Single crystal furnace chassis device capable of dissipating heat and reducing temperature
By installing a spiral water-cooling pipe and a circulating fan outside the single crystal furnace chassis, the problems of poor heat dissipation and damage are solved, and the rapid and efficient heat dissipation and cooling effect is achieved, and the service life of the single crystal furnace chassis is extended.
Patent Information
- Application Number
- CN202422365406.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-27
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-09-27
AI Technical Summary
The heat dissipation effect of the existing single-crystal furnace chassis is poor and easy to damage, which affects the use effect.
The heat dissipation system is adopted that combines a spiral water-cooled pipe and a circulating fan. The condensate is initially cooled through the spiral water-cooled pipe, and then the circulating fan is used to blow out the cold air to accelerate heat dissipation to prevent the coolant from infiltration into and damage the chassis.
It achieves rapid and efficient heat dissipation and cooling, improves the service life and heat dissipation quality of the single crystal furnace chassis, and avoids damage caused by the infiltration of coolant.
Smart Images
Figure CN223292697U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of single crystal furnace chassis, in particular to a single crystal furnace chassis device for heat dissipation and temperature reduction. Background Art
[0002] A single crystal furnace is a device that uses a graphite heater to melt polycrystalline materials such as polysilicon in an inert gas (mainly nitrogen and helium) environment and grows dislocation-free single crystals using the Czochralski method. A single crystal furnace generally consists of a chassis, an upper furnace chamber, a lower furnace chamber, a furnace cover, and a bracket. The upper and lower furnace chambers are connected and called the furnace body, which is installed on the chassis.
[0003] Electrodes are installed on the chassis of the single crystal furnace to provide power to the heater. There is a through hole in the middle for installing a graphite support rod, which is connected to the lower shaft and can provide lifting and rotation.
[0004] After the single crystal furnace is used, the single crystal furnace chassis needs to be cooled and dissipated to prevent workers from being scalded when using it again. The existing single crystal furnace chassis cooling method is water cooling, that is, flushing the surface of the single crystal furnace chassis with water to achieve cooling. However, during the flushing process, water will penetrate into the electrode and cause damage to it, which will lead to short circuit damage to the electrode. This method not only has poor heat dissipation effect, but also causes damage to the single crystal furnace chassis, affecting the use effect. Utility Model Content
[0005] The purpose of the present invention is to provide a single crystal furnace chassis device for heat dissipation and cooling, so as to solve the problems mentioned in the above background technology that the existing single crystal furnace chassis has poor heat dissipation effect, damages the single crystal furnace chassis, and poor performance. To achieve the above purpose, the present invention provides the following technical solution: a single crystal furnace chassis device for heat dissipation and cooling, comprising a base, a single crystal furnace chassis body is mounted on the top of the base, a spiral water-cooling pipe is wound around the outer wall of the single crystal furnace chassis body, a mounting plate is fixed to the bottom of the base, a motor is fixed to the bottom surface of the mounting plate, a transmission rod is fixedly connected to the output end of the motor, and a cooling fan is fixed to the top of the transmission rod.
[0006] Preferably, the end side of the spiral water-cooling tube is connected to a liquid infusion tube, the end side of the liquid infusion tube is connected to a liquid outlet tube, the bottom of the liquid outlet tube is connected to a water-cooling pump, and the bottom of the water-cooling pump is connected to a condensate storage tank.
[0007] Preferably, the other end of the spiral water-cooling tube is connected to a reflux pipe, and the reflux pipe is connected to a condensate storage tank.
[0008] Preferably, a driving gear is fixedly sleeved on the outside of the transmission rod, a driven gear is meshed on the outer periphery of the driving gear, a rotating rod is fixed in the middle of the driven gear, and a circulating fan is fixed on the top of the rotating rod.
[0009] Preferably, the rotating rod is rotatably connected to the mounting plate.
[0010] Preferably, there are four driven gears, all of which are engaged with the driving gear, and the driven gears rotate synchronously with the circulating fan.
[0011] Compared with the prior art, the present invention has the following beneficial effects:
[0012] In the utility model, a spiral water-cooling pipe is provided and sleeved on the outside of the single crystal furnace chassis, and a circulating condensate is provided inside the spiral water-cooling pipe. The condensate contacts the single crystal furnace chassis through the circulation path through which the condensate flows, thereby preliminarily cooling the heat generated by the single crystal furnace, and the condensate will not penetrate into the single crystal furnace chassis and cause damage.
[0013] In the utility model, a heat dissipation fan and a plurality of circulation fans are arranged to rotate synchronously, so that the cold air generated by the condensed water is circulated and blown, thereby quickly dissipating heat and cooling the single crystal furnace chassis, thereby improving the heat dissipation quality. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 It is a schematic diagram of the overall structure of the utility model;
[0015] Figure 2 For the utility model Figure 1 Schematic diagram of the connection structure between the spiral water cooling tube and the condensate storage tank;
[0016] Figure 3 For the utility model Figure 1 Schematic diagram of the synchronous rotation structure of the medium circulation fan and the cooling fan.
[0017] In the picture:
[0018] 1. Base;
[0019] 2. Single crystal furnace chassis body;
[0020] 3. Spiral water cooling tube; 31. Liquid infusion tube; 32. Liquid outlet tube; 33. Water cooling pump; 34. Condensate storage tank; 35. Return pipe;
[0021] 4. Mounting plate;
[0022] 5. Motor; 51. Driving gear; 52. Driven gear; 53. Rotating rod; 54. Circulating fan;
[0023] 6. Transmission rod;
[0024] 7. Cooling fan. DETAILED DESCRIPTION
[0025] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technical personnel in this field without making creative efforts shall fall within the scope of protection of the present invention.
[0026] See also Figures 1 to 3 The utility model provides a technical solution: a single crystal furnace chassis device for heat dissipation and cooling, comprising a base 1, a single crystal furnace chassis body 2 is installed on the top of the base 1, a spiral water-cooling tube 3 is wound around the outer wall of the single crystal furnace chassis body 2, a mounting plate 4 is fixed to the bottom of the base 1, a motor 5 is fixed to the bottom surface of the mounting plate 4, the output end of the motor 5 is fixedly connected to a transmission rod 6, and a cooling fan 7 is fixed to the top of the transmission rod 6.
[0027] In this embodiment, Figure 1 、 Figure 2 and Figure 3 As shown, the end side of the spiral water-cooling tube 3 is connected to a liquid infusion tube 31 , the end side of the liquid infusion tube 31 is connected to a liquid outlet tube 32 , the bottom of the liquid outlet tube 32 is connected to a water-cooling pump 33 , and the bottom of the water-cooling pump 33 is connected to a condensate storage tank 34 .
[0028] It should be noted that the spiral water-cooling tube 3 is sleeved on the outer peripheral surface of the single crystal furnace chassis body 2, and the circulating condensate in the water-cooling tube is in full contact with it. The condensate flows through a path through which it contacts more heat and thus takes away more heat from the single crystal furnace chassis.
[0029] In this embodiment, Figure 1 、 Figure 2 and Figure 3 As shown, the other end of the spiral water cooling tube 3 is connected to a return pipe 35 , and the return pipe 35 is connected to a condensate storage tank 34 .
[0030] The condensate in the spiral water-cooling tube 3 is returned to the condensate storage tank 34 through the reflux pipe 35 , thereby forming a condensate circulation flow.
[0031] In this embodiment, Figure 1 、 Figure 2 and Figure 3 As shown, a driving gear 51 is fixedly sleeved on the outside of the transmission rod 6, a driven gear 52 is meshed on the outer periphery of the driving gear 51, a rotating rod 53 is fixed in the middle of the driven gear 52, and a circulating fan 54 is fixed on the top of the rotating rod 53.
[0032] In this embodiment, Figure 1 、 Figure 2 and Figure 3As shown, the rotating rod 53 is rotatably connected to the mounting plate 4.
[0033] In this embodiment, Figure 1 、 Figure 2 and Figure 3 As shown, there are four driven gears 52 , and the four driven gears 52 are all engaged with the driving gear 51 . The driven gears 52 rotate synchronously with the circulation fan 54 .
[0034] It should be noted that multiple circulation fans 54 are arranged to rotate synchronously so that the circulation fans 54 circulate the cold air, thereby quickly dissipating heat and cooling the single crystal furnace chassis.
[0035] It should be noted that the specific models and specifications of the motor 5 and the water-cooling pump 33 need to be selected and determined according to the actual specifications of the device, and the specific selection calculation method adopts the existing technology in this field, so it is not repeated here.
[0036] The use method and advantages of the utility model: When the single crystal furnace chassis device for heat dissipation and cooling is in operation, the working process is as follows:
[0037] like Figure 1 、 Figure 2 and Figure 3 As shown, when the single crystal furnace chassis is cooled by heat, the water cooling pump 33 is first started. The condensed water in the condensate storage tank 34 is pumped out by the water cooling pump 33 and sent into the liquid infusion pipe 31 through the liquid outlet pipe 32. The condensed water is then transported to the spiral water cooling pipe 3 through the liquid infusion pipe 31. The condensed water then flows back into the condensate storage tank 34 through the return pipe 35, thereby forming a flow cycle in the spiral water cooling pipe 3. The condensed water contacts the single crystal furnace chassis through the circulation path through which the condensed water flows, thereby initially cooling the heat generated by the chassis.
[0038] The starting motor 5 drives the transmission rod 6 to drive the cooling fan 7 to rotate, and at the same time, the driving gear 51 outside the transmission rod 6 rotates synchronously. When the driving gear 51 rotates, it engages with the driven gears 52 around it. The driven gear 52 is forced to drive the rotating rod 53 to rotate, and at the same time, the circulation fan 54 on the top of the rotating rod 53 also rotates, so that the circulation fan 54 and the cooling fan 7 rotate along the bottom surface of the single crystal furnace chassis body 2, and the cold air generated by the spiral water cooling is combined to circulate and ventilate the cold air, thereby achieving the effect of rapid heat dissipation and cooling, improving the heat dissipation quality, and will not damage the single crystal furnace chassis, thereby improving the use effect.
[0039] The above shows and describes the basic principles, main features, and advantages of the present invention. Persons skilled in the art should understand that the present invention is not limited to the above-described embodiments. The above-described embodiments and descriptions are merely preferred examples of the present invention and are not intended to limit the present invention. Various changes and improvements may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and improvements fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.
Claims
1. A single crystal furnace chassis device for heat dissipation and temperature reduction, comprising a base (1), characterized in that: A single crystal furnace chassis body (2) is installed on the top of the base (1), a spiral water-cooling tube (3) is wound around the outer wall of the single crystal furnace chassis body (2), a mounting plate (4) is fixed to the bottom of the base (1), a motor (5) is fixed to the bottom surface of the mounting plate (4), an output end of the motor (5) is fixedly connected to a transmission rod (6), and a cooling fan (7) is fixed to the top of the transmission rod (6).
2. The single crystal furnace chassis device for heat dissipation and temperature reduction according to claim 1, characterized in that: The end side of the spiral water-cooling tube (3) is connected to a liquid infusion tube (31), the end side of the liquid infusion tube (31) is connected to a liquid outlet tube (32), the bottom of the liquid outlet tube (32) is connected to a water-cooling pump (33), and the bottom of the water-cooling pump (33) is connected to a condensate storage tank (34).
3. The single crystal furnace chassis device for heat dissipation and temperature reduction according to claim 1, characterized in that: The other end of the spiral water-cooling pipe (3) is connected to a return pipe (35), and the return pipe (35) is connected to a condensate storage tank (34).
4. The single crystal furnace chassis device for heat dissipation and temperature reduction according to claim 1, characterized in that: A driving gear (51) is fixedly sleeved on the outside of the transmission rod (6), a driven gear (52) is meshed on the outer periphery of the driving gear (51), a rotating rod (53) is fixed in the middle of the driven gear (52), and a circulating fan (54) is fixed on the top of the rotating rod (53).
5. The single crystal furnace chassis device for heat dissipation and temperature reduction according to claim 4, characterized in that: The rotating rod (53) is rotatably connected to the mounting plate (4).
6. The single crystal furnace chassis device for heat dissipation and temperature reduction according to claim 4, characterized in that: There are four driven gears (52), and the four driven gears (52) are all engaged with the driving gear (51). The driven gears (52) rotate synchronously with the circulation fan (54).