Water cooling system without three-way water valve

Abstract

The utility model discloses a water cooling system without a three-way water valve, and relates to the technical field of cooling structures for cleaning systems. Comprising a water inlet and supply block used for providing cooling water; the water inlet end of the first-size pipeline end cooling block a is communicated with the water inlet and supply block; the water inlet end of the first size pipeline end cooling block b is communicated with the water return end of the first size pipeline end cooling block a; the water inlet end of the second-size pipeline end cooling block a is communicated with the water return end of the first-size pipeline end cooling block b; the water inlet end of the second-size pipeline end cooling block b is communicated with the water return end of the second-size pipeline end cooling block a; and the water inlet end of the plasma air source pipeline with water cooling is communicated with the water return end of the second-size pipeline end cooling block b. In order to more effectively control the overall temperature, cooling treatment is preferentially conducted on the first-size pipeline, the overall temperature can be rapidly reduced, and the more remarkable cooling effect is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of cooling structures for cleaning systems, in particular to a water cooling system without a three-way water valve. Background Art

[0002] In semiconductor equipment, the process chamber is too far away from the terminal pipelines and valves. Therefore, when cleaning the process chamber, the contaminants on the terminal pipelines and valves cannot be completely removed. Therefore, a separate cleaning system is required for the terminal pipelines. Since the terminal pipelines and valves are connected together and the path is close, the valves can be cleaned at the same time as the pipelines.

[0003] During the operation of a pipe cleaning system, chemical reactions generate a large amount of heat. If this heat is not dissipated promptly, the clean gas transmission pipeline will heat up and even risk damage, affecting the normal operation and stability of semiconductor equipment. Therefore, the pipe cleaning system requires a well-designed heat dissipation structure to promptly remove the generated heat and maintain the normal operating temperature of the clean gas transmission pipeline.

[0004] The cooling structure of the existing pipeline cleaning system has a three-way water valve, which consumes a lot of consumables. At the same time, the detection signals are numerous and complex, which causes the system to frequently issue alarm signals, affecting its stability and operating efficiency, and the cooling effect is poor. Utility Model Content

[0005] The purpose of the utility model is to provide a water cooling system without a three-way water valve, which can save consumables and cool the heat source position in the first time, with better cooling effect; the detection signal is small and the system is more stable.

[0006] To achieve the above objectives, the present application proposes a water cooling system without a three-way water valve, comprising:

[0007] Water inlet and supply block, used to provide cooling water;

[0008] A first-size pipeline end cooling block a is provided on the first-size clean gas transmission pipeline, and a water inlet end of the first-size pipeline end cooling block a is connected to the water inlet supply block;

[0009] A first-size pipeline end cooling block b is provided on the first-size clean gas transmission pipeline, and the water inlet end of the first-size pipeline end cooling block b is connected to the water return end of the first-size pipeline end cooling block a;

[0010] The second-size pipeline end cooling block a is provided on the second-size clean gas transmission pipeline, and the water inlet end of the second-size pipeline end cooling block a is connected to the water return end of the first-size pipeline end cooling block b;

[0011] The second-size pipeline end cooling block b is provided on the second-size clean gas transmission pipeline, and the water inlet end of the second-size pipeline end cooling block b is connected to the water return end of the second-size pipeline end cooling block a;

[0012] The water inlet end of the plasma gas source pipeline with water cooling is connected to the water return end of the cooling block b at the second size pipeline end.

[0013] Furthermore, the water return end of the water-cooled plasma gas source pipeline is connected to the cooling water inlet end of the RPS remote plasma emitter.

[0014] Furthermore, the RPS remote plasma launcher cooling water return end is connected to the water return supply block.

[0015] Furthermore, after the first-size pipeline end cooling block a is docked with the first-size pipeline end cooling block b, the first-size clean gas transmission pipeline can be completely wrapped.

[0016] Furthermore, after the second-size pipeline end cooling block a is docked with the second-size pipeline end cooling block b, the second-size clean gas transmission pipeline can be completely wrapped.

[0017] Furthermore, the first-size pipeline end cooling block a and the first-size pipeline end cooling block b are an up-down structure or a left-right structure.

[0018] Furthermore, the second-size pipeline end cooling block a and the second-size pipeline end cooling block b are an up-down structure or a left-right structure.

[0019] Furthermore, the first-size pipeline end cooling block a, the first-size pipeline end cooling block b, the second-size pipeline end cooling block a and the second-size pipeline end cooling block b are made of alloy material.

[0020] Furthermore, the first-sized cleaning gas transmission pipeline is located at a heat source position of the pipeline cleaning system.

[0021] Furthermore, the water inlet supply block is connected to the cooling block a at the end of the first size pipeline through the water inlet joint, and the return water supply block is connected to the RPS remote plasma emitter cooling through the return water joint, and water source shut-off valves are provided on the water inlet joint and the return water joint.

[0022] The above technical solution adopted by this utility model has the following advantages over the existing technology: due to the high temperature of the equipment end, the valve connected to it will also reach a high temperature due to heat conduction, which inevitably shortens the service life of the valve internal sealing ring. To address this problem, this water cooling system can cool the pipeline in real time, effectively extending the service life of the sealing ring by reducing its operating temperature.

[0023] During cleaning, the chemical reaction in the first-size pipe area releases a significant amount of heat. This heat is quickly transferred to the entire pipe, making the first-size pipe the primary heat source in the cooling system. To more effectively control the overall temperature, cooling the first-size pipe is prioritized, rapidly reducing the overall temperature and achieving a more significant cooling effect.

[0024] Furthermore, compared to previous water-cooling systems, the system eliminates the need for a three-way water valve, saving consumables and reducing the number of detection signals. This not only simplifies the system structure but also significantly improves its stability and reliability. The use of energy-saving, environmentally friendly, and safe alloy materials effectively protects equipment and personnel. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 This is an exploded view of a water cooling system without a three-way water valve;

[0026] Figure 2 This is a schematic diagram of the structure of a water cooling system without a three-way water valve.

[0027] Among them: 1. Cooling block a at the end of the first-size pipeline, 2. Cooling block b at the end of the first-size pipeline, 3. Cooling block a at the end of the second-size pipeline, 4. Cooling block b at the end of the second-size pipeline, 5. Plasma gas source pipeline with water cooling, 6. Water inlet joint, 7. Return water joint, 8. Water source shut-off valve, 9. RPS remote plasma emitter cooling return water end, 10. RPS remote plasma emitter cooling water inlet end, 11. RPS remote plasma emitter. DETAILED DESCRIPTION

[0028] In order to make the technical problems, technical solutions and beneficial effects to be solved by this application more clearly understood, this application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain this application and are not intended to limit this application.

[0029] It should be noted that when an element is referred to as being “fixed on” or “disposed on” another element, it may be directly on the other element or indirectly on the other element. When an element is referred to as being “connected to” another element, it may be directly connected to the other element or indirectly connected to the other element.

[0030] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of this application, "multiple" means two or more, unless otherwise clearly and specifically defined. "Several" means one or more, unless otherwise clearly and specifically defined.

[0031] In the description of this application, it should be understood that the terms "center", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0032] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0033] See also Figure 1-2 This embodiment provides a water cooling system without a three-way water valve, including:

[0034] Water inlet and supply block, used to provide cooling water;

[0035] A first-size pipeline end cooling block a is provided on the first-size clean gas transmission pipeline, and a water inlet end of the first-size pipeline end cooling block a is connected to the water inlet supply block;

[0036] A first-size pipeline end cooling block b is provided on the first-size clean gas transmission pipeline, and the water inlet end of the first-size pipeline end cooling block b is connected to the water return end of the first-size pipeline end cooling block a;

[0037] After the first-size pipeline end cooling block a and the first-size pipeline end cooling block b are docked, they can completely enclose the first-size clean gas transmission pipeline; and the first-size clean gas transmission pipeline is located at the heat source position of the pipeline cleaning system. It should be noted that the first size can be 4 inches, and can also be adjusted to other sizes according to working conditions;

[0038] The second-size pipeline end cooling block a is provided on the second-size clean gas transmission pipeline, and the water inlet end of the second-size pipeline end cooling block a is connected to the water return end of the first-size pipeline end cooling block b;

[0039] The second-size pipeline end cooling block b is provided on the second-size clean gas transmission pipeline, and the water inlet end of the second-size pipeline end cooling block b is connected to the water return end of the second-size pipeline end cooling block a;

[0040] After the second-size pipeline end cooling block a and the second-size pipeline end cooling block b are docked, the second-size clean gas transmission pipeline can be completely wrapped. It should be noted that the second size can be 1.5 inches, and can also be adjusted to other sizes according to working conditions.

[0041] The water-cooled plasma gas source pipeline has its water inlet connected to the water return end of the cooling block b at the second size pipeline end;

[0042] RPS remote plasma emitter, the preferred model is RPS Central-1008L, other models can also be selected according to actual working conditions; its cooling water inlet end is connected to the water return end of the water-cooled plasma gas source pipeline;

[0043] The return water supply block is connected to the cooling return water end of the RPS remote plasma emitter.

[0044] As a preferred implementation provided in this embodiment, the first size pipeline end cooling block a and the first size pipeline end cooling block b are an upper and lower structure or a left and right structure; the second size pipeline end cooling block a and the second size pipeline end cooling block b are an upper and lower structure or a left and right structure.

[0045] As a preferred implementation provided in this embodiment, the first size pipeline end cooling block a, the first size pipeline end cooling block b, the second size pipeline end cooling block a and the second size pipeline end cooling block b and each water transmission pipeline are made of alloy material.

[0046] After opening the water source shut-off valve, the cooling water at the plant service end flows from the water inlet supply block to the first-size pipeline end cooling block a and the first-size pipeline end cooling block b to cool the first-size clean gas transmission pipeline at the heat source, and then flows to the second-size pipeline end cooling block a and the second-size pipeline end cooling block b to cool the second-size clean gas transmission pipeline; then flows into the RPS remote plasma emitter of the pipeline cleaning system for cooling it, and finally the cooling water flows back to the return water supply block at the plant service end, forming a circulating cooling to cool down the entire system.

[0047] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the embodiments of the present application.

Claims

1. A water cooling system without a three-way water valve, characterized in that: include: Water inlet and supply block, used to provide cooling water; A first-size pipeline end cooling block a is provided on the first-size clean gas transmission pipeline, and a water inlet end of the first-size pipeline end cooling block a is connected to the water inlet supply block; A first-size pipeline end cooling block b is provided on the first-size clean gas transmission pipeline, and the water inlet end of the first-size pipeline end cooling block b is connected to the water return end of the first-size pipeline end cooling block a; The second-size pipeline end cooling block a is provided on the second-size clean gas transmission pipeline, and the water inlet end of the second-size pipeline end cooling block a is connected to the water return end of the first-size pipeline end cooling block b; The second-size pipeline end cooling block b is provided on the second-size clean gas transmission pipeline, and the water inlet end of the second-size pipeline end cooling block b is connected to the water return end of the second-size pipeline end cooling block a; The water inlet end of the plasma gas source pipeline with water cooling is connected to the water return end of the cooling block b at the second size pipeline end.

2. A water cooling system without a three-way water valve according to claim 1, characterized in that: The water return end of the water-cooled plasma gas source pipeline is connected to the cooling water inlet end of the RPS remote plasma emitter.

3. A water cooling system without a three-way water valve according to claim 2, characterized in that: The RPS remote plasma emitter cooling water return terminal is connected to the return water supply block.

4. The water cooling system without a three-way water valve according to claim 1, characterized in that: After the first-size pipeline end cooling block a is docked with the first-size pipeline end cooling block b, the first-size clean gas transmission pipeline can be completely wrapped.

5. The water cooling system without a three-way water valve according to claim 1, characterized in that: After the second-size pipeline end cooling block a is docked with the second-size pipeline end cooling block b, the second-size clean gas transmission pipeline can be completely wrapped.

6. A water cooling system without a three-way water valve according to claim 4, characterized in that: The first-size pipeline end cooling block a and the first-size pipeline end cooling block b are an up-down structure or a left-right structure.

7. A water cooling system without a three-way water valve according to claim 5, characterized in that: The second-size pipeline end cooling block a and the second-size pipeline end cooling block b are an up-down structure or a left-right structure.

8. The water cooling system without a three-way water valve according to claim 1, characterized in that: The first-size pipeline end cooling block a, the first-size pipeline end cooling block b, the second-size pipeline end cooling block a and the second-size pipeline end cooling block b are made of alloy material.

9. The water cooling system without a three-way water valve according to claim 1, characterized in that: The first-sized cleaning gas transmission pipeline is located at a heat source position of the pipeline cleaning system.

10. The water cooling system without a three-way water valve according to claim 1, characterized in that: The water inlet supply block is connected to the cooling block a at the end of the first size pipeline through the water inlet joint, and the return water supply block is connected to the RPS remote plasma emitter cooling through the return water joint. Water source shut-off valves are provided on the water inlet joint and the return water joint.

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