Graphite plate deviation rectifying mechanism

Abstract

The utility model relates to the technical field of semiconductors, in particular to a graphite disc deviation rectifying mechanism which comprises a deviation rectifying table used for bearing a graphite disc, a deviation rectifying driving mechanism in driving connection with the deviation rectifying table, a deviation rectifying annular light source and a deviation rectifying collector, and the deviation rectifying driving mechanism is used for driving the deviation rectifying table to move along the X axis and the Y axis and enabling the deviation rectifying table to rotate. The deviation rectifying annular light source is located between the deviation rectifying table and the deviation rectifying collector, and the deviation rectifying collector corresponds to the deviation rectifying annular light source; the position and the angle of the graphite plate can be adjusted smoothly, so that the fitting precision of the graphite plate can reach the standard smoothly, high-precision and high-efficiency graphite plate positioning and edge searching are realized, the compatibility is high, and the use cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, in particular to a graphite disk deviation correction mechanism. Background Art

[0002] Wafers need to go through hundreds of processes on the semiconductor production line. In order to ensure the quality of the wafers in each process, the wafers need to be continuously edge-finding, origin-finding, and positioning.

[0003] With advancements in semiconductor manufacturing processes, the graphite discs bonded to wafers also require continuous edge detection, origin detection, and positioning. This significantly increases the demand for positioning accuracy and edge detection efficiency of the deflection correction mechanism. Existing deflection correction mechanisms are prone to angular position deviations of the graphite discs, resulting in substandard bonding accuracy, making it difficult to achieve high-precision and efficient graphite disc positioning and edge detection. This leads to poor compatibility and increased cost of use. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a graphite disk correction mechanism, which smoothly adjusts the position and angle of the graphite disk so that the fitting accuracy of the graphite disk meets the standard smoothly, realizes high-precision and high-efficiency graphite disk positioning and edge finding, has strong compatibility, and reduces use costs.

[0005] In order to solve the above technical problems, the present invention adopts the following technical solutions:

[0006] The utility model provides a graphite disc deflection correction mechanism, comprising a deflection correction platform for carrying the graphite disc, a deflection correction drive mechanism connected to the deflection correction platform, a deflection correction ring light source, and a deflection correction collector. The deflection correction drive mechanism is used to drive the deflection correction platform to move along the X-axis and the Y-axis and to make the deflection correction platform rotate. The deflection correction ring light source is located between the deflection correction platform and the deflection correction collector, and the deflection correction collector corresponds to the deflection correction ring light source.

[0007] When the graphite disk is edge-finding, the graphite disk is placed on the deflection correction table, the deflection correction ring light source provides fill light for the graphite disk, the deflection correction collector takes visual photos to determine the position and angle of the graphite disk, and the deflection correction drive mechanism drives the deflection correction table to move along the X-axis and / or Y-axis according to the data obtained by the deflection correction collector, and causes the deflection correction table to rotate, thereby adjusting the position and angle of the graphite disk to achieve precise positioning of the graphite disk.

[0008] Among them, the graphite disk correction mechanism also includes a correction bracket, the correction bracket is connected to a correction slide for sliding up and down, the correction ring light source is installed on the correction slide, and a locking part is connected between the correction bracket and the correction slide. When the correction slide slides to the desired position, the locking part locks the correction slide and the correction bracket.

[0009] Among them, the correction drive mechanism includes a correction X-axis module, a correction Y-axis module drivingly connected to the correction X-axis module, and a correction rotation unit drivingly connected to the correction Y-axis module. The correction X-axis module drives the correction Y-axis module to move along the X-axis, and the correction Y-axis module drives the correction rotation unit to move along the Y-axis. The correction rotation unit is drivingly connected to the correction table, and the correction rotation unit is used to drive the correction table to rotate.

[0010] The deflection correction rotating unit is provided with a protective cover, the deflection correction driving mechanism is located inside the protective cover, an adjustment port is provided at the top of the protective cover, and the deflection correction platform is provided through the adjustment port.

[0011] The graphite disc deflection correction mechanism further comprises at least two laser sensors, and the laser sensors are used to detect whether a graphite disc is placed on the deflection correction platform.

[0012] Beneficial effects of the utility model:

[0013] In actual application, the graphite disk is placed on the deflection correction table, the deflection correction ring light source provides supplementary light for the graphite disk, the deflection correction collector takes visual photos to determine the position and angle of the graphite disk, and the deflection correction drive mechanism drives the deflection correction table to move along the X-axis and / or Y-axis according to the data obtained by the deflection correction collector, and causes the deflection correction table to rotate, thereby adjusting the position and angle of the graphite disk, so that the fitting accuracy of the graphite disk can be smoothly met, realizing high-precision and high-efficiency graphite disk positioning and edge finding, strong compatibility, and reduced use costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 This is a schematic diagram of the three-dimensional structure of the graphite disk correction mechanism.

[0015] Figure 2 It is a structural diagram of the correction bracket and the correction ring light source.

[0016] Figure 3 It is a schematic diagram of the three-dimensional structure of the correction drive mechanism.

[0017] Figure 4 This is an exploded view of the correction rotating unit, protective cover and correction platform.

[0018] Figure 5 Schematic diagram of the explosion structure with laser sensor, correction platform and graphite disk.

[0019] 01. Graphite plate;

[0020] 11. Correction station;

[0021] 12. Deviation correction drive mechanism;

[0022] 121. X-axis deviation correction module; 122. Y-axis deviation correction module; 123. Deflection correction rotation unit;

[0023] 1231, protective cover; 1232, adjustment port;

[0024] 13. Deviation correction ring light source; 14. Deviation correction collector.

[0025] 2. Correction bracket; 3. Correction slide; 4. Locking piece;

[0026] 5. Laser sensor. DETAILED DESCRIPTION

[0027] To facilitate understanding by those skilled in the art, the present invention is further described below with reference to examples and drawings. Specific implementation methods of the present invention will be described below. It should be noted that in the specific description of these implementation methods, for the sake of clarity and clarity, it is impossible for this specification to provide a detailed description of all features of the actual implementation methods.

[0028] refer to Figures 1 to 5 As shown, the utility model provides a graphite disk correction mechanism, including a correction platform 11 for carrying a graphite disk 01, a correction driving mechanism 12 driven and connected to the correction platform 11, a correction ring light source 13 and a correction collector 14, the correction driving mechanism 12 is used to drive the correction platform 11 to move along the X-axis and the Y-axis, and to make the correction platform 11 rotate, the correction ring light source 13 is located between the correction platform 11 and the correction collector 14, and the correction collector 14 corresponds to the correction ring light source 13.

[0029] refer to Figure 1 As shown, in actual application, when the graphite disk 01 is edge-finding, the graphite disk 01 is placed on the deflection correction table 11, the deflection correction ring light source 13 provides fill light for the graphite disk 01, and the deflection correction collector 14 visually takes pictures to determine the position and angle of the graphite disk 01. The deflection correction drive mechanism 12 drives the deflection correction table 11 to move along the X-axis and / or Y-axis according to the data obtained by the deflection correction collector 14, and causes the deflection correction table 11 to rotate, thereby adjusting the position and angle of the graphite disk 01, so that the fitting accuracy of the graphite disk 01 is successfully met, thereby realizing high-precision and high-efficiency positioning and edge-finding of the graphite disk 01, strong compatibility, and reduced use costs.

[0030] refer to Figure 2When the cam 3 is in the upright position, the cam 3 is in the upright position, and the cam 3 is in the upright position, so that the cam 3 and the guide rail 3 are in the upright position, and the guide rail 3 is in the upright position.

[0031] refer to Figure 3 As shown, in this embodiment, the correction drive mechanism 12 includes a correction X-axis module 121, a correction Y-axis module 122 driven and connected to the correction X-axis module 121, and a correction rotation unit 123 driven and connected to the correction Y-axis module 122. The correction X-axis module 121 and the correction Y-axis module 122 are linear motors, cylinders or electric cylinders, and the correction rotation unit 123 is a servo motor or a drive motor. The correction X-axis module 121 drives the correction Y-axis module 122 to move along the X-axis, and the correction Y-axis module 122 drives the correction rotation unit 123 to move along the Y-axis. The correction rotation unit 123 is driven and connected to the correction table 11. The correction rotation unit 123 is used to drive the correction table 11 to rotate, realize the X-axis and / or Y-axis movement of the correction table 11, and meet the rotation requirements of the correction table 11, which is conducive to adjusting the position and angle of the correction table 11.

[0032] refer to Figure 4 As shown, in this embodiment, the deflection correction rotation unit 123 is installed with a protective cover 1231, the deflection correction drive mechanism 12 is located in the protective cover 1231, and an adjustment port 1232 is provided at the top of the protective cover 1231. The deflection correction platform 11 is passed through the adjustment port 1232, and the deflection correction drive mechanism 12 is hidden in the protective cover 1231, which effectively protects the deflection correction drive mechanism 12. When the deflection correction platform 11 moves, it moves smoothly in the adjustment port 1232, thereby ensuring the normal movement of the deflection correction platform 11.

[0033] refer to Figure 1 、 5As shown, in this embodiment, the graphite disk correction mechanism further includes at least two laser sensors 5, and the laser sensors 5 are used to detect whether the graphite disk 01 is placed on the correction platform 11; in actual application, the laser sensor 5 detects in the placement space of the graphite disk 01, and when the graphite disk 01 is located on the correction platform 11, the value obtained by the laser sensor 5 reaches a predetermined value, and the correction drive mechanism 12 can drive the correction platform 11 to move along the X-axis and / or Y-axis, and make the correction platform 11 rotate, which is conducive to adjusting the position and angle of the correction platform 11. When the graphite disk 01 is not located on the correction platform 11, the value obtained by the laser sensor 5 does not meet the predetermined value, and the correction drive mechanism 12 is used. The robot places the graphite disk 01 on the correction table 11 to meet the placement and detection requirements of the graphite disk 01; specifically, during the rotation of the graphite disk 01, the laser sensor 5 can completely collect the distance between it and the surface of the graphite disk 01. During the rotation of the graphite disk 01, the two laser sensors 5 can obtain information from at least three collection points on the graphite disk 01, and fit the three collection points to form a fitting plane. The end face deviation range of the fitting plane can be directly known, and whether the surface of the graphite disk 01 is locally warped can be detected, thereby successfully realizing the flatness detection of the graphite disk 01. The structural design is ingenious, which improves the detection accuracy of the graphite disk 01.

[0034] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention is disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with the profession can make some changes or modifications to equivalent embodiments of the above-disclosed technical contents without departing from the scope of the technical solution of the present invention. However, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technology of the present invention, which do not depart from the content of the technical solution of the present invention, are within the scope of the technical solution of the present invention.

Claims

1. A graphite disc correction mechanism, characterized in that: The invention comprises a deflection correction platform (11) for carrying a graphite disk (01), a deflection correction driving mechanism (12) drivingly connected to the deflection correction platform (11), a deflection correction annular light source (13) and a deflection correction collector (14), wherein the deflection correction driving mechanism (12) is used to drive the deflection correction platform (11) to move along an X-axis and a Y-axis and to make the deflection correction platform (11) rotate, the deflection correction annular light source (13) is located between the deflection correction platform (11) and the deflection correction collector (14), and the deflection correction collector (14) corresponds to the deflection correction annular light source (13); When the graphite disk (01) is edge-finding, the graphite disk (01) is placed on the deflection correction platform (11), the deflection correction ring light source (13) provides supplementary light to the graphite disk (01), the deflection correction collector (14) visually photographs to determine the position and angle of the graphite disk (01), and the deflection correction drive mechanism (12) drives the deflection correction platform (11) to move along the X-axis and / or the Y-axis according to the data obtained by the deflection correction collector (14), and causes the deflection correction platform (11) to rotate, thereby adjusting the position and angle of the graphite disk (01) and realizing accurate positioning of the graphite disk (01).

2. The graphite disc correction mechanism according to claim 1, characterized in that: The graphite disk correction mechanism also includes a correction bracket (2), the correction bracket (2) is connected to a correction slide (3) in an up-and-down sliding manner, the correction ring light source (13) is installed on the correction slide (3), and a locking member (4) is connected between the correction bracket (2) and the correction slide (3), and when the correction slide (3) slides to a desired position, the locking member (4) locks the correction slide (3) and the correction bracket (2).

3. The graphite disc correction mechanism according to claim 1, characterized in that: The deflection correction drive mechanism (12) comprises a deflection correction X-axis module (121), a deflection correction Y-axis module (122) drivingly connected to the deflection correction X-axis module (121), and a deflection correction rotation unit (123) drivingly connected to the deflection correction Y-axis module (122); the deflection correction X-axis module (121) drives the deflection correction Y-axis module (122) to move along the X-axis; the deflection correction Y-axis module (122) drives the deflection correction rotation unit (123) to move along the Y-axis; the deflection correction rotation unit (123) is drivingly connected to the deflection correction platform (11); and the deflection correction rotation unit (123) is used to drive the deflection correction platform (11) to rotate.

4. The graphite disc correction mechanism according to claim 3, characterized in that: The deflection correction rotation unit (123) is installed with a protective cover (1231), the deflection correction drive mechanism (12) is located in the protective cover (1231), an adjustment port (1232) is provided at the top end of the protective cover (1231), and the deflection correction platform (11) is passed through the adjustment port (1232).

5. The graphite disc deviation correction mechanism according to claim 1, characterized in that: The graphite disc deflection correction mechanism further comprises at least two laser sensors (5), and the laser sensors (5) are used to detect whether a graphite disc (01) is placed on the deflection correction platform (11).

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