Substrate processing system

Abstract

The utility model provides a substrate processing system. The substrate processing system comprises a plurality of stations, a transfer device and a conveying device, wherein the transfer device is arranged on the station and is used for taking and placing the substrate; the conveying device is arranged in the arrangement direction of the multiple stations and used for transferring the substrates to any station so that the substrates can be taken and used by the transferring device. According to the substrate processing system disclosed by the utility model, the transfer work of the substrate is completed through the cooperation of the transfer device and the conveying device, and the transfer efficiency of the substrate is greatly improved. Furthermore, when the base plate is transferred through the conveying device, normal work of other stations is not affected, and the efficiency of the base plate transferring system is effectively improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a substrate processing system. Background Art

[0002] In the semiconductor industry, a "substrate" refers to the base material (such as a wafer) used to manufacture integrated circuits (ICs) or other semiconductor devices. It is the starting point of semiconductor manufacturing, typically serving as the support or underlying structure for the deposition, etching, and construction of various layers of semiconductor components. Substrate processing involves multiple steps, with robotic arms within the substrate handling system responsible for transporting substrates between different workstations.

[0003] In the prior art, the substrate handling system mainly includes a loading unit, multiple workstations, and a transfer robot. Among them, the loading unit is located at the starting position of the processing system to facilitate the input of the substrate. The transfer robot is distributed between the various workstations and moves between the loading unit and different workstations. Due to the limitation of the robot's film-taking range, one or more transition robots need to be configured between the initial workstation and the more distant workstation. The transfer robots at different workstations can transfer a substrate from the initial workstation to the more distant workstation through the transfer robot. Under this scheme, the transfer efficiency of the substrate is very low. In addition, in some special process conditions, due to the process requirements of the substrate, the transfer speed of the robot needs to be reduced. While further reducing the transfer efficiency, it also causes a large number of idle transition units and process units in the substrate processing system, greatly reducing the efficiency of the substrate transfer system. Therefore, it is necessary to provide a new substrate processing system to solve the above-mentioned problems existing in the prior art. Utility Model Content

[0004] The purpose of the utility model is to provide a substrate transfer method and a substrate processing system, so as to reduce the links and steps of substrate handling, improve the system efficiency and enhance the multi-station scalability of the system.

[0005] To achieve the above objectives, the present invention provides a substrate processing system, comprising:

[0006] A plurality of workstations, wherein the plurality of workstations are arranged at intervals;

[0007] a conveying device disposed along the arrangement direction of the plurality of workstations, the conveying device comprising a conveying member for loading the substrate; the conveying member being reciprocally movable along the arrangement direction of the plurality of workstations, for conveying the substrate to a position corresponding to any one of the plurality of workstations;

[0008] A plurality of transfer devices correspond to the plurality of workstations, the transfer devices are used to take out the substrate from the corresponding workstations and place the substrate on the conveying member; the transfer devices are also used to take out the substrate from the conveying member and place the substrate on the workstation corresponding to the transfer device.

[0009] Through the above technical solution, the technical effect achieved is: a conveying device is set as a transition unit along the arrangement direction of the multiple stations to facilitate the transfer of the substrate between different stations. Specifically, when it is necessary to transfer the substrate between the current station and the target station, the transfer device set on the current station takes out the substrate from the current station and places it on the conveying device, and then the conveying device transports the substrate directly to the target station. Finally, the transfer device at the target station takes the substrate from the conveying device and places it on the target station. This design solution can not only quickly transfer the substrate between two adjacent stations, but also has greater advantages when transferring the substrate between two stations that are far apart. This solution completes the transfer of the substrate through the cooperation of the transfer device and the conveying device, which greatly improves the transfer efficiency of the substrate. Furthermore, while the substrate is being transferred by the conveying device, it does not affect the normal work of other stations, effectively improving the efficiency of the substrate transfer system.

[0010] Preferably, the conveyor device comprises: a frame, a conveyor member, a guide rail, and a first drive device, wherein the frame extends along the arrangement direction of the plurality of workstations. The conveyor member is slidably mounted on the frame, configured to carry the substrate and transfer it to the corresponding workstation. The guide rail is mounted on the frame and slidably connected to the conveyor member, configured to guide the conveyor member in sliding motion. The first drive device is mounted on the frame and connected to the conveyor member via a transmission mechanism, configured to drive the conveyor member to slide along the guide rail.

[0011] The above technical solution achieves the following technical effects: In the above-mentioned conveyor device, the frame extends along the arrangement direction of the multiple workstations to meet the transfer needs of the multiple workstations. The conveyor member is slidably mounted on the frame to facilitate movement and docking between different workstations. The provision of guide rails facilitates the sliding connection between the conveyor member and the frame, and the provision of the guide rails facilitates the direction of movement of the conveyor member. The first drive device and the transmission device provide power for the movement of the conveyor member.

[0012] Preferably, the conveyor includes a sliding connection assembly and a substrate support assembly, wherein the sliding connection assembly is slidably connected to the guide rail and slides along the guide rail under the drive of the transmission mechanism. The substrate support assembly is connected to the sliding connection assembly and is used to load the substrate. The above technical solution achieves the following technical effects: the conveyor is slidably connected to the guide rail via the sliding connection assembly, and the substrate is loaded via the substrate support assembly.

[0013] Preferably, the sliding connection assembly includes: a mounting plate, a first support plate, and a second support plate. The mounting plate is arranged parallel to the transfer plane of the conveying device. The first support plate and the second support plate are arranged opposite to each other and vertically connected to the two ends of the mounting plate. The lower ends of the first support plate and the second support plate are slidably connected to the guide rail. The above technical solution achieves the following technical effects: through the oppositely arranged first support plate and the second support plate, the support balance of the sliding connection assembly and the sliding connection with the guide rail are achieved. The setting of the mounting plate can be used to install the substrate support assembly.

[0014] Preferably, the substrate support assembly includes a fixed block and a support member. Two fixed blocks are positioned opposite each other on the mounting plate and fixedly connected to the mounting plate. The support member is mounted on the fixed block, and multiple support members cooperate with each other to support the substrate. This technical solution achieves the following technical effects: by providing multiple, mutually cooperating support members, the substrate is stably supported, preventing it from falling or being damaged during transport.

[0015] Preferably, the guide rails include a first guide rail and a second guide rail symmetrically arranged on either side of the frame, the lower end of the first support plate being slidably connected to the first guide rail, and the lower end of the second support plate being slidably connected to the second guide rail. The above technical solution achieves the following technical effect: the symmetrical arrangement of the two guide rails facilitates the stable sliding of the substrate support assembly on the guide rails.

[0016] Preferably, the conveyor device includes n conveyor members, wherein any two conveyor members do not interfere with each other, and the n-1th conveyor member can pass between the nth conveyor member and the rack when sliding along the guide rail. The above technical solution achieves the following technical effect: by providing multiple conveyor members, each of which operates independently and does not interfere with each other, the conveyor device can effectively improve the efficiency of transferring substrates.

[0017] Preferably, the transfer device comprises:

[0018] Second drive device.

[0019] One end of the first mechanical arm is connected to the power output end of the second driving device and rotates under the drive of the second driving device. The other end is equipped with a third driving device.

[0020] The second robot arm has one end connected to the power output end of the third driving device and rotates under the drive of the third driving device, and the other end is equipped with a fourth driving device.

[0021] The third robot arm has one end connected to the power output end of the fourth driving device and rotates under the drive of the fourth driving device, and the other end is equipped with a support plate for taking and placing substrates.

[0022] Through the above technical solution, the technical effect achieved is: by setting the first robotic arm, the second robotic arm and the third robotic arm, the film picking range of the execution end of the transfer device can be effectively expanded.

[0023] Preferably, the third robotic arm is connected to a plurality of the support plates, the plurality of the support plates are arranged at equal intervals, and the distance between two adjacent support plates is greater than the thickness of a single substrate.

[0024] Through the above technical solution, the technical effect achieved is: by connecting multiple pallets to the third robotic arm, the number of substrates transferred by the transfer device at a single time can be increased, thereby improving the transfer efficiency of the transfer device.

[0025] The above-mentioned technical solution achieves the following technical effects: In the above-mentioned substrate transfer method, when transferring a substrate between a current station and a target station, the substrate is first handed over to the conveying device by the transfer device, and then the conveying device directly transports the substrate to the target station. Finally, the transfer device at the target station removes the substrate from the conveying device and transfers it to the target station. In the above process, since the conveying device can directly transfer the substrate from the current station to the target station (regardless of the number of stations between the current station and the target station), the overall transfer efficiency of the substrate is greatly improved. In addition, since the process of transferring the substrate by the conveying device does not affect the normal operation of other stations, the overall processing efficiency of the substrate processing system is greatly improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is an overall schematic diagram of a substrate processing system according to an embodiment of the present invention;

[0027] Figure 2 This is a schematic structural diagram of the conveying device from a first perspective in an embodiment of the present invention;

[0028] Figure 3 This is a schematic structural diagram of the second perspective of the transmission device in an embodiment of the present utility model;

[0029] Figure 4 This is a front view of the conveying device in the embodiment of the present utility model;

[0030] Figure 5 This is a schematic structural diagram of a transmission member in an embodiment of the present utility model;

[0031] Figure 6 This is a schematic structural diagram of a support member in an embodiment of the present utility model;

[0032] Figure 7 It is a schematic structural diagram of the transfer device in an embodiment of the present utility model.

[0033] Reference numerals:

[0034] Station 1, substrate 11, process unit 12,

[0035] Transfer device 2, second driving device 21, first robotic arm 22, second robotic arm 23, third robotic arm 24, pallet 25,

[0036] Conveying device 3, frame 31, first conveying member 32, guide rail 33, second conveying member 34,

[0037] Mounting plate 321, first support plate 322, first inserting piece 3221, second support plate 323, second inserting piece 3231

[0038] Fixed block 324, support member 325, support column 3251, support sheet 3252,

[0039] The first guide groove 331, the second guide groove 332,

[0040] Loading unit 4, loading robot 5. DETAILED DESCRIPTION

[0041] In order to make the purpose, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. Unless otherwise defined, the technical terms or scientific terms used herein should be the usual meanings understood by people with ordinary skills in the field to which the present invention belongs. The words "including" and similar words used in this article mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Unless otherwise specified, "connection" in this article can be a direct connection or an indirect connection, that is, connection through an intermediate.

[0042] See also Figure 1An embodiment of the present invention provides a substrate processing system, including a plurality of workstations 1, a transfer device 2, a conveying device 3 and a loading unit 4.

[0043] The multiple workstations 1 are arranged at intervals; wherein, a plurality of different process units 12 are provided on the workstation 1, which are respectively used to process the substrate 11 with different processes. The "substrate 11" (substrate) refers to the basic material used to manufacture integrated circuits (ICs) or other semiconductor devices. In this embodiment, the substrate 11 specifically refers to a wafer.

[0044] The conveying device 2 is arranged along the arrangement direction of the multiple workstations 1, and the conveying device 2 includes a conveying member for loading the substrate; the conveying member can move back and forth along the arrangement direction of the multiple workstations 1, and is used to convey the substrate 11 to the position corresponding to any one of the multiple workstations 1.

[0045] The plurality of transfer devices 2 correspond to the plurality of workstations 1. In this embodiment, the transfer devices 2 are installed on the workstations 1. The transfer devices 2 are used to remove the substrates 11 from the corresponding workstations 1 and place the substrates 11 on the conveyor. The transfer devices 2 are also used to remove the substrates 11 from the conveyor and place the substrates 11 on the workstations 1 corresponding to the transfer devices 2.

[0046] The loading unit 4 is located at the starting point of the processing system, facilitating the input of substrates 11. A loading robot 5 is provided between the frontmost workstation 1 and the loading unit 4. The loading robot 5 removes the substrate 11 to be processed from the loading unit 4 and passes it to the conveyor device 3. The transfer device 2 then transfers the substrate 11 to the target workstation for the transfer device 2 at the target workstation to pick up.

[0047] In the above technical solution, a conveying device 3 is set as a transition unit along the arrangement direction of multiple workstations 1 to facilitate the transfer of substrates 11 between different workstations 1. Specifically, when it is necessary to transfer the substrate 11 between the current workstation 1 and the target workstation, the transfer device 2 set on the current workstation 1 takes out the substrate 11 from the current workstation 1 and places it on the conveying device 3. Then the conveying device 3 transports the substrate 11 directly to the target workstation. Finally, the transfer device 2 at the target workstation takes the substrate 11 from the conveying device 3 and places it on the target workstation. This design solution can not only quickly transfer the substrate 11 between two adjacent workstations 1, but also has greater advantages when transferring the substrate 11 between two workstations 1 that are far apart. This solution completes the transfer of the substrate 11 through the cooperation of the transfer device 2 and the conveying device 3, which greatly improves the transfer efficiency of the substrate 11. Furthermore, while transferring the substrate 11 through the conveying device 3, it does not affect the normal operation of other workstations 1, effectively improving the efficiency of the substrate 11 transfer system.

[0048] See also Figure 2-Figure 6 In this embodiment, the conveying device 3 includes: a frame 31, a conveying member, a guide rail 33 and a first driving device (not shown). In this embodiment, there are two conveying members.

[0049] The frame 31 extends along the arrangement of the multiple workstations 1. Two conveyor members are slidably mounted on the frame 31, supporting and transporting substrates 11 to corresponding workstations 1. Guide rails 33 are mounted on the frame 31 and slidably connected to the conveyor members, guiding their movement. A first drive unit is mounted on the frame 31 and connected to the conveyor members via a transmission mechanism, driving the conveyor members to slide along the guide rails 33.

[0050] In the conveyor 3, the frame 31 extends along the arrangement direction of the multiple workstations 1 to meet the transfer needs of multiple workstations 1. The conveyor member is slidably mounted on the frame 31, facilitating movement and docking between different workstations 1. The provision of the guide rail 33 facilitates the sliding connection between the conveyor member and the frame 31, and the provision of the guide rail 33 also facilitates the direction of movement of the conveyor member. The first drive device and transmission device provide power for the movement of the conveyor member, and each conveyor member is equipped with a corresponding first drive device and transmission device.

[0051] See also Figure 4 In this embodiment, the conveyor includes a sliding connection assembly and a substrate support assembly. The sliding connection assembly is slidably connected to the guide rail 33 and slides along the guide rail 33 driven by the transmission mechanism. The substrate support assembly is connected to the sliding connection assembly and is used to load the substrate 11. The conveyor is slidably connected to the guide rail 33 via the sliding connection assembly, and the substrate 11 is loaded via the substrate support assembly.

[0052] See also Figure 4-Figure 5 In this embodiment, the sliding connection assembly includes: a mounting plate 321 , a first support plate 322 and a second support plate 323 .

[0053] The mounting plate 321 is arranged parallel to the transport plane of the conveyor 3. The first and second support plates 322, 323 are arranged opposite each other and perpendicularly connected to the ends of the mounting plate 321. The lower ends of the first and second support plates 322, 323 are slidably connected to the guide rails 33. The opposing first and second support plates 322, 323 ensure balanced support of the sliding connection assembly and a sliding connection with the guide rails 33. The mounting plate 321 can be used to mount the substrate support assembly.

[0054] See also Figure 4-Figure 5 In this embodiment, the substrate support assembly includes a fixing block 324 and support members 325. Two fixing blocks 324 are positioned opposite each other on the mounting plate 321 and are fixedly connected to the mounting plate 321 via bolts. The support members 325 are bolted to the fixing blocks 324. The four support members 325 cooperate with each other to support the substrate 11. The provision of multiple, interlocking support members 325 facilitates stable support of the substrate 11, preventing it from falling or being damaged during transport.

[0055] In this embodiment, two support members 325 are respectively provided on opposite sides of the two fixing blocks 324. Four support columns 3251 extend horizontally from the support members 325. The four support columns 3251 are spaced apart vertically. Four support columns 3251 on the four support members 325, which are located on the same horizontal plane, cooperate to support one substrate 11. The four support members 325 can hold a total of four substrates. It is worth noting that in other embodiments, the number of support columns 3251 on the support member 325 can be designed according to actual needs.

[0056] For further information, see Figure 4-Figure 6 The end of the support column 3251 is provided with a support piece 3252, which is in direct contact with the bottom surface of the substrate 11 and supported on the bottom edge of the substrate 11. A limiting step (such as Figure 6 ), the limiting step is used to limit the substrate 11 to prevent the substrate 11 from sliding off the conveyor during the transfer process. Furthermore, the end of the support sheet 3252 that contacts the substrate 11 is provided with an arc-shaped edge to prevent the substrate 11 from being scratched when the support sheet 3252 contacts the substrate 11.

[0057] See also Figure 2-Figure 4In this embodiment, the guide rails 33 include a first guide rail and a second guide rail symmetrically arranged on either side of the frame 31. The lower end of the first support plate 322 is slidably connected to the first guide rail, and the lower end of the second support plate 323 is slidably connected to the second guide rail. The symmetrical arrangement of the two guide rails facilitates stable sliding of the substrate support assembly on the guide rails.

[0058] Furthermore, the first guide rail includes a first guide groove 331, and the second guide rail includes a second guide groove 332.

[0059] Furthermore, the lower end of the first support plate 322 is connected to a first plug 3221, and the lower end of the second support plate 323 is connected to a second plug 3231; wherein, the first plug 3221 is placed in the first guide groove 331 and can slide along the guide groove, and the second plug 3231 is placed in the second guide groove 332 and can slide along the second guide groove 332.

[0060] In this embodiment, a transmission mechanism (not shown) is arranged inside the frame 31 and includes a synchronous belt and at least two synchronous pulleys. The first plug 3221 and the second plug 3231 of the transmission member are connected to the synchronous belt. When the first driving device drives the synchronous pulley to rotate, the synchronous pulley drives the synchronous belt to move, and the synchronous belt drives the first plug 3221 and the second plug 3231 to move, thereby driving the transmission member to slide along the guide rail 33.

[0061] As described above, in this embodiment, the conveying device 3 includes two conveying members, namely a first conveying member 32 and a second conveying member 34. The second conveying member 34 has the same structure as the first conveying member, which has been described in detail in the above description of the "conveyance member" and will not be repeated here.

[0062] It is worth mentioning that the first conveying member 32 and the second conveying member 34 do not interfere with each other, and the first conveying member 32 can pass between the second conveying member 34 and the frame 31 when sliding along the guide rail 33 .

[0063] Specifically, in this embodiment, the length of the mounting plate of the first conveyor member 32 is shorter than the length of the mounting plate of the second conveyor member 34. The lengths of the first support plate and the second support plate of the first conveyor member 32 are shorter than the lengths of the first support plate and the second support plate of the second conveyor member 34. This allows the first conveyor member 32 to easily pass through the bottom of the second conveyor member 34 without interfering with the second conveyor member 34.

[0064] In other embodiments, the conveyor device 3 may include n conveyor members, wherein any two conveyor members do not interfere with each other, and the n-1th conveyor member may pass between the nth conveyor member and the frame 31 when sliding along the guide rail 33. By providing multiple conveyor members, and allowing the multiple conveyor members to operate independently without interfering with each other, the efficiency of the conveyor device 3 in transferring substrates 11 can be effectively improved.

[0065] See also Figure 7 In this embodiment, the transfer device 2 includes: a second driving device 21, a first robotic arm 22, a second robotic arm 23 and a third robotic arm 24.

[0066] One end of the first robotic arm 22 is connected to the power output end of the second driving device 21 and rotates under the drive of the second driving device 21. The other end is installed with a third driving device (not shown).

[0067] One end of the second robotic arm 23 is connected to the power output end of the third driving device and rotates under the drive of the third driving device. The other end is installed with a fourth driving device (not shown).

[0068] One end of the third robotic arm 24 is connected to the power output of the fourth drive device and is driven to rotate by the fourth drive device. The other end is mounted with a support plate 25 for placing and removing the substrate 11. The support plate 25 is conventional and well known to those skilled in the art and will not be described in detail here.

[0069] By providing the first robotic arm 22 , the second robotic arm 23 and the third robotic arm 24 , the film-taking range at the execution end of the transfer device 2 can be effectively expanded.

[0070] The third robotic arm 24 is connected to a plurality of pallets 25, which are arranged at equal intervals, with the distance between two adjacent pallets 25 being greater than the thickness of a single substrate 11. In this embodiment, the third robotic arm 24 is connected to five pallets 25. By connecting multiple pallets 25 to the third robotic arm 24, the number of substrates 11 that can be transferred by the transfer device 2 in a single transfer can be increased, thereby improving the transfer efficiency of the transfer device 2.

[0071] In the above embodiments, the first drive device, the second drive device 21, the third drive device, and the fourth drive device are all servo motors. In other embodiments, the drive device can be selected from existing drive devices according to actual conditions.

[0072] See also Figure 1 In this embodiment, the substrate transfer process specifically includes the following steps:

[0073] Step 1: The transfer device 2 takes out the substrate 11 from the current workstation and places it on the conveying device 3.

[0074] Step 2: The conveying device 3 transports the substrate 11 to the target workstation.

[0075] Step 3: The transfer device 2 at the target workstation takes the substrate 11 from the conveying device 3 and transfers the substrate 11 to the target workstation.

[0076] During the aforementioned substrate transfer process, when transferring a substrate 11 between a current workstation and a target workstation, the transfer device 2 first delivers the substrate 11 to the conveyor device 3. The conveyor device 3 then directly transports the substrate 11 to the target workstation. Finally, the transfer device 2 at the target workstation removes the substrate 11 from the conveyor device 3 and transfers it to the target workstation. This process significantly improves the overall transfer efficiency of substrates 11 because the conveyor device 3 can directly transfer the substrate from the current workstation to the target workstation (regardless of the number of workstations between the current and target workstations). Furthermore, because the transfer of substrates 11 by the conveyor device 3 does not affect the normal operation of other workstations, the overall substrate processing efficiency of the substrate processing system is significantly improved.

[0077] In summary, the substrate processing system of the present invention utilizes a transfer device and a conveyor device to coordinate substrate transfer, significantly improving substrate transfer efficiency. Furthermore, the conveyor device transfers substrates without disrupting the normal operation of other workstations, effectively enhancing the efficiency of the substrate transfer system. Therefore, the present invention effectively overcomes the shortcomings of existing technologies and possesses high industrial value.

[0078] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions within the technical scope disclosed in the present invention should be included in the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A substrate processing system, characterized in that: include: A plurality of workstations, wherein the plurality of workstations are arranged at intervals; a conveying device disposed along the arrangement direction of the plurality of workstations, the conveying device comprising a conveying member for loading the substrate; the conveying member being reciprocally movable along the arrangement direction of the plurality of workstations, for conveying the substrate to a position corresponding to any one of the plurality of workstations; A plurality of transfer devices correspond to the plurality of workstations, the transfer devices are used to take out the substrate from the corresponding workstations and place the substrate on the conveying member; the transfer devices are also used to take out the substrate from the conveying member and place the substrate on the workstation corresponding to the transfer device.

2. The substrate processing system according to claim 1, wherein: The transmission device comprises: a frame extending along an arrangement direction of the plurality of workstations; The conveying member is slidably disposed on the frame, and is used to carry the substrate and transfer the substrate to the corresponding workstation; A guide rail is provided on the frame and is slidably connected to the conveying member, and the guide rail is used to guide the conveying member to slide; A first driving device is installed on the frame and connected to the conveying member through a transmission mechanism. The first driving device is used to drive the conveying member to slide along the guide rail.

3. The substrate processing system according to claim 2, wherein: The transmission member comprises: a sliding connection assembly, slidably connected to the guide rail and sliding along the guide rail under the drive of the transmission mechanism; The substrate supporting assembly is connected to the sliding connection assembly and is used for loading the substrate.

4. The substrate processing system according to claim 3, wherein: The sliding connection assembly includes: a mounting plate, a first support plate and a second support plate; wherein, the mounting plate is arranged parallel to the transfer plane of the conveying device; the first support plate and the second support plate are arranged opposite to each other and vertically connected at both ends of the mounting plate; the lower ends of the first support plate and the second support plate are slidingly connected to the guide rail.

5. The substrate processing system according to claim 4, wherein: The substrate support assembly includes a fixed block and a support member; wherein, two fixed blocks are arranged opposite to each other on the mounting plate and fixedly connected to the mounting plate; the support member is installed on the fixed block, and multiple support members cooperate with each other to support the substrate.

6. The substrate processing system according to claim 4, wherein: The guide rails include a first guide rail and a second guide rail symmetrically arranged on both sides of the frame, the lower end of the first support plate is slidably connected to the first guide rail, and the lower end of the second support plate is slidably connected to the second guide rail.

7. The substrate processing system according to claim 6, wherein: The conveying device includes n conveying members, wherein any two conveying members do not interfere with each other, and the n-1th conveying member can pass between the nth conveying member and the rack when sliding along the guide rail.

8. The substrate processing system according to claim 1, wherein: The transfer device comprises: a second drive device; a first robotic arm, one end of which is connected to the power output end of the second driving device and rotates under the drive of the second driving device; and a third driving device is installed at the other end; a second robotic arm, one end of which is connected to the power output end of the third driving device and rotates under the drive of the third driving device; and a fourth driving device is installed at the other end; The third robot arm has one end connected to the power output end of the fourth driving device and rotates under the drive of the fourth driving device; and the other end is equipped with a supporting plate for taking and placing the substrate.

9. The substrate processing system according to claim 8, wherein: The third robotic arm is connected to a plurality of the support plates, which are arranged at equal intervals, and a distance between two adjacent support plates is greater than the thickness of a single substrate.

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