Thermal insulation door detection device

Abstract

The utility model belongs to the technical field of semiconductor technology, and particularly relates to a thermal insulation door detection device, which comprises a thermal insulation door arranged at the opening end of a quartz tube, a support rod is arranged on one side of the thermal insulation door far away from the quartz tube, a sleeve is sleeved on the outer wall of the support rod, and a sensor trigger rod is arranged in the sleeve. The sensor triggering rod and the supporting rod are connected end to end, a limiting sensor is arranged at the rear end of the sensor triggering rod, the limiting sensor is installed on the movable base, and after the heat preservation door makes close contact with the quartz tube, the supporting rod pushes the sensor triggering rod to make contact with the limiting sensor; when the quartz tube deforms due to a long-time high-temperature state, the thermal insulation door is in contact with the quartz tube in advance, the sensor triggering rod cannot trigger the limiting sensor at the moment, and the limiting sensor transmits a signal, so that a worker can conveniently overhaul the quartz tube, the atmosphere in the quartz tube can be effectively ensured, and the qualified rate of products is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor technology, in particular to a thermal insulation door detection device. Background Art

[0002] Semiconductor process equipment includes oxidation diffusion furnaces, annealing furnace systems, etc. Oxidation diffusion furnaces and annealing furnaces are used for diffusion, thin film oxidation, annealing, alloying and other processes of wafers of different sizes such as integrated circuits, discrete devices, MEMS, etc.

[0003] During wafer production processes like diffusion and oxidation, the wafers are placed in a quartz tube under high-temperature conditions while gas is introduced. To ensure a stable atmosphere within the tube, an insulated door is installed at the tube opening. However, prolonged exposure to high temperatures can cause the quartz tube to deform, preventing the door from properly fitting within the tube opening. Currently, similar products suffer from this problem, resulting in poor atmosphere in the tube due to door deformation, which seriously affects product quality and causes unnecessary losses. Utility Model Content

[0004] In order to overcome the above-mentioned defects in the prior art, the utility model provides a thermal insulation door detection device.

[0005] A thermal insulation door detection device includes a thermal insulation door installed at the open end of a quartz tube, a support rod is provided on the side of the thermal insulation door away from the quartz tube, the outer wall of the support rod is provided with a sleeve, a sensor trigger rod is provided in the sleeve, the sensor trigger rod is connected to the support rod end to end, and a limit sensor is provided at the rear end of the sensor trigger rod, and the limit sensor is installed on a movable seat. When the thermal insulation door is in close contact with the quartz tube, the support rod pushes the sensor trigger rod to contact the limit sensor.

[0006] Furthermore, a compression plate is provided between the thermal insulation door and the fixed frame, a first compression spring is provided between the compression plate and the thermal insulation door, a second compression spring and a third compression spring are provided between the compression plate and the bracket, the first compression spring and the second compression spring are sleeved on the outer periphery of the guide rod, the guide rod is slidably connected to the compression plate, the third compression spring is sleeved on the outer periphery of the cantilever rod, one end of the cantilever rod is fixedly connected to the compression plate, and the other end is fixedly connected to the movable seat.

[0007] Furthermore, the sensor trigger rod includes a rod head and a rod tail, the rod head contacts the support rod, the rod tail passes through the sleeve and contacts the limit sensor, the outer periphery of the rod tail is provided with a trigger spring, the rear end of the sleeve is provided with an annular protrusion extending toward its central axis, one end of the trigger spring is connected to the annular protrusion, and the other end is connected to the rod head.

[0008] Furthermore, a sliding rod is provided on the fixing frame, and the sliding rod is slidably connected to the movable seat.

[0009] Furthermore, the movable seat performs reciprocating motion toward and away from the quartz tube through a transmission mechanism.

[0010] Due to the adoption of the above technical scheme, the beneficial technical effect of the utility model is: in the utility model, when the insulation door needs to be closed, the insulation door moves toward the direction of the quartz tube. When the insulation door is in close contact with the quartz tube, the support rod on the insulation door pushes the sensor trigger rod in the sleeve to contact the limit sensor. At this time, it indicates that the sealing between the quartz tube and the insulation door is good. When the quartz tube is deformed due to long-term high temperature, the insulation door will contact the quartz tube in advance. At this time, the sensor trigger rod cannot trigger the limit sensor. The limit sensor will transmit a signal, which is convenient for the staff to carry out maintenance, can effectively ensure the atmosphere in the quartz tube, and improve the product qualification rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Figure 1 This is a front view of the utility model where the furnace door and the quartz tube are not in contact;

[0012] Figure 2 This is the main view of the contact between the furnace door and the quartz tube in the utility model.

[0013] In the figure, 1, quartz tube, 2, insulation door, 3, support rod, 4, sleeve, 5, first compression spring, 6, trigger spring, 7, sensor trigger rod, 71, rod head, 72, rod tail, 8, limit sensor, 9, cantilever rod, 10, compression plate, 11, second compression spring, 12, moving seat, 13, transmission mechanism, 14, third compression spring, 15, guide rod, 16, annular protrusion, 17, fixing frame, 18, sliding rod. DETAILED DESCRIPTION

[0014] In order to more clearly illustrate the technical solution of the present invention, the present invention is further described below in conjunction with the accompanying drawings. Obviously, the drawings described below are only one embodiment of the present invention. For ordinary technicians in this field, without paying any creative work, other embodiments can be obtained based on these drawings and embodiments, which all fall within the scope of protection of the present invention.

[0015] according to Figure 1-2 As shown, a thermal insulation door detection device includes a thermal insulation door 2 installed at the open end of a quartz tube 1, a support rod 3 is provided on the side of the thermal insulation door 2 away from the quartz tube 1, the outer wall of the support rod 3 is provided with a sleeve 4, a sensor trigger rod 7 is provided in the sleeve 4, the sensor trigger rod 7 is connected to the support rod 3 end to end, and a limit sensor 8 is provided at the rear end of the sensor trigger rod 7, and the limit sensor 8 is installed on the movable seat 12. When the thermal insulation door 2 is in close contact with the quartz tube 1, the support rod 3 pushes the sensor trigger rod 7 to contact the limit sensor 8.

[0016] In the above-mentioned specific technical solution, when it is necessary to close the thermal insulation door 2, the thermal insulation door 2 is moved so as to be in close contact with the quartz tube 1. When the thermal insulation door 2 is in close contact with the quartz tube 1, the support rod 3 on the thermal insulation door 2 pushes the sensor trigger rod 7 in the sleeve 4 to contact the limit sensor 8. At this time, it indicates that the sealing between the quartz tube 1 and the thermal insulation door 2 is good. When the quartz tube 1 is deformed due to a long period of high temperature, the thermal insulation door 2 will contact the quartz tube 1 in advance. At this time, the sensor trigger rod 7 cannot trigger the limit sensor 8. The limit sensor 8 will transmit a signal, which is convenient for the staff to carry out maintenance, can effectively ensure the atmosphere in the quartz tube 1, and improve the product qualification rate.

[0017] A compression plate 10 is provided between the thermal insulation door 2 and the fixed frame 17, a first compression spring 5 is provided between the compression plate 10 and the thermal insulation door 2, a second compression spring 11 and a third compression spring 14 are provided between the compression plate 10 and the bracket, the first compression spring 5 and the second compression spring 11 are sleeved on the outer periphery of the guide rod 15, the guide rod 15 is slidably connected to the compression plate 10, the third compression spring 14 is sleeved on the outer periphery of the cantilever rod 9, one end of the cantilever rod 9 is fixedly connected to the compression plate 10, and the other end is fixedly connected to the movable seat 12.

[0018] In the above specific technical solution, when the movable seat 12 moves toward the direction close to the quartz tube 1, the cantilever rod 9 pushes the compression plate 10 to move toward the quartz tube 1, and the first compression spring 5 pushes the thermal insulation door 2 to be tightly connected with the quartz tube 1; when the movable seat 12 moves toward the direction away from the quartz tube 1, the second compression spring 11 and the third compression spring 14 can assist in driving the compression plate 10 to move toward the direction away from the quartz tube 1.

[0019] The sensor trigger rod 7 includes a rod head 71 and a rod tail 72. The rod head 71 contacts the support rod 3, and the rod tail 72 passes through the sleeve 4 and contacts the limit sensor 8. The outer periphery of the rod tail 72 is provided with a trigger spring 6. The rear end of the sleeve 4 is provided with an annular protrusion 16 extending toward its central axis. One end of the trigger spring 6 is connected to the annular protrusion 16, and the other end is connected to the rod head 71. When the moving seat 12 pushes the thermal insulation door 2 to contact the quartz tube 1, the moving seat 12 continues to move. The pressing plate 10 is pushed to move toward the quartz tube 1, so that the first compression spring 5 is tightly pressed on the thermal insulation door 2, ensuring the atmosphere inside the quartz tube 1. At the same time, the support rod 3 pushes the rod tail 72 of the sensor trigger rod 7 to extend out of the sleeve 4 and trigger the limit sensor 8, indicating that the sealing between the quartz tube 1 and the thermal insulation door 2 is good at this time. If the rod tail 72 of the sensor trigger rod 7 cannot trigger the limit sensor 8, the limit sensor 8 will send a signal, which is convenient for the staff to inspect and repair the quartz tube 1.

[0020] The fixing frame 17 is provided with a sliding rod 18 , which is slidably connected to the movable seat 12 , and the sliding rod 18 can play a guiding role.

[0021] The movable seat 12 is moved back and forth towards and away from the quartz tube 1 by a transmission mechanism 13 . The transmission mechanism 13 may be a screw rod mechanism or other mechanism to drive the movable seat 12 to move laterally.

[0022] The above embodiments are merely exemplary embodiments of the present invention and are not intended to limit the present invention. The scope of protection of the present invention is defined by the claims. Those skilled in the art may make various modifications or equivalent substitutions to the present invention within the essence and scope of protection of the present invention, and such modifications or equivalent substitutions shall also be deemed to fall within the scope of protection of the present invention.

Claims

1. A thermal insulation door detection device, comprising a thermal insulation door (2) mounted on the open end of a quartz tube (1), characterized in that: A support rod (3) is provided on the side of the heat-insulating door (2) away from the quartz tube (1); a sleeve (4) is provided on the outer wall of the support rod (3); a sensor trigger rod (7) is provided in the sleeve (4); the sensor trigger rod (7) and the support rod (3) are connected end to end; a limit sensor (8) is provided at the rear end of the sensor trigger rod (7); the limit sensor (8) is installed on the movable seat (12); when the heat-insulating door (2) is in close contact with the quartz tube (1), the support rod (3) pushes the sensor trigger rod (7) to contact with the limit sensor (8).

2. The thermal insulation door detection device according to claim 1, characterized in that: A pressing plate (10) is provided between the heat-insulating door (2) and the fixed frame (17), a first pressing spring (5) is provided between the pressing plate (10) and the heat-insulating door (2), a second pressing spring (11) and a third pressing spring (14) are provided between the pressing plate (10) and the bracket, the first pressing spring (5) and the second pressing spring (11) are sleeved on the outer periphery of the guide rod (15), the guide rod (15) is slidably connected to the pressing plate (10), the third pressing spring (14) is sleeved on the outer periphery of the cantilever rod (9), one end of the cantilever rod (9) is fixedly connected to the pressing plate (10), and the other end is fixedly connected to the movable seat (12).

3. The thermal insulation door detection device according to claim 2, characterized in that: The sensor trigger rod (7) comprises a rod head (71) and a rod tail (72), wherein the rod head (71) contacts the support rod (3), and the rod tail (72) passes through the sleeve (4) and contacts the limit sensor (8), and a trigger spring (6) is sleeved on the outer periphery of the rod tail (72), and the rear end of the sleeve (4) is provided with an annular protrusion (16) extending toward the central axis thereof, and one end of the trigger spring (6) is connected to the annular protrusion (16), and the other end is connected to the rod head (71).

4. The thermal insulation door detection device according to claim 3, characterized in that: The fixed frame (17) is provided with a sliding rod (18), and the sliding rod (18) is slidably connected to the movable seat (12).

5. The thermal insulation door detection device according to claim 4, characterized in that: The movable seat (12) performs reciprocating motion toward and away from the quartz tube (1) through a transmission mechanism (13).

Images