Cover opening structure of vacuum chamber

Abstract

The utility model discloses a cover opening structure of a vacuum chamber, which comprises an opening and closing module used for opening or closing the vacuum chamber, and the opening and closing module comprises an upper mounting piece, a lower mounting piece and a cover body, the lower mounting piece is propped against the cavity body of the vacuum cavity; the two groups of hinge assemblies are symmetrically arranged, and each group of hinge assemblies comprises an upper hinge and a lower hinge which are rotationally connected through different connecting pieces; the upper hinge is rotationally connected with the upper mounting piece, and the lower hinge is rotationally connected with the lower mounting piece; the lead screw comprises a driving section, a smooth section and a threaded section which are connected in sequence, the smooth section is in sliding connection with the first connecting piece, and the threaded section is in threaded connection with the second connecting piece; and the first thrust bearing is arranged on the smooth section between the driving section and the first connecting piece. Through rotation of the lead screw, the two hinge assemblies and the connecting end of the lead screw move relatively or oppositely, the upper mounting piece drives the cover body to ascend or descend, then the cavity is opened or closed, and the scheme is easy to operate and safe.

Description

Technical Field

[0001] The present disclosure generally relates to the field of semiconductor equipment technology and more particularly to a vacuum chamber cover opening structure. Background Art

[0002] During the assembly and commissioning of semiconductor equipment, opening the vacuum chamber's top cover is a frequent and critical step. Due to its weight and size, the vacuum chamber's top cover is typically opened using lifting equipment or a manual hoist. However, these methods not only require significant manpower and material resources, but can also pose a risk of injury to the equipment or operators.

[0003] In view of this, there is an urgent need to provide a lid opening structure that is simple to operate and safe, so as to improve the safety of the packaging operator while saving costs. Utility Model Content

[0004] In order to at least solve the technical problems mentioned above, the present disclosure proposes a cover opening structure that is simple to operate and safe.

[0005] The opening structure of the vacuum chamber provided by the present disclosure includes an opening and closing module for opening or closing the vacuum chamber, and the opening and closing module includes: an upper mounting member, which abuts against the cover body of the vacuum chamber; a lower mounting member, which abuts against the cavity body of the vacuum chamber; a hinge assembly, including a first hinge assembly and a second hinge assembly; the first hinge assembly includes an upper hinge and a lower hinge rotatably connected by a first connecting member, and the second hinge assembly includes an upper hinge and a lower hinge rotatably connected by a second connecting member; the upper hinge is rotatably connected to the upper mounting member, and the lower hinge is rotatably connected to the lower mounting member; a screw, which includes a driving section, a smooth section and a threaded section connected in sequence, the smooth section is slidably connected to the first connecting member, and the threaded section is threadedly connected to the second connecting member; and a first thrust bearing, which is arranged on the smooth section between the driving section and the first connecting member.

[0006] In some embodiments, the upper hinge and the lower hinge are both U-shaped parts; the first connecting part and the second connecting part both include a connecting part and two extension parts, the middle of the connecting part has a cylindrical through hole, the extension parts are symmetrically arranged on the outer periphery of the connecting part and are rotatably connected to the two side walls of the U-shaped part; the inner surface of the through hole on the first connecting part is smooth and is slidably connected to the smooth section, and the inner surface of the through hole on the second connecting part has an internal thread and is threadedly connected to the threaded section.

[0007] In some embodiments, a second thrust bearing is provided on the smooth section of the first connecting member away from one end of the driving section.

[0008] In some embodiments, the upper mounting member has a certain extension length, and there is a preset distance between the two upper hinges and the two ends connected to the upper mounting member; the lower mounting member also has a certain extension length, and there is a preset distance between the two lower hinges and the two ends connected to the lower mounting member.

[0009] In some embodiments, it is characterized in that the upper mounting member and the lower mounting member are U-shaped grooves with openings arranged opposite to each other, and the two side walls of the U-shaped groove are rotatably connected to the two side walls of the U-shaped member respectively.

[0010] In some embodiments, the U-shaped member and / or the U-shaped groove has at least one reinforcing rib connecting two side walls.

[0011] In some embodiments, the cover opening structure further includes a sliding module disposed on the cavity to drive the opening and closing module to slide, wherein the sliding module is a guide rail.

[0012] In some embodiments, a roller is provided between the two side walls of the lower mounting member, and a plurality of through holes are provided on the bottom wall of the lower mounting member, and the roller passes through the through holes and abuts against the guide rail.

[0013] In some embodiments, the opening and closing module further includes a limiting system, which includes a vertically arranged guide column, one end of which is fixedly connected to the lower mounting member, and the other end of which extends upward through a limiting hole on the upper mounting member.

[0014] In some embodiments, the limiting system also includes: a first guide block, which is fixedly connected to the lower mounting member and fixedly connected to one end of the guide column; and a second guide block, which is fixedly connected to the upper mounting member, and the limiting hole is opened on the second guide block or arranged between the second guide block and the side wall of the upper mounting member.

[0015] With the vacuum chamber cover opening structure provided above, the disclosed embodiments utilize the rotation of a lead screw to cause the two hinge assemblies and the lead screw connection ends to move relative to or toward each other, causing the upper mounting member to raise or lower the cover, thereby opening or closing the chamber. This solution is simple and safe to operate. Furthermore, in some embodiments, a limit system can be provided to limit the horizontal position of the opening and closing module to prevent shaking during its movement. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and other objects, features and advantages of the exemplary embodiments of the present disclosure will become readily understood by reading the detailed description below with reference to the accompanying drawings. In the accompanying drawings, several embodiments of the present disclosure are shown in an illustrative and non-limiting manner, and the same or corresponding reference numerals represent the same or corresponding parts, wherein:

[0017] Figure 1 A schematic diagram showing the state of the opening and closing module in the cover opening structure when the cavity is opened;

[0018] Figure 2 A cross-sectional view of the opening and closing module in the cover opening structure is shown;

[0019] Figure 3 A side view of the opening and closing module in the cover opening structure is shown;

[0020] Figure 4 Shows a structural schematic diagram of the mobile lifting module in the cover opening structure;

[0021] Figure 5 It shows an assembly diagram of each module in the open cover structure when it is in use.

[0022] In the figure: 100, opening and closing module; 200, sliding module; 300, moving lifting module; 400, vacuum chamber;

[0023] 101. Upper mounting member; 102. Lower mounting member; 103. First hinge assembly; 104. Second hinge assembly; 105. Upper hinge; 106. Lower hinge; 107. First connecting member; 108. Second connecting member; 109. Lead screw; 109-1. Drive section; 110. First thrust bearing; 111. Second thrust bearing; 112. First bearing stopper; 113. Second bearing stopper; 114. Rotation pin; 115. Hinge rotation spacer; 116. Reinforcement rib; 117. Roller; 118. Fastener; 119. Retaining ring; 120. Limiting system;

[0024] 1201, guide column; 1202, first guide block; 1203, second guide block;

[0025] 201, guide rail; 202, guide rail mounting block;

[0026] 301. Carrying platform; 302. Base; 303. First support arm group; 304. Second support arm group; 305. First support arm; 306. Second support arm; 307. First limiting slot; 308. Second limiting slot; 309. Connecting shaft; 310. Reinforcement shaft; 311. Driving rod; 312. Fixed seat; 312-1. Support rod; 313. Limiting block; 314. Caster; 315. Caster lifting plate; 316. Support member; 317. Slide rail; 318. Bending portion; 319. Fixed block; 320. Limiting plate; 321. Guide wheel;

[0027] 401. Cavity; 402. Cover; 403. Handle fixing strip; 404. Handle. DETAILED DESCRIPTION

[0028] The following will clearly and completely describe the technical solutions in the embodiments of this disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of this disclosure, not all of them. Based on the embodiments of this disclosure, all other embodiments obtained by those skilled in the art without creative work are within the scope of protection of this disclosure.

[0029] It should be understood that the terms “include” and “comprising” used in the specification and claims of the present disclosure indicate the presence of described features, integers, steps, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components and / or collections thereof.

[0030] It should also be understood that the terminology used in this disclosure is for the purpose of describing specific embodiments only and is not intended to limit the disclosure. As used in this disclosure and the claims, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly indicates otherwise. It should be further understood that the term "and / or" as used in this disclosure and the claims refers to any and all possible combinations of one or more of the associated listed items, including and including these combinations.

[0031] As used in this specification and claims, the term "if" can be interpreted as "when" or "upon" or "in response to determining" or "in response to detecting," depending on the context. Similarly, the phrase "if it is determined" or "if [described condition or event] is detected" can be interpreted as meaning "upon determination" or "in response to determining" or "upon detection of [described condition or event]" or "in response to detecting [described condition or event]," depending on the context.

[0032] The specific embodiments of the present disclosure are described in detail below with reference to the accompanying drawings.

[0033] like Figures 1 to 3 As shown, the present disclosure provides a cover opening structure, which is used to open or close the vacuum chamber 400. The cover opening structure includes an opening and closing module 100. The opening and closing module 100 includes an upper mounting member 101 and a lower mounting member 102 arranged at intervals, two sets of hinge assemblies arranged between the upper mounting member 101 and the lower mounting member 102, and a lead screw 109 connected to the hinge assembly. The lower mounting member 102 abuts against the cavity 401 of the vacuum chamber 400, and the upper mounting member 101 abuts against the handle 404 on the cover body 402. When in use, the two sets of hinge assemblies and the connecting end of the lead screw are moved relative to or toward each other by the lead screw, so that the upper mounting member drives the cover body to rise or fall, thereby opening or closing the cavity. This solution is simple to operate and safe.

[0034] In a specific embodiment, the handle 404 has a horizontally arranged handle. When in use, the upper end of the upper mounting member 101 of the opening and closing module 100 abuts against the lower surface of the handle, and then the hinge assembly is driven to rotate by the screw 109, driving the handle to rise or fall, and then the handle 404 drives the cover body 402 to open or close the cavity 401.

[0035] In a specific embodiment, the upper surface of the cover body 402 has a handle fixing strip 403 with a certain extended length, and the handle 404 is fixed to the cover body 402 by being connected to the handle fixing strip 403 .

[0036] Those skilled in the art will appreciate that the connection method between the handle 404 and the cover 402 is not limited in this solution. The handle 404 can be connected to the cover 402 via the handle fixing strip 403 as described above, or can be directly fixed to the cover 402.

[0037] like Figure 2 As shown, in a specific embodiment, the two hinge assemblies are respectively a first hinge assembly 103 and a second hinge assembly 104. The first hinge assembly 103 includes an upper hinge 105 rotatably connected to the upper mounting member 101 and a lower hinge 106 rotatably connected to the lower mounting member 102, wherein the upper hinge 105 and the lower hinge 106 are rotatably connected via a first connecting member 107. The first hinge assembly 103 also includes an upper hinge 105 rotatably connected to the upper mounting member 101 and a lower hinge 106 rotatably connected to the lower mounting member 102, wherein the upper hinge 105 and the lower hinge 106 are rotatably connected via a second connecting member 108.

[0038] The opening and closing module 100 of this embodiment also includes a lead screw 109 connected to the hinge assembly. This lead screw 109 comprises a drive segment 109-1, a smooth segment, and a threaded segment, which are sequentially connected. The drive segment 109-1 of the lead screw 109 is used to drive the lead screw 109 in rotation, the smooth segment is designed to pass through the first connecting member 107 and slide therewith, and the threaded segment is designed to pass through the second connecting member 108 and threadedly connect therewith. Furthermore, a first thrust bearing 110 is provided on the smooth segment between the drive segment 109-1 and the first connecting member 107.

[0039] During use, the opening and closing module 100 is placed in the assembly position of the vacuum chamber 400. A ratchet wrench is attached to the drive section 109-1 of the lead screw 109. The ratchet wrench is rotated clockwise or counterclockwise to rotate the lead screw 109, which advances or retreats according to the direction of rotation of the threaded section. As the lead screw 109 advances, the first thrust bearing 110 applies a thrust to the first connecting member 107. Due to the hinge linkage structure, the upper hinge 105 and the lower hinge 106 rotate around the upper mounting member 101 and the lower mounting member 102, causing the upper mounting member 101 to rise and abut against the handle 404 of the cover 402. This then drives the handle 404 upward to open the chamber 401.

[0040] In a specific embodiment, in order to prevent the first thrust bearing 110 from moving on the smooth section, a first bearing stopper 112 is sleeved on the smooth section between the first thrust bearing 110 and the driving section 109 - 1 .

[0041] In one embodiment, when cavity 401 needs to be closed, the lead screw 109 is rotated in the opposite direction, causing the hinge assembly to lower the upper mounting member 101 and the lid 402, thereby closing cavity 401. To assist the lead screw 109 as it moves backward, a second thrust bearing 111 is positioned on the smooth section of the first connecting member 107, distal from the drive section 109-1. Furthermore, to prevent the second thrust bearing 111 from moving on the smooth section, a second bearing stopper 113 is positioned on the sliding portion of the second thrust bearing 111, distal from the first connecting member 107.

[0042] Those skilled in the art will appreciate that, in order to open the cover 402 , at least two handles 404 are symmetrically provided on the cover 402 , and the number of the opening and closing modules 100 in this solution is consistent with the number of the handles 404 , also two symmetrically provided.

[0043] In a specific embodiment, the upper hinge 105 and the lower hinge 106 in the first hinge assembly 103 and the second hinge assembly 104 are both U-shaped members. The U-shaped member includes two side walls arranged opposite to each other and a bottom wall connecting the two side walls.

[0044] The first connecting member 107 is the hinge lifting shaft, consisting of a connecting portion connected to the lead screw 109 and two extensions connected to the upper hinge 105 and the lower hinge 106. The connecting portion has a cylindrical through-hole in the middle, and the inner surface of the through-hole is smooth. The two extensions are symmetrically arranged around the outer periphery of the connecting portion and extend radially for a certain length.

[0045] During installation, the hinge lift shaft is connected to the upper hinge 105 and lower hinge 106 in the first hinge assembly 103 via an extension, and is then connected to the lead screw 109 via a connecting portion. Specifically, the hinge lift shaft is placed between the two sidewalls at the ends of the upper hinge 105 and lower hinge 106. One extension passes through one sidewall of the upper hinge 105 and one sidewall of the lower hinge 106, and is secured by a retaining ring 119. The other extension passes through the other sidewall of the upper hinge 105 and the other sidewall of the lower hinge 106, and is also secured by a retaining ring 119. The smooth section of the lead screw 109 passes through a through-hole in the connecting portion and is slidably connected to the hinge lift shaft.

[0046] The second connector 108 is a T-nut, consisting of a connecting portion for connecting to the threaded segment on the lead screw 109 and two extensions for connecting to the upper hinge 105 and the lower hinge 106. The connecting portion has a cylindrical through-hole in the center, and the inner surface of the through-hole has internal threads that mate with the external threads of the threaded segment. The two extensions are symmetrically arranged around the outer periphery of the connecting portion and extend radially for a predetermined length.

[0047] In this embodiment, the connection between the T-nut and the second hinge assembly 104 is similar to the connection between the hinge lifting shaft and the first hinge assembly 103, where the extension section is connected to the upper hinge 105 and the lower hinge 106. The only difference is that the connecting portion on the T-nut is threadedly connected to the threaded section on the lead screw 109.

[0048] Those skilled in the art will appreciate that, in other embodiments, the first connecting member 107 and the second connecting member 108 may also be of the same structure, for example, both are T-nuts, the lead screw 109 is threadedly connected to the two T-nuts, and the two nuts are connected to the lead screw 109 at positions where they rotate in opposite directions, so that the upper mounting member 101 can be raised and lowered.

[0049] In one embodiment, the upper mounting member 101 of the opening and closing module 100 has a certain extension length, and a predetermined distance exists between the two upper hinges 105 and the two ends connected to the upper mounting member 101. The lower mounting member 102 of the opening and closing module 100 also has a certain extension length, and a predetermined distance exists between the two lower hinges 106 and the two ends connected to the lower mounting member 102.

[0050] In this embodiment, since both the upper mounting member 101 and the lower mounting member 102 have a certain extension length, the contact area between the opening and closing module 100, the handle 404, and the cavity 401 is increased, thereby improving the stability of the opening and closing module 100. Furthermore, since there is a preset distance between the two upper hinges 105 and the ends connected to the upper mounting member 101, and a preset distance between the two lower hinges 106 and the ends connected to the lower mounting member 102, structural stress concentration caused by close connection points can be avoided, thereby further improving the stability and durability of the entire opening and closing module 100.

[0051] In one embodiment, the upper mounting member 101 and the lower mounting member 102 are U-shaped grooves with opposing openings. The U-shaped grooves include two opposing side walls and a bottom wall connecting the two side walls. When the upper mounting member 101 is connected to the upper hinge 105, the two side walls of the upper mounting member 101 are connected to the two side walls of the upper hinge 105 via rotating pins 114. The driving pins pass through the side walls and are secured by fasteners 118. When the lower mounting member 102 is connected to the lower hinge 106, the two side walls of the lower mounting member 102 are connected to the two side walls of the lower hinge 106 via rotating pins 114.

[0052] Those skilled in the art will appreciate that, in order to reduce friction between the hinge assembly and the upper mounting member 101 and the lower mounting member 102 and to improve rotational flexibility, a hinge rotation spacer 115 is sleeved on the rotation pin 114 .

[0053] In a specific embodiment, in order to improve the support strength of the opening and closing module 100, a reinforcing rib 116 connecting the two side walls is provided on the U-shaped member, or a reinforcing rib 116 connecting the two side walls is provided on the U-shaped groove.

[0054] Those skilled in the art will appreciate that, in order to further improve the support strength of the opening and closing module 100 , reinforcing ribs 116 are provided on both the U-shaped member and the U-shaped groove.

[0055] In one specific embodiment, to facilitate movement of the opening and closing module 100 within the cavity 401, a roller 117 is provided on the lower mounting member 102 of the opening and closing module 100. Specifically, the roller 117 has a connecting structure extending through its central axis. The ends of the connecting structure extend through the two side walls of the lower mounting member 102 and are secured by large gaskets. The bottom wall of the lower mounting member 102 has several through-holes extending therethrough, through which the roller 117 abuts against the guide rail 201 provided on the cavity 401. During use, after the opening and closing module 100 opens the cavity 401, the cover 402 is moved from its assembly position to another position, driven by the opening and closing module 100, making it easier for the operator to perform operations such as replacing components within the cavity 401.

[0056] In some embodiments, the opening and closing module 100 further includes a limiting system 120, which includes a vertically disposed guide post 1201. One end of the guide post 1201 is fixedly connected to the lower mounting member 102, and the other end extends upward through a limiting hole in the upper mounting member 101. In this solution, the vertically disposed guide post 1201 is connected to the upper mounting member 101 and the lower mounting member 102, respectively, thereby limiting the opening and closing module 100 in the horizontal direction and preventing it from shaking when opening or closing the cavity 401.

[0057] like Figure 3 As shown, in one specific embodiment, the limiting system 120 includes a guide post 1201, a first guide block 1202, and a second guide block 1203. Specifically, the first guide block 1202 is fixedly connected to the lower mounting member 102, and the second guide block 1203 is fixedly connected to the upper mounting member 101. One end of the guide post 1201 is fixedly connected to the first guide block 1202, and the other end of the guide post 1201 extends upward through a limiting hole provided in the second guide block 1203. More specifically, the first guide block 1202 is disposed on the side wall of the lower mounting member 102, and the second guide block 1203 is disposed on the side wall of the upper mounting member 101.

[0058] Those skilled in the art will appreciate that, in other embodiments, the limiting hole is not provided on the second guide block 1203 , but is provided between the second guide block 1203 and the side wall of the upper mounting member 101 .

[0059] Those skilled in the art will also understand that, in this solution, there is no limitation on the number of the limiting systems 120 , and the number may be two, three, or other positive integers.

[0060] In the solution disclosed herein, since the opening and closing module 100 is the basis for opening the lid, the entire opening and closing module 100 can be integrated into the cavity 401 according to usage before opening the lid. This saves time in opening the lid during convenient use and reduces maintenance costs.

[0061] The cover opening structure provided by the present disclosure has not only an opening and closing module but also a sliding module. The above content has introduced the specific structure of the opening and closing module 100 in detail, and the specific structure of the sliding module 200 in the cover opening structure will be introduced in detail below.

[0062] In some embodiments, the sliding module 200 includes a guide rail 201 symmetrically arranged on the cavity 401, wherein the guide rail 201 may extend only along the length direction of the cavity 401 or only along the width direction of the guide rail 201. Of course, the guide rail 201 may also extend along both the length direction and the width direction of the cavity 401.

[0063] In the solution disclosed herein, when there is sufficient space above the cavity 401, the guide rail 201 can be directly installed above the cavity 401. When there is insufficient space above the cavity 401 to install the guide rail 201, a plurality of guide rail mounting blocks 202 can be provided on the sidewalls of the cavity 401, and the guide rail 201 can be fixedly mounted above the guide rail mounting blocks 202.

[0064] It's worth noting that the guide rail 201 in this embodiment is detachably connected to the cavity 401 or the guide rail mounting block 202. This design ensures that the guide rail 201 does not obstruct the operator during operation, thereby ensuring smooth operation and operator convenience. This easily removable connection allows the operator to quickly remove or install the guide rail 201 as needed, providing greater flexibility for maintenance and operation within the cavity 401.

[0065] In a specific embodiment, the vacuum chamber 400 is rectangular. A plurality of interconnected guide rails 201 are disposed on each of the longitudinal sides of the vacuum chamber 400. This arrangement allows the operator to selectively remove one or more of the guide rails 201 as needed, further enhancing the user experience.

[0066] The opening structure provided by the present disclosure has a movable lifting module. The above content has detailed the specific structures of the opening and closing module 100 and the sliding module 200. Next, the specific structure of the movable lifting module 300 in the opening structure will be detailed.

[0067] like Figure 4 and Figure 5 As shown, the mobile lifting module 300 provided in the present disclosure abuts against or maintains a certain distance from any side wall of the cavity 401. It is used to receive the opening and closing module 100 and the cover 402, and drive them toward or away from the cavity 401. The mobile lifting module 300 includes a support platform 301 and a base 302 that are spaced apart and arranged opposite to each other, at least one set of support arms arranged in a scissor-like manner between the two, and a drive mechanism that drives the mobile lifting module 300 to rise or fall.

[0068] In some embodiments, both the carrying platform 301 and the base 302 are square and have a profile frame with a hollowed-out portion in the middle. Two parallel sliding mechanisms are positioned above the carrying platform 301. In this embodiment, the sliding mechanisms are slide rails 317 extending to a predetermined length. During operation, a drive mechanism drives the support arm assembly to align the slide rails 317 on the carrying platform 301 with the interactive module on the cavity 401. This allows the cover 402 and the opening and closing module 100 to move along the slide module 200 onto the slide mechanism above the carrying platform 301.

[0069] In some embodiments, a plurality of casters 314 and supports 316 are mounted on the lower surface of the base 302, wherein the casters 314 are provided with caster lift plates 315 for adjusting the height of the casters 314. During use, the caster lift plates 315 are adjusted so that the casters 314 are in contact with the ground and the supports 316 are away from the ground. The mobile lifting module 300 is pushed to the side wall of the vacuum chamber 400, and the caster lift plates 315 are adjusted so that the supports 316 are in contact with the ground and the casters 314 are away from the ground. In this solution, the height of the mobile lifting module 300 is adjusted by the driving mechanism, and the position of the mobile lifting module 300 is adjusted by the casters 314, so that the sliding module 200 on the cavity 401 and the slide rails 317 on the carrying platform 301 are not only located on the same horizontal plane, but also on the same horizontal line. When the operator is working, after opening the cover body 402 through the opening and closing module 100, the opening and closing module 100 and the cover body 402 move to the movable lifting module 300, and then when pushing the movable lifting module 300, the cover body 402 and the opening and closing module 100 move away from the cavity 401, thereby providing the operator with a larger operating space.

[0070] In some embodiments, the support arm assembly includes a first support arm 305 and a second support arm 306 arranged crosswise, wherein each of the first support arm 305 and the second support arm 306 includes a plurality of rotatably connected connecting rods, and the connecting rods on the first support arm 305 and the connecting rods on the second support arm 306 are rotatably connected via a connector. The first support arm 305 has two ends, one end fixedly connected to the support platform 301, and the other end fixedly connected to the base 302. The second support arm 306 also has two ends, one end slidably connected to a limit slot provided on the support platform 301, and the other end slidably connected to a limit slot provided on the base 302. A drive mechanism is connected to the second support arm 306, driving the end of the second support arm 306 to slide in the limit slot toward or away from the first support arm 305, thereby rotating the connecting rods to drive the support platform 301 to rise or fall.

[0071] In a specific embodiment, the lower surface of the supporting platform 301 has a first limiting groove 307 extending to a certain length, and the upper surface of the base 302 has a second limiting groove 308 corresponding to the first limiting groove 307. A guide wheel 321 is provided at each end of the second support arm 306, one of which slides in the first limiting groove 307, and the other guide wheel 321 slides in the second limiting groove 308. In this embodiment, the guide wheels 321 are connected to a drive mechanism and slide under the action of the drive mechanism.

[0072] Those skilled in the art will appreciate that the carrying platform 301 and the base 302 may also have other structures besides the profile frame, such as a square plate structure.

[0073] like Figure 4 As shown, in some embodiments, the mobile lifting module 300 includes two sets of support arms arranged symmetrically and in parallel, and the supporting platform 301 and the base 302 each include two symmetrically arranged long sides and two symmetrically arranged short sides. Both sets of support arms are arranged along the long sides of the supporting platform 301 and the base 302.

[0074] It will be appreciated by those skilled in the art that the definition of the long side and the short side of the carrying platform 301 is merely for the convenience of describing the present invention and is not intended to limit the present invention. In other words, in other embodiments, the two groups of support arms may also be arranged on the short sides of the profile frame.

[0075] In one specific embodiment, the two support arm groups are connected via a plurality of reinforcing shafts 310. One end of the reinforcing shaft 310 is connected to the connection between the first support arm 305 and the second support arm 306 in the first support arm group 303, and the other end of the reinforcing shaft 310 is connected to the connection between the first support arm 305 and the second support arm 306 in the second support arm group 304. In addition, the reinforcing shaft 310 is also connected to the connecting ends of the connecting rods in the two support arm groups. For example, the first support arm 305 of the first support arm group has two connecting rods connected in sequence, and the connecting ends of the two connecting rods have connecting holes. One end of the connecting rod passes through the connecting holes of the two connecting rods in sequence to connect to the first support arm 305. Similarly, the other end of the connecting rod is connected to the first support arm 305 of the second support arm group in the same manner.

[0076] In a specific embodiment, the two guide wheels 321 near the supporting platform 301 and the two guide wheels 321 near the base 302 in the two groups of support arms are respectively connected by two connecting shafts 309. The driving mechanism drives the connecting shaft 309 to move, thereby driving the guide wheels 321 to move. Specifically, the driving mechanism is a driving rod 311, the outer surface of which is provided with an external thread. The connecting shaft 309 is provided with a threaded hole set through it in a direction perpendicular to the line connecting the two guide wheels 321. The driving rod 311 is threadedly connected to the connecting shaft 309 through the threaded hole. In addition, a fixing seat 312 is fixedly connected to the supporting platform 301 or the base 302. One end of the driving rod 311 passes through the connecting shaft 309 and is inserted into the fixing seat 312 and is rotatably connected to the fixing seat 312. When in use, the driving rod rotates, causing the connecting shaft 309 threadedly connected to it to move back and forth along the long side direction, thereby realizing the lifting and lowering of the mobile lifting module.

[0077] In one embodiment, the drive rod 311 includes a driving portion and a connecting portion that are interconnected, and the cross-sectional area of ​​the connecting portion is smaller than the cross-sectional area of ​​the driving portion. In addition, a limit block 313 is provided on the connection between the driving portion and the connecting shaft 309, and the limit block 313 is fixed to the short side.

[0078] In this embodiment, the connecting shaft 309 connecting the two guide wheels 321 near the support platform 301 is the upper connecting shaft, and the connecting shaft 309 connecting the two guide wheels 321 near the base 302 is the lower connecting shaft. It will be appreciated by those skilled in the art that the number and position of the drive rods 311 can be set according to different requirements. For example, the drive rod 311 can be connected only to the upper connecting shaft 309, or the drive rod 311 can be connected only to the lower connecting shaft 309, or multiple drive rods 311 can be provided, connected to both the upper connecting shaft and the lower connecting shaft.

[0079] Those skilled in the art will also understand that the setting position of the fixing seat 312 will be adjusted according to the setting position of the driving rod 311. For example, when the driving rod 311 is connected only to the upper connecting shaft 309, the fixing seat 312 is fixedly connected to the supporting platform 301. When the driving rod 311 is connected only to the lower connecting shaft 309, the fixing seat 312 is fixedly connected to the base 302. In this solution, since the middle of the profile frame has a hollow portion, in order to connect the fixing seat 312 to the profile frame, a support rod 312-1 parallel to the long side can be provided on the hollow portion, and the fixing seat 312 is fixedly connected to the lower surface of the support rod 312-1.

[0080] The specific structure of the limiting grooves will be described in detail below. It will be appreciated by those skilled in the art that the structures of the first limiting groove 307 and the second limiting groove 308 can be the same or different in different embodiments. For example, in one embodiment, the first limiting groove 307 and the second limiting groove 308 have the same structure and are symmetrically arranged. In another embodiment, the first limiting groove 307 and the second limiting groove 308 have different structures and are arranged in two different forms.

[0081] In a specific embodiment, the first limiting groove 307 includes a bending portion 318 and two fixed blocks 319 spaced apart along the length direction of the supporting platform 301, wherein one fixed block 319 is arranged at the end of the long side, and the other fixed block 319 is arranged in the area between the two ends of the long side of the supporting platform 301. In this solution, the bending portion 318 includes bending portions 318 that are connected to each other and at right angles, and the bending portion 318 includes a first side wall and a second side wall. The upper surfaces of the two fixed blocks 319 are fixedly connected to the lower surface of the supporting platform, the first side wall of the bending portion 318 is fixedly connected to the lower surface of the fixed block 319, and the second side wall is fixedly connected to the surface of the fixed block 319 away from the other group of support arms. The guide wheel 321 is arranged on the second side wall, and the two fixed blocks 319 limit the guide wheel 321 in the length direction, the second side wall and the connecting shaft 309 limit the guide wheel 321 in the width direction, and the first side wall and the lower surface of the supporting platform 301 limit the guide wheel 321 in the height direction.

[0082] In this solution, the end of the second support arm is also connected to the connecting shaft. Specifically, the guide wheel 321 and the nut fix the end of the second support arm 306 on the connecting shaft 309.

[0083] In another specific embodiment, the second limiting groove 308 is symmetrically arranged with the first limiting groove 307, and includes two fixing blocks 319 fixedly connected to the upper surface of the base 302. A limiting plate 320 is installed on the upper surface of the fixing blocks 319. One end of the guide wheel 321 in the width direction is connected to the connecting shaft 309, and the other end is connected to the second support arm 306. In this solution, the two fixing blocks 319 limit the guide wheel 321 in the length direction, the connecting shaft 309 and the second support arm 306 limit the guide wheel 321 in the width direction, and the limiting plate 320 and the upper surface of the base 302 limit the guide wheel 321 in the height direction. In a specific embodiment, when opening the cover, the opening and closing module 100 moves to the assembly position on the sliding module 200, the ratchet wrench is put on the driving section 109-1 of the screw 109, and the ratchet wrench is rotated to adjust the height of the opening and closing module 100, first making the upper support 316 on the opening and closing module 100 abut against the handle 404 on the cover body 402, and then continuing to adjust the height of the opening and closing module 100 so that the cover body 402 moves in a direction away from the cavity 401 under the drive of the opening and closing module 100, and then opening the cavity 401.

[0084] The disclosed solution can be adapted to the operator's varying needs. When the cavity does not need to be opened wide for operation, the cavity can simply be opened using the opening and closing module, and the cover can be moved over the cavity. When the cavity needs to be fully opened for operation, the cover can be moved to the movable lifting module, thereby providing the operator with a larger operating space and improving the user experience.

[0085] Although a plurality of embodiments of the present disclosure have been shown and described herein, it will be apparent to those skilled in the art that such embodiments are provided by way of example only. Those skilled in the art may conceive of many modifications, changes, and alternatives without departing from the ideas and spirit of the present disclosure. It should be understood that in practicing the present disclosure, various alternatives to the embodiments of the present disclosure described herein may be adopted. The appended claims are intended to define the scope of protection of the present disclosure and therefore cover equivalents or alternatives within the scope of these claims.

Claims

1. A vacuum chamber cover structure, comprising an opening and closing module for opening or closing the vacuum chamber, characterized in that: The opening and closing module includes: an upper mounting member abutting against the cover of the vacuum chamber; a lower mounting member abutting against the cavity body of the vacuum chamber; A hinge assembly comprising a first hinge assembly and a second hinge assembly; the first hinge assembly comprising an upper hinge and a lower hinge rotatably connected via a first connecting member, and the second hinge assembly comprising an upper hinge and a lower hinge rotatably connected via a second connecting member; the upper hinge being rotatably connected to the upper mounting member, and the lower hinge being rotatably connected to the lower mounting member; A lead screw comprising a driving section, a smooth section, and a threaded section connected in sequence, wherein the smooth section is slidably connected to the first connecting member, and the threaded section is threadedly connected to the second connecting member; and A first thrust bearing is provided on the smooth section between the driving section and the first connecting member.

2. The cover opening structure according to claim 1, characterized in that: The upper hinge and the lower hinge are both U-shaped parts; The first connecting member and the second connecting member each include a connecting portion and two extending portions, wherein the connecting portion has a cylindrical through hole in the middle thereof, and the extending portions are symmetrically arranged on the outer periphery of the connecting portion and are rotatably connected to the two side walls of the U-shaped member; The inner surface of the through hole on the first connecting member is smooth and is slidably connected to the smooth section. The inner surface of the through hole on the second connecting member has an internal thread and is threadedly connected to the threaded section.

3. The cover opening structure according to claim 1 or 2, characterized in that: A second thrust bearing is provided on the smooth section of the first connecting member away from one end of the driving section.

4. The cover opening structure according to claim 1 or 2, characterized in that: The upper mounting member has a certain extension length, and a preset distance exists between the two ends of the two upper hinges connected to the upper mounting member; The lower mounting member also has a certain extension length, and a preset distance is also provided between the two ends of the two lower hinges connected to the lower mounting member.

5. The cover opening structure according to claim 2, characterized in that: The upper mounting member and the lower mounting member are U-shaped grooves with openings facing each other, and two side walls of the U-shaped groove are rotatably connected to two side walls of the U-shaped member respectively.

6. The cover opening structure according to claim 5, characterized in that: The U-shaped member and / or the U-shaped groove has at least one reinforcing rib connecting two side walls.

7. The cover opening structure according to claim 5, characterized in that: The cover opening structure further includes a sliding module arranged on the cavity to drive the opening and closing module to slide, wherein the sliding module is a guide rail.

8. The cover opening structure according to claim 7, characterized in that: A roller is provided between the two side walls of the lower mounting member. The bottom wall of the lower mounting member is provided with a plurality of through holes, and the roller passes through the through holes and abuts against the guide rail.

9. The cover opening structure according to claim 1, characterized in that: The opening and closing module further includes a limiting system, which includes a vertically arranged guide column, one end of which is fixedly connected to the lower mounting member, and the other end of which extends upward through a limiting hole on the upper mounting member.

10. The cover opening structure according to claim 9, characterized in that: The limiting system also includes: a first guide block, which is fixedly connected to the lower mounting member and fixedly connected to one end of the guide column; and The second guide block is fixedly connected to the upper mounting member, and the limiting hole is opened on the second guide block or is arranged between the second guide block and the side wall of the upper mounting member.

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