Carrier plate movement integration structure and system of submerged hanging basket
Through the integrated structure and system of the carrier plate movement of the sinker basket, the van transport device and vibrator are used to solve the problem of efficient and low-cost substrate transportation in the multi-layer circuit board plating process, achieving a more efficient processing process and smooth substrate transfer.
Patent Information
- Application Number
- CN202422490269.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-15
- Publication Date
- 2025-09-02
- Estimated Expiration
- 2034-10-15
AI Technical Summary
Prior Art In the electroplating process of multilayer circuit boards, there are challenges in how to efficiently and at low cost to transport substrates to semiconductor processing and manufacturing devices.
The carrier plate movement integrated structure and system using the sinking hanging basket, and the sinking vibrating frame is used to hook the hook ears of the substrate load transfer basket through the first and second telescopic hooks, and the substrate is stably placed and moved on the track with the vibrator to achieve the smooth transfer of the substrate.
This improves the efficiency of the processing process, reduces costs, and makes the substrate transfer and electroplating process smoother.
Smart Images
Figure CN223297785U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a carrier plate moving structure, and in particular to a carrier plate moving integrated structure and system of a sunken hanging basket. Background Art
[0002] As electronic products become increasingly miniaturized and feature higher speeds, circuit boards have evolved from single-sided boards to double-sided and multi-layer boards. Double-sided and multi-layer boards are widely used due to their larger wiring areas and higher assembly densities. See Takahashi, A.; High-density multilayer printed circuit board for HITAC M-880; IEEE Transactions on Components, Packaging, and Manufacturing Technology; 1992.
[0003] The production of multilayer circuit boards includes processes such as inner layer circuit fabrication, inner layer inspection, lamination, drilling, electroplating, conductive circuit fabrication, circuit plating, outer layer inspection, solder masking, surface finishing, and cutting and forming. In actual production, to improve efficiency, automated retraction and unloading devices are often used to neatly stack completed circuit boards from the previous process or to transfer neatly stacked circuit boards to the workbench for the next process.
[0004] During the electroplating process, how to use automated guided vehicles (AGVs) or overhead transporters (OHTs) to more efficiently and cost-effectively transport multiple substrates to semiconductor manufacturing equipment is a topic worthy of research. Utility Model Content
[0005] The purpose of the utility model is to provide a structure and system for integrating the movement of a carrier plate of a submerged hanging basket.
[0006] The utility model provides a plate-carrying integrated structure for a submerged hanging basket, which is particularly suitable for being moved by an overhead crane transport device (OHT) on a track, wherein the overhead crane transport device (OHT) has a first telescopic hook and a second telescopic hook, and the plate-carrying integrated structure for the submerged hanging basket includes an electroplating tank body, a submerged vibration frame, a first limiter, a second limiter, a substrate transfer hanging basket, a first vibrator, and a second vibrator. The electroplating tank body contains an electroplating liquid during processing. The submerged vibration frame is partially disposed within the electroplating tank body, the submerged vibration frame has an inwardly concave shape, and its two ends extend out of the outside of the electroplating tank body, wherein the bottom of the submerged vibration frame does not contact the bottom of the electroplating tank body. The first limiter is disposed at the bottom of the submerged vibration frame. The second limiter is disposed at the bottom of the submerged vibration frame. A substrate transfer basket is used to hold at least one substrate. The substrate transfer basket has a first hanging ear and a second hanging ear. When the substrate transfer basket is placed on the submersible vibration frame, the first and second limiting members ensure that the substrate transfer basket is stably positioned. A first vibrator is disposed at one end of the submersible vibration frame. A second vibrator is disposed at the other end of the submersible vibration frame. The first and second vibrators are used to vibrate the submersible vibration frame, thereby causing bubbles in the liquid to escape.
[0007] In one embodiment of the present invention, the first telescopic hook and the second telescopic hook of the overhead transport device (OHT) are used to respectively hook the first hanging ear and the second hanging ear of the substrate transfer basket to smoothly move the substrate transfer basket horizontally on the track.
[0008] In one embodiment of the present invention, the first telescopic hook and the second telescopic hook of the overhead crane transport device (OHT) are used to hook the first hanging ear and the second hanging ear of the substrate transfer basket respectively to smoothly move the substrate transfer basket up and down to move it out of or into the electroplating tank body.
[0009] In one embodiment of the present invention, when the substrate transfer hanging basket is placed on the submerged vibration stand, two sides of the bottom of the substrate transfer hanging basket are respectively engaged with the first limiting member and the second limiting member.
[0010] In one embodiment of the present invention, the horizontal distance between the first limiting member and the second limiting member is the length of the bottom of the substrate transfer hanging basket.
[0011] In one embodiment of the present invention, the substrate is a circuit board.
[0012] In one embodiment of the present invention, the submerged vibration stand is supported by connecting to an external structure and is suspended in the electroplating tank body in a non-contact manner.
[0013] The present invention further provides a substrate moving integrated system for a submerged hanging basket, the substrate moving integrated system comprising an overhead crane transport device (OHT), an electroplating tank body, a submerged vibration stand, a first limiter, a second limiter, a substrate transfer basket, a first vibrator, and a second vibrator. The overhead crane transport device (OHT) has a first telescopic hook and a second telescopic hook, wherein the overhead crane transport device (OHT) moves on a track. The electroplating tank body has an electroplating liquid during processing. The submerged vibration stand is partially disposed within the electroplating tank body, the submerged vibration stand has an inwardly concave shape, and its two ends extend out of the outside of the electroplating tank body, wherein the bottom of the submerged vibration stand does not contact the bottom of the electroplating tank body. The first limiter is disposed at the bottom of the submerged vibration stand. The second limiter is disposed at the bottom of the submerged vibration stand. A substrate transfer basket is used to hold at least one substrate. The substrate transfer basket has a first hanging ear and a second hanging ear. When the substrate transfer basket is placed on the submersible vibration frame, the first and second limiting members ensure that the substrate transfer basket is stably positioned. A first vibrator is disposed at one end of the submersible vibration frame. A second vibrator is disposed at the other end of the submersible vibration frame. The first and second vibrators are used to vibrate the submersible vibration frame, thereby allowing bubbles in the liquid to escape. The substrate transfer basket is moved by the overhead transport (OHT).
[0014] In summary, the integrated structure and system for moving the carrier plate of the submerged hanging basket provided by the present invention can bring the following benefits:
[0015] 1. Improve the efficiency of the processing process;
[0016] 2. Reduce costs; and
[0017] 3. The substrate transfer and electroplating processes are smoother.
[0018] The following detailed description is based on specific embodiments to make it easier to understand the purpose, technical content, features and effects achieved by the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Figure 1 It is an overall schematic diagram of the movable integrated structure of the carrier plate of the submerged hanging basket of the present invention.
[0020] Figure 2 This is a first operational schematic diagram of the integrated structure and system for moving the carrier plate of the submerged hanging basket of the present invention.
[0021] Figure 3This is a second operational schematic diagram of the integrated structure and system for moving the carrier plate of the submerged hanging basket of the present invention.
[0022] Figure 4 This is a third operational schematic diagram of the integrated structure and system for moving the carrier plate of the submerged hanging basket of the present invention.
[0023] Explanation of the accompanying figures: 100-plate carrier movement integration structure of the submerged hanging basket; 100S-plate carrier movement integration system of the submerged hanging basket; 110-electroplating tank body; 112-electroplating solution; 120-submerged vibration stand; 130-first limiter; 140-second limiter; 150-substrate transfer hanging basket; 152-first hanging ear; 154-second hanging ear; 160-first vibrator; 170-second vibrator; 200-overhead crane transport device (OHT); 210-first telescopic hook; 220-second telescopic hook; 300-track; BD-substrate; BL-bubble. DETAILED DESCRIPTION
[0024] After years of research and development, the creators of this project have improved the shortcomings of existing products. The following will introduce in detail how this utility model uses a submerged hanging basket to integrate the structure and system of the carrier plate to achieve the most efficient functional requirements.
[0025] See also Figures 1 to 4 , Figure 1 It is an overall schematic diagram of the movable integrated structure of the carrier plate of the submerged hanging basket of the present invention. Figure 2 This is a first operational schematic diagram of the integrated structure and system for moving the carrier plate of the submerged hanging basket of the present invention. Figure 3 This is a second operational schematic diagram of the integrated structure and system for moving the carrier plate of the submerged hanging basket of the present invention. Figure 4 This is a third operational schematic diagram of the submersible hanging basket carrier movement integrated structure and system of the present invention. As shown in the figure, the submersible hanging basket carrier movement integrated structure of the present invention is particularly suitable for moving partial components of the submersible hanging basket carrier movement integrated structure 100 via an overhead crane transport device (OHT) 200 on a track 300. The overhead crane transport device (OHT) 200 has a first telescopic hook 210 and a second telescopic hook 220. In other words, the first telescopic hook 210 and the second telescopic hook 220 can be extended or retracted according to control commands. The control commands are issued by a central controller (not shown) in a timely manner according to the overall processing flow.
[0026] The following will describe in detail the submersible hanging basket carrier moving integrated structure 100. Figure 1As shown, the substrate moving integration structure 100 of the submerged hanging basket includes an electroplating tank body 110, a submerged vibration stand 120, a first limiter 130, a second limiter 140, a substrate transfer hanging basket 150, a first vibrator 160 and a second vibrator 170. The electroplating tank body 110 contains an electroplating liquid 112 during processing. The submerged vibration stand 120 has a part of its body disposed inside the electroplating tank body 110, and the submerged vibration stand 120 has a concave shape and its two ends extend out of the outside of the electroplating tank body 110 respectively. It should be noted that the bottom of the submerged vibration stand 120 does not touch the bottom of the electroplating tank body 110, wherein the submerged vibration stand 120 of the utility model is supported by connecting to an external structure and is placed in the electroplating tank body 110 in a non-contact suspended manner. In addition, the first stopper 130 is disposed at the bottom of the submersible vibration frame 120 . The second stopper 140 is disposed at the bottom of the submersible vibration frame 120 .
[0027] Furthermore, the substrate transfer basket 150 is used to place at least one substrate BD. The substrate transfer basket 150 has a first hanging ear 152 and a second hanging ear 154, which can be hooked by a first telescopic hook 210 and a second telescopic hook 220, respectively. In the embodiment of the present invention, the substrate BD can be a circuit board, but is not limited to this. When the overhead crane transport device (OHT) 200 located on the track 300 hooks the substrate transfer basket 150 with the first telescopic hook 210 and the second telescopic hook 220, the substrate BD can be hooked by the first telescopic hook 210 and the second telescopic hook 220. Figure 2 As shown) when the substrate transfer hanging basket 150 is placed on the submerged vibration stand 120, the utility model uses the first limiting member 130 and the second limiting member 140 to stably place the substrate transfer hanging basket 150, such as Figure 3 In addition, when the substrate transfer hanging basket 150 is placed on the submerged vibration stand 120, the two sides of the bottom of the substrate transfer hanging basket 150 are respectively engaged with the first limiting member 130 and the second limiting member 140, wherein the horizontal distance between the first limiting member 130 and the second limiting member 140 is the length of the bottom of the substrate transfer hanging basket 150.
[0028] In addition, the first vibrator 160 is disposed at one end of the submerged vibration stand 120. The second vibrator 170 is disposed at the other end of the submerged vibration stand 120. The first vibrator 160 and the second vibrator 170 are used to vibrate the submerged vibration stand 120, thereby allowing the bubbles BL in the liquid to escape. Figure 4 shown.
[0029] Furthermore, during the processing stage, the present invention utilizes the first telescopic hook 210 and the second telescopic hook 220 of the overhead crane transporting device (OHT) 200 to respectively hook the first hanging ear 152 and the second hanging ear 154 of the substrate transfer basket 150, thereby smoothly moving the substrate transfer basket 150 horizontally on the rail 300. Furthermore, the first telescopic hook 210 and the second telescopic hook 220 of the overhead crane transporting device (OHT) 200 respectively hook the first hanging ear 152 and the second hanging ear 154 of the substrate transfer basket 150, thereby smoothly moving the substrate transfer basket 150 vertically, thereby allowing the substrate transfer basket 150 to be moved into or out of the plating tank body 110. The above-mentioned utility model is illustrated by using a plating tank body 110, a submerged vibration frame 120 and a substrate transfer basket 150 as examples, which is the most basic operation of the utility model. The utility model can be expanded to multiple plating tank bodies 110, multiple submerged vibration frames 120 and multiple substrate transfer baskets 150 to cooperate with the overhead crane transport device (OHT) running on the track to perform the processing process.
[0030] Please refer to Figure 2 , which can be regarded as a substrate carrier moving integrated system 100S for a submerged hanging basket. The substrate carrier moving integrated system 100S for a submerged hanging basket includes an overhead crane transport device (OHT) 200, a plating tank body 110, a submerged vibration frame 120, a first limiter 130, a second limiter 140, a substrate transfer hanging basket 150, a first vibrator 160 and a second vibrator 170. The relevant operations are as described above and will not be repeated here.
[0031] In summary, the integrated structure and system for moving the carrier plate of the submerged hanging basket provided by the present invention can bring the following benefits:
[0032] 1. Improve the efficiency of the processing process;
[0033] 2. Reduce costs; and
[0034] 3. The substrate transfer and electroplating processes are smoother.
[0035] The above description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Therefore, any equivalent changes or modifications based on the features and spirit of the present invention should be included in the scope of the patent application of the present invention.
Claims
1. A structure for moving a carrier plate of a submerged hanging basket, which is moved by a crane transport device on a track, wherein the crane transport device has a first telescopic hook and a second telescopic hook, characterized in that: The mobile integrated structure of the submerged hanging basket includes: a plating tank body containing a plating solution during processing; a submerged vibration platform partially disposed within the electroplating tank body, the submerged vibration platform having a concave shape and two ends extending out of the electroplating tank body, wherein the bottom of the submerged vibration platform does not contact the bottom of the electroplating tank body; a first limiting member, which is disposed at the bottom of the submerged vibration stand; a second limiting member disposed at the bottom of the submerged vibration stand; a substrate transfer hanging basket for holding at least one substrate, the substrate transfer hanging basket having a first hanging ear and a second hanging ear, wherein when the substrate transfer hanging basket is placed on the submerged vibration stand, the substrate transfer hanging basket is stably positioned by the first limiting member and the second limiting member; a first vibrator disposed at one end of the submerged vibration stand; and A second vibrator is arranged at the other end of the submerged vibrating stand, wherein the first vibrator and the second vibrator are used to vibrate the submerged vibrating stand, thereby allowing bubbles in the liquid to escape.
2. The movable integrated structure of the submersible hanging basket according to claim 1, characterized in that: The first telescopic hook and the second telescopic hook of the overhead crane transport device are used to respectively hook the first hanging ear and the second hanging ear of the substrate transfer hanging basket so as to stably and horizontally move the substrate transfer hanging basket on the track.
3. The movable integrated structure of the submersible hanging basket according to claim 1, characterized in that: The first telescopic hook and the second telescopic hook of the overhead crane transport device are used to respectively hook the first hanging ear and the second hanging ear of the substrate transfer hanging basket to stably move the substrate transfer hanging basket up and down to move it out of or into the electroplating tank body.
4. The movable integrated structure of the submersible hanging basket according to claim 1, characterized in that: When the substrate transfer hanging basket is placed on the submerged vibration stand, two sides of the bottom of the substrate transfer hanging basket are respectively engaged with the first limiting member and the second limiting member.
5. The movable integrated structure of the submersible hanging basket according to claim 1, characterized in that: The horizontal distance between the first limiting member and the second limiting member is the length of the bottom of the substrate transfer hanging basket.
6. The movable integrated structure of the submersible hanging basket according to claim 1, characterized in that: The substrate is a circuit board.
7. The movable integrated structure of the submersible hanging basket according to claim 1, characterized in that: The submerged vibration stand is supported by connecting to an external structure and is suspended in the electroplating tank body in a non-contact manner.
8. A carrier plate moving integration system for a submerged hanging basket, characterized in that: include: An overhead crane transport device having a first telescopic hook and a second telescopic hook, wherein the overhead crane transport device moves on a track; a plating tank body containing a plating solution during processing; a submerged vibration platform partially disposed within the electroplating tank body, the submerged vibration platform having a concave shape and two ends extending out of the electroplating tank body, wherein the bottom of the submerged vibration platform does not contact the bottom of the electroplating tank body; a first limiting member, which is disposed at the bottom of the submerged vibration stand; a second limiting member disposed at the bottom of the submerged vibration stand; a substrate transfer hanging basket for holding at least one substrate, the substrate transfer hanging basket having a first hanging ear and a second hanging ear, wherein when the substrate transfer hanging basket is placed on the submerged vibration stand, the substrate transfer hanging basket is stably positioned by the first limiting member and the second limiting member; a first vibrator disposed at one end of the submerged vibration stand; and A second vibrator is arranged at the other end of the submerged vibrating frame, wherein the first vibrator and the second vibrator are used to vibrate the submerged vibrating frame, thereby allowing bubbles in the liquid to escape, wherein the substrate transfer hanging basket is moved by the overhead crane transport device.
9. The carrier plate moving and integrating system of the submersible hanging basket according to claim 8, characterized in that: The first telescopic hook and the second telescopic hook of the overhead crane transport device are respectively hooked on the first hanging ear and the second hanging ear of the substrate transfer hanging basket to stably move the substrate transfer hanging basket horizontally on the track.
10. The carrier plate moving and integrating system of the submersible hanging basket according to claim 8, wherein: The first telescopic hook and the second telescopic hook of the overhead crane transport device are used to respectively hook the first hanging ear and the second hanging ear of the substrate transfer hanging basket so as to smoothly move the substrate transfer hanging basket up and down to move it out of or into the electroplating tank body.