Auxiliary manual loading and unloading jig

Abstract

The utility model provides a jig for assisting manual wafer loading and unloading, and belongs to the technical field of semiconductor production equipment, and the jig comprises a first jig part which comprises a holding part, a first positioning part and a clamping part; the second jig part is arranged in a wafer inlet and outlet cavity of the magnetron sputtering equipment, and the second jig part comprises a supporting part and a second positioning part; and under the condition that the first positioning structure and the second positioning structure are aligned and jointed, the clamping parts are located on the two sides, in the first direction, of the glass substrate, the bearing platform is lower than the glass substrate, and the clamping parts can move oppositely so that the bearing platform can be located below the glass substrate, and the glass substrate can be grabbed. The auxiliary manual loading and unloading jig can assist in loading and unloading of the glass substrates, prevents hands from touching the glass substrates, and can effectively solve the problems caused by hand contact.

Description

Technical Field

[0001] The present application belongs to the technical field of semiconductor production equipment, and specifically relates to an auxiliary manual loading and unloading fixture for semiconductor production. Background Art

[0002] The working principle of magnetron sputtering is that electrons, under the action of an electric field, collide with argon atoms in the process of flying toward the substrate, causing them to ionize and produce Ar positive ions and new electrons; the new electrons fly toward the substrate, and the Ar ions are accelerated toward the cathode target under the action of the electric field, and bombard the target surface with high energy, causing the target material to be sputtered. Among the sputtered particles, neutral target atoms or molecules are deposited on the substrate to form a thin film.

[0003] Reference Figure 6 In the magnetron sputtering equipment, the glass substrate coating system consists of a first coating chamber 303, a flip chamber 305, a second coating chamber 304, a transfer chamber 302, an inlet and outlet chamber 301, etc. The coating process flow is as follows: the glass substrate 300 is placed in the inlet and outlet chamber 301, the robot of the transfer chamber 302 transfers the glass substrate 300 to the first coating chamber 303 for magnetron sputtering coating, and then transfers it to the second glass coating chamber 304 (the film layers coated in the two coating chambers are different) for magnetron sputtering coating, and then the robot transfers the glass substrate 300 to the flip chamber 305 for the reverse side, and repeats the coating on the other side. Finally, the glass substrate 300 that has completed the coating process is transferred to the inlet and outlet chamber 301 to complete the process flow.

[0004] In the early stage, there was no automated equipment for storing and retrieving glass substrates. Therefore, during equipment commissioning, glass substrates needed to be stored and retrieved manually. When manually taking out or placing the glass substrates in the inlet and outlet chamber, the human hand would directly contact the glass substrate, resulting in the following problems:

[0005] (1) Direct contact between human hands and the glass substrate will cause contamination;

[0006] (2) Human hands cannot guarantee the gripping strength, which may easily cause damage to the glass substrate. Utility Model Content

[0007] The present application aims to solve at least one of the above-mentioned technical problems existing in the prior art. To this end, the present application provides an auxiliary manual loading and unloading jig that can prevent human hands from directly contacting the glass substrate and solve the problems caused by human hands contacting the glass substrate.

[0008] The auxiliary manual loading and unloading jig according to an embodiment of the present application includes:

[0009] a first jig portion, the first jig portion comprising a gripping portion, a first positioning portion, and a clamping portion, the gripping portion being connected to the upper end of the first jig portion, the first positioning portion being downwardly provided with a first positioning structure, the clamping portions being provided in pairs on both sides of the first jig portion along a first direction, the opposing ends of the clamping portions on both sides being provided with supporting platforms, a substrate supporting space being formed between the upper end of the supporting platform and the first jig portion, and the clamping portions being capable of moving toward each other and adjusting along the first direction;

[0010] a second fixture portion, the second fixture portion being disposed in a sheet entry and exit cavity of the magnetron sputtering device, the second fixture portion comprising a supporting portion and a second positioning portion, the supporting portion being used to support the glass substrate and suspend the glass substrate on both sides along the first direction, the second positioning portion being provided with a second positioning structure upward, the second positioning structure being matched with the first positioning structure;

[0011] In which, when the first positioning structure and the second positioning structure are aligned and engaged, the clamping parts are located on both sides of the glass substrate along the first direction, and the supporting platform is lower than the glass substrate. The clamping parts can move toward each other so that the supporting platform is located below the glass substrate to grasp the glass substrate.

[0012] According to the auxiliary manual loading and unloading jig of the embodiment of the present application, there are at least the following beneficial effects: the auxiliary manual loading and unloading jig of this embodiment, through the second jig part set in the sheet inlet and outlet cavity, maintains the posture of the glass substrate so that it is suspended on both sides along the first direction. The worker only needs to grasp the first jig part by the gripping part and lower it into the sheet inlet and outlet chamber, and use the first positioning structure and the second positioning structure to position it, ensuring that the clamping parts on both sides are located on both sides of the first direction of the glass substrate, and then manually adjust the clamping parts towards each other so that the supporting platform moves to the bottom of the glass substrate, and then manually move the first jig part outward to remove the glass substrate. The placing action is similar. After completing the grabbing of the glass substrate, it is placed on the support part, and then manually adjust the clamping parts towards each other to move away from each other until it is below the exit glass substrate. The first jig part is removed to complete the loading of the glass substrate. In summary, the auxiliary manual loading and unloading jig of this embodiment can assist in the loading and unloading of glass substrates, avoid human hand contact with the glass substrate, and effectively solve the problems caused by human hand contact.

[0013] According to some embodiments of the present application, the first positioning portions are provided on both sides of the first fixture portion along the first direction, and the second positioning portions are located on both sides of the support portion along the first direction.

[0014] According to some embodiments of the present application, the first fixture portion is provided with the clamping portions on both sides of the first positioning portion.

[0015] According to some embodiments of the present application, the first fixture part includes:

[0016] Two side connecting plates, the two side connecting plates are arranged side by side and in parallel;

[0017] an intermediate connecting plate, the intermediate connecting plate being vertically connected to the middle position of the two side connecting plates along the first direction;

[0018] The first positioning portion and the clamping portion are arranged on a side of the side connecting plate away from the middle connecting plate, and the first positioning portion is connected to a middle position of the side connecting plate.

[0019] According to some embodiments of the present application, the middle connecting plate and the side connecting plates are both provided with a plurality of weight-reducing holes.

[0020] According to some embodiments of the present application, the first positioning structure is configured as a curved convexity, and the second positioning structure is configured as an arc-shaped concaveity.

[0021] According to some embodiments of the present application, the clamping portion includes:

[0022] a mounting block, the mounting block being disposed on the first fixture portion along the first direction;

[0023] an adjustment plate, the adjustment plate being fixedly disposed above the mounting block, the adjustment plate being provided with an adjustment slot along the first direction;

[0024] The first fixture part is provided with an adjusting screw passing through the adjusting slot.

[0025] According to some embodiments of the present application, the first fixture part is provided with a plurality of mounting holes along a second direction, the second direction being perpendicular to the first direction, and the mounting holes match the mounting block.

[0026] According to some embodiments of the present application, the first fixture part is provided with a limiting rod, and the mounting block is slidably connected to the limiting rod.

[0027] According to some embodiments of the present application, the first fixture part is provided with a plurality of the gripping portions along the first direction.

[0028] Additional aspects and advantages of the present application will be given in part in the following description, and some additional aspects and advantages will become obvious from the following description, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:

[0030] Figure 1This is a schematic diagram of the overall structure of the present application;

[0031] Figure 2 This is a structural diagram of the first fixture part in this application;

[0032] Figure 3 This is a working schematic diagram of the first fixture part in this application;

[0033] Figure 4 A schematic diagram of a state of a glass substrate entering and exiting a cavity;

[0034] Figure 5 A schematic structural diagram of a first positioning portion and a second positioning portion;

[0035] Figure 6 A schematic diagram of the cavity distribution of a glass substrate coating system. DETAILED DESCRIPTION

[0036] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.

[0037] In the description of this application, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this application.

[0038] In the description of this application, "several" means more than one, "plurality" means more than two, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.

[0039] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.

[0040] In the description of this application, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples.

[0041] Reference Figures 1 to 6 , an embodiment of the present application proposes an auxiliary manual loading and unloading jig, comprising:

[0042] The first fixture part 100 includes a gripping portion 105, a first positioning portion 104, and a clamping portion 103. The gripping portion 105 is connected to the upper end of the first fixture part 100. The first positioning portion 104 is provided with a first positioning structure 1041 downwardly. The clamping portions 103 are provided in pairs on both sides of the first fixture part 100 along the first direction. The opposing ends of the clamping portions 103 on both sides protrude to form supporting platforms 1031. A substrate supporting space is formed between the upper end of the supporting platform 1031 and the first fixture part 100. The clamping portions 103 can be moved toward each other and adjusted along the first direction.

[0043] The second fixture part 200 is arranged in the sheet inlet and outlet cavity 301 of the magnetron sputtering equipment. The second fixture part 200 includes a supporting portion (shielded by the glass substrate 300) and a second positioning portion 201. The supporting portion is used to support the glass substrate 300 and suspend the glass substrate 300 on both sides along the first direction. The second positioning portion 201 is provided with a second positioning structure 2011 upward, and the second positioning structure 2011 matches the first positioning structure 1041.

[0044] In which, when the first positioning structure 1041 and the second positioning structure 2011 are aligned and engaged, the clamping part 103 is located on both sides of the glass substrate 300 along the first direction, and the supporting platform 1031 is lower than the glass substrate 300. The clamping part 103 can move toward each other so that the supporting platform 1031 is located below the glass substrate 300 to grasp the glass substrate 300.

[0045] Reference Figures 1 to 3 The first direction is the left-right direction. The clamping portion 103 is provided on the left and right sides of the first fixture portion 100 and can be moved and adjusted along the left-right direction.

[0046] The auxiliary manual loading and unloading jig of this embodiment uses the second jig portion 200 to be set in the sheet entry and exit chamber 301 to maintain the posture of the glass substrate 300, so that it is suspended on both sides along the first direction. The worker only needs to grasp the first jig portion 100 with the gripping portion 105 and lower it into the sheet entry and exit chamber. The first positioning structure 1041 and the second positioning structure 2011 are used to position it, ensuring that the clamping portions 103 on both sides are located on both sides of the glass substrate 300 in the first direction. The clamping portions 103 are then manually adjusted towards each other so that the supporting platform 1031 moves below the glass substrate 300. The first jig portion 100 is then manually moved outward to remove the glass substrate 300. The placement operation is similar. After the glass substrate 300 is grasped, it is placed on the support portion. The clamping portions 103 are then manually adjusted away from each other until they are below the exit glass substrate 300. The first jig portion 100 is removed to complete the loading of the glass substrate 300.

[0047] In summary, the auxiliary manual loading and unloading jig of this embodiment can assist in loading and unloading the glass substrate 300, avoid human hand contact with the glass substrate 300, and effectively solve the problems caused by human hand contact.

[0048] Reference Figures 1 to 3 In some embodiments of the present application, the first positioning portion 104 is also provided on the left and right sides of the first fixture portion 100 , and the second positioning portion 201 is located on the left and right sides of the supporting portion.

[0049] It can be understood that the glass substrate 300 has a certain length and width. When the clamping parts 103 on the left and right sides clamp the glass substrate 300, the first positioning part 104 and the second positioning part 201 need to be docked for positioning. In this embodiment, the two are distributed on the left and right, which can avoid the area of ​​the glass substrate 300 and avoid the influence of the glass substrate 300, and at the same time improve the positioning accuracy.

[0050] Reference Figures 1 to 3 In some embodiments of the present application, the first fixture part 100 is provided with clamping portions 103 on both sides of the first positioning portion 104. That is, in this embodiment, four clamping portions 103 are provided, and the four clamping portions 103 are distributed on the left and right sides of the first fixture part 100 and are located on the front and back sides of the first positioning portion 104.

[0051] By adopting the structural setting of this embodiment, the glass substrate 300 can be stably grasped by the four clamping parts 103, and the positioning accuracy can be improved during positioning, ensuring that the four clamping parts 103 reach the preset positions, ensuring the grasping stability when taking out the glass substrate 300 and the discharge accuracy when placing the glass substrate 300 into the inlet and outlet cavity 301.

[0052] Reference Figure 2 and Figure 3 In some embodiments of the present application, the first fixture part 100 includes:

[0053] Two side connecting plates 102, the two side connecting plates 102 are arranged side by side, and the two side connecting plates 102 are kept parallel;

[0054] The middle connecting plate 101 is vertically connected to the middle position of the two side connecting plates 102 along the left-right direction.

[0055] The first positioning portion 104 and the clamping portion 103 are disposed on a side of the side connecting plate 102 away from the middle connecting plate 101 , and the first positioning portion 104 is connected to a middle position of the side connecting plate 102 .

[0056] It is understood that because the middle connecting plate 101 is vertically connected to the midpoint of the two side connecting plates 102, the overall center of gravity is located at the midpoint of the middle connecting plate 101. In this embodiment, the first positioning portion 104 is positioned at the midpoint of the outer side connecting plates 102 to maintain colinearity with the middle connecting plate 101. In this way, when the first jig portion 100 is lowered into the entry and exit cavity 301 so that the first positioning portion 104 docks with the second positioning portion 201, the second positioning portion 201 can be used to support the first jig portion 100, making it easier for workers to adjust the four clamping portions 103.

[0057] Reference Figure 2 In some embodiments of the present application, the middle connecting plate 101 and the side connecting plate 102 are both provided with a plurality of weight-reducing holes 1011 to reduce the overall weight of the first fixture part 100 and facilitate operation.

[0058] Reference Figure 5 In some embodiments of the present application, the first positioning structure 1041 is configured as a curved protrusion, and the second positioning structure 2011 is configured as a curved recess. The use of curved surfaces allows for automatic centering and positioning while minimizing the risk of scratching workers. Alternatively, a V-shaped protrusion and recess may be used.

[0059] Reference Figure 2 In some embodiments of the present application, the clamping portion 103 includes:

[0060] A mounting block 1032, which is provided on the first fixture part 100 in the left-right direction;

[0061] The adjustment plate 1033 is fixedly disposed above the mounting block 1032 , and the adjustment plate 1033 is provided with an adjustment slot 1034 along the left-right direction.

[0062] Correspondingly, the first fixture part 100 is provided with an adjustment screw 1035 passing through the adjustment slot 1034 .

[0063] Specifically, the mounting block 1032 is mounted on the side connecting plate 102 for horizontal movement. The adjustment plate 1033 is connected to the mounting block 1032 and extends above the upper end of the side connecting plate 102. An adjustment screw 1035 is installed in the upper end of the side connecting plate 102 through an adjustment slot 1034. During operation, the clamping portion 103 can be adjusted horizontally by loosening the adjustment screw 1035. Once the desired position is reached, the adjustment screw 1035 is tightened to compress the clamping portion 103 and secure it.

[0064] In this embodiment, the adjustment plate 1033 extends from the upper end of the side connecting plate 102, making it easier for workers to determine the position of the supporting platform 1031 below by adjusting the position of the adjustment slot 1034 relative to the adjustment screw 1035. Furthermore, the mounting block 1032 and the adjustment plate 1033 cooperate with the side connecting plate 102 to improve installation stability. In actual installation, the length of the adjustment slot 1034 can be set to correspond to the movement position of the supporting platform 1031. That is, the outer end of the adjustment slot 1034 corresponds to the position where the supporting platform 1031 maintains a safe distance from the glass substrate 300, while the inner end of the adjustment slot 1034 corresponds to the position where the supporting platform 1031 moves below the glass substrate 300, thereby facilitating adjustment.

[0065] It should be noted that the supporting platform 1031 is set at the lower end of the mounting block 1032. When moving to the bottom of the glass substrate 300, the supporting platform 1031 still maintains a distance from the side of the glass substrate 300 to avoid directly clamping the glass substrate 300.

[0066] Reference Figure 2 In some embodiments of the present application, the first fixture part 100 is provided with a plurality of mounting holes 1021 along a second direction, the second direction being perpendicular to the first direction, and the mounting holes 1021 match the mounting blocks 1032 .

[0067] It is understood that the second direction is the front-to-back direction shown in the figure. In this embodiment, by providing multiple mounting holes 1021, the clamping portion 103 can be mounted to different mounting holes 1021, achieving front-to-back position adjustment, adapting to the placement and removal of glass substrates 300 of different sizes, and facilitating the worker to design the position of the clamping portion 103 according to actual conditions.

[0068] It is understandable that the mounting holes 1021 of this embodiment and the weight-reducing holes 1011 in the aforementioned embodiments can be set to the same hole positions, that is, the mounting holes 1021 are used to achieve weight reduction, so that there is no need to set additional weight-reducing holes 1011 on the side connecting plate 102.

[0069] Reference Figure 2 In some embodiments of the present application, the first fixture portion 100 is provided with a limiting rod 1036, and the mounting block 1032 is slidably connected to the limiting rod 1036. In this embodiment, by providing the limiting rod 1036 to pass through the mounting block 1032, the installation stability of the mounting block 1032 can be improved and the sliding position of the mounting block 1032 in the left and right directions can be limited.

[0070] It is understood that the limiting rod 1036 in this embodiment can be provided simultaneously with the mounting hole 1021 in the aforementioned embodiment, i.e., the mounting block 1032 is slidably mounted on the limiting rod 1036 and also has a portion that fits into the mounting hole 1021. The limiting rod 1036 can also be provided independently of the mounting hole 1021 in the aforementioned embodiment, i.e., only the limiting rod 1036 is provided to slidably mount the mounting block 1032.

[0071] Reference Figure 2 In some embodiments of the present application, the first fixture portion 100 is provided with two gripping portions 105 along the first direction. The gripping portion 105 is an inverted U-shaped structure. By providing two gripping portions 105, this embodiment facilitates workers to hold the fixture with both hands.

[0072] It is understood that when using the auxiliary manual loading and unloading jig in this application, the clamping parts 103 are first adjusted to move to the end positions on both sides, and then the first jig part 100 is moved into the entry and exit cavity 301 through the gripping part 105. The first positioning part 104 and the second positioning part 201 are used to position it, and the second positioning part 201 is used to support the first jig part 100. After that, the four clamping parts 103 are manually adjusted to move closer together and to the inner end position of the adjustable range. At this time, the supporting platform 1031 is located below the glass substrate 300, and the first jig part 100 is lifted to remove the glass substrate 300.

[0073] The present application not only prevents the glass substrate 300 from being contaminated, but also prevents it from being damaged during the placement and removal process.

[0074] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features of the embodiments can be combined with each other unless there is a conflict.

Claims

1. A manual auxiliary fixture for loading and unloading sheets, characterized in that: include: a first jig portion, the first jig portion comprising a gripping portion, a first positioning portion, and a clamping portion, the gripping portion being connected to the upper end of the first jig portion, the first positioning portion being downwardly provided with a first positioning structure, the clamping portions being provided in pairs on both sides of the first jig portion along a first direction, the opposing ends of the clamping portions on both sides being provided with supporting platforms, a substrate supporting space being formed between the upper end of the supporting platform and the first jig portion, and the clamping portions being capable of moving toward each other and adjusting along the first direction; a second fixture portion, the second fixture portion being disposed in a sheet entry and exit cavity of the magnetron sputtering device, the second fixture portion comprising a supporting portion and a second positioning portion, the supporting portion being used to support the glass substrate and suspend the glass substrate on both sides along the first direction, the second positioning portion being provided with a second positioning structure upward, the second positioning structure being matched with the first positioning structure; In which, when the first positioning structure and the second positioning structure are aligned and engaged, the clamping parts are located on both sides of the glass substrate along the first direction, and the supporting platform is lower than the glass substrate. The clamping parts can move toward each other so that the supporting platform is located below the glass substrate to grasp the glass substrate.

2. The auxiliary manual loading and unloading jig according to claim 1, characterized in that: The first positioning portions are provided on both sides of the first fixture portion along the first direction, and the second positioning portions are located on both sides of the support portion along the first direction.

3. The auxiliary manual loading and unloading jig according to claim 2, characterized in that: The first fixture part is provided with the clamping parts on both sides of the first positioning part.

4. The auxiliary manual loading and unloading jig according to claim 3, characterized in that: The first fixture part includes: Two side connecting plates, the two side connecting plates are arranged side by side and in parallel; an intermediate connecting plate, the intermediate connecting plate being vertically connected to the middle position of the two side connecting plates along the first direction; The first positioning portion and the clamping portion are arranged on a side of the side connecting plate away from the middle connecting plate, and the first positioning portion is connected to a middle position of the side connecting plate.

5. The auxiliary manual loading and unloading jig according to claim 4, characterized in that: The middle connecting plate and the side connecting plates are both provided with a plurality of weight-reducing holes.

6. The auxiliary manual loading and unloading jig according to claim 1, characterized in that: The first positioning structure is configured as a curved convexity, and the second positioning structure is configured as an arc-shaped concaveity.

7. The auxiliary manual loading and unloading jig according to claim 1, characterized in that: The clamping portion comprises: a mounting block, the mounting block being disposed on the first fixture portion along the first direction; an adjustment plate, the adjustment plate being fixedly disposed above the mounting block, the adjustment plate being provided with an adjustment slot along the first direction; The first fixture part is provided with an adjusting screw passing through the adjusting slot.

8. The auxiliary manual loading and unloading jig according to claim 7, characterized in that: The first fixture part is provided with a plurality of mounting holes along a second direction, the second direction being perpendicular to the first direction, and the mounting holes are matched with the mounting blocks.

9. The auxiliary manual loading and unloading jig according to claim 7, characterized in that: The first fixture part is provided with a limiting rod, and the mounting block is slidably connected to the limiting rod.

10. The auxiliary manual loading and unloading jig according to claim 1, characterized in that: The first fixture part is provided with a plurality of the gripping portions along the first direction.

Images