Device for automatically adjusting pressure

Abstract

The utility model discloses an automatic pressure regulating device which comprises a high-precision electric control pressure valve, a pressure valve servo motor and an upper computer, and the pressure valve servo motor is fixedly connected with a handle of the high-precision electric control pressure valve. The upper computer is connected with the pressure valve servo motor through a data line, and the upper computer is used for controlling operation of the pressure valve servo motor. Due to the fact that the pressure valve servo motor is designed and fixedly connected with the handle of the high-precision electric control pressure valve, the opening and closing degree of the high-precision electric control pressure valve can be controlled through the pressure valve servo motor, and it is guaranteed that the pressure difference between the front end and the rear end of the gas mass flow controller is not too small or too large; therefore, the micro flow can be measured accurately.

Description

Technical Field

[0001] The utility model belongs to the technical field of pressure regulation, and in particular relates to a device for automatically regulating pressure. Background Art

[0002] Low-flow gases are often used in scientific research experiments in fields such as new materials, chemistry, and national defense. Currently, mass flow controllers (MFCs) are commonly used to detect and control low-flow gases. When the pressure differential between the front and rear ends of a MFC is stable, the valve can automatically adjust after the flow rate is set.

[0003] However, these working conditions are not static, but complex and changeable. Therefore, constant adjustments are often required to find the best process conditions and keep the system in a stable operating environment.

[0004] Especially in processes where the buffer tank requires pre-pressurization, when the pressure at the front end of the gas mass flow controller is fixed, the pressure at the back end will continue to rise during operation, resulting in an unstable pressure differential range between the front and back ends of the gas mass flow controller. If the pressure differential between the front and back ends of the gas mass flow controller is too small, it will lead to inaccurate measurement of small flow rates. However, if the pressure differential is too large, it will prevent the relevant control valve from opening, resulting in unstable system operation. Utility Model Content

[0005] The purpose of this utility model is to provide a device for automatically adjusting pressure to solve the problem that the pressure difference between the front and rear ends of the current gas mass flow controller is too small, which will lead to inaccurate measurement of small flow rates, and when the pressure difference is too large, it will lead to the inability to open the relevant control valve and cause unstable system operation.

[0006] In order to solve the above problems, the utility model provides a device for automatically adjusting pressure, comprising a high-precision electrically controlled pressure valve, a pressure valve servo motor and a host computer, wherein the pressure valve servo motor is fixedly connected to the handle of the high-precision electrically controlled pressure valve;

[0007] The upper computer is connected to the pressure valve servo motor via a data line, and the upper computer is used to control the operation of the pressure valve servo motor.

[0008] Furthermore, the outlet of the high-precision electronically controlled pressure valve is connected to the inlet of the ball valve in front of the controller through a pipeline; the outlet of the high-precision electronically controlled pressure valve is also connected to the pressure sensor in front of the controller through a pipeline.

[0009] Furthermore, the outlet of the controller front ball valve is connected to the inlet of the gas mass flow controller through a pipeline.

[0010] Furthermore, the outlet of the gas mass flow controller is connected to the inlet of the ball valve behind the controller through a pipeline.

[0011] Furthermore, the outlet of the ball valve behind the controller is connected to the inlet of the check valve through a pipeline, and the outlet of the check valve is connected to the gas storage device through a pipeline.

[0012] Furthermore, the outlet of the controller rear ball valve is also connected to the controller rear pressure sensor through a pipeline, and the controller rear pressure sensor is also connected to the inlet of the check valve through a pipeline.

[0013] Furthermore, the inlet of the controller front ball valve is also connected to the controller needle valve, the inlet of the controller needle valve is connected to the inlet of the controller front ball valve through a pipeline, and the outlet of the controller needle valve is connected to the controller rear ball valve.

[0014] Furthermore, a motor reducer is provided between the high-precision electronically controlled pressure valve and the pressure valve servo motor. The motor reducer is fixedly connected to the motor, and the motor reducer is fixedly connected to the handle of the high-precision electronically controlled pressure valve.

[0015] Furthermore, the controller front pressure sensor and the controller rear pressure sensor are also connected to the host computer via a data line. The host computer is used to obtain pressure data of the controller front pressure sensor and the controller rear pressure sensor to determine whether pressure adjustment is required.

[0016] The beneficial effect of the automatic pressure adjustment device provided by the utility model is that, compared with the prior art, since a pressure valve servo motor is designed and the pressure valve servo motor is fixedly connected to the handle of the high-precision electronically controlled pressure valve, the opening and closing degree of the high-precision electronically controlled pressure valve can be controlled by the pressure valve servo motor, thereby ensuring that the pressure difference between the front and rear ends of the gas mass flow controller is not too small or too large, that is, it is always within a reasonable range, thereby making the measurement of small flow accurate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is an overall schematic diagram of the device for automatically adjusting pressure.

[0018] Icon: 1-high-precision electronically controlled pressure valve, 2-pressure valve servo motor, 3-ball valve in front of controller, 4-pressure sensor in front of controller, 5-gas mass flow controller, 6-ball valve in back of controller, 7-check valve, 8-gas storage device, 9-pressure sensor in back of controller, 10-needle valve in controller, 11-host computer, 12-motor reducer. DETAILED DESCRIPTION

[0019] In order to better understand the purpose, structure and function of this utility model, Figure 1 , a device for automatically adjusting pressure of the utility model is further described in detail.

[0020] like Figure 1As shown, an automatic pressure regulating device of an embodiment of the utility model includes a high-precision electrically controlled pressure valve 1 and a pressure valve servo motor 2. Since the pressure of a small flow of gas needs to be controlled, a high-precision electrically controlled pressure valve 1 is used. In one embodiment, the pressure valve servo motor 2 is fixedly connected to the handle on the high-precision electrically controlled pressure valve 1; in another embodiment, a motor reducer 12 is further provided between the high-precision electrically controlled pressure valve 1 and the pressure valve servo motor 2. The motor reducer 12 is not only fixedly connected to the motor, but also fixedly connected to the handle of the high-precision electrically controlled pressure valve 1. The purpose of providing the motor reducer 12 is to reduce the speed at which the rotation speed of the pressure valve servo motor 2 is transmitted to the high-precision electrically controlled pressure valve 1, reduce the impact on the high-precision electrically controlled pressure valve 1, and make the rotation speed of the handle on the high-precision electrically controlled pressure valve 1 within a reasonable range.

[0021] In this utility model, the outlet of the high-precision electronically controlled pressure valve 1 is connected to the inlet of the controller's front ball valve 3 via a pipeline. Furthermore, the outlet of the high-precision electronically controlled pressure valve 1 is also connected to the controller's front pressure sensor 4 via a pipeline. Simultaneously, the outlet of the controller's front ball valve 3 is also connected to the inlet of the gas mass flow controller 5 via a pipeline. Therefore, during operation, the controller's front pressure sensor 4 can obtain the pressure intensity at the inlet of the gas mass flow controller 5.

[0022] It can be understood that the outlet of the gas mass flow controller 5 is connected to the inlet of the controller rear ball valve 6 through a pipeline, and the outlet of the controller rear ball valve 6 is connected to the inlet of the check valve 7 through a pipeline. Finally, the outlet of the check valve 7 is connected to the gas storage device 8 through a pipeline. The check valve can prevent the gas in the gas storage device 8 from flowing back into the controller rear ball valve 6 or even the gas mass flow controller 5 after the gas delivery is completed. Avoid causing damage to these devices. The outlet of the controller rear ball valve 6 is also connected to the controller rear pressure sensor 9 through a pipeline, and the controller rear pressure sensor 9 is also connected to the inlet of the check valve 7 through a pipeline. Similarly, the controller rear pressure sensor 9 can obtain the pressure intensity of the gas mass flow controller 5 at the outlet end.

[0023] In one embodiment, the inlet of the controller front ball valve 3 is also connected to the controller needle valve 10, the inlet of the controller needle valve 10 is connected to the inlet of the controller front ball valve 3 through a pipeline, and the outlet of the controller needle valve 10 is connected to the controller rear ball valve 6.

[0024] In the present invention, a host computer 11 is further provided, which is used to detect the pressure value of the pressure sensor to control the pressure valve servo motor 2. The host computer 11 is connected to the controller front pressure sensor 4, the controller rear pressure sensor 9 and the pressure valve servo motor 2 through a data line.

[0025] During use, the system inflates the gas storage device 8. As the inflation progresses, the pressure of the gas storage device 8 will gradually increase, that is, the pressure at the outlet of the controller rear ball valve 6 will gradually increase. At this time, the host computer 11 reads the pressure values ​​of the controller front pressure sensor 4 and the controller rear pressure sensor 9 in real time during the monitoring process. When it is found that the value of the controller rear pressure sensor 9 is higher than the value of the controller front pressure sensor 4 and exceeds the reasonable range, the host computer 11 will send a command to the pressure valve servo motor 2, so that the pressure valve servo motor 2 drives the handle of the high-precision electronically controlled pressure valve 1 to rotate a certain angle.

[0026] Taking the CS200D gas mass flow controller as an example, the pressure difference before and after the gas mass flow controller 5 needs to meet 0.05-0.35Mpa for accurate measurement, that is, when the pressure value of the controller rear ball valve 6 is 0, the pressure value of the controller front ball valve 3 is 0.3Mpa. When the system inflates the rear storage tank, as time goes by, the value of the controller rear ball valve 6 will continue to rise. When the pressure of the controller rear ball valve 6 is greater than 0.35Mpa, the CS200D mass flow controller will have inaccurate measurement and control. At this time, it is necessary to increase the PT101 pressure so that the pressure difference between the controller front ball valve 3 and the controller rear ball valve 6 is maintained within the range of 0.05-0.35Mpa before it can continue to be used. As the controller rear ball valve 6 continues to rise, it is necessary to continuously increase the pressure value of the controller front ball valve 3.

[0027] In the present invention, one rotation of the handle of the high-precision electronically controlled pressure valve 1 is divided into several equal parts, that is, 360 degrees is divided into several equal parts. Therefore, each movement of the pressure valve servo motor 2 will drive the handle of the high-precision electronically controlled pressure valve 1 to rotate a certain angle, thereby accurately controlling the rotation angle of the handle of the high-precision electronically controlled pressure valve 1, thereby controlling the change range of the high-precision electronically controlled pressure valve, and avoiding uneven or even uncontrollable rotation angle of the handle of the high-precision electronically controlled pressure valve 1.

[0028] For example, one rotation of the handle of the high-precision electronically controlled pressure valve 1 is divided into 360 adjustment gears, and the pressure valve servo motor 2 rotates 360 circles. After deceleration, the handle of the high-precision electronically controlled pressure valve 1 rotates one circle, and the servo motor rotates one circle, then the valve stem only rotates one adjustment gear.

[0029] Similarly, if the host computer 11 detects that the pressure difference between the controller front pressure sensor 4 and the controller rear pressure sensor 9 is less than a reasonable range, the host computer 11 will also control the pressure valve servo motor 2 to drive the handle of the high-precision electronically controlled pressure valve 1 to adjust the pressure. This ensures that the pressure difference between the controller front pressure sensor 4 and the controller rear pressure sensor 9 is always within a reasonable range, thereby ensuring the normal operation of the gas mass flow controller 5.

[0030] If it is necessary to adjust the accuracy of the angle of each rotation of the handle of the high-precision electronically controlled pressure valve 1 , this can be achieved by replacing the pressure valve servo motor 2 .

[0031] In the present invention, a check valve 7 is also provided, the inlet of which is connected to the outlet of the controller rear ball valve 6 via a pipe; at the same time, the outlet of the check valve 7 is also connected to the gas storage device 8 via a pipe. This design prevents gas backflow caused by the gas pressure in the gas storage device 8 exceeding the pressure at the inlet of the controller rear ball valve 6 after gas supply to the gas storage device 8 is stopped, thereby preventing damage to the gas mass flow controller 5.

[0032] In one embodiment, the inlet of the controller front ball valve 3 is also connected to a controller needle valve 10. The inlet of the controller needle valve 10 is connected to the inlet of the controller front ball valve 3 via a pipeline, and the outlet of the controller needle valve 10 is connected to the controller rear ball valve 6. The purpose of this design is to input some pressure into the gas storage device 8 in advance to ensure normal operation of the equipment.

[0033] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of protection of the present invention.

Claims

1. A device for automatically adjusting pressure, characterized in that: It comprises a high-precision electrically controlled pressure valve (1), a pressure valve servo motor (2) and a host computer (11), wherein the pressure valve servo motor (2) is fixedly connected to a handle of the high-precision electrically controlled pressure valve (1); The host computer (11) is connected to the pressure valve servo motor (2) via a data line, and the host computer (11) is used to control the operation of the pressure valve servo motor (2).

2. The automatic pressure regulating device according to claim 1, characterized in that: The outlet of the high-precision electrically controlled pressure valve (1) is connected to the inlet of the controller front ball valve (3) through a pipeline; the outlet of the high-precision electrically controlled pressure valve (1) is also connected to the controller front pressure sensor (4) through a pipeline.

3. The automatic pressure regulating device according to claim 2, characterized in that: The outlet of the controller front ball valve (3) is connected to the inlet of the gas mass flow controller (5) through a pipeline.

4. The automatic pressure regulating device according to claim 3, characterized in that: The outlet of the gas mass flow controller (5) is connected to the inlet of the controller rear ball valve (6) through a pipeline.

5. The automatic pressure regulating device according to claim 4, characterized in that: The outlet of the controller rear ball valve (6) is connected to the inlet of the check valve (7) through a pipeline, and the outlet of the check valve (7) is connected to the gas storage device (8) through a pipeline.

6. The automatic pressure regulating device according to claim 5, characterized in that: The outlet of the controller rear ball valve (6) is also connected to the controller rear pressure sensor (9) through a pipeline, and the controller rear pressure sensor (9) is also connected to the inlet of the check valve (7) through a pipeline.

7. The automatic pressure regulating device according to claim 6, characterized in that: The inlet of the controller front ball valve (3) is also connected to a controller needle valve (10), the inlet of the controller needle valve (10) is connected to the inlet of the controller front ball valve (3) through a pipeline, and the outlet of the controller needle valve (10) is connected to the controller rear ball valve (6).

8. The automatic pressure regulating device according to claim 2, characterized in that: A motor reducer (12) is further provided between the high-precision electrically controlled pressure valve (1) and the pressure valve servo motor (2); the motor reducer (12) is fixedly connected to the motor; and the motor reducer (12) is fixedly connected to the handle of the high-precision electrically controlled pressure valve (1).

9. The automatic pressure regulating device according to claim 8, characterized in that: The controller front pressure sensor (4) and the controller rear pressure sensor (9) are also connected to the host computer (11) via a data line. The host computer (11) is used to obtain pressure data of the controller front pressure sensor (4) and the controller rear pressure sensor (9) to determine whether pressure regulation is to be performed.

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