Bearing device and pipe replacing equipment
By designing a supporting device with support members and sliding components of different roughness, the problem of quartz tubes easily falling on the supporting device is solved, the balance between stability and mobility is achieved, and the efficiency of the tube changing equipment is improved.
Patent Information
- Application Number
- CN202422492454.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-14
- Publication Date
- 2025-09-12
- Estimated Expiration
- 2034-10-14
AI Technical Summary
In the prior art, the quartz tube is easy to move on the supporting device, resulting in the risk of falling, and it is difficult to strike a balance between stability and mobility.
A supporting device is designed, which realizes stable support and convenient movement of the quartz tube by designing the first supporting member and the second supporting member with different roughness, combining a sliding assembly and an adjustment mechanism.
The stability and mobility of the quartz tube on the supporting device are both taken into account, and the tube changing efficiency of the tube changing equipment is improved.
Smart Images
Figure CN223329431U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of solar cell production equipment, and in particular to a supporting device and tube replacement equipment. Background Art
[0002] Solar energy is a clean energy source, and solar cells can convert solar energy into electricity, so they have broad application prospects. Silicon wafers undergo several processing steps to become solar cells, with diffusion and surface coating being the core processes. During solar cell production, diffusion, annealing, and surface coating are performed in diffusion furnaces, annealing furnaces, and tubular PECVD equipment, respectively. All of these processes take place within the reaction chamber, of which the quartz tube is a core component.
[0003] Diffusion furnaces typically use quartz tubes as diffusion chambers. After a quartz boat containing multiple silicon wafers is inserted into the tube, the wafers are heated to a set temperature. Afterward, process gas is introduced into the tube to begin the diffusion process. To improve cell production efficiency and reduce the furnace's footprint, a diffusion furnace typically includes multiple quartz tubes (typically 4 to 6). These tubes are stacked horizontally, often to a height exceeding 3 meters.
[0004] Therefore, when installing the quartz tube located at the top, it is usually necessary to first place the quartz tube on a supporting device, then lift the quartz tube through the supporting device, and finally push the quartz tube into the furnace body.
[0005] Related art generally only considers the ease of pushing the quartz tube into the furnace body. Specifically, when the quartz tube is moved, the friction between the quartz tube and the supporting device is usually rolling friction. However, when the quartz tube is placed on the supporting device, it is easy to move, and there is a risk of the quartz tube falling. Utility Model Content
[0006] To this end, the present application proposes a supporting device that can take into account both the stability of the quartz tube support and the convenience of moving the quartz tube.
[0007] The present application also proposes a pipe changing device having the above-mentioned supporting device.
[0008] According to the first embodiment of the present application, the supporting device includes:
[0009] base;
[0010] a first support member slidably connected to the base, wherein the sliding direction of the first support member relative to the base is a first direction; the first support member has a first surface, and the first surface is used to support one end of the pipe;
[0011] A second support member is connected to the base, and the second support member and the first support member are arranged along the first direction; the second support member is provided with a second surface, the second surface is used to support the other end of the pipe, and the roughness of the second surface is less than the roughness of the first surface.
[0012] The supporting device according to the embodiment of the present application has at least the following beneficial effects: when the quartz tube (a type of tube) is placed on the first support member and the second support member, the first surface and the second surface are in contact with the quartz tube; when the first support member and the second support member do not move relative to each other, the first support member and the second support member can maintain contact with the quartz tube, the first support member and the second support member can stably support the quartz tube, and the quartz tube is not easy to fall off the supporting device; when the first support member slides relative to the base and the first support member approaches the second support member, since the roughness of the second surface is less than that of the first surface, the quartz tube will slide relative to the second support member, thereby facilitating the pushing of the quartz tube; thus, the stability of the quartz tube support and the convenience of the quartz tube movement are both taken into account.
[0013] According to some embodiments of the present application, the second support member includes:
[0014] a body connected to the base;
[0015] A backing plate is installed on the main body, and the backing plate is provided with the second surface.
[0016] According to some embodiments of the present application, the material of the pad is polytetrafluoroethylene.
[0017] According to some embodiments of the present application, the material of the main body is ABS plastic, and the pad is welded to the main body.
[0018] According to some embodiments of the present application, the position of the second support member relative to the base along the first direction is adjustable.
[0019] According to some embodiments of the present application, the further comprising:
[0020] Nuts;
[0021] The base is provided with a first mounting hole, the bolt is passed through the first mounting hole, and the bolt can move along the first direction in the first mounting hole; the second support member is provided with a second mounting hole, the bolt is also passed through the second mounting hole; the bolt can cooperate with the nut thread to fix the second support member to the base.
[0022] According to some embodiments of the present application, the material of the first support member is ABS plastic.
[0023] According to some embodiments of the present application, the first surface includes a first concave surface, and the first concave surface is used to support one end of the tube; the second surface includes a second concave surface, and the second concave surface is used to support the other end of the tube.
[0024] According to some embodiments of the present application, the first concave surface is an arc surface or an elliptical surface, and the second concave surface is an arc surface or an elliptical surface.
[0025] The pipe-changing device according to the second embodiment of the present application includes:
[0026] the aforementioned supporting device;
[0027] A lifting device, used for driving the base to move in an up and down direction;
[0028] The translation device is used to drive the base to move along the second direction, assuming that the second direction is a horizontal direction and the angle between the second direction and the first direction is greater than zero.
[0029] The tube changing device according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned supporting device, the stability of the quartz tube support and the convenience of moving the quartz tube are both taken into account, and the tube changing efficiency of the tube changing device is higher.
[0030] Additional aspects and advantages of the present application will be given in part in the description below, and in part will become obvious from the description below, or will be learned through practice of the present application. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] The present application is further described below with reference to the accompanying drawings and embodiments, wherein:
[0032] Figure 1 A three-dimensional diagram of a supporting device according to an embodiment of the present application;
[0033] Figure 2 for Figure 1 a cross-sectional view of the middle support device;
[0034] Figure 3 This is a schematic diagram of a tube replacement device according to an embodiment of the present application.
[0035] Reference numerals: base 100, first mounting hole 110;
[0036] First support member 200, first surface 210, first concave surface 211;
[0037] The second support member 300, the body 310, the second mounting hole 311, the backing plate 320, the second surface 321, and the second concave surface 322;
[0038] Sliding assembly 400, slider 410, slide rail 420;
[0039] Bolt 510, nut 520;
[0040] Lifting device 610 and translation device 620. DETAILED DESCRIPTION
[0041] The following describes in detail embodiments of the present application. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present application and are not to be construed as limiting the present application.
[0042] In the description of this application, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on this application.
[0043] In the description of this application, "several" means one or more, "plurality" means two or more, "greater than," "less than," and "exceed" are understood to exclude the number itself, while "above," "below," and "within" are understood to include the number itself. The use of "first" and "second" in the description is solely for the purpose of distinguishing technical features and is not to be construed as indicating or implying relative importance, implicitly specifying the number of the indicated technical features, or implicitly specifying the order of the indicated technical features.
[0044] In the description of this application, unless otherwise clearly defined, terms such as setting, installing, and connecting should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in this application based on the specific content of the technical solution.
[0045] In the description of this application, reference to the terms "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of this application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described can be combined in any appropriate manner in any one or more embodiments or examples.
[0046] It should be noted that the pipes supported by the supporting device in the following embodiments are quartz pipes as an example, but the pipes that can be supported by the supporting device are not limited to quartz pipes. For example, the pipes can also be steel pipes, aluminum pipes, copper pipes, and copper pipes.
[0047] Reference Figure 1 According to the first embodiment of the present application, the supporting device includes a base 100, a first support member 200 and a second support member 300. The first support member 200 is slidably connected to the base 100, and the sliding direction of the first support member 200 relative to the base 100 is a first direction (refer to Figure 1 , for example, the first direction is the left-right direction). The first support member 200 has a first surface 210, which is used to support one end of the quartz tube. The second support member 300 is connected to the base 100, and the second support member 300 and the first support member 200 are arranged along the first direction. The second support member 300 has a second surface 321, which is used to support the other end of the quartz tube. The roughness of the second surface 321 is less than that of the first surface 210.
[0048] According to the supporting device of the embodiment of the present application, there are at least the following beneficial effects: when the quartz tube is placed on the first support member 200 and the second support member 300, the first surface 210 and the second surface 321 are in contact with the quartz tube; when the first support member 200 and the second support member 300 do not move relative to each other, the first surface 210 and the second surface 321 can maintain contact with the quartz tube, the first support member 200 and the second support member 300 can stably support the quartz tube, and the quartz tube is not easy to fall off the supporting device; when the first support member 200 slides relative to the base 100 and the first support member 200 approaches the second support member 300, since the roughness of the second surface 321 is less than the roughness of the first surface 210, the quartz tube will slide relative to the second support member 300, thereby facilitating the pushing of the quartz tube; thus, both the stability of the quartz tube support and the convenience of the quartz tube movement are taken into account.
[0049] Specifically, the support device further includes a sliding assembly 400, which includes a slider 410 and a slide rail 420. The length of the slide rail 420 is arranged along the first direction and is secured to the base 100 via fasteners. The slider 410 and the slide rail 420 are slidably coupled, and the slider 410 is secured to the first support member 200 via fasteners. Thus, the first support member 200 can slide relative to the base 100 in the first direction.
[0050] In another embodiment, the first support member 200 may also be slidably connected to the base 100 through the cooperation of a slider and a sliding groove.
[0051] Specifically, the second support member 300 may be fixed to the base 100 by fasteners (bolts, nuts, etc.).
[0052] Reference Figure 1In some embodiments of the present application, the second support member 300 includes a body 310 and a backing plate 320. The body 310 is connected to the base 100. The backing plate 320 is mounted on the body 310 and has a second surface 321.
[0053] By decomposing the second support member 300 into the main body 310 and the backing plate 320, and separately providing the second surface 321 on the backing plate 320, it is feasible to use different materials to manufacture the main body 310 and the backing plate 320. In other words, to meet the roughness requirements of the second surface 321, if the main body 310 and the backing plate 320 are two separate parts, the backing plate 320 can be made of a material different from that of the main body 310, without requiring the entire second support member 300 to be made of a specific material. This facilitates meeting the roughness requirements of the second surface 321 at a lower material cost.
[0054] Reference Figure 1 In an improved solution of the above embodiment, the material of the pad 320 is polytetrafluoroethylene.
[0055] The low coefficient of friction between polytetrafluoroethylene and the quartz tube helps meet the requirement that the roughness of second surface 321 be less than that of first surface 210. Furthermore, polytetrafluoroethylene exhibits high thermal stability, good wear resistance, high hardness, and high compressive strength, thereby extending the service life of backing plate 320 and maintaining more stable physical properties.
[0056] In another embodiment, the material of the pad 320 can also be selected from polyetheretherketone and polyformaldehyde. There is a low friction coefficient between polyetheretherketone and the quartz tube, and between polyformaldehyde and the quartz tube, which is also conducive to meeting the requirement that "the roughness of the second surface 321 is less than the roughness of the first surface 210".
[0057] Reference Figure 1 In the improved solution of the above embodiment, the material of the main body 310 is ABS plastic, and the pad 320 is welded to the main body 310.
[0058] ABS plastic has high impact strength, so when the body 310 supports the quartz tube, it can effectively absorb impact energy, making the body 310 less susceptible to breakage and extending the service life of the second support member 300. Furthermore, both polytetrafluoroethylene and ABS plastic are plastic, and the backing plate 320 is welded to the body 310, which increases the connection strength between the body 310 and the backing plate 320 and extends the service life of the second support member 300.
[0059] In another embodiment, the material of the body 310 may also be aluminum or stainless steel. In this case, the backing plate 320 may be fixed to the body 310 by fasteners.
[0060] Reference Figure 1 In some embodiments of the present application, the position of the second support member 300 relative to the base 100 along the first direction is adjustable.
[0061] By adjusting the position of the second support member 300 relative to the base 100 along the first direction, the distance between the first support member 200 and the second support member 300 can be adjusted, which is conducive to supporting quartz tubes of different lengths, thereby enhancing the compatibility of the supporting device.
[0062] Reference Figure 2 In an improved version of the above embodiment, the supporting device further includes a bolt 510 and a nut 520. The base 100 is provided with a first mounting hole 110, through which the bolt 510 is inserted and can move in a first direction within the first mounting hole 110. The second support member 300 is provided with a second mounting hole 311, through which the bolt 510 is also inserted. The bolt 510 can be threadedly engaged with the nut 520 to secure the second support member 300 to the base 100.
[0063] When it is necessary to adjust the position of the second support member 300 relative to the base 100 along the first direction, loosen the nut 520 threadedly engaged with the bolt 510 to move the second support member 300 relative to the base 100 along the first direction, and at the same time move the bolt 510 along the first direction in the first mounting hole 110. After the second support member 300 moves into position, tighten the bolt 510 and the nut 520 to fix the second support member 300 to the base 100 again.
[0064] It should be noted that “the bolt 510 can be threadedly engaged with the nut 520 to fix the second support member 300 to the base 100” means that after the bolt 510 and the nut 520 are tightened, the head of the bolt 510 and the nut 520 can clamp a part of the second support member 300 and a part of the base 100, thereby fixing the second support member 300 to the base 100.
[0065] In another embodiment, the first mounting hole 110 can also be replaced by a plurality of through holes arranged at intervals along the first direction. When the second support member 300 moves to different positions relative to the base 100 along the first direction, the bolts 510 are inserted into different through holes, thereby realizing position adjustment of the second support member 300 relative to the base 100 along the first direction.
[0066] Reference Figure 1 In some embodiments of the present application, the material of the first support member 200 is ABS plastic.
[0067] ABS plastic has a high impact strength, so the first support member 200 can effectively absorb impact energy when carrying the quartz tube, the main body 310 is not easily broken, and the service life of the first support member 200 is extended.
[0068] In another embodiment, the material of the first support member 200 may also be aluminum or stainless steel.
[0069] Reference Figure 1 In some embodiments of the present application, the first surface 210 includes a first concave surface 211 for supporting one end of the quartz tube. The second surface 321 includes a second concave surface 322 for supporting the other end of the quartz tube.
[0070] When the first concave surface 211 and the second concave surface 322 support the quartz tube, the quartz tube will stay at the lowest point of the first concave surface 211 and the second concave surface 322 under the action of gravity. The position of the quartz tube is more stable and the risk of the quartz tube escaping from the supporting device is lower.
[0071] Reference Figure 1 In an improved solution of the above embodiment, the first concave surface 211 is an arc surface or an elliptical surface, and the second concave surface 322 is an arc surface or an elliptical surface.
[0072] Since the cross-section of the quartz tube is generally circular or elliptical, the first concave surface 211 is set as an arc surface or an elliptical surface, and the second concave surface 322 is set as an arc surface or an elliptical surface. The first concave surface 211 and the second concave surface 322 can fit more closely with the quartz tube, the quartz tube is less likely to shake, and the risk of the quartz tube detaching from the supporting device is lower.
[0073] Reference Figure 3 According to the second embodiment of the present application, the pipe changing device includes a supporting device, a lifting device 610 and a translation device 620. The lifting device 610 is used to drive the base 100 to move in the up and down directions. Assume that the second direction is the horizontal direction (refer to Figure 3 , for example, the second direction is the front-to-back direction), and the angle between the second direction and the first direction is greater than zero, and the translation device 620 is used to drive the base 100 to move along the second direction.
[0074] The tube changing device according to the embodiment of the present application has at least the following beneficial effects: by using the above-mentioned supporting device, the stability of the quartz tube support and the convenience of moving the quartz tube are both taken into account, and the tube changing efficiency of the tube changing device is higher.
[0075] It should be noted that the lifting device 610 is mainly used to lift the quartz tube to a set height, and the translation device 620 is mainly used to adjust the horizontal position of the quartz tube so that the quartz tube is horizontally aligned with the installation space on the furnace body.
[0076] Specifically, the angle between the second direction and the first direction can be 45°, 60°, 80°, or other values. Preferably, the angle between the second direction and the first direction is 90°. In this case, the quartz tube driven by the translation device 620 will not have a displacement component in the first direction. When the translation device 620 drives the quartz tube to move, the quartz tube will not approach or move away from the furnace body, and the risk of collision between the quartz tube and the furnace body is low.
[0077] Specifically, the lifting device 610 may include one of a linear motor, an air cylinder, an oil cylinder, a motor-driven rack and pinion mechanism, a motor-driven slider-crank mechanism, a motor-driven synchronous wheel and belt mechanism, and a motor-driven sprocket and chain mechanism. The translation device 620 may include one of a linear motor, an air cylinder, an oil cylinder, a motor-driven rack and pinion mechanism, a motor-driven slider-crank mechanism, a motor-driven synchronous wheel and belt mechanism, and a motor-driven sprocket and chain mechanism.
[0078] The embodiments of the present application have been described in detail above with reference to the accompanying drawings. However, the present application is not limited to the above embodiments. Various modifications can be made within the scope of knowledge possessed by ordinary technicians in the relevant technical field without departing from the purpose of the present application. In addition, the embodiments of the present application and the features of the embodiments can be combined with each other unless there is a conflict.
Claims
1. A supporting device, characterized in that: include: base; a first support member slidably connected to the base, wherein the sliding direction of the first support member relative to the base is a first direction; the first support member has a first surface, and the first surface is used to support one end of the pipe; A second support member is connected to the base, and the second support member and the first support member are arranged along the first direction; the second support member is provided with a second surface, the second surface is used to support the other end of the pipe, and the roughness of the second surface is less than the roughness of the first surface.
2. The supporting device according to claim 1, characterized in that: The second support member comprises: a body connected to the base; A backing plate is installed on the main body, and the backing plate is provided with the second surface.
3. The supporting device according to claim 2, characterized in that: The material of the backing plate is polytetrafluoroethylene.
4. The supporting device according to claim 3, characterized in that: The material of the body is ABS plastic, and the pad is welded to the body.
5. The supporting device according to claim 1, characterized in that: The position of the second support member relative to the base along the first direction is adjustable.
6. The supporting device according to claim 5, characterized in that: Also includes: Nuts; The base is provided with a first mounting hole, the bolt is passed through the first mounting hole, and the bolt can move along the first direction in the first mounting hole; the second support member is provided with a second mounting hole, the bolt is also passed through the second mounting hole; the bolt can cooperate with the nut thread to fix the second support member to the base.
7. The supporting device according to claim 1, characterized in that: The first supporting member is made of ABS plastic.
8. The supporting device according to claim 1, characterized in that: The first surface includes a first concave surface, and the first concave surface is used to support one end of the pipe; the second surface includes a second concave surface, and the second concave surface is used to support the other end of the pipe.
9. The supporting device according to claim 8, characterized in that: The first concave surface is an arc surface or an elliptical surface, and the second concave surface is an arc surface or an elliptical surface.
10. Tube changing equipment, characterized in that: include: The supporting device according to any one of claims 1 to 9; A lifting device, used for driving the base to move in an up and down direction; The translation device is used to drive the base to move along the second direction, assuming that the second direction is a horizontal direction and the angle between the second direction and the first direction is greater than zero.