Exhaust device and gluing equipment
By introducing the inlet pipe and drain pipe into the exhaust device, and cleaning the pipes are used to clean the pipes, the problem of blockage in the exhaust device is solved, and the stability of exhaust pressure and the improvement of wafer yield is achieved.
Patent Information
- Application Number
- CN202422328544.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-24
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-09-24
AI Technical Summary
The existing exhaust devices cannot effectively clean the internal pipes, resulting in clogging, affecting the stability of exhaust pressure and reducing wafer yield.
An exhaust device is designed, including an inlet pipe and a drain pipe, which flows into and out of the pipe through the cleaning liquid, removes tiny particles and photoresist viscous liquid, and keeps the exhaust pressure stable.
Improves the stability of exhaust pressure, prevents mist and particles from falling on the wafer, and improves the yield and film thickness uniformity of the wafer.
Smart Images
Figure CN223288404U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of gluing equipment, in particular to an exhaust device and gluing equipment. Background Art
[0002] During the semiconductor manufacturing process, coating equipment is required to evenly coat a layer of photoresist on silicon wafers or other semiconductor substrates. This is a critical step in integrated circuit manufacturing. The coating unit in the coating equipment is typically equipped with an exhaust device. The exhaust device's primary function is to discharge volatiles generated during the coating process to reduce the impact and harm to the environment or human body. Furthermore, when the wafer rotates during photoresist coating, the high-speed rotation of the wafer disperses the photoresist and solvent liquid, creating mist. When a large amount of particles and droplets in the mist land on the wafer, it reduces the wafer's yield. Therefore, exhaust is necessary to remove the mist and particles generated during photoresist coating.
[0003] The exhaust system is typically fixed to the base of the coating unit and cannot be removed independently. Furthermore, the internal space is relatively small, so tiny particles and viscous photoresist liquid formed during photoresist coating, exposure, and development processes can easily accumulate inside the exhaust pipe. This can easily lead to blockage within the exhaust system, reducing exhaust pressure and causing a large amount of droplets and particles to land on the wafers. Fluctuations in exhaust pressure can also lead to poor film thickness uniformity across the wafers. However, because existing exhaust systems cannot clean their internal pipes, this reduces product yield. Utility Model Content
[0004] The purpose of the utility model is to provide an exhaust device and a gluing device, which can improve the stability of the exhaust pressure of the gluing unit during the gluing process, prevent droplets and particles from falling on the wafer, and improve the product yield.
[0005] The embodiment of the present utility model is achieved as follows:
[0006] One aspect of the utility model provides an exhaust device, including a pipeline, wherein an air inlet and an air outlet are respectively provided at opposite ends of the pipeline, the air inlet is connected to the base of the gluing unit, and the gas generated by the gluing unit enters the pipeline through the air inlet and is discharged to the outside through the air outlet; the exhaust device also includes a liquid inlet pipe and a liquid discharge pipe, which are respectively provided at opposite ends of the pipeline and connected to the pipeline, and the liquid inlet pipe and the liquid discharge pipe are provided between the air inlet and the air outlet; the cleaning liquid flows into the pipeline through the liquid inlet pipe and is discharged from the liquid discharge pipe.
[0007] Optionally, a pneumatic valve is provided on the liquid inlet pipe, and the pneumatic valve is used to control the flow or stop of the cleaning liquid in the liquid inlet pipe.
[0008] Optionally, there is at least one liquid inlet pipe, which is arranged at one end of the pipeline close to the air inlet; when there are multiple liquid inlet pipes, the multiple liquid inlet pipes are arranged at intervals.
[0009] Optionally, there is at least one drain pipe, which is arranged at one end of the pipeline close to the air outlet; when there are multiple drain pipes, the multiple drain pipes are arranged at intervals.
[0010] Optionally, the exhaust device further includes a liquid tank, which is used to store cleaning liquid; the liquid inlet pipe is connected to the liquid tank.
[0011] Optionally, the outer wall of the pipe is further provided with a through hole, and the through hole is covered with a transparent plate.
[0012] Optionally, a first mounting hole is provided on the periphery of the transparent plate, and a second mounting hole coaxial with the first mounting hole is provided on the outer wall of the pipe near the through hole. The first mounting hole and the second mounting hole can be sequentially passed through fixings to connect the transparent plate to the pipe.
[0013] Optionally, the pipeline includes a first pipeline and a second pipeline, the first pipeline is vertically connected to the second pipeline; an air inlet is provided at one end of the first pipeline away from the second pipeline; there are multiple first pipelines, and the multiple first pipelines are arranged side by side along the extension direction of the second pipeline.
[0014] Optionally, when the first pipeline includes multiple pipelines, two adjacent first pipelines are connected to each other at one end close to the second pipeline.
[0015] Another aspect of the present invention provides a gluing device, including a box, an exhaust device and a gluing unit, wherein the exhaust device and the gluing unit are arranged in the box; the gluing unit includes a base for setting a wafer, an air inlet of the exhaust device is connected to a side of the base away from the wafer, and an air outlet of the exhaust device extends to the outside of the box.
[0016] The beneficial effects of the present invention include at least one of the following:
[0017] The present application provides an exhaust device, comprising a pipe, wherein an air inlet and an air outlet are respectively provided at opposite ends of the pipe, the air inlet is connected to the base of the glue coating unit, and when the glue coating unit is coating, the gas generated by the glue coating unit enters the pipe from the air inlet and is discharged to the outside from the air outlet to prevent particles and droplets in the mist from falling on the wafer; the exhaust device also includes a liquid inlet pipe and a liquid discharge pipe, which are respectively provided at opposite ends of the pipe and connected to the pipe, and the liquid inlet pipe and the liquid discharge pipe are provided between the air inlet and the air outlet; the cleaning liquid flows into the pipe from the liquid inlet pipe and is discharged from the liquid discharge pipe to prevent the interior of the pipe from being blocked by tiny particles and photoresist viscous liquid, resulting in delayed discharge of the mist, and at the same time facilitates maintaining the exhaust pressure, thereby improving the wafer yield. The above-mentioned exhaust device can improve the stability of the exhaust pressure during the glue coating process of the glue coating unit, prevent droplets and particles from falling on the wafer, and improve the product yield.
[0018] The present application also provides a glue coating device comprising a housing, an exhaust device, and a glue coating unit, wherein the exhaust device and the glue coating unit are disposed within the housing; the glue coating unit includes a base for mounting a wafer, an air inlet of the exhaust device connected to a side of the base facing away from the wafer, and an air outlet of the exhaust device extending to the exterior of the housing. The glue coating device can prevent a large amount of mist particles and droplets from dripping onto the wafer surface, while improving the uniformity of the film thickness on the wafer surface, thereby increasing product yield. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.
[0020] Figure 1 One of the structural schematic diagrams of the exhaust device provided in an embodiment of the utility model;
[0021] Figure 2 The second structural diagram of the exhaust device provided by the embodiment of the utility model;
[0022] Figure 3 This is the third structural diagram of the exhaust device provided in an embodiment of the present utility model.
[0023] Icons: 100-exhaust device; 110-pipeline; 111-air inlet; 112-air outlet; 113-first pipeline; 114-second pipeline; 120-liquid inlet pipe; 121-pneumatic valve; 130-liquid discharge pipe; 140-through hole. DETAILED DESCRIPTION
[0024] To make the purpose, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations.
[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but rather merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are also within the scope of protection of the present invention.
[0026] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.
[0027] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, or are the orientations or positional relationships in which the utility model product is typically placed when in use. These terms are intended solely to facilitate the description of this utility model and to simplify the description, and are not intended to indicate or imply that the device or component referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third," etc., are used solely to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0028] Furthermore, terms such as "horizontal" and "vertical" do not necessarily mean that a component must be absolutely horizontal or overhanging, but rather that it can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but rather that it can be slightly tilted.
[0029] It should also be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "disposed," "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal connections between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.
[0030] Please refer to Figure 1 and Figure 2 As shown, this embodiment provides an exhaust device 100, including a pipe 110, with an air inlet 111 and an air outlet 112 respectively provided at opposite ends of the pipe 110, the air inlet 111 is connected to the base of the glue coating unit, and the gas generated by the glue coating unit enters the pipe 110 through the air inlet 111 and is discharged to the outside through the air outlet 112; the exhaust device 100 also includes a liquid inlet pipe 120 and a liquid discharge pipe 130, the liquid inlet pipe 120 and the liquid discharge pipe 130 are respectively provided at opposite ends of the pipe 110 and are connected to the pipe 110, and the liquid inlet pipe 120 and the liquid discharge pipe 130 are provided between the air inlet 111 and the air outlet 112; the cleaning liquid flows into the pipe 110 through the liquid inlet pipe 120 and is discharged from the liquid discharge pipe 130.
[0031] Specifically, the present application provides an exhaust device 100, which includes a pipe 110, and an air inlet 111 and an air outlet 112 are respectively provided at the opposite ends of the pipe 110. During the glue coating process, the photoresist and solvent liquid are dispersed to generate mist, which enters the pipe 110 through the air inlet 111 and is discharged to the external space through the air outlet 112, so as to timely discharge the gas generated by the glue coating unit to prevent particles and droplets in the mist from falling on the wafer.
[0032] Since the existing exhaust device is fixedly connected to the base of the glue coating unit and is not easy to remove, it is difficult to clean the inside of its pipeline. After long-term use, the inside of the pipeline is easily blocked by tiny particles and photoresist viscous liquid. The blockage inside the pipeline not only makes it difficult to discharge the gas, but also reduces the exhaust pressure, resulting in poor uniformity of the wafer film thickness and reduced product yield.
[0033] like Figure 2 As shown, in order to promptly clean the interior of the pipe 110, the exhaust device 100 of the present application is further provided with a liquid inlet pipe 120 and a liquid discharge pipe 130. The liquid inlet pipe 120 and the liquid discharge pipe 130 are respectively provided at opposite ends of the pipe 110 and are in communication with the pipe 110. The liquid inlet pipe 120 is used to input a cleaning liquid into the pipe 110. The cleaning liquid flows in the extension direction of the pipe 110 and is finally discharged from the liquid discharge pipe 130, thereby cleaning the interior of the pipe 110.
[0034] It should be noted that, first, Figure 3 As shown, in one embodiment of the present application, the pipeline 110 includes a first pipeline 113 and a second pipeline 114, and the first pipeline 113 is vertically connected to the second pipeline 114; an air inlet 111 is provided at one end of the first pipeline 113 away from the second pipeline 114; there are multiple first pipelines 113, and the multiple first pipelines 113 are arranged side by side along the extension direction of the second pipeline 114.
[0035] Specifically, since the base of the gluing unit is typically circular, to adapt the exhaust duct 110 to the shape of the base of the gluing unit and improve space utilization, the duct 110 is composed of a first duct 113 and a second duct 114 connected together. The first duct 113 and the second duct 114 are vertically connected to minimize the occupied space. To further improve the exhaust efficiency of the exhaust device 100, multiple first ducts 113 are provided to increase the rate at which mist enters the duct 110.
[0036] Second, if Figure 3 As shown, in a specific embodiment of the present application, when the first pipe 113 includes multiple ones, one end of two adjacent first pipes 113 close to the second pipe 114 is connected to each other to form a Y-shaped structure to save production costs.
[0037] The exhaust device 100 provided in the present application includes a pipe 110, and an air inlet 111 and an air outlet 112 are respectively provided at opposite ends of the pipe 110. The air inlet 111 is connected to the base of the glue coating unit. When the glue coating unit is coating, the gas generated by the glue coating unit enters the pipe 110 through the air inlet 111 and is discharged to the outside through the air outlet 112 to prevent particles and droplets in the mist from falling on the wafer; the exhaust device 100 also includes a liquid inlet pipe 120 and a liquid outlet pipe 130. The liquid inlet pipe 120 and the liquid discharge pipe 130 are respectively arranged at opposite ends of the pipe 110 and are connected to the pipe 110. The liquid inlet pipe 120 and the liquid discharge pipe 130 are arranged between the air inlet 111 and the air outlet 112. The cleaning liquid flows into the pipe 110 through the liquid inlet pipe 120 and is discharged through the liquid discharge pipe 130. This prevents the pipe 110 from being blocked by tiny particles and photoresist viscous liquid, resulting in delayed mist discharge. At the same time, it also facilitates maintaining exhaust pressure, thereby improving wafer yield. The above-mentioned exhaust device 100 can improve the stability of the exhaust pressure during the coating process of the coating unit, prevent droplets and particles from falling on the wafer, and improve product yield.
[0038] In one embodiment of the present application, Figure 2 As shown, a pneumatic valve 121 is provided on the liquid inlet pipe 120 , and the pneumatic valve 121 is used to control the flow or stop of the cleaning liquid in the liquid inlet pipe 120 .
[0039] Specifically, if Figure 2As shown, in order to control the input state of the cleaning liquid and make the cleaning process inside the pipeline 110 more controllable, a pneumatic valve 121 is also provided on the liquid inlet pipe 120, and the pneumatic valve 121 can connect or disconnect the liquid inlet pipe 120. When the pneumatic valve 121 is opened, the cleaning liquid can flow into the pipeline 110 from the liquid inlet pipe 120; when the pneumatic valve 121 is closed, the liquid inlet pipe 120 is disconnected and the cleaning liquid cannot flow into the pipeline 110. The provision of the pneumatic valve 121 not only makes the cleaning process of the pipeline 110 more controllable and saves cleaning costs; it also makes the cleaning process and the exhaust process of the pipeline 110 independent of each other. During the exhaust process, it can be ensured that the cleaning liquid does not flow into the pipeline 110 to interfere with the exhaust of the pipeline 110, thereby improving the exhaust reliability of the exhaust device 100.
[0040] In one embodiment of the present application, the liquid inlet pipe 120 includes at least one, and the liquid inlet pipe 120 is arranged at one end of the pipeline 110 close to the air inlet 111; when the liquid inlet pipe 120 includes multiple, the multiple liquid inlet pipes 120 are arranged at intervals.
[0041] Specifically, at least one liquid inlet pipe 120 is provided at one end of the pipe 110 near the air inlet 111 to maximize the flow range of the cleaning liquid within the pipe 110 and improve cleaning efficiency. To further improve cleaning efficiency, multiple liquid inlet pipes 120 can be provided, with the multiple liquid inlet pipes 120 being spaced apart.
[0042] In one embodiment of the present application, the drain pipe 130 includes at least one, and the drain pipe 130 is arranged at one end of the pipeline 110 close to the air outlet 112; when the drain pipe 130 includes multiple drain pipes 130, the multiple drain pipes 130 are arranged at intervals.
[0043] Specifically, at least one drain pipe 130 is provided at one end of the pipe 110 near the air outlet 112 to maximize the flow range of the cleaning liquid within the pipe 110 and improve cleaning efficiency. To further improve cleaning efficiency and ensure that the cleaning liquid within the pipe 110 promptly removes fine particles and photoresist viscous liquid, multiple drain pipes 130 may be provided, with each being spaced apart to ensure that impurities within the pipe 110 are completely discharged.
[0044] Preferably, in order to ensure that impurities in the pipeline 110 are completely discharged, the drain pipe 130 can be set to a larger diameter.
[0045] For example, the exhaust device 100 further includes a liquid tank (not shown) for storing cleaning liquid. A liquid inlet pipe 120 is connected to the liquid tank, allowing the cleaning liquid in the liquid tank to flow into the pipeline 110 through the liquid inlet pipe 120. The provision of the liquid tank makes the cleaning process of the pipeline 110 more timely and convenient, allowing the interior of the pipeline 110 to be cleaned at any time.
[0046] Alternatively, as Figure 3 As shown, the outer wall of the pipe 110 is further provided with a through hole 140 , and the through hole 140 is covered with a transparent plate.
[0047] Specifically, if Figure 3 As shown, the outer wall of pipe 110 is further provided with a through hole 140, which is covered with a transparent plate to prevent the cleaning liquid from escaping through the opening, thereby improving the airtightness of pipe 110. The provision of through hole 140 and the transparent plate facilitates the operator to observe the blockage inside pipe 110, facilitating timely cleaning of the interior of pipe 110, and preventing the interior of pipe 110 from being clogged by tiny particles and photoresist viscous liquid, resulting in delayed mist discharge and reduced product yield.
[0048] Preferably, to increase the viewing angle of the through hole 140, the width of the through hole 140 can be set to be consistent with the width of the pipe wall. Of course, the present application does not impose any restrictions on the number of through holes 140 provided. Multiple through holes 140 can be provided, and multiple through holes 140 are evenly distributed on the pipe 110, so that the operator can promptly observe the blockage conditions at various locations inside the pipe 110. Of course, only one through hole 140 can also be provided, and the through hole 140 has a sufficient length to facilitate the operator to promptly observe the blockage conditions at various locations inside the pipe 110. In addition, the present application does not impose any restrictions on the length of the through hole 140, as long as it can ensure that the operator can quickly observe the blockage conditions inside the pipe 110.
[0049] In a preferred embodiment of the present application, a first mounting hole is provided on the periphery of the transparent plate, and a second mounting hole coaxial with the first mounting hole is provided on the outer wall of the pipe 110 near the through hole 140. The first mounting hole and the second mounting hole can be sequentially passed through fixing parts to connect the transparent plate to the pipe 110.
[0050] Specifically, a first mounting hole is provided on the periphery of the transparent plate, and a second mounting hole coaxial with the first mounting hole is provided on the outer wall of the pipe 110 near the through hole 140. The first mounting hole and the second mounting hole can be sequentially passed through a fixing member to detachably connect the transparent plate to the pipe 110. Preferably, the fixing member is a screw.
[0051] This arrangement makes it easy to disassemble the transparent plate. When the inside of the pipe 110 is blocked, the transparent plate can be directly disassembled and the inside of the pipe 110 can be quickly cleaned through the through hole 140, thereby improving the cleaning efficiency. At the same time, it is also easy to clean the transparent plate after disassembly to avoid the photoresist waste liquid contaminating the transparent plate and making it impossible to observe the blockage inside the pipe 110 in time.
[0052] On the other hand, the present invention provides a gluing device (not shown in the figure), including a box, an exhaust device 100 and a gluing unit, the exhaust device 100 and the gluing unit are arranged in the box; the gluing unit includes a base for setting the wafer, the air inlet 111 of the exhaust device 100 is connected to the side of the base away from the wafer, and the air outlet 112 of the exhaust device 100 extends to the outside of the box.
[0053] Specifically, the glue coating equipment includes a housing and a glue coating unit arranged in the housing, the base of the glue coating unit is used to place the wafer, and the glue coating unit can apply photoresist to the surface of the wafer. An exhaust device 100 is provided on the side of the base facing away from the wafer. The exhaust device 100 is fixedly connected to the base. The mist generated during the process of applying photoresist to the surface of the wafer by the glue coating unit can pass through the air inlet 111 of the exhaust device 100 through the pipe 110 and be discharged to the outside of the housing through the air outlet 112 to prevent particles and droplets in the mist from falling on the wafer. At the same time, the two ends of the pipe 110 of the exhaust device 100 are also connected to a liquid inlet pipe 120 and a liquid discharge pipe 130. The cleaning liquid flows into the pipe 110 from the liquid inlet pipe 120 and is discharged from the liquid discharge pipe 130 to prevent the pipe 110 from being blocked by microparticles and photoresist viscous liquid, resulting in delayed discharge of the mist. At the same time, it is also convenient to maintain the exhaust pressure, thereby improving the wafer yield. The specific structure and beneficial effects of the exhaust device 100 have been described in detail above and will not be repeated here. The above-mentioned glue coating equipment can ensure that a large amount of mist particles and droplets do not drip onto the wafer surface, while improving the uniformity of the film thickness on the wafer surface, thereby improving the product yield.
[0054] The above description is merely an optional embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention.
[0055] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any appropriate manner without contradiction. In order to avoid unnecessary repetition, the present invention will not further describe various possible combinations.
Claims
1. An exhaust device, characterized in that: The invention comprises a pipeline (110), wherein opposite ends of the pipeline (110) are respectively provided with an air inlet (111) and an air outlet (112), wherein the air inlet (111) is connected to the base of the gluing unit, and the gas generated by the gluing unit enters the pipeline (110) through the air inlet (111) and is discharged to the outside through the air outlet (112); the exhaust device (100) further comprises a liquid inlet pipe (120) and a liquid discharge pipe (130), wherein the liquid inlet pipe (120) and the liquid discharge pipe (130) are respectively provided at opposite ends of the pipeline (110) and are connected to the pipeline (110), and the liquid inlet pipe (120) and the liquid discharge pipe (130) are provided between the air inlet (111) and the air outlet (112); and the cleaning liquid flows into the pipeline (110) through the liquid inlet pipe (120) and is discharged through the liquid discharge pipe (130).
2. The exhaust device according to claim 1, characterized in that The liquid inlet pipe (120) is provided with a pneumatic valve (121), and the pneumatic valve (121) is used to control the flow or stop of the cleaning liquid in the liquid inlet pipe (120).
3. The exhaust device according to claim 1, characterized in that The liquid inlet pipe (120) includes at least one, and the liquid inlet pipe (120) is arranged at one end of the pipeline (110) close to the air inlet (111); when the liquid inlet pipe (120) includes a plurality, the plurality of liquid inlet pipes (120) are arranged at intervals.
4. The exhaust device according to claim 1, characterized in that The drainage pipe (130) includes at least one, and the drainage pipe (130) is arranged at one end of the pipeline (110) close to the air outlet (112); when the drainage pipe (130) includes multiple, the multiple drainage pipes (130) are arranged at intervals.
5. The exhaust device according to claim 1, characterized in that The exhaust device (100) further comprises a liquid tank, which is used to store cleaning liquid; the liquid inlet pipe (120) is in communication with the liquid tank.
6. The exhaust device according to claim 1, characterized in that The outer wall of the pipe (110) is further provided with a through hole (140), and the through hole (140) is covered with a transparent plate.
7. The exhaust device according to claim 6, characterized in that A first mounting hole is provided on the periphery of the transparent plate, and a second mounting hole coaxial with the first mounting hole is provided on the outer wall of the pipe (110) near the through hole (140). Fixing members can be sequentially passed through the first mounting hole and the second mounting hole to connect the transparent plate to the pipe (110).
8. The exhaust device according to claim 1, characterized in that The pipeline (110) comprises a first pipeline (113) and a second pipeline (114), wherein the first pipeline (113) is vertically connected to the second pipeline (114); an end of the first pipeline (113) away from the second pipeline (114) is provided with the air inlet (111); and there are a plurality of first pipelines (113), and the plurality of first pipelines (113) are arranged side by side along the extension direction of the second pipeline (114).
9. The exhaust device according to claim 8, characterized in that When the first pipes (113) are multiple, two adjacent first pipes (113) are connected to each other at one end close to the second pipe (114).
10. A glue coating device, characterized in that: The invention comprises a box body, an exhaust device (100) as described in any one of claims 1 to 9, and a gluing unit, wherein the exhaust device (100) and the gluing unit are arranged in the box body; the gluing unit comprises a base for arranging a wafer, an air inlet (111) of the exhaust device (100) is connected to a side of the base facing away from the wafer, and an air outlet (112) of the exhaust device (100) extends to the outside of the box body.