission assembly to stop moving according to detection signals from the first limit sensor, the second limit sensor, and the initialization position sensor; The limiting module is arranged on one side of the linkage member along the first direction, and is used to limit the movement range of the transmission assembly along the first direction.
5. The level adjustment device according to claim 4, characterized in that: The transmission assembly further includes a blocking piece located on a side of the linkage member close to the limiting assembly, and the blocking piece is capable of cutting off the initialization position sensor signal when the linkage member moves along the first direction to the initialization position sensor.
6. The level adjustment device according to claim 1, characterized in that: The distance measuring component includes a suspended distance measuring sensor for detecting the distance between the test machine and the probe station.
7. The level adjustment device according to claim 6, characterized in that: The distance measuring assembly further includes a damper, which is arranged on the surface of the transmission assembly and is used for providing buffering when the area to be adjusted of the testing machine contacts the corresponding adjustment structure.
8. The level adjustment device according to claim 7, characterized in that: The suspended distance measuring sensor can determine whether the area to be adjusted of the testing machine contacts the corresponding adjustment structure by detecting the distance between the damper and the suspended distance measuring sensor.
9. The level adjustment device according to claim 1, characterized in that: Also includes a status prompt structure, the status prompt structure further includes: Different colors of display lights are used to show different working states; The code display screen is used to display the working codes corresponding to different working states.
10. The level adjustment device according to claim 1, characterized in that: The area to be adjusted of the test machine includes the four corners of the test machine; there are four adjustment structures, which are respectively arranged at the four corners of the probe station, and each adjustment structure is used to adjust the relative level between a corresponding corner of the test machine and a corresponding corner of the probe station.