Gas conveying device for helium detection and detection equipment

Abstract

The utility model discloses a gas conveying device for helium detection and detection equipment. The gas conveying device comprises a gas conveying pipe, an isolation pipe, a first connector and a second connector, the gas conveying pipe comprises a gas conveying main cavity, a first end part and a second end part; the isolating pipe is provided with a third end part and a fourth end part, the isolating pipe sleeves the gas conveying pipe, and an isolating main cavity is formed between the gas conveying pipe and the isolating pipe; the first connector is provided with an inner pipe fixing part and a first outer pipe fixing part, the inner pipe fixing part is connected with the gas conveying pipe, and the first outer pipe fixing part is connected with the isolation pipe; a gas transmission auxiliary cavity communicated with the gas transmission main cavity is formed in the first connector; the second connector is provided with a second outer pipe fixing part, and the second outer pipe fixing part is connected with the isolation pipe; a through hole allowing the gas conveying pipe to penetrate through is formed in the second connector, and an auxiliary isolation cavity communicated with the main isolation cavity is formed between the through hole and the gas conveying pipe. According to the utility model, the risk that gas in the gas delivery pipe leaks to a test environment can be reduced, and the reliability of a test result is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of airtightness detection, in particular to a gas conveying device and detection equipment for helium detection. Background Art

[0002] With the increasing requirements for product sealing, the air leak detection method can no longer meet market requirements. The detection method using helium as a tracer gas was born. Helium has a low content in the air and a small molecular weight. It is easier to leak from tiny gaps than air. Therefore, it is widely used in the airtightness detection industry.

[0003] In the traditional helium inspection process, the workpiece needs to be placed in a vacuum chamber, and helium is transported into the workpiece in the vacuum chamber. Then, by observing the leakage of helium in the vacuum chamber, it is determined whether the workpiece is leaking. During the helium inspection process, the workpiece to be inspected is placed in a vacuum box, and then the helium gas pipeline is connected to the workpiece to be inspected, the product is filled with helium, and finally the vacuum box is evacuated to a vacuum environment. The concentration of helium in the vacuum box is then detected by a leak detector to determine whether the product is leaking. In this process, the pipeline for transporting helium is also exposed to the vacuum environment, and the contact area between the pipeline and the vacuum environment is large. Helium can easily leak from the gas pipeline into the vacuum box, thereby interfering with the test results. The gas pipeline usually uses materials such as nylon tubes. Nylon tubes have certain elasticity and are not easily damaged by long-term bending. However, helium molecules are small and can easily penetrate into the vacuum box through pipelines made of materials such as nylon tubes. Especially when the pressure difference between the inside and outside of the pipeline is large, helium is more likely to penetrate into the vacuum box, resulting in too high a background value of the vacuum box, affecting the test results. Therefore, there is an urgent need for a gas delivery device that will not affect the test environment. Utility Model Content

[0004] In order to overcome the deficiencies of the prior art, the purpose of the present invention is to provide a gas delivery device and detection equipment for helium detection, which can reduce the risk of gas leakage in the gas pipeline to the test environment and improve the reliability of the test results.

[0005] One of the purposes of this utility model is to provide a gas delivery device for helium detection, which is achieved by the following technical solutions:

[0006] A gas delivery device for helium detection, characterized by comprising a gas delivery pipe, an isolation pipe, a first connector and a second connector;

[0007] The gas delivery pipe has a first pipe wall, a gas delivery main cavity is formed in the first pipe wall, and two ends form a first end portion and a second end portion respectively;

[0008] The isolation tube has a second tube wall, with two ends forming a third end and a fourth end. The isolation tube is sleeved on the gas transmission pipe, so that an isolation main cavity is formed between the first tube wall and the second tube wall.

[0009] One end of the first connector is used to connect to the workpiece to be inspected, and the other end is provided with an inner tube fixing portion and a first outer tube fixing portion, the inner tube fixing portion is connected to the first end of the gas transmission pipe, and the first outer tube fixing portion is connected to the third end of the isolation pipe; a gas transmission sub-cavity is formed inside the first connector, and the gas transmission sub-cavity is connected to the gas transmission main cavity;

[0010] One end of the second connecting head is used to connect to the vacuum box, and the other end is formed with a second outer tube fixing portion, and the second outer tube fixing portion is connected to the fourth end of the isolation tube; a through hole is formed inside the second connecting head, and the through hole can be used for the second end of the gas pipe to pass through, and an isolation sub-cavity is formed between the through hole and the first tube wall, and the isolation sub-cavity is connected to the isolation main cavity.

[0011] In one of the purposes of the present invention, as an optional embodiment, the isolated sub-cavity is communicated with the atmosphere.

[0012] In one of the purposes of the present invention, as an optional embodiment, the isolation sub-chamber is connected to a negative pressure forming device; the negative pressure forming device forms a negative pressure environment between the isolation sub-chamber and the isolation main chamber.

[0013] In one of the purposes of the present invention, as an optional embodiment, the gas delivery pipe and the isolation pipe are coaxially arranged.

[0014] In one of the purposes of the present utility model, as an optional embodiment, the first connector includes a first connecting member, a second connecting member and a third connecting member;

[0015] One end of the first connecting member is used to connect to the workpiece to be inspected, and the other end is threadedly connected to the second connecting member, and the inner tube fixing portion is formed at the connection between the first connecting member and the second connecting member; the other end of the second connecting member is threadedly connected to the third connecting member, and the first outer tube fixing portion is formed at the connection between the second connecting member and the third connecting member.

[0016] In one of the purposes of the present utility model, as an optional embodiment, the second connector includes a fourth connector and a fifth connector;

[0017] One end of the fourth connecting member is used to be connected to the vacuum box, and the other end is threadedly connected to the fifth connecting member; the second outer tube fixing portion is formed at the connection between the fourth connecting member and the fifth connecting member.

[0018] The second purpose of this utility model is to provide a detection device for helium detection, which is achieved by the following technical solutions:

[0019] A vacuum box and a gas delivery device for helium detection according to any one of the purposes of the present utility model;

[0020] The vacuum box is formed with a first mounting port and a detection cavity formed therein; the first mounting port is adapted to fit the second connector; and the gas delivery device for helium detection is fixed in the detection cavity by sealingly connecting the second connector to the first mounting port;

[0021] The vacuum box is connected to a helium detector and a first vacuum pump, and the first vacuum pump is used to form a negative pressure environment in the detection cavity; the helium detector is used to detect the helium content in the detection cavity.

[0022] In the second purpose of the present invention, as an optional embodiment, it also includes a second vacuum pump, which is connected to the second connector through a connecting pipe, and the second vacuum pump is used to form a negative pressure environment between the isolated sub-cavity and the isolated main cavity.

[0023] Compared with the prior art, the beneficial effects of the present invention are:

[0024] 1. The utility model provides a gas delivery device for helium detection. By arranging an isolation tube on the outside of the gas delivery pipe, the main gas delivery cavity is isolated from the test environment. The gas transported in the main gas delivery cavity will not directly leak into the test environment. A small amount of gas leaked from the main gas delivery cavity first reaches the isolation main cavity between the gas delivery pipe and the isolation tube, and then needs to overcome the barrier of the first tube wall and the second tube wall before it can leak into the test environment. This greatly reduces the impact of the gas delivery process of the gas delivery pipe on the test environment, reduces the background noise of the test environment, and improves the reliability of the test results.

[0025] 2. The gas delivery device for helium detection of the present invention improves the connector at the pipeline connection so that one connection structure can connect pipelines of different inner diameters. There are two types of connectors at both ends of the second connecting piece, one for connecting to a small-diameter pipeline (gas pipeline) and the other for connecting to a large-diameter pipeline (isolation tube). The center points of the two pipelines are on the same axis. The effect after connection is like a large tube covering a small tube. A gap is left between the two pipelines, namely the isolation main cavity. The isolation main cavity separates the gas pipeline from the test environment. Gas leaked from the gas pipeline will first penetrate into the isolation main cavity and will not leak directly into the test environment. The isolation main cavity and the test environment are also separated by the wall of the isolation tube, and the isolation tube further plays a partitioning role. In this way, while ensuring the sealing of the pipeline, it can also ensure that the tracer gas is not easy to leak into the test environment.

[0026] 3. The gas delivery device for helium testing of the present invention arranges the gas delivery pipe and the isolation pipe coaxially, so that there is an evenly distributed isolation space between the isolation pipe and the gas delivery pipe, so that the gas leaked from the gas delivery pipe into the isolation main cavity is evenly diffused, thereby reducing gas leakage into the test environment and improving the reliability of isolation. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 Schematic diagram of the structure of the gas delivery device for helium detection in Example 1;

[0028] Figure 2 This is a partial enlarged view of part A of the gas delivery device for helium detection in Example 1;

[0029] Figure 3 This is a schematic structural diagram of the detection equipment for helium detection in Example 2.

[0030] In the figure: 10, gas transmission pipe; 11, gas transmission main cavity; 20, isolation tube; 21, isolation main cavity; 30, first connector; 31, inner tube fixing portion; 32, first outer tube fixing portion; 33, gas transmission sub-cavity; 34, first connecting piece; 35, second connecting piece; 36, third connecting piece; 40, second connector; 41, second outer tube fixing portion; 42, isolation sub-cavity; 43, fourth connecting piece; 44, fifth connecting piece; 50, vacuum box; 51, first mounting port; 52, detection cavity; 60, workpiece to be inspected. DETAILED DESCRIPTION

[0031] Below, the present invention is further described in conjunction with the accompanying drawings and specific embodiments. It should be noted that, under the premise of no conflict, the various embodiments described below or the various technical features can be arbitrarily combined to form a new embodiment. Unless otherwise specified, the materials and equipment used in this embodiment can be purchased from the market. Examples of the embodiments are shown in the accompanying drawings, in which the same or similar numbers throughout represent the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and cannot be understood as limiting this application.

[0032] In the description of this application, it should be understood that the terms "upper," "lower," "front," "back," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended only to facilitate the description of this application and simplify the description. They do not indicate or imply that the devices or elements referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting this application. In the description of this application, "plurality" means two or more, unless otherwise specifically specified.

[0033] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "connected," "connected," and "connected" should be understood in a broad sense. For example, they may refer to a fixed connection, a connection through an intermediary medium, internal communication between two components, or an interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0034] The terms "first," "second," and the like in the specification and claims of this application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a particular order or sequential sequence. In addition, the terms "including," "comprising," and "having," and any variations thereof, are intended to cover non-exclusive inclusions. For example, a process, method, system, product, or apparatus that includes a series of steps or elements is not necessarily limited to those steps or elements explicitly listed, but may include other steps or elements not explicitly listed or inherent to the process, method, product, or apparatus.

[0035] Example 1:

[0036] Please refer to Figure 1-2 The present embodiment provides a gas delivery device for helium inspection, including a gas delivery pipe 10, an isolation pipe 20, a first connector 30, and a second connector 40; the isolation pipe 20 is sleeved on the outside of the gas delivery pipe 10; the first connector 30 and the second connector 40 are respectively connected to the two ends of the isolation pipe 20, the device is connected to the workpiece to be inspected 60 through the first connector 30, and the device is connected to the vacuum box 50 through the second connector 40.

[0037] The gas delivery pipe 10 has a first pipe wall, and a main gas delivery cavity 11 for delivering helium is formed in the first pipe wall. The two ends of the gas delivery pipe 10 are respectively formed with a first end and a second end. The first end is used to connect to the first connector 30, and the second end is used to connect to the helium supply device and the pneumatic pump.

[0038] The isolation tube 20 has a second tube wall, with a third end and a fourth end formed at both ends. The third end is arranged toward the first end for connecting to the first connector 30, and the fourth end is arranged toward the second end for connecting to the second connector 40; the isolation tube 20 is sleeved on the surface of the gas pipe 10, so that an isolation main cavity 21 is formed between the first tube wall and the second tube wall.

[0039] One end of the first connector 30 is used for sealing connection with the workpiece to be inspected 60, and the other end is provided with an inner tube fixing portion 31 and a first outer tube fixing portion 32. The inner tube fixing portion 31 is sealed to the first end of the gas transmission pipe 10, and the first outer tube fixing portion 32 is sealed to the third end of the isolation pipe 20. A gas transmission sub-cavity 33 is formed inside the first connector 30, and the gas transmission sub-cavity 33 is connected to the gas transmission main cavity 11.

[0040] One end of the second connecting head 40 is used to connect to the vacuum box 50, and the other end is formed with a second outer tube fixing portion 41, and the second outer tube fixing portion 41 is sealed and connected to the fourth end of the isolation tube 20; a through hole is formed inside the second connecting head 40, and the through hole can be used for the second end of the gas supply pipe 10 to pass through, and an isolation sub-cavity 42 is formed between the through hole and the first tube wall, and the isolation sub-cavity 42 is connected to the isolation main cavity 21.

[0041] The gas delivery device for helium testing of this embodiment utilizes an isolation tube 20 sheathed on the surface of the gas delivery tube 10 at the section of the vacuum chamber 50, forming an isolated main chamber 21 between the two. This prevents tracer gas from leaking directly into the test environment, but instead leaks into the isolated main chamber 21 first. The isolation main chamber 21 is separated from the test environment by a layer of isolation tube 20. This ensures that tracer gas within the gas delivery tube 10 is not easily leaked into the test environment, ensuring that the test environment is not affected during tracer gas delivery, thereby improving test reliability. By sheathing the gas delivery tube 10, an isolation tube 20 is sheathed on the outside of the gas delivery tube 10, forming an isolated main chamber 21 between the two layers of tubes. The isolation main chamber 21 separates the gas delivery main chamber 11 from the test environment. The isolation main chamber 21 is separated from the test environment by a pipeline, and the tracer gas must pass through the first and second tube walls to leak into the test environment. This significantly reduces the risk of tracer gas from the gas delivery tube 10 leaking into the test environment, ensuring that the test environment is not contaminated, and reducing the noise floor of the test environment, thereby improving the reliability of the test results.

[0042] Furthermore, the first connector 30 includes a first connector 34, a second connector 35, and a third connector 36. One end of the first connector 34 is used to connect to the workpiece 60 to be inspected, and the other end is threadedly connected to the second connector 35. The inner tube fixing portion 31 is formed at the connection between the first connector 34 and the second connector 35. The other end of the second connector 35 is threadedly connected to the third connector 36. The first outer tube fixing portion 32 is formed at the connection between the second connector 35 and the third connector 36. The threaded connection between the first connector 34 and the second connector 35 secures the first end of the gas transmission pipe 10 therebetween, and the threaded connection between the second connector 35 and the third connector 36 secures the third end of the isolation tube 20 therebetween.

[0043] The second connector 40 includes a fourth connector 43 and a fifth connector 44. One end of the fourth connector 43 is connected to the vacuum chamber 50, and the other end is threadedly connected to the fifth connector 44. The second outer tube fixing portion 41 is formed at the junction of the fourth connector 43 and the fifth connector 44. The fourth end of the isolation tube 20 is fixed therebetween by threading the fourth connector 43 and the fifth connector 44. The second end of the gas delivery tube 10, which passes through the isolation tube 20, passes through a through hole formed in the second connector 40 and is connected to the helium supply device and the pneumatic pump.

[0044] By improving the connector at the pipeline connection, a connection structure can be connected to pipelines of different inner diameters. There are two types of connectors at both ends of the second connecting piece 35, one for connecting to the small-diameter pipeline (gas pipeline 10) and the other for connecting to the large-diameter pipeline (isolation tube 20). The center points of the two pipelines are on the same axis. The effect after connection is like a large pipe wrapped around a small pipe. There is a gap between the two pipelines, namely the isolation main cavity 21. The isolation main cavity 21 isolates the gas pipeline 10 from the test environment. The gas leaked from the gas pipeline 10 will first penetrate into the isolation main cavity 21 and will not leak directly into the test environment. The isolation main cavity 21 and the test environment are also separated by the wall of the isolation tube 20. The isolation tube 20 further plays a partitioning role. In this way, while ensuring the sealing of the pipeline, it can also ensure that the tracer gas is not easy to leak into the test environment.

[0045] Based on the above structure, during use of the gas delivery device for helium inspection of this embodiment, the gas delivery pipe 10 is connected to the inspected workpiece through the first connector 30, and the gas delivery pipe 10 and the first connector 30 are locked to achieve a sealing effect; after the gas delivery pipe 10 is connected, the isolation pipe 20 is connected, and the isolation pipe 20 is clamped to the first connector 30 by the cooperation of the second connector 35 and the third connector 36 to achieve a sealing effect, and the gas delivery pipe 10 and the isolation pipe 20 are connected through the second connector 40, and the isolation pipe 20 wraps the gas delivery pipe 10 to isolate the gas delivery pipe 10 from the test environment, and the gas delivery pipe 10 and There is a gap between the isolation tubes 20, namely the isolation main cavity 21. The isolation main cavity 21 is generally at atmospheric pressure, that is, the isolation main cavity 21 is connected to the atmosphere through the end of the isolation sub-cavity 42. The advantage of this design is that the gas in the gas pipe 10 will first leak into the isolation main cavity 21, diffuse and dilute in the isolation main cavity 21, and the gas concentration is reduced. The diluted gas must pass through the isolation tube 20 before it can leak into the test environment. This design can better ensure that the gas in the gas pipe 10 is not easy to leak into the test environment during the gas transmission process, which will affect the test results. After the isolation tube 20 is connected, the connection between the gas transmission device and the workpiece to be inspected is completed. , first evacuate the workpiece, and then fill the workpiece with helium. After the helium filling is completed, evacuate the vacuum box 50. When the evacuation is completed, the vacuum box 50 is in a vacuum environment. At this time, the gas transmission main chamber 11 is at positive pressure, and the isolation main chamber 21 is at atmospheric pressure. There is a pressure difference between the isolation main chamber 21 and the gas transmission main chamber 11, and there is a pressure difference between the isolation main chamber 21 and the inside of the vacuum box 50 (test environment). The pressure of the gas transmission main chamber 11 is greater than that of the isolation main chamber 21, and the pressure of the isolation main chamber 21 is greater than the pressure inside the vacuum box 50. The airflow direction is: gas transmission main chamber 11 → isolation main chamber 21 → inside the vacuum box 50, that is, the helium in the gas transmission main chamber 11 needs to pass through The helium flows through the first wall of the gas transmission pipe 10 to the isolated main chamber 21, and then flows to the inside of the vacuum box 50 through the second wall of the isolation tube 20 in the isolated main chamber 21. The helium in the gas transmission main chamber 11 leaks into the isolated main chamber 21 and is diluted by the isolation main chamber 21. At this time, the helium concentration in the isolated main chamber 21 is relatively low, and the helium in the isolated main chamber 21 must also pass through the second wall of the isolation tube 20 to remain in the vacuum box 50, which effectively reduces the risk of helium leaking into the vacuum box 50. Compared with the traditional gas transmission method, the leakage part is almost negligible, which greatly reduces the background noise of the helium in the vacuum box 50 and improves the reliability of the test.

[0046] The gas pipe 10 is suitable for nylon tubes or other high-pressure elastic tubes with better pressure resistance. Preferably, it can be made of one or more of nylon (Nyl on), polytetrafluoroethylene (PTFE) or steel wire reinforced tube; the isolation tube 20 can use an ordinary gas pipe with a diameter larger than the gas pipe 10, and the isolation tube uses a material with a thicker wall and good sealing performance, such as polyurethane (PU), that is, the thickness of the second tube wall is greater than the thickness of the first tube wall. In addition, the gas pipe 10 and the isolation tube 20 are coaxially arranged. The coaxiality mentioned here refers to the situation where the line connecting the centers of the two ends of the gas pipe 10 coincides with the line connecting the centers of the two ends of the isolation tube 20, that is, the center points of the gas pipe 10 and the isolation tube 20 are at the same position, so that there is a uniformly distributed isolation space between the isolation tube 20 and the gas pipe 10, so that the gas leaked from the gas pipe 10 to the isolation main cavity 21 is evenly diffused, reducing gas leakage into the test environment and improving the reliability of isolation.

[0047] In some preferred embodiments, one end of the isolation sub-chamber 42 is connected to a negative pressure forming device via a connecting pipe; the negative pressure forming device forms a negative pressure environment between the isolation sub-chamber 42 and the isolation main chamber 21. The isolation main chamber 21 is evacuated to a vacuum environment, or a low vacuum, to further reduce the pressure difference between the isolation main chamber 21 and the test environment in the vacuum box 50, thereby reducing the background noise in the vacuum box 50. In addition, connecting the negative pressure forming device also helps to extract the helium or tracer gas in the isolation main chamber 21, reducing the possibility of helium or tracer gas leaking into the test environment. This double layer of insurance improves the reliability of the test results. At the same time, the gas transmission structure is not only suitable for gas transmission for helium detection, but can also be used for gas transmission for other gas detection. It is not only suitable for vacuum testing, but also for positive pressure testing. The connection method is the same as that for vacuum testing, which can be understood by those skilled in the art.

[0048] Example 2:

[0049] Please refer to Figure 3 , based on Example 1, this embodiment provides a detection device for helium detection, including a vacuum box 50 and the gas delivery device for helium detection described in Example 1;

[0050] The vacuum box 50 is formed with a first mounting port 51 and a detection cavity 52 therein; the first mounting port 51 is adapted to fit the second connector 40; the gas delivery device for helium detection is fixed in the detection cavity 52 by sealingly connecting the second connector 40 to the first mounting port 51;

[0051] The vacuum box 50 is connected to a helium detector and a first vacuum pump, and the first vacuum pump is used to form a negative pressure environment in the detection chamber 52; the helium detector is used to detect the helium content in the detection chamber 52.

[0052] Furthermore, a second vacuum pump is included, which is connected to the second connector 40 via a connecting pipe. The second vacuum pump forms a negative pressure environment between the isolated sub-chamber 42 and the isolated main chamber 21. Although certain components and embodiments of the present application have been illustrated and described, those skilled in the art will appreciate many modifications and changes (for example, changes in the size, dimensions, structure, shape and proportion of each component, installation arrangement, material usage, color, orientation, etc.) without actually departing from the scope and spirit of the claims.

[0053] Finally, it should be noted that the above-mentioned implementation mode is only a preferred embodiment mode of the present invention and cannot be used to limit the scope of protection of the present invention. Any non-substantial changes and replacements made by technicians in this field on the basis of the present invention fall within the scope of protection required by the present invention.

Claims

1. A gas delivery device for helium detection, characterized in that: It includes a gas transmission pipe, an isolation pipe, a first connector and a second connector; The gas delivery pipe has a first pipe wall, a gas delivery main cavity is formed in the first pipe wall, and two ends form a first end portion and a second end portion respectively; The isolation tube has a second tube wall, with two ends forming a third end and a fourth end. The isolation tube is sleeved on the gas transmission pipe, so that an isolation main cavity is formed between the first tube wall and the second tube wall. One end of the first connector is used to connect to the workpiece to be inspected, and the other end is provided with an inner tube fixing portion and a first outer tube fixing portion, the inner tube fixing portion is connected to the first end of the gas transmission pipe, and the first outer tube fixing portion is connected to the third end of the isolation pipe; a gas transmission sub-cavity is formed inside the first connector, and the gas transmission sub-cavity is connected to the gas transmission main cavity; One end of the second connecting head is used to connect to the vacuum box, and the other end is formed with a second outer tube fixing portion, and the second outer tube fixing portion is connected to the fourth end of the isolation tube; a through hole is formed inside the second connecting head, and the through hole can be used for the second end of the gas pipe to pass through, and an isolation sub-cavity is formed between the through hole and the first tube wall, and the isolation sub-cavity is connected to the isolation main cavity.

2. A gas delivery device for helium detection according to claim 1, characterized in that: The isolated sub-chamber is communicated with the atmosphere.

3. A gas delivery device for helium detection according to claim 1, characterized in that: The isolation sub-cavity is connected to a negative pressure forming device; the negative pressure forming device forms a negative pressure environment between the isolation sub-cavity and the isolation main cavity.

4. A gas delivery device for helium detection according to claim 1, characterized in that: The gas delivery pipe and the isolation pipe are coaxially arranged.

5. A gas delivery device for helium detection according to claim 1, characterized in that: The first connector includes a first connector, a second connector and a third connector; One end of the first connecting member is used to connect to the workpiece to be inspected, and the other end is threadedly connected to the second connecting member, and the inner tube fixing portion is formed at the connection between the first connecting member and the second connecting member; the other end of the second connecting member is threadedly connected to the third connecting member, and the first outer tube fixing portion is formed at the connection between the second connecting member and the third connecting member.

6. A gas delivery device for helium detection according to claim 5, characterized in that: The second connector includes a fourth connector and a fifth connector; One end of the fourth connecting member is used to be connected to the vacuum box, and the other end is threadedly connected to the fifth connecting member; the second outer tube fixing portion is formed at the connection between the fourth connecting member and the fifth connecting member.

7. A detection device for helium detection, characterized in that: comprising a vacuum box and a gas delivery device for helium detection according to any one of claims 1 to 6; The vacuum box is formed with a first mounting port and a detection cavity formed therein; the first mounting port is adapted to fit the second connector; and the gas delivery device for helium detection is fixed in the detection cavity by sealingly connecting the second connector to the first mounting port; The vacuum box is connected to a helium detector and a first vacuum pump, and the first vacuum pump is used to form a negative pressure environment in the detection cavity; the helium detector is used to detect the helium content in the detection cavity.

8. The detection device for helium detection according to claim 7, characterized in that: It also includes a second vacuum pump, which is connected to the second connector through a connecting pipe. The second vacuum pump forms a negative pressure environment between the isolated sub-cavity and the isolated main cavity.

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