Locking device

Abstract

The utility model discloses a locking device which comprises a base and a driving mechanism fixedly connected with the base, the driving mechanism is in driving connection with two first sliding blocks, the driving mechanism is used for driving the two first sliding blocks to move face to face or back to back, and each first sliding block is fixedly connected with a connecting plate; the side, away from the driving mechanism, of the base is provided with two symmetrically-arranged inclined faces, each inclined face is slidably connected with a mounting base, and the mounting bases are rotationally connected with clamping jaws. The connecting plate is provided with a kidney-shaped hole, the mounting base is fixedly connected with a connecting shaft, and the connecting shaft is connected into the kidney-shaped hole in a sliding mode. According to the locking device, stretching unlocking and embedding locking of the clamping jaw in a compact space can be achieved only through one air cylinder, meanwhile, the function of automatically detecting the opening and closing states of the clamping jaw is integrated, and therefore the automation level and the production efficiency in the chip picking process are improved while stable operation of the fixed film expanding device is guaranteed.

Description

Technical Field

[0001] The utility model relates to a locking device, belonging to the technical field of locking equipment. Background Art

[0002] Chip picking is a crucial step in the semiconductor manufacturing industry, with its accuracy and stability directly impacting chip production quality and efficiency. During this process, wafers are placed in a ring-shaped expansion device. As wafer diameters increase, the expansion device's stability and precision are increasingly demanded. The expansion device experiences slight deformation while carrying large wafers and moving. While this deformation is minimal, it can significantly affect wafer positioning accuracy, potentially leading to errors in chip processing and even wafer damage.

[0003] To maintain the stability of the film expansion device, a locking device is required. This effectively secures the film expansion device and ensures its stability during movement. To ensure the reliable operation of the locking device, a mechanism is also required to automatically detect the open and closed status of the clamping jaws. This not only helps to promptly detect and correct potential faults in the locking device, but also improves the automation level of the entire chip picking process, reduces manual intervention, and thus improves production efficiency.

[0004] However, most existing locking devices are complex in structure, requiring multiple cylinders or other driving components to work together to unlock the jaws and lock them in place. This not only increases manufacturing costs and maintenance difficulties, but also limits their application in compact spaces. Therefore, there is an urgent need for a locking device with a simple structure, convenient operation, and the ability to achieve efficient locking and automatic detection in confined spaces. Utility Model Content

[0005] The purpose of this utility model is to provide a locking device with a simple structure, convenient operation, and the ability to achieve efficient locking and automatic detection in confined spaces. This locking device utilizes only a single cylinder to achieve both extended unlocking and inward locking of the jaws in a compact space. It also integrates the function of automatically detecting the open and closed state of the jaws, thereby ensuring stable operation of the fixed film expansion device while improving the automation level and production efficiency of the chip picking process.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A locking device comprises a base and a driving mechanism fixedly connected to the base, the driving mechanism being drivably connected to two first sliders, the driving mechanism being used to drive the two first sliders to move toward or away from each other, and each first slider being fixedly connected to a connecting plate; two symmetrically arranged inclined surfaces are provided on a side of the base away from the driving mechanism, each of the inclined surfaces is slidably connected to a mounting seat, and the mounting seat is rotatably connected to a clamping claw; the connecting plate is provided with a waist-shaped hole, the mounting seat is fixedly connected to a connecting shaft, and the connecting shaft is slidably connected to the waist-shaped hole.

[0008] In one embodiment of the present invention, it further includes an abutment block fixedly connected to the inclined surface, and the abutment block is configured to be able to abut against the clamping claw; a rounded corner is provided on the side where the two abutment blocks are close to each other, and the two abutment blocks are symmetrically arranged.

[0009] In one embodiment of the present invention, a boss is provided at a middle position of the base away from the driving mechanism, and the two inclined surfaces are symmetrically arranged about the boss.

[0010] In one embodiment of the present invention, the inclined surface is arranged upwardly from the side close to the boss to the side away from the boss; the upper end surface of the abutment block is inclined with the inclined surface, and the upper end surface of the abutment block is arranged upwardly from the side close to the boss to the side away from the boss.

[0011] In one embodiment of the present invention, the inclined surface is fixedly connected to a guide rail, a second slider is slidably connected to the guide rail, the mounting seat is fixedly connected to the second slider, and the bottom of the clamp is rotatably connected to the top of the mounting seat through an axis.

[0012] In one embodiment of the present invention, a fixed block is fixedly connected to one side of the bottom of the mounting seat, a reset spring is provided on the periphery of the connecting shaft between the mounting seat and the connecting plate, and a fixing pin is fixedly connected to the side of the clamp facing the connecting plate, one end of the reset spring is fixedly connected to the fixed block, and the other end is fixedly connected to the fixing pin of the clamp.

[0013] In one embodiment of the present invention, a fixing hole is provided at the bottom of the fixing block, and one end of the return spring is fixed in the fixing hole of the fixing block.

[0014] In one embodiment of the present invention, a groove is provided on the outer periphery of the fixing pin, and the other end of the return spring is wound around and fixed in the groove of the fixing pin.

[0015] In one embodiment of the present invention, mounting bases are fixedly connected to both sides of the base, and proximity sensors are installed in the mounting bases.

[0016] In one embodiment of the present invention, the driving mechanism is a bidirectional slide cylinder.

[0017] The beneficial effects of the utility model are:

[0018] The utility model provides a locking device, when it is necessary to fix the film expansion device, it is only necessary to drive the driving mechanism of the locking device to drive the clamping jaw to rotate inward, so that the clamping jaw is in an embedded state, at this time, the clamping jaw does not contact the rotating fixed block, and under the elastic force of the spring of the spring reset pin, the rotating fixed block can be tightly locked to the fixed surface of the film expansion device body, thereby locking and fixing the film expansion device, thereby ensuring its stability. When it is necessary to unlock the film expansion device, that is, when the film expansion device is not fixed, it is only necessary to drive the driving mechanism of the locking device to extend the clamping jaw outward, so that the clamping jaw is in an extended state, and the driving mechanism continues to drive the clamping jaw to move along the top surface of the abutment block, so that the clamping jaw can contact the fixed rod on the lower end surface of the rotating fixed block, so that when the clamping jaw extends and moves, the fixed rod drives the rotating fixed block to rotate, thereby overcoming the elastic force of the spring of the spring reset pin, and causing one end of the rotating fixed block to move away from the fixed surface of the film expansion device body, thereby unlocking the film expansion device. Among them, the sensor detection pin on the lower side of the rotating fixed block cooperates with the proximity sensor of the locking device. When the rotating fixed block rotates and aligns the sensor detection pin with the proximity sensor of the locking device, the rotation position of the rotating fixed block can be detected by the proximity sensor, thereby realizing automatic detection of the unlocking of the film expansion device, and then the jaw opening and closing signal can be received by the proximity sensor. The locking device has a simple structure, convenient operation, and can achieve efficient locking and automatic detection in a limited space. The locking device only needs to use one cylinder to realize the extension unlocking and the embedded locking of the jaw in a compact space. At the same time, it integrates the function of automatically detecting the opening and closing status of the jaw, thereby ensuring the stable operation of the fixed film expansion device while improving the automation level and production efficiency of the chip picking process. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a three-dimensional diagram of the locking device provided by the utility model from a first perspective.

[0020] Figure 2 This is a stereoscopic view of the locking device provided by the present invention from a second perspective.

[0021] Figure 3 This is a three-dimensional diagram of the locking device provided by the utility model from a third perspective.

[0022] Figure 4 A three-dimensional diagram of the locking device provided by the utility model with one of the connecting plates removed.

[0023] Figure 5 for Figure 4 A three-dimensional diagram of the partial structure of the locking device in FIG.

[0024] Figure 6 This is a three-dimensional diagram of the locking device and film expanding device provided by the utility model.

[0025] Figure 7 A three-dimensional diagram of the partial structure of the locking device and the film expansion device provided by the utility model

[0026] In the figure: 1. connecting plate; 2. driving mechanism; 21. first slider; 3. base; 31. inclined surface; 4. mounting seat; 5. proximity sensor; 6. waist-shaped hole; 7. second slider; 8. connecting shaft; 9. mounting seat; 10. fixing pin; 101. groove; 11. reset spring; 12. fixing block; 121. fixing hole; 13. abutment block; 131. fillet; 14. guide rail; 15. clamping claw; 16. boss; 100. locking device; 200. film expansion device; 201. fixing surface; 202. rotating fixed block; 203. fixing rod; 204. sensor detection pin; 205. spring reset pin; 206. rotating shaft. DETAILED DESCRIPTION

[0027] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] In this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection; direct connection, indirect connection through an intermediate medium, and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0029] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0030] like Figure 1-5 As shown, the utility model provides a locking device. In some embodiments, the locking device 100 includes a base 3 and a driving mechanism 2 fixedly connected to the base 3. The driving mechanism 2 is driven and connected to two first sliders 21. The driving mechanism 2 is used to drive the two first sliders 21 to move toward or away from each other. Each of the first sliders 21 is fixedly connected to a connecting plate 1; two symmetrically arranged inclined surfaces 31 are provided on the side of the base 3 away from the driving mechanism 2, and each of the inclined surfaces 31 is slidably connected to a mounting seat 9, and the mounting seat 9 is rotatably connected to a clamping claw 15; the connecting plate 1 is provided with a waist-shaped hole 6, and the mounting seat 9 is fixedly connected to a connecting shaft 8, and the connecting shaft 8 is slidably connected to the waist-shaped hole 6.

[0031] Optionally, the driving mechanism 2 is a bidirectional slide cylinder that drives the two first sliders 21 to move toward or away from each other, so that the two first sliders 21 move closer to or farther away from each other.

[0032] In some embodiments, it also includes an abutment block 13 fixedly connected to the inclined surface 31, and the abutment block 13 is configured to abut against the clamping jaw 15; a rounded corner 131 is provided on the side where the two abutment blocks 13 are close to each other, and the two abutment blocks 13 are symmetrically arranged.

[0033] Furthermore, a boss 16 is provided at a middle position of the base 3 on a side away from the driving mechanism 2 , and the two inclined surfaces 31 are symmetrically arranged with respect to the boss 16 .

[0034] Furthermore, the inclined surface 31 is arranged upwardly from the side close to the boss 16 to the side away from the boss 16; the upper end surface of the abutment block 13 is inclined with the inclined surface 31, and the upper end surface of the abutment block 13 is arranged upwardly from the side close to the boss 16 to the side away from the boss 16.

[0035] In some embodiments, the inclined surface 31 is fixedly connected to the guide rail 14, the guide rail 14 is slidably connected to the second slider 7, the mounting seat 9 is fixedly connected to the second slider 7, and the bottom of the clamp 15 is rotatably connected to the top of the mounting seat 9 through an axis.

[0036] In some embodiments, a fixed block 12 is fixedly connected to one side of the bottom of the mounting seat 9, a reset spring 11 is provided on the periphery of the connecting shaft 8 between the mounting seat 9 and the connecting plate 1, and the clamping jaw 15 is fixedly connected to a fixing pin 10 on the side facing the connecting plate 1, one end of the reset spring 11 is fixedly connected to the fixed block 12, and the other end is fixedly connected to the fixing pin 10 of the clamping jaw 15.

[0037] Furthermore, a fixing hole 121 is provided at the bottom of the fixing block 12 , and one end of the return spring 11 is fixed in the fixing hole 121 of the fixing block 12 .

[0038] Furthermore, a groove 101 is provided on the outer periphery of the fixing pin 10 , and the other end of the return spring 11 is wound around and fixed in the groove 101 of the fixing pin 10 .

[0039] In this embodiment, the elastic force of the return spring 11 constantly exerts an elastic force on the clamping jaw 15 in the direction of the boss 16, driving the clamping jaw 15 to rotate toward the boss 16, thereby causing the clamping jaw 15 to rotate inward and be in an embedded state. One end of the return spring 11 is fixed to the fixing hole 121 at the bottom of the fixing block 12, and the other end of the return spring 11 is wound around the outer periphery of the connecting shaft 8 between the mounting seat 9 and the connecting plate 1, and then fixed to the groove 101 of the fixing pin 10 on one side of the clamping jaw 15. This structural design of the return spring 11 ensures that the clamping jaw 15 is always subjected to the elastic force of the return spring 11, resulting in the clamping jaw 15 always having a tendency to rotate inward. The fixing block 12, the mounting seat 9, the clamping jaw 15, the return spring 11, and the connecting shaft 8 can move synchronously on the guide rail 14.

[0040] In some embodiments, both sides of the base 3 are fixedly connected to a mounting base 4, and a proximity sensor 5 is installed in the mounting base 4. The proximity sensor 5 can receive the opening and closing signal of the clamping jaw 15.

[0041] The operating principle of the locking device 100 is as follows: the drive mechanism 2, via two first sliders 21, drives the two connecting plates 1 inward toward each other or outward away from each other. Because the mounting seat 9, fixed block 12, clamping jaws 15, return spring 11, and connecting shaft 8 all move synchronously on the guide rail 14, movement of the mounting seat 9 drives the fixed block 12, clamping jaws 15, return spring 11, and connecting shaft 8 as a whole. Because the connecting shaft 8 is slidably connected to the waist-shaped hole 6 of the connecting plate 1, movement of the connecting plate 1 allows the mounting seat 9 to move downward or upward along the inclined guide rail 14 through the sliding connection between the waist-shaped hole 6 and the connecting shaft 8.

[0042] When the driving mechanism 2 drives the two connecting plates 1 inwardly toward each other, the connecting plates 1 drive the mounting seat 9 to move inwardly via the connecting shaft 8. The mounting seat 9 slides downwardly on the guide rail 14 on the inclined surface 31 via the second slider 7. The bottom surface of the clamping jaw 15 abuts the top surface of the abutting block 13, causing the clamping jaw 15 to move downwardly along the top surface of the abutting block 13. When the clamping jaw 15 moves downwardly to the rounded corner 131 of the abutting block 13, the elastic force of the return spring 11 causes the clamping jaw 15 to rotate inward and enter an embedded state.

[0043] When the driving mechanism 2 drives the two connecting plates 1 outward and away from each other, the connecting plate 1 drives the mounting seat 9 to move outward via the connecting shaft 8, and the mounting seat 9 slides upward on the guide rail 14 on the inclined surface 31 via the second slider 7. The driving force of the driving mechanism 2 overcomes the elastic force of the reset spring 11, causing the clamping jaw 15 to rotate outward at the rounded corner 131 of the abutment block 13 and be in an extended state. The driving mechanism 2 continues to drive the mounting seat 9 outward. Due to the sliding connection between the connecting shaft 8 and the waist-shaped hole 6 of the connecting plate 1, the bottom surface of the clamping jaw 15 abuts against the top surface of the abutment block 13, allowing the clamping jaw 15 to move along the top surface of the abutment block 13.

[0044] like Figure 6 and 7As shown, the locking device 100 can achieve extended unlocking and internal locking of the clamping jaws of the film expansion device 200. The film expansion device 200 includes two rotating fixed blocks 202, two of which are connected to one side of the film expansion device 200 body. The rotating fixed blocks 202 are rotatably connected to the film expansion device 200 body via a rotating shaft 206. The upper end surface of the rotating fixed block 202 is fixedly connected to a spring reset pin 205, the lower end surface of the rotating fixed block 202 is fixedly connected to a fixed rod 203, and the lower side of the rotating fixed block 202 is fixedly connected to a sensor detection pin 204. The film expansion device 200 body has a fixed surface 201. The outer periphery of the spring reset pin 205 is provided with a spring. Under the elastic force of the spring of the spring reset pin 205, one end of the rotating fixed block 202 can be tightly locked to the fixed surface 201 of the film expansion device 200 body, thereby locking and fixing the film expansion device 200. When the rotating fixed block 202 is driven to rotate, the elastic force of the spring of the spring reset pin 205 is overcome, so that one end of the rotating fixed block 202 is away from the fixing surface 201 of the film expanding device 200 body, thereby unlocking the film expanding device 200.

[0045] Therefore, when in use, the locking device 100 is arranged on one side of the rotating fixed block 202 of the film expanding device 200, and the two clamping jaws 15 are respectively arranged corresponding to the two rotating fixed blocks 202. When the film expanding device 200 needs to be fixed, the driving mechanism 2 of the locking device 100 only needs to drive the clamping jaws 15 to rotate inward, so that the clamping jaws 15 are in an embedded state. At this time, the clamping jaws 15 are not in contact with the rotating fixed block 202. Under the elastic force of the spring of the spring return pin 205, one end of the rotating fixed block 202 can be tightly locked to the fixing surface 201 of the film expanding device 200 body, thereby locking and fixing the film expanding device 200 and ensuring its stability. When it is necessary to unlock the film expansion device 200, that is, when the film expansion device 200 is not fixed, it is only necessary to make the driving mechanism 2 of the locking device 100 drive the clamping jaw 15 to extend outward, so that the clamping jaw 15 is in an extended state, and the driving mechanism 2 continues to drive the clamping jaw 15 to move along the top surface of the abutment block 13, and the clamping jaw 15 can contact the fixed rod 203 on the lower end surface of the rotating fixed block 202, so that the clamping jaw 15 can extend and move. During the process of moving, the rotating fixed block 202 is driven to rotate through the fixed rod 203, thereby overcoming the elastic force of the spring of the spring reset pin 205, so that one end of the rotating fixed block 202 is away from the fixed surface 201 of the film expansion device 200 body, thereby being able to unlock the film expansion device 200. Among them, the sensor detection pin 204 on the lower side of the rotating fixed block 202 cooperates with the proximity sensor 5 of the locking device 100. When the rotating fixed block 202 rotates and aligns the sensor detection pin 204 with the proximity sensor 5 of the locking device 100, the rotation position of the rotating fixed block 202 can be detected by the proximity sensor 5, thereby realizing automatic detection of unlocking of the film expansion device 200, and then the opening and closing signal of the clamping jaw 15 can be received through the proximity sensor 5.

[0046] In summary, the locking device boasts a simple structure, convenient operation, and the ability to achieve efficient locking and automatic detection within confined spaces. Using only a single cylinder, the locking device achieves both extended unlocking and inward locking of the jaws in a compact space. It also integrates automatic detection of the jaw's open and closed state, thereby ensuring stable operation of the fixed film expansion device while improving the automation level and production efficiency of the chip picking process.

[0047] This document uses specific examples to illustrate the principles and implementation methods of the present invention. The description of the above examples is only intended to help understand the method and core concept of the present invention. It should be noted that for those skilled in the art, without departing from the principles of the present invention, various improvements and modifications can be made to the present invention, and such improvements and modifications also fall within the scope of protection of the claims of the present invention. Therefore, the scope of protection of this utility model patent shall be based on the appended claims.

Claims

1. A locking device, characterized in that: It includes a base and a driving mechanism fixedly connected to the base, the driving mechanism is drivably connected to two first sliders, the driving mechanism is used to drive the two first sliders to move toward or away from each other, and each first slider is fixedly connected to a connecting plate; two symmetrically arranged inclined surfaces are provided on the side of the base away from the driving mechanism, each of the inclined surfaces is slidably connected to a mounting seat, and the mounting seat is rotatably connected to a clamping claw; the connecting plate is provided with a waist-shaped hole, the mounting seat is fixedly connected to a connecting shaft, and the connecting shaft is slidably connected to the waist-shaped hole.

2. A locking device according to claim 1, characterized in that: It also includes an abutment block fixedly connected to the inclined surface, and the abutment block is configured to be able to abut against the clamping claw; a rounded corner is provided on the side where the two abutment blocks are close to each other, and the two abutment blocks are symmetrically arranged.

3. A locking device according to claim 2, characterized in that: A boss is provided at a middle position of the base away from the driving mechanism, and the two inclined surfaces are symmetrically arranged about the boss.

4. A locking device according to claim 3, characterized in that: The inclined surface is arranged upwardly from the side close to the boss to the side away from the boss; the upper end surface of the abutment block is inclined with the inclined surface, and the upper end surface of the abutment block is arranged upwardly from the side close to the boss to the side away from the boss.

5. A locking device according to claim 4, characterized in that: The inclined surface is fixedly connected to a guide rail, a second slider is slidably connected to the guide rail, the mounting seat is fixedly connected to the second slider, and the bottom of the clamp is rotatably connected to the top of the mounting seat through a shaft.

6. A locking device according to claim 5, characterized in that: A fixing block is fixedly connected to one side of the bottom of the mounting seat, a return spring is provided on the periphery of the connecting shaft between the mounting seat and the connecting plate, and a fixing pin is fixedly connected to the side of the clamp facing the connecting plate, one end of the return spring is fixedly connected to the fixing block, and the other end is fixedly connected to the fixing pin of the clamp.

7. A locking device according to claim 6, characterized in that: A fixing hole is provided at the bottom of the fixing block, and one end of the return spring is fixed in the fixing hole of the fixing block.

8. The locking device according to claim 6, characterized in that: A groove is provided on the outer periphery of the fixing pin, and the other end of the return spring is wound around and fixed in the groove of the fixing pin.

9. The locking device according to claim 1, characterized in that: Both sides of the base are fixedly connected with mounting bases, and proximity sensors are installed in the mounting bases.

10. A locking device according to any one of claims 1 to 9, characterized in that: The driving mechanism is a bidirectional sliding cylinder.

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