Wafer suction pen with automatic switching function
By integrating manual and infrared control valves on the wafer suction pen to achieve automatic switching function, the problem of vacuum channel blockage caused by improper operation of the wafer suction pen is solved, ensuring stable suction and reducing the risk of wafer dropping.
Patent Information
- Application Number
- CN202422544342.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-21
- Publication Date
- 2025-09-09
- Estimated Expiration
- 2034-10-21
AI Technical Summary
During the wafer manufacturing process, operators often forget to put the wafer suction pen back into the holder, resulting in blockage of the vacuum channel, insufficient suction, and wafer falling.
A wafer suction pen with automatic switching function is designed. It combines a manual control valve and an infrared control valve to automatically control the opening and closing of the vacuum channel by sensing human body heat, preventing the suction pen from continuously sucking air due to misoperation.
It effectively prevents the vacuum channel from being blocked, ensures sufficient suction force of the suction pen, and reduces the probability of wafer dropping during wafer transfer.
Smart Images
Figure CN223321254U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer preparation devices, in particular to a wafer suction pen with an automatic switching function. Background Art
[0002] Currently, the wafer manufacturing process often involves the transfer of wafers. More commonly, operators use a wafer suction pen to achieve negative pressure adsorption of the wafer, and drive the transfer of the wafer by moving the wafer suction pen. Specifically, it controls the generation and stop of the adsorption force of the wafer suction pen by pressing a switch. Generally, when contacting the wafer, pressing the switch generates adsorption force, so that the wafer is adsorbed by the suction pen; and when placing the wafer, pressing the switch again to pause adsorption, so that the wafer is separated from the wafer suction pen; finally, releasing the press switch, the wafer suction pen is placed on the suction pen holder after use.
[0003] However, during the operation, the operator may easily forget to put the suction pen back on the suction pen holder and place it on the table, or fail to place it in the correct position on the holder, causing the vacuum suction pen to be in the suction state all the time, which easily absorbs particles in the air into its vacuum channel, causing the vacuum suction pen channel to be blocked, resulting in insufficient suction force of the vacuum suction pen, and causing the wafer to fall during the process of sucking the wafer. Utility Model Content
[0004] In response to the problems in the prior art, the purpose of the present invention is to provide a wafer suction pen with an automatic switching function, which can effectively reduce the probability of wafer falling during wafer transfer using a wafer washing pen.
[0005] Specifically, the first aspect of the present invention provides a wafer suction pen with an automatic on / off function, the wafer suction pen with an automatic on / off function comprising: a pen body, a vacuum channel formed in the pen body along an axial direction, and at least one suction hole at one end of the pen body;
[0006] A manual control valve is provided on the pen body and is used to open or close the vacuum channel. The manual control valve has a trigger end, and the trigger end is used for manual control;
[0007] An infrared control valve is provided on the pen body and is used to open or close the vacuum channel. The infrared control valve has a sensing end, and the sensing end is used to sense the heat of the human body.
[0008] In a possible implementation of the first aspect, the manual control valve is disposed closer to the suction hole relative to the infrared control valve.
[0009] In a possible implementation of the first aspect above, the pen body includes: a pen body and a pen tip, the pen body and the pen tip are connected, the suction hole is opened on the pen tip, and the manual control valve and the infrared control valve are provided on the pen body.
[0010] In a possible implementation of the first aspect above, a plurality of suction holes are provided on the pen tip, and the plurality of suction holes are arranged in a rectangular array.
[0011] In a possible implementation of the first aspect above, the pen tip is configured as a rounded rectangular structure.
[0012] In a possible implementation of the first aspect above, the pen body further includes a buffer component, the pen body is connected to the pen tip via the buffer component, and the buffer component has a deformation amount along the axial direction of the pen body.
[0013] In a possible implementation of the first aspect above, the manual control valve includes: a button and a closure member, a first channel is radially arranged on the pen body, the first channel is connected to the vacuum channel, one end of the closure member is movably arranged in the vacuum channel through the first channel, the button is arranged on the outside of the pen body, the button is connected to the other end of the closure member, and the trigger end is formed on the button.
[0014] In a possible implementation of the first aspect above, the infrared control valve includes: an infrared sensing device, a driving component and a valve body, the sensing end is formed on the infrared sensing device, the infrared sensing device is connected to the driving component, and the driving component is used to drive the opening and closing of the valve body.
[0015] In a possible implementation of the first aspect above, the other end of the pen body has a connecting port, and the connecting port is used to connect to a negative pressure device.
[0016] In a possible implementation of the first aspect, the pen body is configured as a hollow rod structure.
[0017] Compared with the prior art, the present invention has the following beneficial effects:
[0018] Through the application of the utility model, a wafer suction pen suitable for wafer transfer is provided, which can realize the automatic switching function through the independent or simultaneous use of the manual control valve and the infrared control valve, preventing the suction pen from being in a continuous suction state due to the operator's misoperation, avoiding the blockage of the vacuum channel, ensuring that the suction force of the suction pen is sufficient, and effectively reducing the probability of wafer falling during the wafer transfer process, which has popularization value. BRIEF DESCRIPTION OF THE DRAWINGS
[0019] Other features, objects and advantages of the present invention will become more apparent from the detailed description of non-limiting embodiments made with reference to the following drawings.
[0020] Figure 1 According to an embodiment of the present invention, an overall schematic diagram of a wafer suction pen with an automatic switching function is provided.
[0021] Figure 2 According to an embodiment of the present invention, a schematic diagram of a wafer suction pen with an automatic switching function being picked up by a person is provided.
[0022] Figure 3 According to an embodiment of the present invention, a schematic diagram of the state of a wafer suction pen with an automatic switching function before it is ready to suck a wafer is provided.
[0023] Figure 4 According to an embodiment of the present invention, a schematic diagram of the state of a wafer suction pen with an automatic switching function sucking a wafer is provided.
[0024] Figure 5 According to an embodiment of the present invention, a schematic diagram of the state of placing a wafer using a wafer suction pen with an automatic switching function is provided.
[0025] Figure 6 According to an embodiment of the present invention, a schematic diagram of a wafer suction pen with an automatic switching function being mistakenly placed on a table is provided.
[0026] In the attached figure:
[0027] 1. Pen body; 2. Vacuum channel; 3. Suction hole; 4. Manual control valve; 5. Infrared control valve; 6. Pen body; 7. Pen tip; 8. Buffer component; 9. Button; 10. Closure; 11. Infrared sensing device; 12. Drive component; 13. Valve body; 14. Connection port. DETAILED DESCRIPTION
[0028] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied to various different specific embodiments, and the various details of the present invention may be modified or altered based on different perspectives and application systems without departing from the spirit of the present invention. It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other, unless they conflict.
[0029] The following is a detailed description of the embodiments of the present invention with reference to the accompanying drawings so that those skilled in the art can easily implement the present invention. The present invention can be embodied in many different forms and is not limited to the embodiments described herein.
[0030] In the description of the present invention, reference to terms such as "one embodiment," "some embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and integrate different embodiments or examples, and features of different embodiments or examples, as long as they are not mutually inconsistent.
[0031] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one such feature. In the context of this utility model, "plurality" means two or more, unless otherwise specifically defined.
[0032] In order to clearly illustrate the present invention, components not related to the description are omitted, and the same or similar components throughout the specification are given the same reference numerals.
[0033] Throughout this specification, when a device is said to be "connected" to another device, this includes not only "direct connection" but also "indirect connection" with other elements interposed therebetween. Furthermore, when a device is said to "include" a certain component, unless otherwise stated, this does not exclude the inclusion of other components but rather implies that the device may include other components.
[0034] When a device is said to be "on" another device, it may be directly on the other device, but there may also be other devices between it. In contrast, when a device is said to be "directly on" another device, there are no other devices between it.
[0035] Although the terms first, second, etc. are used in some instances herein to represent various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, the first interface and the second interface, etc. are represented. Furthermore, as used in this article, the singular forms "one," "an," and "the" are intended to also include the plural forms, unless there is a contrary indication in the context. It should be further understood that the terms "comprise," "include," and "include" indicate the presence of features, steps, operations, elements, components, items, types, and / or groups, but do not exclude the presence, occurrence, or addition of one or more other features, steps, operations, elements, components, items, types, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B, or C" or "A, B, and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B, and C." Exceptions to this definition only occur when the combination of elements, functions, steps, or operations is inherently mutually exclusive in some way.
[0036] The technical terms used herein are intended only to refer to specific embodiments and are not intended to limit the present invention. The singular form used herein also includes the plural form, unless the statement explicitly indicates otherwise. The term "comprising" as used in this specification specifies specific features, regions, integers, steps, operations, elements, and / or components, and does not exclude the existence or addition of other features, regions, integers, steps, operations, elements, and / or components.
[0037] Although not defined otherwise, all terms used herein, including technical and scientific terms, have the same meanings as those generally understood by those skilled in the art to which this invention belongs. Terms defined in commonly used dictionaries are to be interpreted as having meanings consistent with the relevant technical literature and current disclosures, and unless otherwise defined, they should not be overly interpreted as ideal or highly formalized meanings.
[0038] In some embodiments of the present invention, Figure 1 The figure shows the overall schematic diagram of the wafer suction pen with automatic switching function. Figure 1As shown, the wafer suction pen with automatic on / off function can specifically include: a pen body 1, with a vacuum channel 2 formed axially therein, and at least one suction hole 3 at one end of the pen body 1; a manual control valve 4, which is arranged on the pen body 1 and is used to open or close the vacuum channel 2, and has a trigger end for manual control; an infrared control valve 5, which is arranged on the pen body 1 and is used to open or close the vacuum channel 2, and has a sensing end for sensing human body heat. Furthermore, the sensing end senses the human body, specifically, provides feedback on whether the operator is holding the suction pen, thereby achieving automatic control. If the operator fails to properly return the suction pen after using it, the infrared control valve 5 is closed because the sensing end does not sense human body heat, causing the vacuum channel 2 to be closed, thereby preventing the suction pen from being continuously in the suction working state.
[0039] In the above embodiment, further, the manual control valve 4 can be configured to be disposed closer to the suction hole 3 relative to the infrared control valve 5 .
[0040] In the above embodiment, further, the pen body 1 may include a pen body 6 and a pen tip 7, wherein the pen body 6 and the pen tip 7 are connected, a suction hole 3 is provided on the pen tip 7, and a manual control valve 4 and an infrared control valve 5 are provided on the pen body 6.
[0041] In the above embodiment, further, the pen tip 7 may be configured to have a plurality of suction holes 3 , and the plurality of suction holes 3 are arranged in a rectangular array.
[0042] In the above embodiment, further, the pen tip 7 can be configured to be arranged in a rounded rectangular structure.
[0043] In the above embodiment, the pen body 1 may further include a buffer component 8, through which the pen body 6 is connected to the pen tip 7, and the buffer component 8 has a deformation amount along the axial direction of the pen body 6. Furthermore, the provision of the buffer component 8 can prevent the pen tip 7 from making hard contact with the wafer.
[0044] In the above embodiment, further, the buffer component 8 preferably includes at least one elastic cylindrical portion, and the elastic cylindrical portion has the ability to elastically deform along the axial direction of the pen body 6 .
[0045] In the above embodiment, further, the vacuum channel 2 is configured with at least a suction hole 3, which is sequentially arranged through the pen tip 7, the buffer component 8 and the pen body 6.
[0046] In the above embodiment, further, the manual control valve 4 can be configured to include a button 9 and a closure member 10, wherein a first channel is radially arranged on the pen body 1, the first channel is connected to the vacuum channel 2, one end of the closure member 10 is movably arranged in the vacuum channel 2 through the first channel, the button 9 is arranged on the outside of the pen body 1, the button 9 is connected to the other end of the closure member 10, and a trigger end is formed on the button 9.
[0047] In the above embodiment, the infrared control valve 5 may further include an infrared sensor 11, a drive assembly 12, and a valve body 13. The infrared sensor 11 is formed with a sensing terminal, and the infrared sensor 11 is connected to the drive assembly 12. The drive assembly 12 is used to drive the valve body 13 to open and close. Furthermore, the infrared sensor 11 obtains human body heat information through the sensing terminal and controls the operation of the drive assembly 12 based on the amount or absence of this heat information. The drive assembly 12 is used to open and close the valve body 13. When the valve body 13 is opened, the vacuum channel 2 is opened; when the valve body 13 is closed, the vacuum channel 2 is closed.
[0048] In the above embodiment, further, the other end of the pen body 1 has a connecting port 14 , and the connecting port 14 is used to connect to a negative pressure device.
[0049] In the above embodiment, further, the connection port 14 can be connected to the negative pressure device through a straw.
[0050] In the above embodiment, further, the pen body 6 is provided in a hollow rod structure.
[0051] The above description is only a preferred embodiment of the present invention and does not limit the implementation manner and protection scope of the present invention.
[0052] The present invention also has the following implementation methods based on the above:
[0053] In a specific embodiment of the present invention, Figure 2 The figure shows a schematic diagram of a wafer suction pen with automatic switching function being picked up by a person. Figure 2 As shown, when the operator uses the suction pen, he holds the pen holder 1 with his hand, and the sensing end senses the heat of the human body. Part of the valve body 13 of the infrared control valve 5 moves outward to be in an open state. At the same time, the manual control valve 4 is also in an open state, and the vacuum channel 2 as a whole is in a conductive state.
[0054] In the above specific embodiment, further, Figure 3 The figure shows a schematic diagram of a wafer suction pen with automatic switching function before it is ready to absorb the wafer. Figure 3As shown, before the operator prepares to adsorb the wafer, the operator presses the manual control valve 4 with his thumb to close it, the infrared control valve 5 is open, and the vacuum channel 2 is closed as a whole.
[0055] In the above specific embodiment, further, Figure 4 The figure shows a schematic diagram of the state of a wafer suction pen with an automatic switching function sucking a wafer. Figure 4 As shown, after the pen tip 7 contacts the wafer, the thumb releases the manual control valve 4 to open it. At the same time, the infrared control valve 5 is also open, and the vacuum channel 2 is in a conducting state as a whole. The pen tip 7 can generate suction to hold the wafer.
[0056] In the above specific embodiment, further, Figure 5 The figure shows a schematic diagram of the wafer placement state of a wafer suction pen with an automatic switching function. Figure 5 As shown, after the wafer reaches the designated position, the operator's thumb presses the manual control valve 4 to close it, the infrared control valve 5 is open, and the vacuum channel 2 is closed as a whole, so that the pen head 7 stops adsorbing the wafer.
[0057] In the above specific embodiment, further, Figure 6 The figure shows a schematic diagram of a wafer suction pen with automatic switching function being placed on a table by mistake. Figure 6 As shown in the figure, it can be seen that after the operator finished using the suction pen, the thumb released the manual control valve 4, and the suction pen was mistakenly placed on the table instead of the dedicated bracket by the operator. The sensing end did not sense the human body heat, the infrared control valve 5 was in the closed state, and the vacuum channel 2 was in the closed state as a whole.
[0058] To sum up, through the application of the utility model, a wafer suction pen suitable for wafer transfer is provided, which can realize the automatic switching function through the independent or simultaneous use of the manual control valve and the infrared control valve, preventing the suction pen from being in a continuous suction state due to the operator's misoperation, avoiding the blockage of the vacuum channel, ensuring that the suction force of the suction pen is sufficient, and effectively reducing the probability of wafer falling during the wafer transfer process, which has promotional value.
[0059] The above content is a further detailed description of the present invention in conjunction with specific preferred embodiments, and the specific implementation of the present invention cannot be considered to be limited to these descriptions. For those skilled in the art of the present invention, without departing from the concept of the present invention, several simple deductions or substitutions can be made, which should be considered to fall within the scope of protection of the present invention.
Claims
1. A wafer suction pen with automatic switching function, characterized in that: include: A pen body, wherein a vacuum channel is formed in the pen body along the axial direction, and one end of the pen body has at least one suction hole; A manual control valve is provided on the pen body and is used to open or close the vacuum channel. The manual control valve has a trigger end, and the trigger end is used for manual control; An infrared control valve is provided on the pen body and is used to open or close the vacuum channel. The infrared control valve has a sensing end, and the sensing end is used to sense the heat of the human body.
2. The wafer suction pen with automatic on / off function according to claim 1, characterized in that: The manual control valve is arranged relative to the infrared control valve and close to the suction hole.
3. The wafer suction pen with automatic on / off function according to claim 1, characterized in that: The pen body comprises a pen body and a pen head, wherein the pen body and the pen head are connected, the pen head is provided with the suction hole, and the pen body is provided with the manual control valve and the infrared control valve.
4. The wafer suction pen with automatic on / off function according to claim 3, characterized in that: A plurality of suction holes are provided on the pen tip, and the plurality of suction holes are arranged in a rectangular array.
5. The wafer suction pen with automatic on / off function according to claim 4, characterized in that: The pen tip is arranged in a rounded rectangular structure.
6. The wafer suction pen with automatic on / off function according to claim 3, characterized in that: The pen body further includes a buffer component, through which the pen body is connected to the pen tip, and the buffer component has a deformation amount along the axial direction of the pen body.
7. The wafer suction pen with automatic on / off function according to claim 1, characterized in that: The manual control valve includes: a button and a closure member; a first channel is radially provided on the pen body, the first channel is connected to the vacuum channel, one end of the closure member is movably provided in the vacuum channel through the first channel; the button is provided on the outside of the pen body, the button is connected to the other end of the closure member, and the trigger end is formed on the button.
8. The wafer suction pen with automatic on / off function according to claim 1, characterized in that: The infrared control valve includes: an infrared sensing device, a driving component and a valve body. The sensing end is formed on the infrared sensing device. The infrared sensing device is connected to the driving component. The driving component is used to drive the valve body to open and close.
9. The wafer suction pen with automatic on / off function according to claim 1, characterized in that: The other end of the pen body is provided with a connection port, and the connection port is used to be connected to a negative pressure device.
10. The wafer suction pen with automatic on / off function according to claim 3, characterized in that: The pen body is arranged in a hollow rod structure.