Heating device for chemical vapor deposition equipment

Abstract

The utility model discloses a heating device for chemical vapor deposition equipment, which comprises a heating wire, the top and the bottom of the heating wire are both fixedly connected with heat insulation blocks, one side of each heat insulation block far away from the heating wire is fixedly connected with a mounting block, one side of each mounting block far away from the heat insulation block is fixedly connected with a mounting bolt, and the mounting bolts are fixedly connected with the heating wire. Mounting plates are arranged at the top and the bottom of the heating wire, mounting grooves are formed in inner cavities of the mounting plates, mounting nuts are in threaded connection with the surfaces of mounting bolts, adjusting plates are arranged on the sides, away from the heating wire, of the mounting plates, and adjusting toothed plates are fixedly connected to the sides, away from the heating wire, of the mounting plates. Heat generated by heating of the heating wire can be prevented from being conducted outwards through the arranged heat insulation block, the installation bolt is inserted into the inner cavity of the installation plate and fixed through the installation nut, at the moment, installation of the heating wire is completed, the installation block can be limited through the arranged limiting rod and the arranged limiting groove, and the installation block is prevented from deviating.

Description

Technical Field

[0001] The utility model relates to the technical field of chemical vapor deposition, in particular to a heating device for chemical vapor deposition equipment. Background Art

[0002] The diameter of the furnace body of chemical vapor deposition equipment is generally large, and correspondingly, the diameter of the matching heating device is also large, usually between 500mm and 2000mm. In the related art, large-sized heating devices adopt a combined structure. Specifically, the combined structure mostly adopts a nut fixing method or a simple hole-shaft interference fit to fix the graphite heating wire. In the above scheme, when using the nut fixing method, the temperature in the furnace varies greatly, causing the heating wire to easily loosen, affecting the use effect of the heating wire. For this reason, a heating device for chemical vapor deposition equipment is proposed to solve the above problem. Utility Model Content

[0003] (1) Technical problems solved

[0004] In view of the deficiencies of the prior art, the purpose of the present invention is to provide a heating device for chemical vapor deposition equipment, which has the advantages of easy installation and adjustable tightness.

[0005] (2) Technical solution

[0006] To achieve the above-mentioned purpose, the present invention provides the following technical solution, the technical solution adopted by the heating device of chemical vapor deposition equipment is: it includes a heating wire, the top and bottom of the heating wire are fixedly connected to an insulation block, the side of the insulation block away from the heating wire is fixedly connected to a mounting block, the side of the mounting block away from the insulation block is fixedly connected to a mounting bolt, the top and bottom of the heating wire are provided with a mounting plate, the inner cavity of the mounting plate is provided with a mounting groove, the surface of the mounting bolt is threadedly connected to a mounting nut, the side of the mounting plate away from the heating wire is provided with an adjustment plate, the side of the mounting plate away from the heating wire is fixedly connected to an adjustment tooth plate, the inner cavity of the adjustment plate is movably connected to a rotating rod through a bearing, the surface of the rotating rod is fixedly connected to an adjusting gear, the side of the mounting plate away from the heating wire is fixedly connected to a magnetic rod, and the inner cavity wall of the adjustment plate is fixedly connected to an electromagnet.

[0007] As a preferred solution, a side of the mounting plate away from the insulation block is fixedly connected to a limiting rod, and a side of the mounting plate close to the mounting block is provided with a limiting groove adapted to the limiting rod.

[0008] As a preferred solution, the mounting nut is located in the inner cavity of the mounting groove, and the end of the mounting bolt away from the heating wire extends to the inner cavity of the mounting plate.

[0009] As a preferred solution, a fixing plate is fixedly connected to one side of the adjustment plate, and a fixing through hole is provided in the inner cavity of the fixing plate.

[0010] As a preferred solution, the front end of the rotating rod is fixedly connected to a rotating block, and the surface of the rotating block is provided with anti-slip grooves.

[0011] As a preferred solution, the inner cavity of the electromagnet is provided with a magnetic suction groove adapted to the magnetic suction rod, and the inner cavity of the adjustment plate is provided with an entry and exit groove adapted to the magnetic suction rod.

[0012] As a preferred solution, the inner cavity of the adjustment plate is fixedly connected to the limiting plate, the side of the mounting plate away from the heating wire is fixedly connected to the extension rod, the extension rod extends to the inner cavity of the adjustment plate away from the mounting plate, and the other end of the extension rod is fixedly connected to the horizontal plate, and pulleys are fixedly connected on both sides of the horizontal plate.

[0013] (3) Beneficial effects

[0014] Compared with the prior art, the present invention provides a heating device for chemical vapor deposition equipment, which has the following beneficial effects.

[0015] 1. The provided heat insulation block can prevent the heat generated by the heating wire from being conducted outward. Insert the mounting bolt into the inner cavity of the mounting plate and fix the mounting bolt with the mounting nut. At this time, the heating wire is installed. The provided limit rod and limit groove can limit the mounting block to prevent the mounting block from shifting.

[0016] 2. The rotating rod is provided to drive the adjusting gear to rotate, the adjusting gear drives the adjusting tooth plate to move, and the adjusting tooth plate drives the mounting plate to move. By adjusting the position of the mounting plate, the tightness of the heating wire can be adjusted. The magnetic rod and electromagnet are provided, and the electromagnet can be energized after adjusting the position of the mounting plate to magnetically fix the mounting plate. The fixing plate can fix the adjusting plate in the processing furnace. The rotating block is provided to facilitate the rotation of the rotating rod. The limit plate, extension rod, cross plate and pulley are provided to limit the mounting plate when adjusting the position of the mounting plate to avoid shaking. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 This is a schematic diagram of the structure of the utility model;

[0018] Figure 2 It is a cross-sectional schematic diagram of the mounting plate of the utility model;

[0019] Figure 3 This is a schematic diagram of the internal structure of the adjustment plate of the utility model;

[0020] Figure 4 For this utility model Figure 2 Enlarged view of point A in the middle.

[0021] In the figure: 1. Heating wire; 2. Insulation block; 3. Mounting block; 4. Mounting bolt; 5. Mounting plate; 6. Mounting nut; 7. Adjustment plate; 8. Adjustment gear plate; 9. Rotating rod; 10. Adjustment gear; 11. Magnetic rod; 12. Electromagnet; 13. Limit rod; 14. Fixed plate; 15. Rotating block; 16. Limit plate; 17. Extension rod; 18. Horizontal plate; 19. Pulley. DETAILED DESCRIPTION

[0022] The following diagrams illustrate various embodiments of the present invention. For clarity, many practical details will be included in the following description. However, it should be understood that these practical details are not intended to limit the present invention. In other words, in some embodiments of the present invention, these practical details are not essential. Furthermore, to simplify the drawings, some commonly used structures and components are depicted in simplified schematic form.

[0023] Example 1:

[0024] See also Figure 1-4 In order to achieve the purpose of heat insulation installation, this embodiment provides the following technical solutions, which specifically disclose: comprising a heating wire 1, the top and bottom of the heating wire 1 are fixedly connected to a heat insulation block 2, the side of the heat insulation block 2 away from the heating wire 1 is fixedly connected to a mounting block 3, the side of the mounting block 3 away from the heat insulation block 2 is fixedly connected to a mounting bolt 4, the top and bottom of the heating wire 1 are provided with a mounting plate 5, the inner cavity of the mounting plate 5 is provided with a mounting groove, the surface of the mounting bolt 4 is threadedly connected to a mounting nut 6, and the side of the mounting plate 5 away from the heat insulation block 2 is fixedly connected to a limit rod 13 A limiting groove that is compatible with the limiting rod 13 is opened on the side of the mounting plate 5 close to the mounting block 3. The mounting nut 6 is located in the inner cavity of the mounting groove, and the end of the mounting bolt 4 away from the heating wire 1 extends to the inner cavity of the mounting plate 5. The heat insulation block 2 is provided to prevent the heat generated by the heating wire 1 from being conducted outward. The mounting bolt 4 is inserted into the inner cavity of the mounting plate 5 and fixed with the mounting nut 6. At this time, the heating wire 1 is installed. The limiting rod 13 and the limiting groove are provided to limit the mounting block 3 to prevent the mounting block 3 from deflecting.

[0025] Example 2:

[0026] See also Figure 1-4The present embodiment provides the following technical solutions for achieving the purpose of adjusting the tightness of the heating wire 1: an adjusting plate 7 is provided on the side of the mounting plate 5 away from the heating wire 1; an adjusting tooth plate 8 is fixedly connected to the side of the mounting plate 5 away from the heating wire 1; the inner cavity of the adjusting plate 7 is movably connected to a rotating rod 9 through a bearing; the surface of the rotating rod 9 is fixedly connected to an adjusting gear 10; the side of the mounting plate 5 away from the heating wire 1 is fixedly connected to a magnetic rod 11; the inner cavity wall of the adjusting plate 7 is fixedly connected to an electromagnet 12; one side of the adjusting plate 7 is fixedly connected to a fixing plate 14; the inner cavity of the fixing plate 14 is provided with a fixing through hole; the front end of the rotating rod 9 is fixedly connected to a rotating block 15; the surface of the rotating block 15 is provided with anti-slip grooves; the inner cavity of the electromagnet 12 is provided with a magnetic suction groove adapted to the magnetic suction rod 11; the inner cavity of the adjusting plate 7 is provided with an inlet and outlet slot adapted to the magnetic suction rod 11; the inner cavity of the adjusting plate 7 is fixedly connected to a limiting plate 16; the mounting plate 5 is away from the heating wire 1 The adjusting gear 10 drives the adjusting tooth plate 8 to move, and the adjusting tooth plate 8 drives the mounting plate 5 to move. By adjusting the position of the mounting plate 5, the purpose of adjusting the tightness of the heating wire 1 is achieved. The provided magnetic rod 11 and the electromagnet 12 can be energized to energize the electromagnet 12 after the position of the mounting plate 5 is adjusted, and the mounting plate 5 is magnetically fixed. The provided fixing plate 14 can fix the adjusting plate 7 in the processing furnace, and the provided rotating block 15 can facilitate the rotation of the rotating rod 9. The provided limiting plate 16, the extension rod 17, the transverse plate 18 and the pulley 19 can be used to limit the mounting plate 5 when the position of the mounting plate 5 is adjusted to avoid shaking.

[0027] The working principle of the present utility model is as follows: insert the mounting bolt 4 into the inner cavity of the mounting plate 5, and screw the mounting nut 6 onto the surface of the mounting bolt 4, rotate the rotating rod 9 through the rotating block 15, the rotating rod 9 drives the adjusting gear 10 to rotate, the adjusting gear 10 drives the adjusting tooth plate 8 to move, the adjusting tooth plate 8 drives the mounting plate 5 to move, and the mounting plate 5 drives the heating wire 1 to move while moving, and adjusts the tightness of the heating wire 1. When the appropriate tightness is adjusted, stop rotating the rotating block 15, and at this time energize the electromagnet 12, the electromagnet 12 magnetically attracts the magnetic rod 11, and the installation and tightness adjustment of the heating wire 1 are completed.

[0028] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the utility model, rather than to limit the scope of protection of the utility model. Although the utility model has been described in detail with reference to the preferred embodiments, ordinary technicians in this field should understand that the technical solution of the utility model can be modified or replaced by equivalents without departing from the essence and scope of the technical solution of the utility model.

Claims

1. A heating device for chemical vapor deposition equipment, comprising a heating wire (1), characterized in that: The top and bottom of the heating wire (1) are fixedly connected to a heat insulating block (2), the side of the heat insulating block (2) away from the heating wire (1) is fixedly connected to a mounting block (3), the side of the mounting block (3) away from the heat insulating block (2) is fixedly connected to a mounting bolt (4), the top and bottom of the heating wire (1) are provided with a mounting plate (5), the inner cavity of the mounting plate (5) is provided with a mounting groove, the surface of the mounting bolt (4) is threadedly connected to a mounting nut (6), the side of the mounting plate (5) away from the heating wire (1) is provided with an adjustment plate (7), the side of the mounting plate (5) away from the heating wire (1) is fixedly connected to an adjustment tooth plate (8), the inner cavity of the adjustment plate (7) is movably connected to a rotating rod (9) through a bearing, the surface of the rotating rod (9) is fixedly connected to an adjustment gear (10), the side of the mounting plate (5) away from the heating wire (1) is fixedly connected to a magnetic suction rod (11), and the inner cavity wall of the adjustment plate (7) is fixedly connected to an electromagnet (12).

2. The heating device for chemical vapor deposition equipment according to claim 1, characterized in that: The side of the mounting plate (5) away from the heat insulation block (2) is fixedly connected to a limiting rod (13), and the side of the mounting plate (5) close to the mounting block (3) is provided with a limiting groove adapted to the limiting rod (13).

3. The heating device for chemical vapor deposition equipment according to claim 1, characterized in that: The mounting nut (6) is located in the inner cavity of the mounting groove, and the end of the mounting bolt (4) away from the heating wire (1) extends to the inner cavity of the mounting plate (5).

4. The heating device for chemical vapor deposition equipment according to claim 1, characterized in that: A fixing plate (14) is fixedly connected to one side of the adjustment plate (7), and a fixing through hole is provided in the inner cavity of the fixing plate (14).

5. The heating device for chemical vapor deposition equipment according to claim 1, characterized in that: The front end of the rotating rod (9) is fixedly connected to a rotating block (15), and the surface of the rotating block (15) is provided with anti-slip grooves.

6. The heating device for chemical vapor deposition equipment according to claim 1, characterized in that: The inner cavity of the electromagnet (12) is provided with a magnetic suction groove adapted to the magnetic suction rod (11), and the inner cavity of the adjustment plate (7) is provided with an inlet and outlet groove adapted to the magnetic suction rod (11).

7. The heating device for chemical vapor deposition equipment according to claim 1, characterized in that: The inner cavity of the regulating plate (7) is fixedly connected to a limiting plate (16), and the side of the mounting plate (5) away from the heating wire (1) is fixedly connected to an extension rod (17), and the extension rod (17) extends from the side of the mounting plate (5) to the inner cavity of the regulating plate (7), and the other end of the extension rod (17) is fixedly connected to a transverse plate (18), and both sides of the transverse plate (18) are fixedly connected to pulleys (19).

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