Lifting and rotating device for furnace body of single crystal furnace

Abstract

The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace body lifting and rotating device which comprises a lifting device and a rotating component, the lifting device comprises an oil cylinder fixing seat fixedly arranged on a mounting surface, a hydraulic oil cylinder arranged on the oil cylinder fixing seat and a lifting platform arranged on the mounting surface in a sliding manner, a piston rod of the hydraulic oil cylinder is fixedly arranged at the upper end of the lifting platform, the rotating assembly comprises a rotating shaft fixedly arranged on the lifting platform, a lifting frame rotationally arranged on the rotating shaft and a rotating driving device arranged between the rotating shaft and the lifting frame, and a clamping jaw assembly is arranged at the lower end of the lifting frame. The lifting and rotation of the furnace body are accurately controlled, the operation process is simplified, the operation difficulty is reduced, the maintenance and replacement are convenient, the production efficiency is improved, the direct contact between an operator and the high-temperature furnace body is reduced through the automatic clamping and releasing functions, and the operation safety is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal furnaces, in particular to a lifting and rotating device for a single crystal furnace body. Background Art

[0002] Single crystal furnaces are essential equipment in the process of converting polycrystalline silicon into single crystal silicon. As a key supporting material for the modern information society, single crystal silicon is one of the most important single crystal materials in the world. It is not only the main functional material for the development of computers and integrated circuits, but also the main functional material for photovoltaic power generation using solar energy.

[0003] In the process of preparing single crystal silicon using a single crystal furnace, the middle furnace body of the single crystal furnace needs to be lifted and rotated, so a corresponding middle furnace body lifting and rotating device is required. The currently disclosed technology uses the traditional shaft lifting and chain or belt driven rotation method, which has a relatively complex structure, high manufacturing cost, and low transmission accuracy. Utility Model Content

[0004] In order to solve the problems of the prior art, the utility model provides a single crystal furnace body lifting and rotating device.

[0005] The purpose of the utility model can be achieved through the following technical solutions: A single crystal furnace body lifting and rotating device, comprising:

[0006] A lifting device, comprising a cylinder fixing seat fixedly mounted on a mounting surface, a hydraulic cylinder mounted on the cylinder fixing seat, and a lifting platform slidably mounted on the mounting surface, wherein a piston rod of the hydraulic cylinder is fixedly mounted on an upper end of the lifting platform;

[0007] The rotating assembly includes a rotating shaft fixedly arranged on the lifting platform, a lifting frame rotatably arranged on the rotating shaft, and a rotating drive device arranged between the rotating shaft and the lifting frame. A clamping claw assembly is arranged at the lower end of the lifting frame.

[0008] As a further improvement, the rotation drive device includes a large gear fixedly arranged on the rotating shaft, a rotating motor arranged on the lifting frame, and a small gear arranged on the output end of the rotating motor, and the small gear is meshed with the large gear.

[0009] As a further improvement, the lifting platforms are provided with two groups, and linear bearings are provided on one side of the two groups of lifting platforms close to the mounting surface, and the lifting platforms are slidably provided on the linear slide rails of the mounting surface through the linear bearings.

[0010] A further improvement includes a guide mechanism, which includes a guide rod arranged on the mounting surface and a guide seat arranged at the lower end of the lifting frame, and the front end of the guide seat is slidably arranged in the guide rod.

[0011] As a further improvement, the clamping jaw assembly includes a clamping jaw mounting seat fixedly arranged on the lifting frame, a clamping jaw rotatably arranged on the clamping jaw mounting seat, and a clamping jaw oil cylinder rotatably arranged between the clamping jaw mounting seat and the clamping jaw.

[0012] As a further improvement, a copper sleeve is provided between the rotating shaft and the lifting frame.

[0013] As a further improvement, the clamping jaw assembly is provided in multiple groups.

[0014] Compared with the prior art, the present invention has the following beneficial effects:

[0015] 1. The lifting device of the utility model consists of a cylinder fixing seat, a hydraulic cylinder and a lifting platform. The piston rod of the hydraulic cylinder is fixed to the upper end of the lifting platform. The vertical movement of the furnace body is achieved through the telescopic action of the hydraulic cylinder. The rotating assembly includes a rotating shaft, a lifting frame and a rotating drive device. The clamping claw assembly at the lower end of the lifting frame is used to clamp and release the furnace body, while the rotating drive device is responsible for driving the lifting frame to rotate around the rotating shaft to achieve precise positioning of the furnace body.

[0016] 2. The utility model realizes the rotation of the lifting frame by means of gear meshing. Compared with the traditional belt drive or chain drive, it greatly improves the reliability of the equipment and facilitates the subsequent maintenance and replacement.

[0017] 3. The number of the clamping jaw assemblies of the present invention is preferably more than one, and the clamping jaws can be automatically opened and closed under the action of the clamping jaw cylinder. When in the closed state, the middle furnace barrel can be grabbed by hanging the connecting plate on the middle furnace barrel, and then the lifting and rotation of the middle furnace barrel can be achieved under the action of the device. The structure is simple and the operation is convenient. At the same time, a clamping jaw protection cover can be provided on the outside of the clamping jaw assembly to protect the clamping jaw cylinder from being damaged by collision. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a structural diagram of the utility model;

[0019] Figure 2 For this utility model Figure 1 Enlarged view of the part A in the middle;

[0020] Figure 3 For this utility model Figure 1 Enlarged view of part B in the middle.

[0021] In the figure, 1. lifting device; 11. cylinder fixing seat; 12. hydraulic cylinder; 13. lifting platform; 131. linear bearing; 2. rotating assembly; 21. rotating shaft; 22. lifting frame; 3. rotating drive device; 31. large gear; 32. rotating motor; 33. small gear; 4. clamping jaw assembly; 41. clamping jaw mounting seat; 42. clamping jaw; 43. clamping jaw cylinder; 5. guide mechanism; 51. guide rod; 52. guide seat. DETAILED DESCRIPTION

[0022] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention.

[0023] In the description of this utility model, it should be noted that, unless otherwise specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections. Those skilled in the art will understand the specific meanings of these terms in this utility model based on the specific circumstances.

[0024] Below with reference to the embodiment and the attached Figures 1 to 3 , the technical solution of the utility model is further elaborated.

[0025] Example 1

[0026] A single crystal furnace body lifting and rotating device, comprising:

[0027] A lifting device 1 includes a cylinder fixing seat 11 fixedly mounted on a mounting surface, a hydraulic cylinder 12 mounted on the cylinder fixing seat 11, and a lifting platform 13 slidably mounted on the mounting surface, wherein a piston rod of the hydraulic cylinder 12 is fixedly mounted on an upper end of the lifting platform 13;

[0028] The rotating assembly 2 includes a rotating shaft 21 fixedly arranged on the lifting platform 13, a lifting frame 22 rotatably arranged on the rotating shaft 21, and a rotating drive device 3 arranged between the rotating shaft 21 and the lifting frame 22. A clamping claw assembly 4 is provided at the lower end of the lifting frame 22.

[0029] like Figures 1 to 3As shown, the lifting device 1 of the present invention is composed of a cylinder fixing seat 11, a hydraulic cylinder 12 and a lifting platform 13, wherein the piston rod of the hydraulic cylinder 12 is fixed to the upper end of the lifting platform 13, and the vertical movement of the furnace body is realized through the telescopic action of the hydraulic cylinder; the rotating assembly 2 includes a rotating shaft 21, a lifting frame 22 and a rotating drive device 3, the clamping claw assembly 4 at the lower end of the lifting frame 22 is used to clamp and release the furnace body, and the rotating drive device 3 is responsible for driving the lifting frame to rotate around the rotating shaft to achieve precise positioning of the furnace body.

[0030] The utility model accurately controls the lifting and rotation of the furnace body, simplifies the operation process, reduces the difficulty of operation, saves space, facilitates maintenance and replacement, improves production efficiency, and through the automatic clamping and releasing function, reduces the direct contact between the operator and the high-temperature furnace body, thereby improving the safety of operation.

[0031] As a further preferred embodiment, the rotation drive device 3 includes a large gear 31 fixed on the rotating shaft 21, a rotating motor 32 arranged on the lifting frame 22, and a small gear 33 arranged on the output end of the rotating motor 32, and the small gear 33 is engaged with the large gear 31.

[0032] Specifically, such as Figure 3 As shown, the present invention realizes the rotation of the lifting frame 22 by transmission through gear meshing, which greatly improves the reliability of the equipment compared with the traditional belt drive or chain drive, and is convenient for subsequent maintenance and replacement.

[0033] As a further preferred embodiment, the lifting platform 13 is provided with two groups, and the two groups of lifting platforms 13 are provided with linear bearings 131 on the side close to the mounting surface. The lifting platform 13 is slidably set on the linear slide rail of the mounting surface through the linear bearings 131. The stability of the equipment lifting is improved through the movement of the linear bearings 131 and the linear slide rail.

[0034] As a further preferred embodiment, it also includes a guide mechanism 5, which includes a guide rod 51 arranged on the mounting surface and a guide seat 52 arranged at the lower end of the lifting frame 22. The front end of the guide seat 52 is slidably arranged in the guide rod 51. Through the coordinated guidance of the guide rod 51 and the guide seat 52, on the one hand, it ensures that the position of each rotation during the rotation process is fixed and accurate, and on the other hand, it ensures smooth operation during the lifting process.

[0035] As a further preferred embodiment, the clamping jaw assembly 4 includes a clamping jaw mounting base 41 fixedly arranged on the lifting frame 22, a clamping jaw 42 rotatably arranged on the clamping jaw mounting base 41, and a clamping jaw cylinder 43 rotatably arranged between the clamping jaw mounting base 41 and the clamping jaw 42. The clamping jaw assembly 4 is provided with multiple groups.

[0036] Specifically, the number of the jaw assemblies 4 is preferably more than 3, and the jaws 42 can be automatically opened and closed under the action of the jaw cylinder 43. When in the closed state, the middle furnace barrel can be grabbed by hanging the connecting plate on the middle furnace barrel, and then the lifting and rotation of the middle furnace barrel can be achieved under the action of this set of devices. The structure is simple and the operation is convenient. At the same time, a jaw protection cover can be set on the outside of the jaw assembly 4 to protect the jaw cylinder 43 from damage due to collision.

[0037] As a further preferred embodiment, a copper sleeve is provided between the rotating shaft 21 and the lifting frame 22 to reduce wear during the rotation process.

[0038] The above describes in detail the preferred embodiments of the present invention. It should be understood that those skilled in the art can make numerous modifications and variations based on the concepts of the present invention without inventive effort. Therefore, any technical solutions that can be derived by those skilled in the art based on the concepts of the present invention through logical analysis, reasoning, or limited experimentation based on the existing technology should be within the scope of protection defined by the claims.

Claims

1. A single crystal furnace body lifting and rotating device, characterized in that: include: A lifting device (1), comprising a cylinder fixing seat (11) fixedly arranged on a mounting surface, a hydraulic cylinder (12) arranged on the cylinder fixing seat (11), and a lifting platform (13) slidably arranged on the mounting surface, wherein a piston rod of the hydraulic cylinder (12) is fixedly arranged on an upper end of the lifting platform (13); A rotating assembly (2) includes a rotating shaft (21) fixedly arranged on the lifting platform (13), a lifting frame (22) rotatably arranged on the rotating shaft (21), and a rotating drive device (3) arranged between the rotating shaft (21) and the lifting frame (22); a clamping claw assembly (4) is provided at the lower end of the lifting frame (22).

2. The single crystal furnace body lifting and rotating device according to claim 1, characterized in that: The rotary drive device (3) comprises a large gear (31) fixedly arranged on the rotating shaft (21), a rotary motor (32) arranged on the lifting frame (22), and a small gear (33) arranged on the output end of the rotary motor (32), wherein the small gear (33) is meshed with the large gear (31).

3. The single crystal furnace body lifting and rotating device according to claim 1, characterized in that: The lifting platforms (13) are provided with two groups, and a linear bearing (131) is provided on one side of the two groups of lifting platforms (13) close to the mounting surface. The lifting platforms (13) are slidably provided on the linear slide rails of the mounting surface through the linear bearings (131).

4. The single crystal furnace body lifting and rotating device according to claim 1, characterized in that: The invention also includes a guide mechanism (5), wherein the guide mechanism (5) includes a guide rod (51) arranged on the mounting surface and a guide seat (52) arranged at the lower end of the lifting frame (22), and the front end of the guide seat (52) is slidably arranged in the guide rod (51).

5. The single crystal furnace body lifting and rotating device according to claim 1, characterized in that: The clamping jaw assembly (4) comprises a clamping jaw mounting seat (41) fixedly arranged on the lifting frame (22), a clamping jaw (42) rotatably arranged on the clamping jaw mounting seat (41), and a clamping jaw oil cylinder (43) rotatably arranged between the clamping jaw mounting seat (41) and the clamping jaw (42).

6. A single crystal furnace body lifting and rotating device according to claim 1 or 2, characterized in that: A copper sleeve is provided between the rotating shaft (21) and the lifting frame (22).

7. The single crystal furnace body lifting and rotating device according to claim 1 or 5, characterized in that: The clamping jaw assemblies (4) are provided in multiple groups.

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