Sublimation condensation recovery device

Abstract

The sublimation condensation recovery device is characterized in that a U-shaped first flow channel allowing sublimation raw materials or desublimation products to pass through is formed in a U-shaped inner condensation pipe, the U-shaped inner condensation pipe is sleeved with a U-shaped jacket, a second flow channel allowing refrigerants to pass through is formed in the U-shaped jacket, and the second flow channel surrounds at least part of the U-shaped inner condensation pipe; therefore, at least part of the first flow channel is cooled by the refrigerant. Due to the design of the U-shaped flow channel, sublimation raw materials start to desublimate gradually after reaching the top of the U-shaped flow channel, and desublimation products forming solids fall down towards a desublimation solid outlet under the action of air flow and self gravity. According to the device, after required process parameters are set according to the physical properties of raw materials, the sublimation raw materials are cooled and desublimated when being introduced into the first runner, are discharged from the desublimated solid outlet and directly fall into the recovery tank. The device is simple in flow channel structure and easy to clean, and under the same heat exchange area, the recovery efficiency of the device is higher than that of a traditional coil pipe type or shell and tube type sublimation condensation recovery device for a laboratory.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a sublimation condensation recovery device. Background Art

[0002] A gas condensation recovery unit is a device that sublimates a solid mixture and then recondenses it to separate or purify some of its components. Existing small-scale laboratory sublimation condensation recovery units are primarily made of glass, limiting their application scenarios. Due to the poor pressure resistance and fragility of glass in environments with high temperatures or pressures, smooth experiments cannot be guaranteed and there are also certain safety risks for personnel. Furthermore, existing small-scale laboratory sublimation condensation recovery units typically use coil cooling or shell-and-tube heat exchangers. Solids easily adhere to the coils or tubes, making them difficult to clean and resulting in low solid recovery efficiency. Utility Model Content

[0003] In view of this, an embodiment of the present application provides a sublimation condensation recovery device to solve at least one problem existing in the background technology.

[0004] The embodiment of the present application provides a sublimation condensation recovery device, comprising:

[0005] A U-shaped inner condenser tube is formed with a U-shaped first flow channel for the sublimation raw material or the condensation product to pass through, wherein the first flow channel has a sublimation gas inlet at one end and a condensation solid outlet at the other end;

[0006] A U-shaped jacket is mounted on the outside of the U-shaped inner condenser tube. A second flow channel for the refrigerant to pass through is formed inside the U-shaped jacket. The second flow channel surrounds at least part of the U-shaped inner condenser tube so that the first flow channel is at least partially cooled by the refrigerant.

[0007] In an optional embodiment, the U-shaped inner condenser tube and / or the U-shaped jacket are made of metal or alloy.

[0008] In an optional embodiment, the U-shaped inner condenser and / or the U-shaped jacket are made of stainless steel.

[0009] In an optional embodiment, the U-shaped jacket includes a refrigerant inlet and a refrigerant outlet located at both ends of the second flow channel, and the refrigerant introduced from the refrigerant inlet can pass through the second flow channel and be discharged from the refrigerant outlet.

[0010] In an optional embodiment, along the first flow channel, the refrigerant inlet is located at an end of the second flow channel close to the condensed solid outlet, and the refrigerant outlet is located at an end of the second flow channel close to the sublimated gas inlet.

[0011] In an optional embodiment, the top of the U-shaped jacket has an exhaust pipe for discharging air in the second flow channel, and the exhaust pipe is connected to the second flow channel.

[0012] In an optional embodiment, both ends of the U-shaped jacket have jacket end plates, and the jacket end plates close both ends of the second flow channel.

[0013] In an optional embodiment, both ends of the U-shaped inner condenser tube have connecting portions, the connecting portions protrude radially outward along the two ends of the U-shaped inner condenser tube, and the end surfaces of the connecting portions are plane.

[0014] In an optional embodiment, a plurality of assembly holes are provided on the end surface of the connecting portion for connection with a pipeline for conveying sublimation raw materials or a recovery tank for collecting products.

[0015] In an optional embodiment, the connecting portion is a flange structure.

[0016] The sublimation condensation recovery device provided in the embodiment of the present application has a U-shaped first flow channel formed inside the U-shaped inner condenser tube for the passage of sublimation raw materials or condensation products, a U-shaped jacket is arranged on the outside of the U-shaped inner condenser tube, and a second flow channel is formed inside for the passage of refrigerant, and the second flow channel surrounds at least part of the U-shaped inner condenser tube so that the first flow channel is at least partially cooled by the refrigerant. The U-shaped flow channel design allows the sublimation raw materials to begin to gradually sublimate after reaching the top of the U-shape, and the condensation products after forming solids fall to the condensation solid outlet under the action of airflow and its own gravity. Through this device, after setting the required process parameters according to the physical properties of the raw materials, the sublimation raw materials are cooled and sublimated when passing into the first flow channel, and are discharged from the condensation solid outlet and fall directly into the recovery tank. The flow channel structure of this device is simple and easy to clean. Under the same heat exchange area, the recovery efficiency is higher than that of the coil-type or shell-and-tube sublimation condensation recovery devices used in traditional laboratories.

[0017] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become apparent from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The illustrative embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation on the present application. In the drawings:

[0019] Figure 1 A schematic cross-sectional view of a sublimation condensation recovery device provided in an embodiment of the present application;

[0020] Figure 2 This is a schematic top view of the structure of the sublimation condensation recovery device provided in an embodiment of the present application.

[0021] The reference numerals in the figures are:

[0022] 1. Sublimation gas inlet;

[0023] 2. Jacket end plate;

[0024] 3. Refrigerant export;

[0025] 4. U-shaped jacket;

[0026] 5. U-shaped internal condenser;

[0027] 6. Exhaust pipe;

[0028] 7. Refrigerant inlet;

[0029] 8. Sublimated solid outlet;

[0030] 9. Connecting part;

[0031] 41. Second flow channel;

[0032] 51. First flow channel. DETAILED DESCRIPTION

[0033] The exemplary embodiments disclosed herein will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present application are shown in the accompanying drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the specific embodiments described herein. Rather, these embodiments are provided to enable a more thorough understanding of the present application and to fully convey the scope of the present application to those skilled in the art.

[0034] In the following description, numerous specific details are provided to provide a more thorough understanding of the present application. However, it will be apparent to those skilled in the art that the present application can be practiced without one or more of these details. In other instances, certain technical features known in the art are not described to avoid confusion with the present application; that is, all features of actual embodiments are not described herein, nor are well-known functions and structures described in detail.

[0035] In the drawings, the sizes of layers, regions, elements and their relative sizes may be exaggerated for clarity. Like reference numerals denote like elements throughout.

[0036] It should be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" another element or layer, it may be directly on, adjacent to, connected to, or coupled to the other element or layer, or there may be intervening elements or layers. Conversely, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" another element or layer, there may be no intervening elements or layers. It should be understood that although the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or parts, these elements, components, regions, layers, and / or parts should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, or part from another element, component, region, layer, or part. Therefore, without departing from the teachings of the present application, the first element, component, region, layer, or part discussed below may be represented as a second element, component, region, layer, or part. And when the second element, component, region, layer, or part is discussed, it does not necessarily mean that the first element, component, region, layer, or part is present in the present application.

[0037] Spatially relative terms such as "under," "beneath," "below," "under," "above," "above," etc., may be used herein for convenience of description to describe the relationship of an element or feature shown in the figures to other elements or features. It should be understood that in addition to the orientations shown in the figures, the spatially relative terms are intended to include different orientations of the device in use and operation. For example, if the device in the drawings is flipped, then the elements or features described as "under the other elements" or "under it" or "under it" will be oriented as "on" the other elements or features. Thus, the exemplary terms "under" and "under" may include both upper and lower orientations. The device may be oriented otherwise (rotated 90 degrees or in other orientations) and the spatial descriptors used herein are interpreted accordingly.

[0038] The purpose of the terms used herein is only to describe specific embodiments and is not intended to limit the present application. When used herein, the singular forms "a", "an", and "the" are intended to include the plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "comprising" and / or "including", when used in this specification, determine the presence of the features, integers, steps, operations, elements and / or parts, but do not exclude the presence or addition of one or more other features, integers, steps, operations, elements, parts and / or groups. When used herein, the term "and / or" includes any and all combinations of the relevant listed items.

[0039] In order to fully understand the present application, detailed steps and detailed structures will be presented in the following description to illustrate the technical solution of the present application. The preferred embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application may also have other implementation methods.

[0040] The present embodiment provides a sublimation condensation recovery device, comprising: a U-shaped inner condenser tube 5 and a U-shaped jacket 4. A U-shaped first flow channel 51 is formed inside the U-shaped inner condenser tube 5 for passage of sublimation raw materials or condensation products. The first flow channel 51 has a sublimation gas inlet 1 at one end and a condensation solid outlet 8 at the other end. The U-shaped jacket 4 is sleeved on the outside of the U-shaped inner condenser tube 5. A second flow channel 41 is formed inside the U-shaped jacket 4 for passage of a refrigerant. The second flow channel 41 surrounds at least a portion of the U-shaped inner condenser tube 5, so that the first flow channel 51 is at least partially cooled by the refrigerant.

[0041] The sublimation and condensation recovery device provided in this embodiment features a U-shaped flow channel design, which allows the sublimated raw material to gradually sublimate upon reaching the top of the U-shaped channel. Once solidified, the sublimated product then falls toward the sublimated solid outlet 8 under the influence of airflow and gravity. Through this device, after setting the required process parameters based on the physical properties of the raw material, the sublimated raw material is cooled and sublimated upon entering the first flow channel 51, and is discharged from the sublimated solid outlet 8 and directly into the recovery tank. This device has a simple flow channel structure and is easy to clean. With the same heat exchange area, it achieves a recovery efficiency exceeding 20% ​​higher than that of traditional laboratory coil-type or shell-and-tube sublimation and condensation recovery devices.

[0042] The sublimation condensation recovery device provided in this embodiment is as follows: Figure 1 As shown, the U-shaped structure needs to be inverted during use, that is, the sublimation gas inlet 1 and the condensed solids outlet 8 face downward. The sublimation raw material enters the sublimation gas inlet 1 from bottom to top and then circulates from bottom to top along the first flow channel 51. During this process, the sublimation raw material is pre-cooled. When the sublimation raw material reaches the top of the first flow channel 51, it will begin to condense in large quantities, and the condensed products will fall toward the condensed solids outlet 8 under the action of the airflow and its own gravity. It should be noted that even if some of the sublimation raw material condenses before reaching the top of the first flow channel 51 from bottom to top, it will still reach the top of the first flow channel 51 under the influence of the airflow, so the condensed products will not be discharged from the sublimation gas inlet 1. In this embodiment, a recovery tank is connected below the condensed solids outlet 8 of the sublimation condensation recovery device to directly recover the condensed products, which has a simple structure and convenient operation.

[0043] In an optional embodiment, the U-shaped inner condenser tube 5 and / or the U-shaped jacket 4 are made of metal or alloy. Existing laboratory small-scale sublimation condensation recovery devices are basically made of glass, and the general pressure range is -0.1Mpa to 0Mpa, that is, it can only withstand negative pressure but not positive pressure, and has poor safety. This device uses metal or alloy materials as an alternative, which can withstand both positive and negative pressures and has a wider range of applicable scenarios.

[0044] In an optional embodiment, the U-shaped inner condenser tube 5 and / or the U-shaped jacket 4 are made of stainless steel. Stainless steel has the performance of being able to withstand positive and negative pressures, and also has an anti-corrosion effect, and the technology is mature and the cost is low, making it suitable as the material for this device. Preferably, this device uses 316 stainless steel with a pressure range of -0.1Mpa to 1.0Mpa. The structural strength and operational safety are higher than those of the glass sublimation condensation recovery device, and the applicable scenarios are wider.

[0045] In an optional embodiment, if Figure 1 As shown, the U-shaped jacket 4 includes a refrigerant inlet 7 and a refrigerant outlet 3 located at both ends of the second flow channel 41. The refrigerant introduced from the refrigerant inlet 7 can be discharged from the refrigerant outlet 3 through the second flow channel 41. In this embodiment, by providing the refrigerant inlet 7 and the refrigerant outlet 3, the refrigerant in the second flow channel 41 can be continuously introduced and discharged, thereby improving heat exchange efficiency and promoting rapid sublimation of the raw material.

[0046] In an optional embodiment, if Figure 1 As shown, along the first flow channel 51, the refrigerant inlet 7 is located at one end of the second flow channel 41 close to the condensed solid outlet 8, and the refrigerant outlet 3 is located at one end of the second flow channel 41 close to the sublimated gas inlet 1. In this embodiment, by arranging the refrigerant inlet 7 at one end close to the condensed solid outlet 8, the portion of the circulating refrigerant with the lowest temperature (because it is close to the refrigerant inlet 7) is close to the condensed solid outlet 8, while the portion with higher refrigerant temperature (because it is far from the refrigerant inlet 7) is close to the sublimated gas inlet 1. In this arrangement, the refrigerant temperature is relatively high during the pre-cooling of the sublimation raw material, and relatively low thereafter, which can promote the sublimation raw material to fully sublimate when it is close to the condensed solid outlet 8.

[0047] In an optional embodiment, if Figure 1 、 Figure 2 As shown, the top of the U-shaped jacket 4 is provided with an exhaust pipe 6 for exhausting the air in the second flow channel 41, and the exhaust pipe 6 is connected to the second flow channel 41. The provision of the exhaust pipe 6 allows bubbles in the refrigerant to be discharged therefrom. Since the gas has a low density, it will naturally float to the top of the U-shaped jacket 4 and be discharged from the exhaust pipe 6, thereby preventing the heat transfer of the refrigerant from being blocked by the mixed gas and avoiding uneven cooling of the internal first flow channel 51.

[0048] In an optional embodiment, if Figure 1 As shown, the U-shaped jacket 4 has jacket end plates 2 at both ends, which seal the ends of the second flow channel 41. Since the U-shaped jacket 4 uses the gap between the inner wall and the outer wall as the second flow channel 41, the ends of the second flow channel 41 need to be sealed to form a sealed space. In this embodiment, the jacket end plates 2 are used to seal the ends of the second flow channel 41.

[0049] In an optional embodiment, if Figure 1 As shown, the U-shaped inner condenser tube 5 has connecting portions 9 at both ends. These connecting portions 9 protrude radially outward from the ends of the U-shaped inner condenser tube 5, and the end surfaces of the connecting portions 9 are flat. In this embodiment, the provision of connecting portions 9 at both ends of the U-shaped inner condenser tube 5 facilitates connection to external pipelines for gas input and solid recovery. The flat end surfaces of the connecting portions 9 facilitate the provision of a sealing structure.

[0050] In an optional embodiment, if Figure 1 As shown, the end surface of the connecting portion 9 is provided with a plurality of assembly holes for connecting a pipeline for conveying sublimation raw materials or a recovery tank for collecting products. The assembly holes can be convenient for setting fasteners and fixing them to the pipeline.

[0051] In an optional embodiment, the connecting portion 9 is a flange structure. The flange structure can facilitate the arrangement of multiple fasteners at the connecting surface, greatly improving the sealing performance.

[0052] It should be understood that the above embodiments are exemplary and are not intended to encompass all possible implementations of the claims. Various modifications and variations may be made to the above embodiments without departing from the scope of the present disclosure. Similarly, the various technical features of the above embodiments may be arbitrarily combined to form additional embodiments of the present application that may not be explicitly described. Therefore, the above embodiments merely illustrate several implementations of the present application and do not limit the scope of protection of the patent application.

Claims

1. A sublimation condensation recovery device, characterized in that: include: A U-shaped inner condenser (5) is formed inside thereof with a U-shaped first flow channel (51) for the sublimation raw material or the condensation product to pass through, wherein the first flow channel (51) has a sublimation gas inlet (1) at one end and a condensation solid outlet (8) at the other end; A U-shaped jacket (4) is sleeved on the outside of the U-shaped inner condenser tube (5), and a second flow channel (41) for the refrigerant to pass through is formed inside the U-shaped jacket (4). The second flow channel (41) surrounds at least a portion of the U-shaped inner condenser tube (5) so that the first flow channel (51) is at least partially cooled by the refrigerant.

2. The sublimation condensation recovery device according to claim 1, characterized in that: The U-shaped inner condenser tube (5) and / or the U-shaped jacket (4) are made of metal.

3. The sublimation condensation recovery device according to claim 2, characterized in that: The U-shaped inner condenser tube (5) and / or the U-shaped jacket (4) are made of stainless steel.

4. The sublimation condensation recovery device according to any one of claims 1 to 3, characterized in that: The U-shaped jacket (4) includes a refrigerant inlet (7) and a refrigerant outlet (3) located at both ends of the second flow channel (41), and the refrigerant introduced from the refrigerant inlet (7) can pass through the second flow channel (41) and be discharged from the refrigerant outlet (3).

5. The sublimation condensation recovery device according to claim 4, characterized in that: Along the first flow channel (51), the refrigerant inlet (7) is located at one end of the second flow channel (41) close to the condensed solid outlet (8), and the refrigerant outlet (3) is located at one end of the second flow channel (41) close to the sublimated gas inlet (1).

6. The sublimation condensation recovery device according to any one of claims 1 to 3, characterized in that: The top of the U-shaped jacket (4) is provided with an exhaust pipe (6) for exhausting the air in the second flow channel (41), and the exhaust pipe (6) is in communication with the second flow channel (41).

7. The sublimation condensation recovery device according to any one of claims 1 to 3, characterized in that: Both ends of the U-shaped jacket (4) are provided with jacket end plates (2), and the jacket end plates (2) seal both ends of the second flow channel (41).

8. The sublimation condensation recovery device according to any one of claims 1 to 3, characterized in that: Both ends of the U-shaped inner condenser tube (5) have connecting portions (9), the connecting portions (9) protrude radially outward from both ends of the U-shaped inner condenser tube (5), and the end surfaces of the connecting portions (9) are plane.

9. The sublimation condensation recovery device according to claim 8, characterized in that: A plurality of assembly holes are provided at the end surface of the connecting portion (9) for connection to a pipeline for conveying sublimation raw materials or a recovery tank for collecting products.

10. The sublimation condensation recovery device according to claim 8, characterized in that: The connecting portion (9) is a flange structure.

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