Single crystal furnace provided with heat preservation assembly and used for monocrystalline silicon production

Abstract

The utility model discloses a single crystal furnace for monocrystalline silicon production with a heat preservation component, which relates to the field of monocrystalline silicon production and comprises a lower furnace body, an upper furnace body is arranged at the top of the lower furnace body and connected with the lower furnace body through bolts, a heat preservation ring is arranged between the upper furnace body and the lower furnace body, and a driving base is arranged at the bottom of the lower furnace body. Six heat preservation assemblies are arranged in the lower furnace body, fixing assemblies are arranged in the middles of the peripheries of the heat preservation assemblies, guide grooves matched with the fixing assemblies are formed in the peripheries of the heat preservation assemblies, crucibles are arranged in the heat preservation assemblies, and the heat preservation assemblies comprise lower heat preservation blocks fixed to the lower side of the inner wall of the lower furnace body. According to the single crystal furnace thermal insulation device, the abutting block, the lead screw, the adjusting ring, the adjusting hole, the fixing ring and other components are matched, so that thermal insulation assemblies can be installed on boilers of different sizes, the installation efficiency of the thermal insulation assemblies is improved, and the thermal insulation effect of the single crystal furnace is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of single crystal silicon production, in particular to a single crystal furnace provided with a heat preservation component for single crystal silicon production. Background Art

[0002] A single crystal silicon furnace equipped with a thermal insulation component is a single crystal silicon furnace specifically designed to maintain a stable temperature and reduce heat loss. This component is typically made of materials with excellent thermal insulation properties, such as specialized high-temperature-resistant fibers and insulating bricks. It is carefully designed and installed inside or outside the single crystal furnace to form an effective thermal barrier.

[0003] After searching, the existing Chinese patent announcement number is: CN215209690U, which provides a single crystal furnace for the production of single crystal silicon. The patent "includes a furnace body, wherein a crucible assembly, a heating assembly and an insulation assembly are provided in the furnace body, and the insulation assembly includes an internal insulation tube, an external insulation tube and a bottom insulation layer, the external insulation tube is placed on the inner side wall of the furnace body and the external insulation tube is sleeved on the internal insulation tube, the bottom insulation layer is located on the bottom plate of the furnace body, and the surrounding walls of the bottom insulation layer are attached to the internal insulation tube, the heating assembly includes a side heater and a bottom heater, the side heater is located between the crucible assembly and the internal insulation tube, the bottom heater is located between the crucible assembly and the bottom insulation layer, and the side heater and the bottom heater are connected to the graphite electrode through a graphite nut. The utility model can heat the side wall and the bottom of the crucible assembly at the same time during heating, thereby ensuring the quality of the single crystal silicon wafer."

[0004] However, the insulation assembly in the above-mentioned patent cannot be installed on single crystal furnaces of different sizes, thereby failing to ensure the insulation of the single crystal furnace, thereby reducing the insulation effect of the insulation assembly on the single crystal furnace. Utility Model Content

[0005] The purpose of the present utility model is to provide a single crystal furnace for single crystal silicon production provided with a thermal insulation component, so as to solve the problem raised in the above background technology that the thermal insulation component cannot be installed for single crystal furnaces of different sizes, so the thermal insulation of the single crystal furnace cannot be ensured, thereby reducing the thermal insulation effect of the thermal insulation component on the single crystal furnace.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical solution: a single crystal furnace for single crystal silicon production equipped with an insulation component, comprising a lower furnace body, an upper furnace body is arranged on the top of the lower furnace body, and the upper furnace body is connected by bolts, and an insulation ring is arranged between the two, a driving base is arranged at the bottom of the lower furnace body, six groups of insulation components are arranged inside the lower furnace body, a fixing component is arranged in the middle of the outer periphery of the insulation component, and a guide groove matching it is opened on the outer periphery of the insulation component, and a crucible is arranged inside the insulation component.

[0007] Preferably, the insulation component includes a lower insulation block fixed to the lower side of the inner wall of the lower furnace body, an insulation bracket is provided on the top of the lower insulation block, an upper insulation block is provided inside the insulation bracket, the upper and lower parts of the insulation bracket are both provided with limiting blocks, and the upper and lower parts of the insulation bracket are both provided with matching slide grooves, and upper insulation blocks are provided inside the left and right sides of the six groups of insulation brackets, and limiting rods are provided between the limiting blocks.

[0008] Preferably, the fixing assembly includes six groups of sliding blocks, a fixing ring is provided on the outside of the sliding block, a screw rod is provided in the middle of the fixing ring, an adjusting ring is provided on the outer periphery of the middle of the screw rod, an adjusting hole is provided on the outer periphery of the middle of the adjusting ring, a stop block is provided at the opposite end of the screw rod, a limiting block is provided at the adjacent end of the screw rod, and a matching sliding groove is provided inside the sliding block, guide blocks are provided at both ends of the sliding block, and the guide blocks are provided in the limiting grooves provided on the inner side walls of the guide grooves.

[0009] Preferably, the outer side of the abutment block abuts against the inner wall of the lower furnace body, the inner wall of the lower furnace body and the insulation component are filled with thermal insulation foam, and the adjacent sides of the screw rod are rotatably connected to the inside of the sliding block.

[0010] Preferably, the limiting rod is arranged inside the sliding groove opened between the six groups of thermal insulation supports.

[0011] Preferably, the upper furnace body includes a furnace cover, an inner side wall of the furnace cover is provided with a guide tube, and a connecting pipe is provided on the upper side of the furnace cover.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] 1. By adopting the coordination among the components such as the stop block, screw rod, adjusting ring, adjusting hole and fixing ring, it is possible to install the insulation assembly on boilers of different sizes, thereby improving the installation efficiency of the insulation assembly and further improving the insulation effect of the single crystal furnace.

[0014] 2. By coordinating the lower insulation block, insulation bracket, upper insulation block, limit block and limit rod, it is possible to fit the insulation components on the boiler surface for boilers of different functional sizes, thereby improving the insulation effect of the single crystal furnace. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of the utility model;

[0016] Figure 2 This is a schematic diagram of the crucible structure of the utility model;

[0017] Figure 3 This is a schematic diagram of the structure of the sliding block of the utility model;

[0018] Figure 4 This is a schematic diagram of the structure of the limit block of the utility model;

[0019] Figure 5 This is a schematic diagram of the limiting rod structure of the utility model.

[0020] In the figure: 1. Upper furnace body; 11. Guide tube; 12. Furnace cover; 13. Connecting pipe; 2. Lower furnace body; 3. Driving base; 4. Fixing assembly; 41. Stop block; 42. Screw rod; 43. Adjusting ring; 44. Adjusting hole; 45. Fixing ring; 46. Sliding block; 47. Guide block; 48. Limiting block; 401. Guide groove; 402. Limiting groove; 5. Insulation assembly; 51. Lower insulation block; 52. Insulation bracket; 53. Upper insulation block; 54. Limiting block; 55. Limiting rod; 6. Crucible. DETAILED DESCRIPTION

[0021] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] See also Figure 1-5 The utility model provides a technical solution: a single crystal furnace for single crystal silicon production provided with a heat preservation component, comprising a lower furnace body 2, an upper furnace body 1 is provided on the top of the lower furnace body 2, and is connected by bolts, and a heat preservation ring is provided between the two. The cooperation between the upper furnace body 1 and the lower furnace body 2 can be stably fixed together to form a stable main body. A driving base 3 is provided at the bottom of the lower furnace body 2, and the driving base 3 drives the crucible 6 inside the lower furnace body 2 to operate. Six groups of heat preservation components 5 are provided inside the lower furnace body 2, and the heat preservation components 5 have the effect of heat preservation and can adapt to crucibles 6 of different sizes. A fixing component 4 is provided in the middle of the outer periphery of the heat preservation component 5, and the fixing component 4 can stably fit the heat preservation component 5 on the outer periphery of the crucible 6, and a matching guide groove 401 is opened on the outer periphery of the heat preservation component 5. The guide groove 401 has the effect of stably sliding the fixing component 4 up and down, and a crucible 6 is provided inside the heat preservation component 5, and the heat preservation component 5 is installed on the outer periphery of the crucible 6.

[0023] The insulation component 5 includes a lower insulation block 51 fixed to the lower side of the inner wall of the lower furnace body 2, and an insulation bracket 52 is provided on the top of the lower insulation block 51. Six groups of insulation brackets 52 are provided with installation grooves, and upper insulation blocks 53 are provided inside the insulation brackets 52. The upper insulation blocks 53 are installed inside the installation grooves of the insulation brackets 52. The upper and lower parts of the insulation brackets 52 are both provided with limiting blocks 54, and the upper and lower parts of the insulation brackets 52 are both provided with matching slide grooves. By pulling the insulation bracket 52, the limiting blocks 54 are driven to slide inside the slide grooves opened inside the insulation brackets 52, and upper insulation blocks 53 are provided inside the left and right sides of the six groups of insulation brackets 52. A limiting rod 55 is provided between the limiting blocks 54. The limiting rod 55 has a certain elasticity and slides inside the groove opened inside the insulation bracket 52.

[0024] The fixing assembly 4 includes six groups of sliding blocks 46. A fixing ring 45 is provided on the outside of the sliding block 46. The fixing ring 45 is stably connected to the screw rod 42 through a thread and is tightly attached to the inner wall of the lower furnace body 2 at the stop block 41, so that it can be tightly connected and fixed with the screw rod 42 through the fixing ring 45. A screw rod 42 is provided in the middle of the fixing ring 45. The screw rod 42 is driven by the adjusting ring 43 and rotates in the groove opened inside the sliding block 46. An adjusting ring 43 is provided on the outer periphery of the middle of the screw rod 42. The adjusting ring 43 drives the screw rod 42 to rotate. An adjusting hole 4 is provided on the outer periphery of the middle of the adjusting ring 43. 4. The worker uses the adjusting rod to put it into the adjusting hole 44 and drives the adjusting ring 43 to rotate. A stop block 41 is provided at the opposite end of the screw rod 42. The screw rod 42 drives the stop block 41 to rotate. A limit block 48 is provided at the adjacent end of the screw rod 42, and a matching sliding groove is provided inside the sliding block 46. The limit block 48 is rotatably connected to the groove opened inside the sliding block 46, wherein the limit block 48 has a limiting effect. Guide blocks 47 are provided at both ends of the sliding block 46, and the guide blocks 47 are provided in the limit groove 402 opened on the inner wall of the guide groove 401, and the guide blocks 47 are slidably connected inside the limit groove 402.

[0025] The outer side of the block 41 abuts against the inner wall of the lower furnace body 2. The block 41 rotates through the screw rod 42, thereby driving the outer side of the block 41 to abut against the inner wall of the lower furnace body 2. The inner wall of the lower furnace body 2 and the insulation component 5 are filled with thermal insulation foam. High-temperature resistant thermal insulation foam is selected. It can be compressed and filled when fine-tuning the fixing component 4 to effectively block heat transfer. The adjacent sides of the screw rod 42 are rotatably connected to the inside of the sliding block 46, and the screw rod 42 is driven to rotate inside the sliding block 46 by the adjustment ring 43.

[0026] The limiting rod 55 is set inside the sliding groove opened between the six groups of heat preservation brackets 52. The limiting rod 55 pulls the heat preservation bracket 52 to both sides, driving the limiting rod 55 to slide inside the groove opened in the heat preservation bracket 52.

[0027] The upper furnace body 1 includes a furnace cover 12 , an inner wall of the furnace cover 12 is provided with a guide tube 11 , which has a diversion effect, and an upper side of the furnace cover 12 is provided with a connecting pipe 13 , which has a connection effect.

[0028] Working principle: When installing the insulation components 5 of single crystal furnaces of different sizes, first install the groove opened by the insulation bracket 52 included in the insulation component 5, and install the upper insulation block 53 inside the groove, wherein the upper insulation block 53 is made of glass fiber, aerogel felt and perlite board, which respectively play a good role in thermal insulation performance and heat resistance, and the cost is relatively low, ultra-low thermal conductivity, is a very efficient thermal insulation material, high strength, good thermal insulation performance effect, and then put the insulation component 5 into the crucible 6 Between the lower furnace body 2, fine adjustment is performed through the fixing assembly 4, wherein the guide blocks 47 fixed on both sides of the sliding block 46 slide inside the limit groove 402, wherein the sliding block 46 slides inside the guide groove 401, and is placed inside the adjustment hole 44 opened on the outer periphery of the adjustment ring 43 through the adjustment rod, and then fine-tuned, thereby driving the screw rod 42 fixed in the middle of the adjustment ring 43 to rotate, thereby driving the block 41 to be close to the inner wall of the lower furnace body 2, and at the same time driving the limit block 48 to slide in the groove opened inside the sliding block 46 Inside, the screw rod 42 is rotated and threadedly connected through the fixing ring 45, and then the fixing assembly 4 is moved to the bottom of the guide groove 401 after fine-tuning, and then the upper, middle and lower parts of the insulation assembly 5 are locked in turn. A scale is provided on the outer peripheral surface of the adjusting ring 43, which is convenient for tightening the distance between each fixing assembly 4, thereby ensuring the uniform pressure of the crucible 6 and improving the insulation efficiency of the insulation assembly 5. Before installing the insulation assembly 5, the lower insulation block 51 is first installed on the lower side of the inner wall of the lower furnace body 2, and the limiting block 54 and the limiting rod 55 sliding on the upper and lower parts of the insulation bracket 52 can adjust the distance between the insulation bracket 52 to better fit the outer periphery of the crucible 6, wherein the limiting rod 55 has a certain elasticity. After the installation is completed and the interior is invisible, the lower furnace body 2 is sealed by the furnace cover 12, wherein the guide tube 11 plays a diversion effect, and the material is input through the connecting pipe 13, wherein the lower furnace body 2 is installed on the top of the driving base 3, wherein the driving base 3 plays a role in stable operation.

[0029] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single crystal furnace for producing single crystal silicon provided with a heat preservation assembly, comprising a lower furnace body (2), characterized in that: The upper furnace body (1) is provided on the top of the lower furnace body (2), and the upper furnace body (1) is connected by bolts, and an insulation ring is provided between the upper furnace body (1). The lower furnace body (2) is provided with a driving base (3) at the bottom. Six groups of insulation components (5) are provided inside the lower furnace body (2). A fixing component (4) is provided in the middle of the outer periphery of the insulation component (5). A guide groove (401) matching the insulation component (5) is provided on the outer periphery. A crucible (6) is provided inside the insulation component (5). The insulation assembly (5) comprises a lower insulation block (51) fixed to the lower side of the inner wall of the lower furnace body (2), a insulation bracket (52) is provided on the top of the lower insulation block (51), an upper insulation block (53) is provided inside the insulation bracket (52), the upper and lower parts of the insulation bracket (52) are both provided with limiting blocks (54), and the upper and lower parts of the insulation bracket (52) are both provided with matching sliding grooves, and the upper insulation blocks (53) are provided inside the left and right sides of the six groups of insulation brackets (52), and limiting rods (55) are provided between the limiting blocks (54).

2. The single crystal furnace for single crystal silicon production equipped with a heat preservation assembly according to claim 1, characterized in that: The fixing assembly (4) includes six groups of sliding blocks (46), a fixing ring (45) is provided on the outside of the sliding block (46), a screw rod (42) is provided in the middle of the fixing ring (45), an adjusting ring (43) is provided on the outer periphery of the middle of the screw rod (42), an adjusting hole (44) is provided on the outer periphery of the middle of the adjusting ring (43), a stop block (41) is provided at the opposite end of the screw rod (42), a limiting block (48) is provided at the adjacent end of the screw rod (42), and a matching sliding groove is provided inside the sliding block (46), a guide block (47) is provided at both ends of the sliding block (46), and the guide block (47) is provided in the limiting groove (402) provided on the inner side wall of the guide groove (401).

3. The single crystal furnace for single crystal silicon production provided with a heat preservation assembly according to claim 2, characterized in that: The outer side of the abutment block (41) abuts against the inner wall of the lower furnace body (2), and the space between the inner wall of the lower furnace body (2) and the insulation component (5) is filled with heat-insulating foam. The adjacent sides of the screw rod (42) are both rotatably connected to the inside of the sliding block (46).

4. The single crystal furnace for single crystal silicon production equipped with a heat preservation assembly according to claim 1, characterized in that: The limiting rod (55) is arranged inside the sliding groove opened between the six groups of heat-insulating brackets (52).

5. The single crystal furnace for single crystal silicon production equipped with a heat preservation assembly according to claim 1, characterized in that: The upper furnace body (1) comprises a furnace cover (12), an inner side wall of the furnace cover (12) is provided with a guide tube (11), and a connecting pipe (13) is provided on the upper side of the furnace cover (12).

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