Slicing machine and in-place detection assembly thereof

Abstract

The utility model relates to the technical field of linear cutting, in particular to a slicing machine and an in-place detection assembly thereof, the slicing machine comprises a plurality of fixed parts, workpieces to be machined can be fed in a mode of being close to any fixed part, and the in-place detection assembly comprises a movable part and a movable part, the movable part can be arranged on any one of the fixed parts in a removable manner; the in-place detection part is arranged on the movable part, and the in-place detection part can detect the position of the to-be-machined part in the feeding process of the to-be-machined part; wherein the movable part is provided with a mechanical limiting surface. By means of the structure, the position of the workpiece to be machined in the feeding process can be detected in real time according to the detection value of the in-place detection component, and therefore whether feeding is in place or not is judged. In a specific scene, based on the in-place detection assembly of the slicing machine, the thickness of a thick sheet at the front end can be automatically measured according to actual requirements.

Description

Technical Field

[0001] The utility model relates to the technical field of wire cutting, and specifically provides a slicer and an in-place detection component thereof. Background Art

[0002] Equipment for processing workpieces of hard and brittle materials (taking silicon rods as an example) usually includes a cutting machine, a squarer, a grinder and a slicer. Among them, the cutting machine is mainly used to cut longer silicon rods into shorter silicon rods (such as silicon rods with a circular cross-section, referred to as round rods for short). The squarer is mainly used to cut round rods into silicon rods with a rectangular cross-section (such as a square) for short (referred to as square rods, if the square rods at this stage have not been ground, they can usually be called rough rods) by methods such as wire cutting. The grinder is mainly used to make the surface accuracy of the rough rod meet the standard through grinding operations (such as the square rods at this stage meet the surface accuracy standard after grinding, and can usually be called finished rods). The slicer is mainly used to obtain thin silicon wafers to be used from the finished rods by methods such as multi-wire cutting (wire mesh cutting).

[0003] Slicers primarily use cutting wires (such as diamond wire, which is typically a steel wire with tiny diamond particles embedded on its surface) to slice silicon ingots. During the slicing process, the ingots must first be properly loaded. This is typically detected by providing a mechanical stop surface or other positioning mechanism on the slicer. When the silicon ingot (or the wafer tray carrying it) abuts the mechanical stop surface, the ingot is properly loaded. Currently, slicers are available on the market that offer a variety of loading methods, including automatic rear-end loading and manual front-end loading. To ensure reliable loading under various loading methods and that the positioning mechanism for one loading method does not interfere with the loading of other methods, a portion of the positioning mechanism is typically removable. This removable mechanism is positioned at different locations on the slicer, ensuring that it functions properly when in operation and that it is removed when not in operation, preventing it from interfering with the loading paths of other loading methods. However, the sensitivity of the method of realizing in-place detection through mechanical limit surfaces needs to be further improved. In addition, if each in-place detection requires abutment with the mechanical limit surface, the in-place detection accuracy of the slicer may be affected. Utility Model Content

[0004] The present invention aims to at least partially solve the above technical problems and / or solve at least part of the above technical problems.

[0005] In a first aspect, the utility model provides an in-place detection component of a slicer, wherein the slicer includes multiple fixed parts, and the workpiece to be processed can be loaded in a manner close to any of the fixed parts. The in-place detection component includes: a movable part, which can be removably set at any of the fixed parts; and an in-place detection component, which is set at the movable part, and the in-place detection component can detect the position of the workpiece to be processed during the loading process; wherein the movable part has a mechanical limit surface.

[0006] With this structure, the position of the workpiece during loading can be detected in real time by the detection value of the in-place detection component, thereby judging whether the loading is in place. At the same time, the setting of the mechanical limit surface plays a role in mechanical in-place protection.

[0007] For the in-place detection component of the above-mentioned slicer, in a possible embodiment, a first mounting structure is provided on the fixed part, and a second mounting structure is provided on the movable part. The fixed part and the movable part are fixedly connected based on the cooperation between the first mounting structure and the second mounting structure. The in-place detection component includes a locking component, and the locking component includes a locking operating end. The gap between the first mounting structure and the second mounting structure can be adjusted by means of the movement of the locking operating end.

[0008] Through such a structure, the position reliability of the mechanical positioning can be achieved. Those skilled in the art can determine the specific structural form of the first / second mounting structure according to actual needs and adjust the matching mode between the fixed part and the movable part accordingly.

[0009] Regarding the in-place detection component of the above-mentioned slicer, in a possible embodiment, the locking component includes a locking operating end component and a locking structure arranged on the locking operating end component, and the locking operating end component can drive the locking structure to move to adjust the gap.

[0010] Regarding the in-place detection component of the above-mentioned slicer, in a possible implementation, the locking operating end component includes the locking operating end and a screw, the locking operating end can drive the screw to move along its axial direction, and the locking structure is provided on the screw.

[0011] With such a configuration, it is possible to achieve axial movement of the screw rod through movement of the operating end, thereby adjusting the gap between the locking structure and the fixed portion.

[0012] Regarding the in-place detection assembly of the slicer described above, in a possible implementation, the locking assembly includes: an elastic component, which is provided on the screw; and a locking nut, which is provided at an end of the screw away from the locking operation end.

[0013] With this structure, the locking reliability of the locking assembly is ensured.

[0014] For the in-place detection component of the above-mentioned slicer, in a possible embodiment, the locking component includes a locking anti-rotation component, and the locking anti-rotation component includes: a pressure plate, which is arranged on the locking structure; an anti-rotation positioning sleeve, which is sleeved on the screw and has a positioning surface that can cooperate with the pressure plate, and in the assembled state, the pressure plate cooperates with the positioning surface.

[0015] With this configuration, it is possible to effectively prevent the locking assembly from rotating.

[0016] Regarding the in-position detection component of the slicer, in a possible embodiment, the locking operating end can drive the screw to move along its axial direction by rotating.

[0017] The locking and anti-rotation assembly includes an anti-rotation structure, and the anti-rotation structure is arranged at a position of the movable part close to the operating end.

[0018] With this configuration, it is possible to effectively prevent the operating end from rotating relative to the movable portion in the absence of an external force.

[0019] Regarding the above-mentioned in-place detection assembly of the slicer, in a possible implementation manner, the second mounting structure is capable of sliding along the first mounting structure.

[0020] This configuration provides a possible way to install the movable part and the fixed part in place.

[0021] Regarding the in-place detection assembly of the above-mentioned slicer, in one possible embodiment, the locking assembly includes a connecting component, and when the second mounting structure slides into place along the first mounting structure, the fixed part and the movable part can be connected to each other by means of the connecting component.

[0022] Through such a structure, the reliability of the connection between the fixed part and the movable part can be ensured. For example, the connecting component can be a safety pin, a screw, etc.

[0023] For the in-place detection component of the above-mentioned slicer, in a possible embodiment, the movable part includes: a main body part, the in-place detection component and the mechanical limit surface are arranged on the main body part; an installation part, which is fixedly connected to the main body part or integrally formed, and the second installation structure is arranged on the installation part.

[0024] By such a configuration, a possible structural form of the in-position detection component is provided. For example, the mounting portion is a rectangular structure or a strip structure, and the main body portion is a block structure provided at one end of the mounting portion.

[0025] For the in-place detection component of the above-mentioned slicer, in one possible embodiment, the workpiece to be processed is loaded by being mounted on a workpiece table, and the workpiece table has a workpiece table positioning surface. The in-place detection component determines the position of the workpiece to be processed by detecting the position of the workpiece table positioning surface of the workpiece table on which the workpiece to be processed is mounted.

[0026] This configuration provides a possible representation of the position of the workpiece to be machined within the microtome.

[0027] Regarding the in-place detection component of the slicer described above, in a possible implementation manner, the in-place detection component is a contact displacement sensor.

[0028] This configuration provides a specific structural form of the in-place detection component. For example, if the workpiece stage positioning surface abuts the contact displacement sensor (generating a preset compression amount), it indicates that the loading is in place. After the loading is in place, if the workpiece stage continues to move in the loading direction, it will abut the mechanical limit surface.

[0029] In a second aspect, the present invention provides a slicer, comprising the in-place detection component of the slicer described in any one of the above.

[0030] It can be understood that the slicer has all the technical effects of the in-place detection component of the slicer described in any of the above items, which will not be repeated here. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The following describes a preferred embodiment of the present invention with reference to the accompanying drawings, in which:

[0032] Figure 1 A schematic structural diagram of a silicon rod including a workpiece table is shown;

[0033] Figure 2 A schematic diagram of the partial structure of a silicon rod including a workpiece table is shown;

[0034] Figure 3 A schematic diagram showing a silicon rod including a workpiece table;

[0035] Figure 4 A schematic diagram showing the structure of the silicon rod including the workpiece table in a loaded state;

[0036] Figure 5 A schematic diagram showing the detection principle of a contact displacement sensor is shown;

[0037] Figure 6 Schematic diagram showing the principle of L1 measurement scenario;

[0038] Figure 7 Schematic diagram of the measurement scenario of L1 is shown;

[0039] Figure 8 Schematic diagram showing the measurement principle of L2;

[0040] Figure 9 A schematic structural diagram showing an embodiment of the present invention, wherein the in-place detection component is assembled with the fixing portion;

[0041] Figure 10 A schematic diagram showing the structure of an in-place detection component after being assembled with a fixed part according to an embodiment of the utility model;

[0042] Figure 11 A schematic structural diagram showing a locking assembly of an in-place detection assembly according to an embodiment of the present utility model;

[0043] Figure 12 A schematic cross-sectional view of an in-place detection assembly according to an embodiment of the present invention is shown;

[0044] Figure 13 A schematic cross-sectional view showing an in-place detection assembly in a locked state according to an embodiment of the present invention;

[0045] Figure 14 A schematic cross-sectional view showing an in-place detection assembly in a released state according to an embodiment of the present invention;

[0046] Figure 15 A schematic diagram showing the three-dimensional structure of an in-place detection component according to an embodiment of the present invention before being assembled with a fixed part;

[0047] Figure 16 A schematic diagram showing the three-dimensional structure of the in-place detection component after being assembled with the fixing part according to one embodiment of the utility model; and

[0048] Figure 17 A schematic structural diagram showing an in-place detection component in an embodiment of the present invention in a state of being assembled with a fixing part.

[0049] List of reference numerals:

[0050] 1. Silicon rod; 11. End face; 12.

[0051] 2. Workpiece table; 21. Workpiece table positioning surface;

[0052] 3. First circle of diamond wire;

[0053] 4. Rear axle box; 41. End face of rear axle box;

[0054] 5. In-place detection components;

[0055] 51. In-place detection component; 52. Mechanical limit surface;

[0056] 61. First measuring device; 62. Second measuring device; 63. Silicon rod positioning device; 64. Lifting device; 65. Support plate;

[0057] 71. Calibration tool; 72. Feed mechanism; 73. Measuring tool;

[0058] 81. Fixing seat (fixing part); 811. Mounting slot (first mounting structure);

[0059] 82. Sliding support (movable part); 821. Main body; 8221. Mounting track (second mounting structure); 822. Mounting part;

[0060] 83. Safety pin (connecting component);

[0061] 84. Gap;

[0062] 85. Locking assembly;

[0063] 851, locking handle assembly (locking operating end assembly);

[0064] 8511, handle (operating end); 8512, screw;

[0065] 852, elastic components;

[0066] 853, locking block (locking movable parts);

[0067] 8541, pressure plate; 8542, anti-rotation positioning sleeve; 8543, anti-rotation retaining ring;

[0068] 855. Anti-rotation locking nut; 856. Gasket. DETAILED DESCRIPTION

[0069] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0070] It should be noted that in the description of this utility model, terms such as "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" indicating directions or positional relationships are based on the directions or positional relationships shown in the accompanying drawings. This is merely for ease of description and does not indicate or imply that the device or element described must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, it should not be understood as limiting the utility model. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance.

[0071] Furthermore, it should be noted that, in the description of this utility model, unless otherwise expressly specified or limited, the terms "installed," "set," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to direct connections, indirect connections through an intermediate medium, or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0072] In addition, in order to better illustrate the present invention, numerous specific details are provided in the following detailed description. Those skilled in the art will understand that the present invention can be implemented without certain specific details. In some instances, the principles of a slicer, which are well known to those skilled in the art, are not described in detail in order to highlight the main purpose of the present invention.

[0073] The following will refer to Figures 1 to 17 At least a part of the present invention is described.

[0074] The slicer slices silicon ingots using diamond wire wound around a cutting mechanism. Specifically, the slicer primarily consists of a feed mechanism located above and a cutting mechanism located below, which work together. Furthermore, it also includes a pay-off and retracting mechanism that cooperates with the cutting mechanism to achieve reciprocating motion of the diamond wire, and a loading and unloading assembly for loading and unloading the silicon ingots. Typically, the cutting mechanism primarily consists of three main cutting rollers (two at the top and one at the bottom) arranged in an inverted triangle. These rollers are machined with dense annular grooves. By densely wrapping diamond wire around positions corresponding to the annular grooves, a wire mesh is formed that can continuously cut the silicon ingot at multiple locations. The slicing process of the slicer is generally as follows: Before loading, the silicon ingot is mounted on a workpiece table (such as a wafer tray) using a stick-on process. After the silicon ingot, including the workpiece table, is loaded into place, the silicon ingot mounted on the workpiece table is secured to the feed mechanism. Afterwards, the feed mechanism is fed in the vertical direction (close to the cutting mechanism). Through the reciprocating motion of the diamond wire on the cutting mechanism, the diamond wire located between the two upper cutting main rollers can slice the silicon rod close to the cutting mechanism in the manner of a wire saw.

[0075] Obviously, the above structure is only an exemplary description. Those skilled in the art can flexibly select the structural form of the slicer according to actual needs. For example, the cutting mechanism can include only two cutting main rollers, the slicer can allow loading only at the rear end, or loading at both the front and rear ends, etc.

[0076] During the slicing process of silicon ingots, a thicker wafer, often referred to as the front-end thick wafer, is typically reserved at the front end of the ingot to be processed to prevent issues such as wafer breakage. To ensure the desired thickness of the front-end thick wafer, the current common approach involves adjusting the position of the silicon ingot by levering the wafer holder with a crowbar. This determines the distance between the front end of the ingot and the first diamond wire loop of the slicer, thereby achieving the desired thickness. However, this approach has limited constraints and requires manual intervention during the sizing process, resulting in considerable room for improvement in adjustment accuracy. Current methods also suffer from long adjustment times and the potential for damage to the ingot if not handled with care. Therefore, a solution is necessary to automatically adjust the thickness of the front-end thick wafer of the ingot, once the workpiece is loaded and ready for processing, based on actual needs.

[0077] The in-place detection component of the present invention was proposed by the inventor in the process of solving the problem of how to realize the automatic adjustment of the thickness of the front thick slice. Therefore, the in-place detection component of the slicer of the present invention will be introduced below in conjunction with the scenario of automatically adjusting the thickness of the front thick slice.

[0078] 1. Definition of data:

[0079] Main reference Figures 1 to 3 In a possible embodiment, the silicon rod 1 is mounted on the workpiece table 2, and the diamond wire wound on the cutting main roller can cut the silicon rod. Figure 1 The rightmost circle of diamond wire is recorded as the first circle of diamond wire 3. Figure 2 In the orientation shown, when the material is loaded in place, as mentioned in the background technology, a certain distance needs to be reserved between the left end face 11 of the silicon rod (the end face away from the in-place detection component) and the first circle of diamond wire wound on the cutting mechanism. This distance corresponds to the thickness of the front end thick sheet 12 of the silicon rod, such as the thickness of the front end thick sheet is recorded as B. That is, the total length L of the silicon rod consists of two parts, one part is the thickness B of the front end thick sheet, and the other part is the cuttable length (or effective slice length) A. The workpiece table positioning surface 21 used to achieve loading in place is a vertical plane located on the right side of the workpiece table 2. The distance between the left end face of the silicon rod and the workpiece table positioning surface is recorded as L1.

[0080] Main reference Figure 4 and Figure 5In a possible embodiment, the distance between the flange end face of the rear axle box 4 of the slicer (hereinafter referred to as the rear axle box end face 41) and the mechanical limit surface 52 is recorded as L2, and the distance between the rear axle box end face and the first circle of diamond wire 3 of the slicer is recorded as L3.

[0081] In one possible embodiment, the slicer is provided with a position detection component 5. The cooperation between the position detection component and the positioning surface on the workpiece table (e.g., a vertical surface located downstream along the loading direction above the wafer holder, hereinafter referred to as the workpiece table positioning surface) can ensure that the silicon rod to be processed is loaded in place. On this basis, the diamond wire can be used to slice the silicon rod by the feeding movement of the feed mechanism. The slicer is provided with a position detection component, such as a main body, on which a limiting structure is provided. The limiting structure cooperates with the workpiece table to ensure that the silicon rod is loaded in place, that is, to ensure that the silicon rod is positioned in the slicer.

[0082] In one possible embodiment, the main body is provided with an in-place detection component 51 and a mechanical limit surface 52. In this example, the in-place detection component is a contact displacement sensor. When the positioning surface of the workpiece table abuts against the contact displacement sensor (generating a preset compression amount), it can be indicated that the material is loaded in place. After the material is loaded in place, if the workpiece table continues to move along the loading direction, it can abut against the mechanical limit surface. Therefore, in this example, it can be understood that the role of the mechanical limit surface is mechanical in-place protection, that is, during normal use, the positioning surface of the workpiece table of the utility model does not contact, or more accurately, cannot contact, the mechanical limit surface.

[0083] In the present invention, the slicer ensures that the silicon ingot loaded onto the workpiece table is properly positioned based on L4, which is determined based on the detection value of the contact displacement sensor. For example, the distance between the mechanical stop surface 52 and the contact displacement sensor's pressed position, determined based on the contact displacement sensor's detection value, is denoted as L4.

[0084] Specifically, after assembly is completed, the following preliminary calibration needs to be completed: with the help of an external object such as a flat plate, the probe of the contact displacement sensor is compressed to the mechanical limit surface, thereby determining the total value of the contact displacement sensor that can be compressed, recorded as LA.

[0085] Based on the above calibration, the probe compression value of the contact displacement sensor when the material is loaded into place is recorded as LB (corresponding to the pressed position of the aforementioned contact displacement sensor). It can be seen that the distance L4 between the aforementioned mechanical limit surface and the pressed position of the contact displacement sensor is L4 = LA-LB.

[0086] 2. Determination of data:

[0087] As can be seen from the aforementioned data, those related to the silicon rod to be sliced ​​include L1 (the distance between the workpiece table positioning surface and the front end of the silicon rod) and the thickness B of the front thick slice of the silicon rod. Data related to the slicer include L2 (the distance between the rear axle box end face and the mechanical limit surface) and L3 (the distance between the rear axle box end face and the first coil of diamond wire of the slicer). Data related to the detection value (LB) of the contact displacement sensor is L4.

[0088] The thickness of the front end slab of the silicon rod can be flexibly determined (set) based on actual needs. For example, the thickness of the front end slab can be set to 1.5 mm. The slicer requires manual wiring. After wiring is completed, L3 can be directly measured. L4 can be calculated based on the detection value of the contact displacement sensor. The following mainly describes how to determine L1 and L2.

[0089] (1) Determination of L1:

[0090] Main reference Figure 6 and Figure 7 In one possible implementation, L1 is determined (measured) as follows:

[0091] The first measuring device 61 and the second measuring device 62 are respectively used to detect the position data of the workpiece table positioning surface and the front end face of the silicon rod corresponding to L1. Specifically, relying on the rod bonding automation line, the first measuring device 61 and the second measuring device 62 are respectively fixed to the two ends of the silicon rod positioning device in the rod bonding automation line. In this example, the first measuring device 61, which is primarily used to measure the position data of the workpiece table positioning surface, includes a sensor, and the second measuring device 62, which is used to measure the position data of the front end face of the silicon rod, includes multiple sensors. Specifically, because the front end face of the silicon rod may have problems such as tilt and non-geometrically flat end face, four sensors are used to collect data on the front end face of the silicon rod, which are roughly distributed at the four vertices of the front end face of the silicon rod.

[0092] After the silicon rod has completed the initial fixation (bonding the silicon rod to the crystal tray), it is transported to the silicon rod positioning device 63 via a roller conveyor. The lifting device 64 rises to lift the silicon rod 1. After it is lifted into place, the support plates 65 on both sides move toward the middle to clamp the workpiece table. Then the lifting device retracts. After that, the silicon rod that has completed the initial fixation can be converted to a state where it is fixed by the support plates. When the silicon rod is lifted by the support plates, the front end surface of the silicon rod enters the measurement range of the second measuring device 62. Subsequently, the cylinder of the first measuring device extends, so that a sensor corresponding to the second measuring device reaches the measurement position of the workpiece table positioning surface. In this way, L1 can be determined based on the two detection results.

[0093] The aforementioned data processing for determining the position of the front end of the silicon rod based on the detection values ​​of the four sensors may include but is not limited to:

[0094] 1) Calculate four L1 values ​​based on the detection values ​​of the four sensors in combination with the first measuring device, and take the minimum value of the four L1 values.

[0095] 2) Based on the relative positions of the four sensors and the detection values ​​of each sensor, the slope of the front end surface of the silicon rod is calculated. At the same time, combined with the specifications of the silicon rod, the minimum distance between the front end surface of the silicon rod and the positioning surface of the workpiece table can be calculated. The minimum value can be used as L1.

[0096] (2) Determination of L2:

[0097] L2 is the distance between the mechanical limit surface and the rear axle box end surface. The determination (measurement) methods of L2 include but are not limited to the following two methods:

[0098] Method 1: After the whole machine is assembled, the slicer's in-place detection component and the rear axle box are both fixed parts. Therefore, after the installation is completed, the distance between the mechanical limit surface and the end face of the rear axle box can be determined, and L2 can be considered as a theoretical value.

[0099] Method 2: Use a calibration tool (a precision-machined part of known length) for measurement.

[0100] Main reference Figure 8 In one possible implementation, L2 is determined (measured) as follows:

[0101] Use the calibration tool 71 to simulate the position after normal loading, so that the end face of the corresponding side (the left side in the figure) of the calibration tool contacts the mechanical limit surface 52, and drive the feed mechanism 72 of the slicer to drive the calibration tool to move downward until the calibration tool enters the diameter range of the rear axle box end face. Use a measuring tool 73 such as a caliper to measure the distance between the end face of the corresponding side (the right side in the figure) of the calibration tool and the end face of the rear axle box. Add this to the length of the calibration tool (known) to obtain L2.

[0102] Current slicers now have both front-end and rear-end loading functions. For example, they can achieve flexible slicing operations through automatic rear-end loading and manual front-end loading. Accordingly, it is necessary to achieve rapid conversion of the mechanical limit surface of the slicer, that is, to realize the mechanical limit surface corresponding to front-end loading (located on the rear side) and the mechanical limit surface corresponding to rear-end loading (located on the front side).

[0103] In one possible embodiment, a fixed block is installed at the position corresponding to the front and rear ends of the feed mechanism 72 (respectively referred to as the first fixed block and the second fixed block. The sliding support is installed on any fixed block in a switchable manner. In this way, the front and rear rapid conversion of the mechanical limit surface 52 is reflected in how to achieve rapid disassembly and installation of the sliding support on the first / second fixed block. For example, if the sliding support is initially installed on the first fixed seat at the front end of the feed mechanism (automatic loading at the rear end, limiting at the front end), when it is switched to manual front end loading, the sliding support needs to be quickly removed and installed on the second fixed block at the rear end of the feed mechanism, and then the sliding support can be fixed to the second fixed block by, for example, a positioning pin.

[0104] To ensure smooth installation between the sliding support and the first / second fixed block, a large gap typically exists between the sliding support and the mounting surface of the first / second fixed block. Consequently, once the material is loaded into place, the gap causes the sliding support to displace due to the force exerted upon contact. This displacement changes the position of the mechanical limit surface, resulting in poor repeatability of each workpiece stage positioning and poor numerical repeatability of L2. This further results in an inability to meet the precision requirements of the present invention for flexible control of the front-end thick sheet. In view of this, the present invention provides a new in-place detection component to ensure the precision requirements for control of the front-end thick sheet.

[0105] Main reference Figures 9 to 17 In one possible embodiment, a mounting groove 811 is provided on each fixed block 81, and a mounting track 8221 adapted to the mounting groove and capable of sliding in the mounting groove is provided on the sliding support 82. After the track is slid into the fixed seat along the mounting groove, the two can be fixedly connected with the aid of fasteners such as safety pins 83. As in this example, the sliding support 82 includes a main body portion 821 and a mounting portion 822 located below the main body portion. The mounting track 8211 is provided on the mounting portion 821, and the aforementioned in-place detection component 51 and the mechanical limit surface 52 are both provided on the mounting portion 822. For example, a columnar structure is provided on the mounting portion, and the end face of the columnar structure is the mechanical limit surface 52.

[0106] As previously mentioned, the large gap 84 between the mounting groove 811 and the mounting rail 821 results in poor repeatability of the L2 measurement. In view of this, in the present invention, the in-place detection assembly further includes a locking assembly 85. The locking assembly 85 is primarily used to ensure that the sliding support 82 can be smoothly removed from the fixed block 81 by loosening the locking handle 851, and to ensure that the sliding support 82 and the fixed block 81 have a small gap 84 when assembled by locking the locking handle 851, thereby ensuring the repeatability of the L2 value.

[0107] In one possible embodiment, the locking assembly 85 mainly includes a locking operating end assembly (such as a locking handle assembly 851, etc.), an elastic component (such as a disc spring 852, a spring, etc.), and a locking movable component (such as a locking block 853, a locking plate, etc.). For example, the locking handle assembly 851 includes a locking handle 8511 and a screw 8512. The disc spring is sleeved on the screw, and a mounting space corresponding to the disc spring is provided in the sliding support. The end of the handle near the screw is an eccentric circle structure. In this way, when the operator turns the handle, the center position of the eccentric circle will change. As the center position changes, the screw will move, and the locking block 853 fixed to the screw will therefore move along the length of the screw.

[0108] Obviously, the above-mentioned locking handle is only an exemplary description, and those skilled in the art can adopt other structural forms with an operation to drive the locking movable component to move according to actual needs.

[0109] When the locking handle is loosened and locked, the locking handle can drive the locking block to move, thereby changing the size of the gap between the locking block and the sliding support. Specifically:

[0110] When the locking handle is released, the disc spring causes the locking block to move backward (to the left in the figure), widening the gap between the locking block and the sliding support. This frees the sliding block from any constraints, ensuring smooth removal of the sliding support from the fixed base. Specifically, when changing the loading method, remove the safety pin, bend the locking handle to the loosened position, and remove the iron stop assembly, including the sliding support and locking handle, from one side.

[0111] When the locking handle is locked, the locking block moves forward (to the right in the figure) under the action of the disc spring, and the gap between the locking block and the sliding support becomes smaller. In this way, the gap between the sliding support and the fixed block can be kept small when they are fixed to each other.

[0112] In a possible implementation, the locking assembly 85 includes a locking anti-rotation assembly 854 , which is mainly used to implement the anti-rotation function of the locking assembly so as to ensure the locking reliability of the locking assembly.

[0113] In one possible embodiment, the locking and anti-rotation assembly 854 includes a connected pressure plate 8541 and an anti-rotation locating sleeve 8542. One end of the anti-rotation locating sleeve 8542 is sleeved over the screw, while the other end is freely accommodated within a reserved mounting space on the locking block. The anti-rotation locating sleeve has a flat surface that mates with the pressure plate, which can be secured to the locking block using fasteners such as screws. In the assembled state, the pressure plate mates with the flat surface on the anti-rotation locating sleeve, thereby achieving an anti-rotation function. Specifically, it effectively prevents the locking handle from rotating relative to the sliding support.

[0114] In one possible embodiment, the locking anti-rotation assembly 854 also includes an anti-rotation structure (such as an anti-rotation baffle ring 8543, an anti-rotation baffle plate, etc.) installed at the locking handle. Through the cooperation between the anti-rotation baffle ring and the locking handle, it is ensured that the installed locking handle will not cause the anti-loosening locking nut to loosen due to rotation.

[0115] In one possible embodiment, the locking assembly 85 includes an anti-loosening locking nut 855, which is arranged at the end of the screw away from the locking handle, such as the anti-loosening locking nut 855 is abutted against the side of the locking block away from the locking handle (the right surface in the figure) through a gasket 856.

[0116] In this way, through the above-mentioned in-place detection component (mainly including the structure that needs to be switched (such as the sliding support, locking component, safety pin, etc.) in addition to the fixed block (set on the slicer)), on the premise of ensuring that the sliding support can realize the function of quick disassembly to facilitate the rapid switching of front and rear loading, when the sliding support is installed on the corresponding first / second fixed block and the locking handle is locked, it can be ensured that when the loading is in place, the mechanical limit surface 51 will not be displaced, thereby ensuring the numerical repeatability accuracy of L2.

[0117] 3. Control of loading in place:

[0118] Based on the above data, we know that L4 = L1 - L2 - L3 + B. Thus, B can be inferred from the contact displacement sensor's detection value. Specifically, when B is set, a corresponding contact displacement sensor detection value (LB) will be generated. This means that there is a definite mapping relationship between the contact displacement sensor's detection value and the set thickness of the front end slab. Based on the set B, the detection value LB that the contact displacement sensor should have when the material is loaded properly is determined. In this way, when the contact displacement sensor's detection value matches the expected detection value when the material is loaded properly, it can be determined that the material is loaded properly. Specifically, in the current state, the thickness of the front end slab of the silicon rod to be cut is the same as the pre-set value. Still taking the preset thickness of the front end thick sheet of the silicon rod as 1.5 mm as an example, assuming that the thickness of the front end thick sheet of the silicon rod needs to be adjusted to 1.8 mm, it is only necessary to determine the detection value LB that the new contact displacement sensor should have when the material is loaded into place according to the aforementioned mapping relationship. This can ensure that the silicon rod can be loaded into place with the new front end thick sheet thickness through real-time detection.

[0119] Relying on the automated ingot gluing line, sensor-equipped measuring devices are fixed at both ends of the ingot positioning device within the ingot gluing line. The relative distance between the sensors at both ends is calibrated using a tool of known length. After calibration, the ingots, after initial consolidation, are transported to the ingot positioning device according to the normal operating procedures of the ingot gluing line. Data for L1 is collected and transmitted to the MES, for example, by writing the collected data to a QR code attached to the ingots. The ingots are then placed in a three-dimensional warehouse for cutting. Before the slicer cuts the ingots, L1 is obtained by scanning the QR code attached to the ingots. L2 is the theoretical set value, L3 is manually measured (re-measured after each rewiring, not after each cut), and B is the set standard value for the front-end thickness. If the actual distance between the ingot tip and the first coil of diamond wire can be manually measured (e.g., B'), the difference between B' and B is calculated and used as an offset to adjust L2. This revised L2 is then input into the slicer as a fixed value. Write the algorithm L4=(L2-L3)-L1+B in the control program of the slicer, and now the calibration of each position size (first calibration) and the program setting of the slicer are completed.

[0120] Based on this, L4 is calculated according to the obtained L1, L2, L3 and B. The slicer pushes the L4 value to the control part of the automatic loading and unloading program of the slicer, and pushes the silicon rod to the specified position corresponding to L4. The arrival of the specified position indicates that the silicon rod has been loaded in place according to the set specifications of the front-end thick slice. For example, in a specific example, the loading process of the silicon rod is: first, the silicon rod is moved to the push-pull initial position. Then the silicon rod is moved forward in the current loading direction. After reaching a preset position (a position close to the position), the silicon rod is decelerated until the detection value of the sensor is LB corresponding to L4, which indicates that the silicon rod is loaded in place.

[0121] After the material is loaded in place, the feed mechanism can complete the clamping action of the workpiece table (fixing the silicon rod to the feed mechanism), and then the feed mechanism can perform the feed operation (making the bottom side of the silicon rod close to the wire mesh), and on this basis complete the one-knife slicing operation of the silicon rod.

[0122] It can be seen that in the preferred embodiment of the utility model, according to the detection value of the contact displacement sensor, it can be ensured that the silicon rod loaded in place has the set thickness of the front end thick slice. On this basis, it can effectively avoid the occurrence of situations such as silicon slice breakage during the slicing operation. The mapping relationship between the thickness of the front end thick slice and the detection value of the contact displacement sensor constructed by the constraints of multiple factors can seek to more stably ensure the thickness control accuracy of the front end thick slice. Based on this, when the thickness of the front end thick slice needs to be adjusted, it is only necessary to adjust the detection value of the contact displacement sensor corresponding to the characterization of the loading in place. Therefore, high-precision adjustment of the thickness of the front end thick slice can be easily achieved without manual intervention, which is conducive to the advancement of automated production of slicers. Among them, through the setting of the in-place detection component, the numerical repeatability of L2 is guaranteed, thereby ensuring the adjustment accuracy of the thickness of the front end thick slice.

[0123] Thus far, the technical solutions of the present invention have been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it is readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art may make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will fall within the scope of protection of the present invention.

Claims

1. A slicer in-place detection component, characterized in that: The slicer includes a plurality of fixed parts, and the workpiece to be processed can be loaded in a manner close to any of the fixed parts. The in-place detection component includes: a movable portion that can be removably provided on any one of the fixed portions; and An in-place detection component is provided on the movable portion, and the in-place detection component can detect the position of the workpiece to be processed during the loading process; Wherein, the movable part has a mechanical limiting surface.

2. The in-place detection component of the slicer according to claim 1, characterized in that: The fixed part is provided with a first mounting structure, the movable part is provided with a second mounting structure, and the fixed part and the movable part are fixedly connected based on the cooperation between the first mounting structure and the second mounting structure. The in-place detection assembly includes a locking assembly, and the locking assembly includes a locking operating end. The gap between the first mounting structure and the second mounting structure can be adjusted by means of the movement of the locking operating end.

3. The in-place detection component of the slicer according to claim 2, characterized in that: The locking assembly includes a locking operating end assembly and a locking structure provided on the locking operating end assembly. The locking operating end assembly can drive the locking structure to move so as to adjust the gap.

4. The in-place detection component of the slicer according to claim 3, characterized in that: The locking operating end assembly includes the locking operating end and a screw rod. The locking operating end can drive the screw rod to move along its axial direction. The locking structure is provided on the screw rod.

5. The in-place detection component of the slicer according to claim 4, characterized in that: The locking assembly comprises: an elastic member disposed on the screw; and A locking nut is arranged at the end of the screw rod away from the locking operation end.

6. The in-place detection component of the slicer according to claim 5, characterized in that: The locking assembly includes a locking anti-rotation assembly, and the locking anti-rotation assembly includes: a pressure plate, which is arranged on the locking structure; an anti-rotation positioning sleeve, which is sleeved on the screw and has a positioning surface capable of cooperating with the pressing plate, and In the assembled state, the pressing plate cooperates with the positioning surface.

7. The in-place detection component of the slicer according to claim 6, characterized in that: The locking operation end can drive the screw to move along its axial direction by rotating. The locking and anti-rotation assembly includes an anti-rotation structure, and the anti-rotation structure is arranged at a position of the movable part close to the operating end.

8. The in-place detection component of a slicer according to claim 2, characterized in that: The second mounting structure is slidable along the first mounting structure.

9. The in-place detection component of the slicer according to claim 8, characterized in that: The locking assembly includes a connecting component, In a situation where the second mounting structure is slid into position along the first mounting structure, the fixed portion and the movable portion can be connected to each other by means of the connecting member.

10. The in-place detection component of a slicer according to claim 2, characterized in that: The activities described include: A main body portion, wherein the in-position detection component and the mechanical limit surface are arranged on the main body portion; The mounting portion is fixedly connected to or integrally formed with the main body portion, and the second mounting structure is provided on the mounting portion.

11. The in-place detection component of a slicer according to claim 1, characterized in that: The workpiece to be processed is loaded by being mounted on a workpiece table, which has a workpiece table positioning surface. The in-position detection component determines the position of the workpiece to be processed by detecting the position of the workpiece table positioning surface of the workpiece table on which the workpiece to be processed is carried.

12. The in-place detection component of a slicer according to claim 11, characterized in that: The in-position detection component is a contact displacement sensor.

13. A slicer, characterized in that: The slicer comprises the in-position detection component of any one of claims 1 to 12.

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