Heat preservation structure for wet process machine table pipeline

Abstract

The utility model relates to the technical field of pipeline heat preservation, in particular to a heat preservation structure for a wet process machine table pipeline, which comprises a support frame, a mold temperature box, a pipeline and a fixing mechanism, the mold temperature box is placed above the support frame and used for controlling the temperature of heat preservation liquid, and the mold temperature box is connected with the pipeline to input and output the heat preservation liquid. A hard pipe fixing mechanism is arranged on the side of the supporting frame, a lower hard pipe is in bolted connection with a hose, the hose wraps the liquid medicine pipeline, and heat preservation liquid flows around the liquid medicine pipeline through the hose. The fixing mechanism comprises a transverse clamping mechanism and an anti-loosening mechanism for preventing the hard pipe from falling off downwards; the pipeline heat preservation structure has the advantages that heat preservation of liquid medicine in the liquid medicine pipeline can be achieved through heat conduction of heat preservation liquid in the hose by means of mutual matching of the mold temperature box, the hard hose and the fixing structure, and the pipeline heat preservation structure is easy and convenient to use, easy to assemble and disassemble and good in applicability.

Description

Technical Field

[0001] The utility model relates to the technical field of pipeline heat preservation, in particular to a heat preservation structure for wet process machine pipelines. Background Art

[0002] Wet process equipment is a key component of semiconductor manufacturing, used for cleaning wafers and etching away materials. It uses chemical solutions and deionized water, combined with ultrasonic and heating technologies, to effectively remove particles, oxide layers, and metal contamination from the wafer surface. Pipeline insulation devices are important energy-saving devices used to reduce heat loss in piping systems. They maintain a stable temperature within the pipeline by controlling three heat transfer modes: conduction, convection, and radiation.

[0003] The existing Chinese patent document with publication number CN104896261 B discloses a pipeline insulation pipe sleeve, which includes a pipe sleeve body, and an insulation layer is provided on the inner wall of the pipe sleeve body. The pipe sleeve body is mainly composed of two half shells spliced ​​together, and the splicing surfaces of the two half shells are provided with a waterproof structure. The waterproof structure includes two pairs of buckle groups that fit together, each buckle group includes a radial buckle and a radial buckle groove, and the radial buckle and the corresponding radial buckle groove are embedded together. The radial buckle is provided on the splicing surface of one of the half shells, and the corresponding radial buckle groove is provided on the splicing surface of the other half shell.

[0004] The method for heat preservation of pipelines under the above scheme and existing technology is usually to wrap the liquid medicine pipeline with insulation cotton, so that the temperature drop rate of the liquid medicine slows down and the pipeline cannot be actively insulated. To address this problem, the existing method is to use a hose wrapped around the side wall of the liquid medicine pipeline, and there is insulation liquid flowing in the hose, so as to actively insulate the liquid medicine pipeline. However, during the flow of liquid, vibration may cause the hose to detach from the liquid medicine pipeline, affecting the insulation effect, and then affecting the temperature of the liquid medicine, which has an impact on subsequent processes and needs to be optimized.

[0005] To this end, the present invention proposes a pipeline heat preservation device for a wet process machine to solve the above problems. Utility Model Content

[0006] The purpose of the present utility model is to provide a heat preservation structure for the pipeline of a wet process machine to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a heat preservation structure for the pipeline of a wet process machine, comprising a support frame body, a mold temperature box, a pipeline mechanism and a fixing mechanism;

[0008] A mold temperature box is placed on the support frame, and a fixing mechanism is provided on the side of the support frame;

[0009] The pipeline mechanism is connected to the mold temperature box and is fixed by a fixing mechanism.

[0010] Preferably, the pipeline mechanism includes a box bolt structure, a hard pipe, a hose and a pipeline bolt structure; the box bolt structure connects the mold temperature box and the hard pipe through bolts, the hard pipe and the hose are connected using a pipeline bolt structure, and the hose is wrapped around the liquid medicine pipeline.

[0011] Preferably, the fixing mechanism includes a clamping base, fixing screws, anti-loosening screws, anti-loosening nuts, anti-loosening patches, a clamping body and a stabilizing baffle; the clamping base is installed on the support frame body through fixing screws, the anti-loosening screws and anti-loosening nuts fasten the two anti-loosening patches together through bolts, and a stabilizing baffle is provided on the clamping body.

[0012] Preferably, the stabilizing baffle includes an anti-slip paddle, a rotating shaft, a rotating slot, mounting screws and an anti-slip ring; the anti-slip paddle is tightly connected to the rotating shaft, the rotating shaft is arranged in the rotating slot, and the rotating slot is connected to the clamping platform body by mounting screws.

[0013] Preferably, the anti-slip pick is clamped under the anti-slip ring, and the anti-slip ring is arranged on the hard pipe and tightly connected thereto.

[0014] Compared with the existing technology, the beneficial effect of the utility model is: mainly by wrapping the liquid medicine pipeline with a hose, the insulating liquid flowing out of the mold temperature box can actively insulate the liquid medicine pipeline through the hose, providing convenience for the process and meeting the use requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the pipeline insulation structure of the utility model;

[0016] Figure 2 For this utility model Figure 1 A in the middle is an enlarged structural diagram;

[0017] Figure 3 This is a schematic diagram of the fixing mechanism of the utility model;

[0018] Figure 4 It is a schematic diagram of the anti-slip mechanism in the fixing mechanism of the utility model.

[0019] In the figure: support frame body 1, mold temperature box 2, box bolt structure 3, hard pipe 4, hose 5, clamping platform 6, pipeline bolt structure 7, liquid medicine pipeline 8, anti-slip ring 9, clamping platform base 61, fixing screw 62, anti-loosening screw 63, anti-loosening nut 64, anti-loosening patch 65, clamping platform body 66, stabilizing baffle 67, anti-slip pick 671, rotating shaft 672, rotating slot 673, mounting screw 674. DETAILED DESCRIPTION

[0020] In order to clearly and completely describe the purpose and technical solution of the present invention and make its advantages more clearly understood, the following is a further detailed description of the embodiments of the present invention in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are only part of the embodiments of the present invention, not all of them, and are only used to explain the embodiments of the present invention and are not intended to limit the embodiments of the present invention. All other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] Example 1

[0022] See also Figures 1 to 4 The utility model provides a technical solution: an insulation structure for the pipeline of a wet process machine, comprising a support frame body, a mold temperature box, a pipeline mechanism and a fixing mechanism; the mold temperature box is placed on the support frame body, and a fixing mechanism is provided on the side of the support frame; the pipeline mechanism is connected to the mold temperature box and fixed by the fixing mechanism.

[0023] The pipeline mechanism is connected to the mold temperature box 1 and fixed by a fixing mechanism. The pipeline mechanism includes a box bolt structure 3, a hard pipe 4, a hose 5 and a pipeline bolt structure 7; the box bolt structure 3 connects the mold temperature box and the hard pipe 4 by bolts, and the hard pipe 4 and the hose 5 are connected by the pipeline bolt structure 7. The hose 5 is wrapped around the liquid medicine pipeline 8.

[0024] When in use, first install the support frame, place the mold temperature box horizontally on the support frame, connect the hard pipe 4 to the liquid output section of the mold temperature box through the box body bolt structure 3, adjust the position of the hard pipe so that it can be installed in the fixing mechanism, and then connect the lower hose 5 to the hard pipe 4 through the pipeline bolt structure 7, wrap the hose around the liquid medicine pipeline 8, and then return to the mold temperature box from the other side along the same path.

[0025] See also Figures 1 to 3 The fixing mechanism includes a clamping base 61, a fixing screw 62, an anti-loosening screw 63, an anti-loosening nut 64, an anti-loosening patch 65, a clamping base 66 and a stabilizing baffle 67; the clamping base 61 is installed on the support frame body 1 through the fixing screw 62.

[0026] When in use, place the hard tube 4 in the middle of the clamping platform body 66, close the two parts, fix the clamping platform base 61 on the support frame body 1 with the fixing screw 62, and then bolt the anti-loosening screw 63 and the anti-loosening nut 64 through the anti-loosening patch 65.

[0027] See also Figures 3 and 4The stabilizing baffle 67 includes an anti-slip paddle 671, a rotating shaft 672, a rotating slot 673, a mounting screw 674 and an anti-slip ring 9; the anti-slip paddle 671 is tightly connected to the rotating shaft 672, the rotating shaft 672 is arranged in the rotating slot 673, and the rotating slot 673 is connected to the clamping platform body 66 through the mounting screw 674.

[0028] When in use, first place the rotating shaft 672 in the rotating slot 673, and then use the mounting screw 674 to fix the rotating slot 673 to the clamping platform body 66. Since an anti-slip ring 9 is provided above the hard tube 4, when installing the hard tube, it can be installed from bottom to top, and the anti-slip pick 671 is used to press against the anti-slip ring 9 to prevent the hose 5 from driving the hard tube 4 downward during operation, so that the hose 5 cannot wrap the liquid medicine pipeline 8 tightly, affecting the insulation effect.

[0029] Although the embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the present invention, and the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A thermal insulation structure for wet process machine pipelines, characterized by: It comprises a support frame main body (1), a mold temperature box (2), a pipeline mechanism and a fixing mechanism; A mold temperature box (2) is placed on the support frame body (1), and a fixing mechanism is provided on the side of the support frame body (1); The pipeline mechanism is connected to the mold temperature box (2), and the pipeline mechanism is fixed by a fixing mechanism.

2. The heat preservation structure for wet process machine pipeline according to claim 1, characterized in that: The pipeline mechanism comprises a box bolt structure (3), a hard pipe (4), a soft pipe (5) and a pipeline bolt structure (7); the mold temperature box (2) and the hard pipe (4) are connected via the box bolt structure (3), the hard pipe (4) and the soft pipe (5) are connected via the pipeline bolt structure (7), and the soft pipe (5) is tightly wound around the side wall of the liquid medicine pipeline (8).

3. The heat preservation structure for wet process machine pipeline according to claim 1, characterized in that: The fixing mechanism comprises a clamping platform base (61), a fixing screw (62), an anti-loosening screw (63), an anti-loosening nut (64), an anti-loosening patch (65), a clamping platform body (66) and a stabilizing baffle (67); the clamping platform base (61) is mounted on the support frame body (1) via the fixing screw (62).

4. The heat preservation structure for wet process machine pipeline according to claim 3, characterized in that: The anti-loosening screw (63) and the anti-loosening nut (64) are used to fasten the two anti-loosening patches (65) through bolts, and a stabilizing baffle (67) is provided on the clamping platform body (66).

5. The thermal insulation structure for wet process machine pipelines according to claim 3, characterized in that: The stabilizing baffle (67) comprises an anti-slip paddle (671), a rotating shaft (672), a rotating slot (673), a mounting screw (674) and an anti-slip ring (9); the anti-slip paddle (671) is tightly connected to the rotating shaft (672), the rotating shaft (672) is arranged in the rotating slot (673), and the rotating slot (673) is connected to the clamping platform body (66) via the mounting screw (674).

6. The heat preservation structure for wet process machine pipeline according to claim 5, characterized in that: The anti-slip pick (671) is clamped under the anti-slip ring (9), and the anti-slip ring (9) is arranged on the hard tube (4), and the anti-slip ring (9) is tightly connected to the hard tube (4).

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