Vacuum chamber helium detection device

Abstract

The utility model belongs to the technical field of vacuum equipment, and discloses a vacuum chamber helium detection device, which comprises a leak detection vacuum header pipe connected with a helium detector; the plurality of leak detection vacuum branch pipes are connected between the leak detection vacuum header pipe and each vacuum chamber; and the leak detection angle valves are connected between the leak detection vacuum branch pipes and the corresponding vacuum chambers and are used for controlling connection and disconnection between the leak detection vacuum branch pipes and the vacuum chambers. The corrugated pipe does not need to be disassembled and assembled, when any vacuum chamber needs helium detection, the control unit is used for controlling the leak detection angle valve to be opened, so that the helium detector is communicated with the detected vacuum chamber, and then helium detection operation is carried out. As the corrugated pipe does not need to be disassembled and assembled repeatedly and air exhaust and inflation are not needed, the working efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of vacuum equipment, and in particular relates to a helium detection device for a vacuum chamber. Background Art

[0002] A vacuum refers to the absence of any substance in a container (a true vacuum does not exist in real life). A container's state below normal atmospheric pressure is generally referred to as a vacuum state. In the semiconductor industry, a vacuum chamber refers to the vacuum environment container used in semiconductor equipment to manufacture semiconductor chips. Its primary function is to provide a stable vacuum environment for semiconductor processing. Vacuum is required in most semiconductor process equipment. In semiconductor manufacturing, many processes must be performed in a vacuum or extremely low-pressure environment because impurities in the air, such as oxygen, water vapor, and dust, can negatively impact semiconductor devices. Therefore, vacuum chambers are widely used in semiconductor equipment such as photolithography machines, thin film deposition equipment, and ion implantation equipment. The stability and precision of the vacuum chamber in these devices have a significant impact on the manufacturing and performance of semiconductor devices.

[0003] During equipment maintenance, a helium test may be necessary due to an unacceptable leak rate in the vacuum chamber. Helium detectors are used to verify the chamber's tightness. Due to their high sensitivity and accuracy, helium detectors are typically used on containers with high leak resistance levels. The helium detector is securely connected to the vacuum chamber's leak detection valve via a bellows and clamps. If the vacuum chamber does not have a leak detection valve, the chamber must be inflated to atmospheric pressure, connected to the helium detector, and then roughly pumped to a vacuum state. After the rough pumping is complete, the helium test can be performed again. After completing the helium test on one vacuum chamber and testing another, the clamps must be removed and reconnected.

[0004] Because vacuum chambers typically have multiple channels, helium detectors must be reconnected multiple times during helium testing. This requires repeated disassembly and reconnection, making the work tedious and time-consuming. Furthermore, the maintenance space around the machine is limited, making operation difficult and inefficient.

[0005] In view of this, a method for improving the efficiency of helium detection is needed. Utility Model Content

[0006]

Technical Issues

[0007] To solve the above-mentioned problems, the present invention aims to provide a vacuum chamber helium detection device that can perform helium detection operations without disassembling or installing a bellows. This eliminates the need for repeated disassembly of the bellows and the need for pumping and refilling operations, thereby increasing work efficiency.

[0008]

Technical solution

[0009] A vacuum chamber helium detection device, comprising:

[0010] Leak detection vacuum main pipe, connected to the helium detector;

[0011] A plurality of leak detection vacuum branch pipes are connected between the leak detection vacuum main pipe and each vacuum chamber;

[0012] The leak detection angle valve is connected between the leak detection vacuum branch pipe and the corresponding vacuum chamber, and is used to control the on-off between the leak detection vacuum branch pipe and the corresponding vacuum chamber.

[0013] Optionally, one end of any leak detection vacuum branch pipe is connected to the corresponding leak detection angle valve, and the other end is connected to the leak detection vacuum main pipe through a bellows.

[0014] Optionally, a control unit is also included, which includes multiple control medium pipelines and solenoid valves. One end of each control medium pipeline is connected to the corresponding leak detection angle valve control port, and the other end is connected to the solenoid valve. The solenoid valve is used to control the on and off of the control medium pipeline.

[0015] Optionally, the control medium pipeline is filled with compressed air.

[0016] Optionally, the leak detection angle valve of each vacuum chamber has an interlocking structure with the roughing valve and cold pump valve of the vacuum chamber.

[0017] Optionally, the leak detection angle valves between the vacuum chambers have an interlocking structure.

[0018] Optionally, the helium detector is a helium mass spectrometer leak detector.

[0019] Beneficial effects

[0020] (1) There is no need to disassemble or assemble the bellows. When any vacuum chamber requires helium testing, the control unit is used to control the leak detection angle valve to open, thereby connecting the helium detector to the vacuum chamber to be tested, and then the helium test operation is performed. Since there is no need to repeatedly disassemble or assemble the bellows and perform the pumping and filling operations, work efficiency is increased.

[0021] (2) The leakage detection angle valve switch is controlled by the solenoid valve, eliminating the need for manual operation and improving the automation capability of the equipment.

[0022] (3) The leak detection vacuum branch pipe only needs to be connected to the leak detection vacuum main pipe, which reduces the repeated connection pipes of the equipment and saves equipment maintenance space. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 Schematic diagram of a vacuum chamber helium detection device according to an embodiment of the present application.

[0024] Figure 2 Schematic diagram of the connection between the vacuum chamber and the leak detection pipeline in an embodiment of the present application.

[0025] Figure 3 It is a schematic diagram of the exploded view of the moving part of the embodiment of the present application.

[0026] Figure 4 It is a schematic diagram of the interlocking process of an embodiment of the present application.

[0027] [Brief Explanation of Reference Numerals]

[0028] 1: Helium detector 2: Vacuum chamber

[0029] 3: Leak detection angle valve 31: Interface

[0030] 32: Interface 4: Control Unit

[0031] 41: Control medium pipeline 42: Solenoid valve

[0032] 5: Leak detection vacuum main pipe 51: Leak detection vacuum branch pipe

[0033] 52: Bellows DETAILED DESCRIPTION

[0034] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0035] This embodiment provides a vacuum chamber helium detection device that eliminates the need for disassembly of a bellows. When any vacuum chamber requires helium testing, a control unit controls the opening of a leak detection angle valve, thereby connecting the helium detector to the vacuum chamber being tested, and then performing the helium test. This eliminates the need for repeated disassembly of the bellows and the need for pumping and refilling, thereby increasing work efficiency.

[0036] The vacuum chamber helium detection device of this embodiment includes a leak detection vacuum main pipe 5 and a plurality of leak detection vacuum branch pipes 51 branching out from the leak detection vacuum main pipe 5, one end of each leak detection vacuum branch pipe 51 is connected to the leak detection vacuum main pipe 5, and the other end is connected to the corresponding vacuum chamber 2; a helium detector 1 is connected to the leak detection vacuum main pipe 5, and is connected to the interior of the vacuum chamber 1 through the leak detection vacuum main pipe 5 and the leak detection vacuum branch pipe 51; a leak detection angle valve 3 is connected between the leak detection vacuum branch pipe 51 and each vacuum chamber 2, and is used to control the connection and disconnection between the leak detection vacuum branch pipe 51 and each vacuum chamber 2; a control unit 4 is used to control the opening or closing of the leak detection angle valve 3, thereby controlling the connection and disconnection between the leak detection vacuum branch pipe 51 and each vacuum chamber 2.

[0037] The leak detection vacuum main pipe 5 can be extended along the arrangement path of each vacuum chamber 2. For example, if each vacuum chamber 2 is arranged in two rows from top to bottom, the leak detection vacuum main pipe 5 can be arranged at the vertical center position of the two rows of vacuum chambers from top to bottom. For example, if each vacuum chamber is arranged in two rows horizontally, the leak detection vacuum main pipe 5 can be arranged horizontally at the horizontal center position of the two rows of vacuum chambers. Of course, the above example does not limit the arrangement form of the leak detection vacuum main pipe 5. The leak detection vacuum main pipe 5 can be arranged arbitrarily as needed, as long as a leak detection vacuum branch pipe 51 can be branched out from it and connected to each vacuum chamber 2.

[0038] There can be multiple vacuum chambers 2, for example Figure 1 In the figure, multiple vacuum chambers including LLA, LLB, CHA, CHE, CHC, CHD, CHA, CHB, BUFFER, Transfer, CH1, CH2, CH3, CH4, and CH5 are respectively connected to corresponding leak detection vacuum branches 51.

[0039] like Figure 2 In the figure, a schematic diagram of the connection between a vacuum chamber 2 and a leak detection vacuum branch pipe 51, and a schematic diagram of the connection between the leak detection vacuum branch pipe 51 and the leak detection vacuum main pipe 5 are shown. The leak detection angle valve has two interfaces with an angle of 90°, one interface 31 is connected to the vacuum chamber 2, and the other interface 32 is connected to the leak detection vacuum branch pipe 51. In order to adapt to the interface of the leak detection angle valve, one end of the leak detection vacuum branch pipe 51 is connected to the interface 32 of the leak detection angle valve through an integrally formed 90° elbow. The other end of the leak detection vacuum branch pipe 51 is connected to one end of the bellows 52 through an integrally formed 90° elbow, and the other end of the bellows 52 is connected to the leak detection vacuum main pipe 5. The bellows 52 has a certain axial expansion and contraction and bending ability, and can reliably connect the leak detection vacuum main pipe 5 and the leak detection vacuum branch pipe 51.

[0040] The control unit 4 includes a plurality of control medium pipelines 41 and solenoid valves 42. One end of each control medium pipeline 41 is connected to the corresponding leak detection angle valve control port, and the other end is connected to the solenoid valve 42. The leak detection angle valve can be a pneumatic angle valve. Compressed air can be filled in the control medium pipeline 41. The compressed air is passed into the leak detection angle valve control port to control the opening and closing of the leak detection angle valve. The opening and closing of the medium can be controlled by the control unit to control the opening and closing of the solenoid valve, thereby controlling the opening and closing of the leak detection angle valve. In addition, the control medium can be other than compressed air, and can also be a liquid such as hydraulic oil or water.

[0041] In some embodiments, the leak detection angle valve 3 of each chamber can be configured as an interlocking structure with the rough extraction valve and cold pump valve (gate valve or swing valve) of this chamber, and the leak detection angle valve 3 between each chamber can also be provided with an interlocking structure. The interlocking means that when the leak detection angle valve needs to be opened, the control unit needs to verify whether its opening conditions are met. If it is met, it can be opened. If it is not met, it cannot be opened and an alarm is prompted. The rule set in the control unit is that if this leak detection angle valve is to be opened, the rough extraction valve, gate valve, and all other leak detection angle valves of this chamber are in a closed state, then the control unit regards that the opening conditions of this leak detection angle valve are met, otherwise, it is regarded as unsatisfied. The helium detector 1 can be a helium mass spectrometer leak detector, which determines whether there is a leak by detecting the helium content.

[0042] Specifically, each vacuum chamber's leak detection angle valve is interlocked with the chamber's roughing valve and cold pump valve. When opening a chamber's leak detection angle valve, the control unit checks to see if the chamber's roughing valve and gate valve are open. If either is open, the leak detection angle valve cannot be opened, and the control unit issues an alarm. If both valves are closed, the leak detection angle valve can open normally.

[0043] Specifically, the leak detection angle valves between each vacuum chamber also have an interlocking structure. When the control unit opens a leak detection angle valve in a chamber, it searches the system for the status of any leak detection angle valve other than the current one. If all leak detection angle valves are closed, it opens the leak detection angle valve. If any other leak detection angle valve is open, the leak detection angle valve cannot be opened, and the control unit issues an alarm.

[0044] For example, the control unit may also include a controller such as a PLC, which is connected to the solenoid valve, each roughing valve, the gate valve, and the leak detection angle valve to obtain their opening and closing signals, thereby achieving interlocking based on the opening and closing signals.

[0045] The following describes how to use the vacuum chamber helium detection device.

[0046] During machine maintenance, if it is found that one or more vacuum chambers may have leaks, such as LLA, helium detection is required. Start the helium detector 1 to exhaust the gas in the leak detection vacuum main pipe 5 and the leak detection vacuum branch pipe 51 to achieve a vacuum state. When the vacuum chamber is in a vacuum state, the control unit controls the solenoid valve to open, so that the control medium enters the control port of the leak detection angle valve, so that the leak detection angle valve can be opened, so that the LLA chamber is connected to the helium detector, and helium detection can be performed. For example, helium is sprayed on the leak detection point outside the vacuum chamber, and the helium detector 1 is used to detect whether there is helium in the vacuum chamber. This method can detect the leak point and the leak rate. The specific helium detection operation is not described in detail here.

[0047] If other chambers also need to be tested for helium, such as LLB, close the leak detection angle valve 3 of the LLA chamber, open the leak detection angle valve 3 of the LLB chamber, and start the helium test of the next chamber.

[0048] Of course, the present invention may have many other embodiments. Without departing from the spirit and essence of the present invention, those skilled in the art may make various corresponding changes and deformations based on the present invention, but these corresponding changes and deformations shall fall within the scope of protection of the claims of the present invention.

Claims

1. A vacuum chamber helium detection device, characterized in that: include: Leak detection vacuum main pipe, connected to the helium detector; A plurality of leak detection vacuum branch pipes are connected between the leak detection vacuum main pipe and each vacuum chamber; The leak detection angle valve is connected between the leak detection vacuum branch pipe and the corresponding vacuum chamber, and is used to control the on-off between the leak detection vacuum branch pipe and the corresponding vacuum chamber.

2. The vacuum chamber helium detection device according to claim 1, characterized in that: One end of any leak detection vacuum branch pipe is connected to the corresponding leak detection angle valve, and the other end is connected to the leak detection vacuum main pipe through a bellows.

3. The vacuum chamber helium detection device according to claim 1, characterized in that: It also includes a control unit, which includes multiple control medium pipelines and solenoid valves. One end of each control medium pipeline is connected to the corresponding leak detection angle valve control port, and the other end is connected to the solenoid valve. The solenoid valve is used to control the on and off of the control medium pipeline.

4. The vacuum chamber helium detection device according to claim 3, characterized in that: The control medium pipeline is filled with compressed air.

5. The vacuum chamber helium detection device according to claim 3, characterized in that: The leak detection angle valve of each vacuum chamber has an interlocking structure with the roughing valve and cold pump valve of the vacuum chamber.

6. The vacuum chamber helium detection device according to claim 3, characterized in that: The leak detection angle valves between the vacuum chambers have an interlocking structure.

7. The vacuum chamber helium detection device according to claim 1, characterized in that: The helium detector is a helium mass spectrometer leak detector.

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