Feeder

Abstract

The utility model provides a feeder. The feeder comprises a barrel, a connecting rod, a cone and a dustproof assembly. The connecting rod is arranged on the cylinder body and extends in the axis direction of the cylinder body, the cone is arranged at one end of the connecting rod, and the connecting rod is moved in the axis direction of the cylinder body, so that the cone can move in the direction away from the cylinder body, a material guiding gap is formed between the cone and the cylinder body, or the cone moves towards the cylinder body, and the cylinder body is sealed by the cone; the dustproof assembly comprises a dustproof part, and the dustproof part is arranged on the connecting rod in a sleeving mode and can cover the section, in the axis direction, of the barrel. According to the silicon powder feeding device, the dustproof part is arranged, the dustproof part intercepts a silicon powder escaping path, and the silicon powder can be fundamentally prevented from escaping into the auxiliary chamber in the feeding process, so that the cleanliness of the auxiliary chamber is ensured, and the survival of crystals is further ensured.

Description

Technical Field

[0001] The present application relates to a technical field for crystal preparation, and in particular to a feeder. Background Art

[0002] The mainstream method for single crystal production is the Czochralski (RCZ) method, which involves inserting a seed crystal into a single crystal furnace and slowly pulling it upward to form a single crystal rod. During the single crystal production process, multiple feeds are added to the furnace via a feeder.

[0003] Currently, when using a feeder to add materials, silicon powder easily escapes, causing the sub-chamber to be contaminated. Once the sub-chamber is contaminated, the survival of the crystal is seriously affected and the sub-chamber is difficult to clean.

[0004] Therefore, there is an urgent need for a feeder to solve the technical problems existing in the prior art to a certain extent. Utility Model Content

[0005] The purpose of the present application is to provide a feeder that can, to a certain extent, solve the technical problems of using existing feeders, such as the easy escape of silicon powder, which affects the survival of crystals and the difficulty in cleaning the auxiliary chamber.

[0006] The present application provides a feeder for use in a single crystal preparation device; comprising a cylinder, a connecting rod, a cone, and a dustproof component;

[0007] The connecting rod is provided on the cylinder and extends along the axis of the cylinder. The cone is provided at one end of the connecting rod. By moving the connecting rod along the axis of the cylinder, the cone can be moved away from the cylinder to form a material guide gap between the cone and the cylinder, or the cone can be moved toward the cylinder to seal the cylinder.

[0008] The dustproof assembly includes a dustproof portion, which is sleeved on the connecting rod and can cover the cross section of the cylinder along the axial direction.

[0009] In the above technical solution, further, the dustproof assembly includes a dustproof plate that can serve as the dustproof portion;

[0010] The dustproof plate is sleeved on the connecting rod, and the diameter of the dustproof plate is the same as the diameter of the cylinder, so that the dustproof plate can cover the cross section of the cylinder along the axial direction.

[0011] In the above technical solution, further, the dustproof plate and the connecting rod are clearance-matched;

[0012] When the material flows out of the cylinder through the material guiding gap, the dust-proof plate can move toward the cone along the axial direction of the cylinder in coordination with the discharge of the material.

[0013] In the above technical solution, further, the dustproof component also includes an anti-interference part;

[0014] The anti-interference portion is arranged on a side of the dustproof plate facing the cone, and the anti-interference portion is in a gradually expanding structure along a direction from the cone to the cylinder.

[0015] In the above technical solution, further, the anti-interference portion is a frustum.

[0016] In the above technical solution, further, the dustproof plate and the anti-interference portion are integrally formed.

[0017] In the above technical solution, further, the dustproof component also includes a hanging part;

[0018] The hanging portion is arranged on a side of the dustproof plate away from the cone, and the dustproof plate and the anti-interference portion can be moved out of the cylinder through the hanging portion.

[0019] In the above technical solution, further, the angle between the height of the cone and the generatrix of the cone is in the range of 60°-80°.

[0020] In the above technical solution, further, the circumferential edge of the cone away from the cylinder is provided with an outward-turned edge, and when the cone moves toward the cylinder, the outward-turned edge can abut against the edge of the cylinder toward the cone, so that the cone is sealed to the cylinder.

[0021] In the above technical solution, further, the end surface of the outward-turned edge facing the cylinder is an arc-shaped surface.

[0022] Compared with the prior art, this application has the following beneficial effects:

[0023] The present application provides a feeder for use in a single crystal preparation device; comprising a cylinder, a connecting rod, a cone, and a dustproof component;

[0024] The connecting rod is provided on the cylinder and extends along the axis of the cylinder. The cone is provided at one end of the connecting rod. By moving the connecting rod along the axis of the cylinder, the cone can be moved away from the cylinder to form a material guide gap between the cone and the cylinder, or the cone can be moved toward the cylinder to seal the cylinder.

[0025] The dustproof assembly includes a dustproof portion, which is sleeved on the connecting rod and can cover the cross section of the cylinder along the axial direction.

[0026] In summary, the present application sets up a dustproof part, which intercepts the path of silicon powder escaping, and can fundamentally prevent silicon powder from escaping into the sub-chamber during the feeding process, thereby ensuring the cleanliness of the sub-chamber and further ensuring the survival of the crystal. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the specific implementation methods of the present application or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific implementation methods or the description of the prior art. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without any creative work.

[0028] Figure 1 This is a schematic structural diagram of the feeder provided in this application from a first perspective;

[0029] Figure 2 This is a schematic diagram of the structure of the feeder provided in this application from a second perspective;

[0030] Figure 3 This is a schematic diagram of the structure of the hidden cylinder in the feeder provided by this application and viewed from a first perspective;

[0031] Figure 4 This is a schematic structural diagram of the hidden cylinder in the feeder provided in this application and viewed from a second perspective.

[0032] Figure numerals: 1-cylinder; 2-connecting rod; 4-cone; 6-material guide gap; 7-dustproof part; 8-dustproof plate; 9-anti-interference part; 10-frustum; 11-hanging part; 12-outward turning edge. DETAILED DESCRIPTION

[0033] The following detailed description is provided to help the reader gain a comprehensive understanding of the methods, devices, and / or systems described herein. However, various changes, modifications, and equivalents of the methods, devices, and / or systems described herein will be apparent upon understanding the disclosure of this application. For example, the order of operations described herein is merely illustrative and is not limited to the order set forth herein. Rather, except for operations that must occur in a particular order, changes may be made that will be apparent upon understanding the disclosure of this application. Furthermore, descriptions of features known in the art may be omitted for clarity and brevity.

[0034] The features described herein may be implemented in different forms and should not be construed as being limited to the examples described herein. Rather, the examples described herein have been provided merely to illustrate some of the many possible ways to implement the methods, devices, and / or systems described herein that will be apparent upon understanding the disclosure of this application.

[0035] Throughout the specification, when an element (such as a layer, region, or substrate) is described as being “on,” “connected to,” “coupled to,” “over,” or “overlaying” another element, it may be directly “on,” “connected to,” “coupled to,” “over,” or “overlaying” another element, or one or more other elements may be present between them. In contrast, when an element is described as being “directly on,” “directly connected to,” “directly coupled to,” “directly over,” or “directly covering” another element, there may be no other elements intervening therebetween.

[0036] As used herein, the term "and / or" includes any one of the associated listed items and any combination of any two or more items.

[0037] Although terms such as "first," "second," and "third" may be used herein to describe various members, components, regions, layers, or portions, these members, components, regions, layers, or portions are not limited by these terms. Rather, these terms are used only to distinguish one member, component, region, layer, or portion from another member, component, region, layer, or portion. Thus, a first member, component, region, layer, or portion in the examples described herein may also be referred to as a second member, component, region, layer, or portion without departing from the teachings of the examples.

[0038] For ease of description, spatial relational terms such as "above," "upper," "below," and "lower" may be used herein to describe the relationship of one element to another element as shown in the accompanying drawings. Such spatial relational terms are intended to encompass different orientations of the device in use or operation in addition to the orientations depicted in the accompanying drawings. For example, if the device in the accompanying drawings is turned over, an element described as being "above" or "upper" relative to another element would subsequently be "below" or "lower" relative to the other element. Thus, the term "above" includes both the orientations "above" and "below," depending on the spatial orientation of the device. The device may also be positioned in other ways (e.g., rotated 90 degrees or in other orientations), and the spatial relational terms used herein will be interpreted accordingly.

[0039] The terms used herein are intended only to describe various examples and are not intended to limit the present disclosure. Unless the context clearly indicates otherwise, the singular is intended to include the plural. The terms "comprise," "include," and "have" list the presence of stated features, quantities, operations, components, elements, and / or combinations thereof, but do not preclude the presence or addition of one or more other features, quantities, operations, components, elements, and / or combinations thereof.

[0040] Due to manufacturing techniques and / or tolerances, variations in the shapes shown in the drawings may occur. Therefore, the examples described herein are not limited to the specific shapes shown in the drawings but include changes in shapes that occur during manufacturing.

[0041] The features of the examples described herein can be combined in various ways that will be apparent after understanding the disclosure of the present application. In addition, although the examples described herein have various configurations, other configurations are possible as will be apparent after understanding the disclosure of the present application.

[0042] The following combination Figure 1-Figure 4 The feeder provided by the present application is described in detail.

[0043] The present application provides a feeder, which is used in a single crystal preparation device; when using the feeder for feeding, silicon powder is not easy to escape, that is, it will not cause pollution to the sub-chamber, thereby ensuring the cleanliness of the sub-chamber and further ensuring the survival rate of the crystal. The specific structure of the feeder is as follows.

[0044] Combine Figure 1-Figure 4 As shown, the feeder includes a barrel 1, a connecting rod 2, a cone 4 and a dustproof component.

[0045] Specifically, the connecting rod 2 is arranged on the cylinder 1 and extends along the axial direction of the cylinder 1. Furthermore, the cylinder 1 is a cylinder and the connecting rod is a cylindrical rod; specifically, the cone 4 is arranged at one end of the connecting rod 2. Further, the top end of the cone 4 is connected to the connecting rod 2, and the bottom diameter of the cone 4 is the same as the diameter of the cylinder 1.

[0046] Specifically, moving the connecting rod 2 along the axial direction of the cylinder 1 can cause the cone 4 to move in a direction away from the cylinder 1 so that a material guide gap 6 is formed between the cone 4 and the cylinder 1, or cause the cone 4 to move toward the cylinder 1 so that the cone 4 seals the cylinder 1; further, in actual use, it is first necessary to add material to the cylinder 1, then hoist the cylinder 1 into the auxiliary chamber, and finally add the material in the cylinder 1 into the auxiliary chamber; when it is necessary to add material to the cylinder 1, the connecting rod 2 is first moved, and the connecting rod 2 will drive the cone 4 to move toward the cylinder 1, so that the cone 4 seals one end of the cylinder 1, and then add material from the other end of the cylinder 1; when the cylinder 1 with material reaches the auxiliary chamber, the connecting rod 2 moves again, and at this time the connecting rod 2 drives the cone 4 to move away from the cylinder 1, that is, the cone 4 opens the cylinder 1, so that a material guide gap 6 is formed between the cone 4 and the cylinder 1, and the material in the cylinder 1 is discharged from the material guide gap 6, thereby realizing the addition of material to the auxiliary chamber.

[0047] It is worth noting that an additional driving mechanism, such as a driving motor, can be used to move the connecting rod within the cylinder 1, the output end of the driving motor being connected to the connecting rod 2, and the driving motor being able to drive the connecting rod 2 to move within the cylinder 1 along the axis of the cylinder 1. In addition, other feasible structures can also be used, all of which are within the scope of protection of this application.

[0048] In addition, considering that the present application is mainly used in the crystal pulling process, the above-mentioned materials can be understood as silicon powder.

[0049] Specifically, the dustproof assembly includes a dustproof portion 7, which is mounted on the connecting rod 2 and covers the cross-section of the cylinder 1 along the axial direction. Furthermore, when silicon powder is added, it can be diverted from the material guide gap 6. Because the dustproof portion 7 is provided on the connecting rod 2 and because the dustproof portion 7 covers the cross-section of the cylinder 1 along the axial direction, the silicon powder will not escape from the end of the cylinder 1 away from the cone 4, and thus will not escape into the secondary chamber and contaminate the secondary chamber. Furthermore, the dustproof portion 7 is provided on the connecting rod 2, which is equivalent to intercepting the silicon powder on the path of escape.

[0050] In summary, the present application sets up a dustproof part 7, which intercepts the path of silicon powder escaping, and can fundamentally prevent silicon powder from escaping into the sub-chamber during the feeding process, thereby ensuring the cleanliness of the sub-chamber and further ensuring the survival of the crystal.

[0051] In this embodiment, combined Figure 3 As shown, the dustproof assembly includes a dustproof plate 8 that can serve as a dustproof portion 7 .

[0052] Specifically, the dustproof plate 8 is circular, and its diameter is the same as that of the cylinder 1 , so that the dustproof plate 8 can cover the cross section of the cylinder 1 along the axial direction.

[0053] Furthermore, the dustproof plate 8 is clearance-fitted with the connecting rod 2. Specifically, a through-hole is provided at the center of the dustproof plate 8, and the connecting rod 2 passes through the through-hole so that the dustproof plate 8 is set on the connecting rod 2. In addition, the diameter of the through-hole is slightly larger than the diameter of the connecting rod 2, for example, the diameter of the through-hole differs from that of the connecting rod 2 by 1 mm.

[0054] In the actual working process: first, the cone 4 is sealed in the cylinder 1, and then silicon powder is added into the cylinder 1. Finally, the dustproof plate 8 is mounted on the connecting rod 2 from the end of the cylinder 1 away from the cone 4, and the dustproof plate 8 is located just above the silicon powder. The silicon powder can have a certain supporting effect on the dustproof plate 8; when the silicon powder flows out of the cylinder 1 through the material guide gap 6, that is, when the silicon powder slowly flows out of the cylinder 1 due to gravity, the dustproof plate 8 is also slowly moved downward due to the gap fit between it and the connecting rod 2, that is, the dustproof plate 8 moves with the silicon powder.

[0055] In this embodiment, further, combined with Figure 4 As shown, the dustproof assembly further includes an anti-interference portion 9. The anti-interference portion 9 is provided on the side of the dustproof plate 8 facing the cone 4, and the anti-interference portion 9 is a gradually expanding structure along the direction from the cone 4 to the cylinder 1.

[0056] Preferably, the anti-interference portion 9 is a truncated cone 10 .

[0057] Preferably, the dustproof plate 8 and the anti-interference portion 9 are integrally formed.

[0058] In the actual working process, the speed of silicon powder flowing out through the material guide gap 6 may be different, which will cause the upper surface of the silicon powder to be uneven, and may appear to be low on the left and high, high on the left and low, high in the front and low in the back, or low in the front and high in the back (according to Figure 1 (For example, the dustproof plate 8 is placed in the middle.) If there is no cone 10 under the dustproof plate 8, the unevenness of the upper surface of the silicon powder will drive the dustproof plate 8 to be uneven. Once the dustproof plate 8 is uneven, the dustproof plate 8 will not be able to completely seal the cross section of the cylinder 1. That is, there will be a gap between the dustproof plate 8 and the side wall of the cylinder 1. This gap will cause the silicon powder to escape. In other words, the dustproof plate 8 in this case has failed to function. In this embodiment, a cone 4 is provided on the side of the dustproof plate 8 facing the cone 4. The frustum 10 has a gradually expanding structure along the direction from the cone 4 to the cylinder 1. This means that the frustum 10 will create a certain gap between the dustproof plate 8 and the silicon powder. Even if the upper surface of the silicon powder is uneven, it will not directly interfere with the dustproof plate 8. This gap can just alleviate the problem of uneven upper surface of the silicon powder and overcome the interference problem between the dustproof plate 8 caused by the uneven upper surface of the silicon powder. That is, the setting of the frustum 10 can ensure that the dustproof plate 8 always has a dustproof effect.

[0059] In this embodiment, combined Figure 4 As shown, the dustproof component further includes a hanging portion 11. Preferably, the hanging portion 11 is a hook.

[0060] Specifically, the hanging portion 11 is provided on the side of the dustproof plate 8 facing away from the cone 4 , and the dustproof plate 8 and the anti-interference portion 9 can be moved out of the cylinder 1 through the hanging portion 11 .

[0061] In summary, during use, the loading process: first, seal the cone 4 at one end of the cylinder 1, then add silicon powder into the cylinder 1, and finally insert the dust plate 8 through the other end of the cylinder 1 and into the connecting rod 2. The feeding process: The cone 4 opens the cylinder 1, creating a guide gap 6, through which the silicon powder is discharged. As the silicon powder is discharged, the dust plate 8 will continue to move downward; when the next loading is required, the long groove can be used to hook the hook, remove the dust plate 8 from the cylinder 1, and re-add silicon powder to the cylinder 1.

[0062] In this embodiment, the angle between the height of the cone 4 and the generatrix of the cone 4 is in the range of 60° to 80°. Preferably, the angle between the height of the cone 4 and the generatrix of the cone 4 is 70°.

[0063] Specifically, in the prior art, the angle between the height of the cone and the center line of the cone is mostly 30°, while in the present application, the angle between the height of the cone 4 and the center line of the cone 4 is set to be relatively large. When the degree of opening and closing of the cone and the cylinder in the prior art (the relative position between the cone 4 and the cylinder 1 after the cone 4 opens the cylinder 1) is the same as the degree of opening and closing of the cone 4 and the cylinder 1 in the present application, then the present application will have a larger angle. This large angle setting can expand the size of the material guide gap, and then increase the discharge of silicon powder from the cylinder 1, thereby preventing the phenomenon of silicon powder jamming to a certain extent.

[0064] In addition, due to the different types of silicon powder, if silicon powder that is not easily stuck is selected, the relative position between cone 4 and cylinder 1 can be reduced after cone 4 opens cylinder 1. Then, when the silicon powder is discharged from the material guide gap, the small distance between cylinder 1 and cone 4 will make the silicon powder have less potential energy. The reduction in potential energy can reduce the impact of silicon powder on cone 4, thereby increasing the service life of cone 4 to a certain extent.

[0065] In this embodiment, combined Figure 2 and Figure 3 As shown, an outward-turned edge 12 is provided on the circumferential edge of the cone 4 away from the cylinder 1 .

[0066] Specifically, in actual use, when the cone 4 moves toward the cylinder 1 to seal the cylinder 1, the outward-turned edge 12 can eventually abut against the edge of the cylinder 1 facing the cone 4, so that the cone 4 can be sealed to the cylinder 1 without dead angles.

[0067] Furthermore, considering that the edge of the cylinder 1 facing the cone 4 has a certain curvature, in order to further enable the outward-turned edge 12 to completely seal the edge of the cylinder 1 facing the cone 4, the end face of the outward-turned edge 12 facing the cylinder 1 is an arc-shaped surface, and the arc-shaped surface of the outward-turned edge 12 is completely compatible with the arc-shaped edge of the cylinder 1 facing the cone 4, so that the outward-turned edge 12 can completely seal the edge of the cylinder 1 facing the cone 4, ensuring that the cone 4 can be sealed to the cylinder 1 without dead angles.

[0068] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit them. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some or all of the technical features therein. These modifications or replacements do not deviate the essence of the corresponding technical solutions from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A feeder for use in a single crystal preparation device; characterized in that: Including cylinder, connecting rod, cone and dustproof assembly; The connecting rod is provided on the cylinder and extends along the axis of the cylinder. The cone is provided at one end of the connecting rod. By moving the connecting rod along the axis of the cylinder, the cone can be moved away from the cylinder to form a material guide gap between the cone and the cylinder, or the cone can be moved toward the cylinder to seal the cylinder. The dustproof assembly includes a dustproof portion, which is sleeved on the connecting rod and can cover the cross section of the cylinder along the axial direction.

2. The feeder according to claim 1, characterized in that The dustproof assembly includes a dustproof plate that can serve as the dustproof portion; The dustproof plate is sleeved on the connecting rod, and the diameter of the dustproof plate is the same as the diameter of the cylinder, so that the dustproof plate can cover the cross section of the cylinder along the axial direction.

3. The feeder according to claim 2, characterized in that The dustproof plate is clearance-matched with the connecting rod; When the material flows out of the cylinder through the material guiding gap, the dust-proof plate can move toward the cone along the axial direction of the cylinder in coordination with the discharge of the material.

4. The feeder according to claim 2, characterized in that The dustproof component further includes an anti-interference portion; The anti-interference portion is arranged on a side of the dustproof plate facing the cone, and the anti-interference portion is in a gradually expanding structure along a direction from the cone to the cylinder.

5. The feeder according to claim 4, characterized in that The anti-interference portion is a frustum.

6. The feeder according to claim 4, characterized in that The dustproof plate and the anti-interference portion are integrally formed.

7. The feeder according to claim 4, characterized in that The dustproof component also includes a hanging portion; The hanging portion is arranged on a side of the dustproof plate away from the cone, and the dustproof plate and the anti-interference portion can be moved out of the cylinder through the hanging portion.

8. The feeder according to claim 1, characterized in that The included angle between the height of the cone and the generatrix of the cone is in the range of 60° to 80°.

9. The feeder according to claim 8, characterized in that The circumferential edge of the cone away from the cylinder is provided with an outward-turned edge. When the cone moves toward the cylinder, the outward-turned edge can abut against the edge of the cylinder facing the cone, so that the cone is sealed to the cylinder.

10. The feeder according to claim 9, characterized in that The end surface of the outward-turned edge facing the cylinder is an arc-shaped surface.

Images