Infrared microscopic stress detection device

Abstract

The utility model discloses an infrared microscopic stress detection device, which relates to the technical field of stress detection, and comprises a bottom plate, a base mechanism is arranged on the top surface of the bottom plate, an adjusting mechanism is arranged on the top surface of the base mechanism, the adjusting mechanism comprises a fixing plate, the fixing plate is fixedly connected to the top surface of the base mechanism, and the fixing plate is fixedly connected to the top surface of the base mechanism. A sliding groove is formed in one end of the top face of the fixing plate, and a limiting rod is slidably connected into the sliding groove in the top face of the fixing plate. The first telescopic rod is installed on the top face of the fixing plate through the fixing cover, meanwhile, the first telescopic rod and the fixing block are protected to a certain degree, when the first telescopic rod drives the fixing block to stretch out and draw back, the limiting rod slides in the sliding groove formed in the top face of the fixing plate, and it is guaranteed that the rotating device does linear motion; and meanwhile, through cooperation of a left telescopic rod and a right telescopic rod, it is ensured that the rotating device can be adjusted in the left-right position, a space is reserved for the motor through a groove, and movement of the rotating device cannot be blocked.

Description

Technical Field

[0001] The utility model relates to the technical field of stress detection, in particular to an infrared microscopic stress detection device. Background Art

[0002] Silicon is the core raw material for manufacturing semiconductor devices, but this material is highly brittle, its tensile strength is much lower than its compressive strength, and it has a piezoresistive effect. Therefore, stress in silicon materials should be avoided as much as possible. However, during the production, packaging and use of semiconductor devices, stresses such as shear stress, thermal stress, electrical stress, and mechanical stress will be generated inside the device, affecting its electrical performance.

[0003] New sensors using MEMS technology have been developed to measure and detect stress distribution within silicon-based semiconductors. Due to the unique characteristics of MEMS chips, their analog output is often very weak or subject to very strict operating conditions. General-purpose ASIC chips cannot meet these requirements, and conventional ASIC design companies are unable to design chips that satisfy MEMS sensor manufacturers. Therefore, an infrared micro-stress detection device has been proposed to address these issues. Utility Model Content

[0004] The purpose of the present invention is to provide an infrared micro-stress detection device to solve the problems raised in the above background technology.

[0005] In order to solve the above technical problems, the technical solution adopted by the present invention is:

[0006] An infrared micro-stress detection device includes a base plate, a base mechanism is provided on the top surface of the base plate, an adjustment mechanism is provided on the top surface of the base mechanism, the adjustment mechanism includes a fixed plate, the fixed plate is fixedly connected to the top surface of the base mechanism, a slide groove is provided at one end of the top surface of the fixed plate, a limit rod is slidably connected inside the slide groove on the top surface of the fixed plate, the top surface of the limit rod is fixedly connected to a fixed block, the back side of the fixed block is fixedly connected to a telescopic rod 1, the side of the telescopic rod 1 is fixedly connected to a fixed cover, and the fixed cover is fixedly connected to one end of the top surface of the fixed plate.

[0007] A further improvement of the technical solution of the present utility model is that: a second telescopic rod is fixedly connected to the inside of the side of the fixed block, a rotating device is fixedly connected to the side of the second telescopic rod, a groove is provided at one end of the side of the fixed plate, and a light-transmitting groove is provided in the middle of the top surface of the fixed plate.

[0008] A further improvement of the technical solution of the present utility model is that: the rotating device includes an outer frame, the outer frame is fixedly connected to the output end of the second telescopic rod, the inner part of the outer frame is rotatably connected to a rotating plate, the inner part of the rotating plate is fixedly connected to a lens, the side of the outer frame is fixedly connected to a connecting plate, and the inner part of the connecting plate is rotatably connected to a driving wheel.

[0009] A further improvement of the technical solution of the present utility model is that a motor is fixedly connected to the bottom surface of the connecting plate, the output end of the motor passes through the inner bottom surface of the connecting plate and is fixedly connected to the bottom surface of the connecting plate, and the side surface of the driving wheel is movably connected to the side surface of the rotating plate.

[0010] A further improvement of the technical solution of the present utility model is that: the base mechanism includes a shell, the shell is fixedly connected to the top surface of the base plate, the inner bottom surface of the shell is fixedly connected to a bromine tungsten lamp, one end of the inner bottom surface of the shell is fixedly connected to a fixed frame, the inner bottom end of the fixed frame is movably connected to a homogenizer, the inner middle part of the fixed frame is movably connected to a polarizer, the inner top of the fixed frame is movably connected to a quarter-wave plate, the side of the shell is movably connected to a normally closed door, the top surface of the shell is fixedly connected to a movable device, and the fixed plate is fixedly connected to one end of the top surface of the shell.

[0011] A further improvement of the technical solution of the present utility model is that: the movable device includes a vertical pole, the vertical pole is fixedly connected to one end of the top surface of the shell, a sliding rod is slidably connected to the inside of the side surface of the vertical pole, a tooth groove is provided at the top end of the side surface of the vertical pole, the inner side surface of the sliding rod is fixedly connected to a driving motor, and the output end of the driving motor is fixedly connected to a gear.

[0012] A further improvement of the technical solution of the present utility model is that: the gear is rotatably connected to the inside of the sliding rod, the gear and the tooth groove are engaged with each other, the side of the sliding rod is fixedly connected to an infrared polarization camera, the bottom surface of the infrared polarization camera is fixedly connected to an infrared microscope body, and the bottom surface of the infrared microscope body is fixedly connected to a zoom lens.

[0013] Due to the adoption of the above technical solution, the present invention has achieved the following technical advancements compared to the prior art:

[0014] 1. The utility model provides an infrared micro stress detection device, which adopts the cooperation of an adjustment mechanism, a fixed plate, a groove, a fixed cover, a telescopic rod 1, a fixed block, a telescopic rod 2, a light-transmitting groove, a rotating device, an outer frame, a rotating plate, a lens, a connecting plate, a driving wheel, a motor, and a limit rod. The telescopic rod 1 is installed on the top surface of the fixed plate through the fixed cover, which plays a certain degree of protection for the telescopic rod 1 and the fixed block. When the telescopic rod 1 drives the fixed block to extend or retract, the limit rod slides in the slide groove provided on the top surface of the fixed plate to ensure that the rotating device performs linear motion. At the same time, the left and right telescopic rods The cooperation of the two ensures that the rotating device can be adjusted to the left and right positions. The groove reserves space for the motor and will not block the movement of the rotating device. The outer frame fixes the rotating plate inside the outer frame while allowing it to rotate. The object to be detected is placed on the top surface of the lens, so that the components inside the base mechanism can illuminate the object on its top surface through the lens and detect the stress it is subjected to. The motor drives the driving wheel to rotate, so that the driving wheel can drive the rotating plate to rotate, and cooperate with the internal components of the adjustment mechanism to enable objects on the top surface of the lens to be detected at more angles, thereby improving the adaptability of the device.

[0015] 2. The utility model provides an infrared micro stress detection device, which adopts the cooperation of a base mechanism, a shell, a bromine tungsten lamp, a fixed frame, a homogenizer, a polarizer, a quarter wave plate, a normally closed door, a movable device, a vertical pole, a tooth groove, an infrared polarization camera, a drive motor, a gear, an infrared microscope body, a zoom lens, a slide bar, and a bottom plate. The normally closed door can protect the internal components of the base mechanism. At the same time, if the components inside the fixed frame are damaged, they can be easily replaced. The bromine tungsten lamp provides an infrared light source for the entire device. Emulsified glass is used as a homogenizer and a polarizer is used. Both the lens and the quarter-wave plate are optical devices for near-infrared light. Through the cooperation of the bromine tungsten lamp, homogenizer, polarizer and quarter-wave plate, the infrared light source is transmitted through the lens to the object on its top surface. Through the cooperation of the infrared polarization camera, infrared microscope body and zoom lens, polarized light in four directions is received and imaged at the same time, which is convenient for observing the stress of the object on the lens surface. The gear can be driven by the driving motor to rotate, and the gear is engaged with the tooth groove, which will drive the infrared polarization camera to move up and down, making it convenient to adjust the distance between it and the object to be detected, thereby improving the adaptability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 This is a schematic structural diagram of the adjustment mechanism of the present utility model;

[0018] Figure 3 This is a schematic structural diagram of the rotating device of the present invention;

[0019] Figure 4 This is a structural diagram of the base mechanism of the present utility model;

[0020] Figure 5 It is a structural schematic diagram of the movable device of the utility model.

[0021] In the figure: 1. base mechanism; 11. outer shell; 12. bromine tungsten lamp; 13. fixed frame; 14. homogenizer; 15. polarizer; 16. quarter-wave plate; 17. normally closed door; 18. movable device; 181. vertical pole; 182. tooth groove; 183. infrared polarization camera; 184. driving motor; 185. gear; 186. infrared microscope body; 187. zoom lens; 188. slide bar; 2. bottom plate; 3. adjustment mechanism; 31. fixed plate; 32. groove; 33. fixed cover; 34. telescopic rod 1; 35. fixed block; 36. telescopic rod 2; 37. light transmission slot; 38. rotating device; 381. outer frame; 382. rotating plate; 383. lens; 384. connecting plate; 385. driving wheel; 386. motor; 39. limit rod. DETAILED DESCRIPTION

[0022] The present invention is further described in detail below with reference to the embodiments:

[0023] Example 1

[0024] like Figure 1-5 As shown, the utility model provides an infrared micro-stress detection device, including a base plate 2, a base mechanism 1 is provided on the top surface of the base plate 2, an adjustment mechanism 3 is provided on the top surface of the base mechanism 1, the adjustment mechanism 3 includes a fixed plate 31, the fixed plate 31 is fixedly connected to the top surface of the base mechanism 1, a sliding groove is provided at one end of the top surface of the fixed plate 31, a limiting rod 39 is slidably connected inside the sliding groove on the top surface of the fixed plate 31, a fixed block 35 is fixedly connected to the top surface of the limiting rod 39, a telescopic rod 1 34 is fixedly connected to the back of the fixed block 35, a fixed cover 33 is fixedly connected to the side of the telescopic rod 1 34, the fixed cover 33 is fixedly connected to one end of the top surface of the fixed plate 31, a telescopic rod 2 36 is fixedly connected to the inside of the side of the fixed block 35, a rotating device 38 is fixedly connected to the side of the telescopic rod 2 36, a groove 32 is provided at one end of the side surface of the fixed plate 31, and a light-transmitting groove 37 is provided in the middle of the top surface of the fixed plate 31.

[0025] In this embodiment, the telescopic rod 1 34 is installed on the top surface of the fixed plate 31 by the fixed cover 33, which provides a certain degree of protection for the telescopic rod 1 34 and the fixed block 35. When the telescopic rod 1 34 drives the fixed block 35 to extend or retract, the limit rod 39 slides in the slide groove opened inside the top surface of the fixed plate 31, ensuring that the rotating device 38 can move in a straight line. At the same time, through the cooperation of the left and right telescopic rods 2 36, the rotating device 38 can be adjusted to the left and right positions. The groove 32 reserves space for the motor 386 and will not block the movement of the rotating device 38.

[0026] Example 2

[0027] like Figure 1-5 As shown, on the basis of Example 1, the present invention provides a technical solution: preferably, the rotating device 38 includes an outer frame 381, the outer frame 381 is fixedly connected to the output end of the telescopic rod 36, the inner rotatable connection of the outer frame 381 is connected to the rotating plate 382, ​​the inner fixed connection of the rotating plate 382 is connected to the lens 383, the side of the outer frame 381 is fixedly connected to the connecting plate 384, the inner rotatable connection of the connecting plate 384 is connected to the driving wheel 385, the bottom surface of the connecting plate 384 is fixedly connected to the motor 386, the output end of the motor 386 passes through the inner bottom surface of the connecting plate 384 and is fixedly connected to the bottom surface of the connecting plate 384, and the side of the driving wheel 385 is movably connected to the side of the rotating plate 382.

[0028] In this embodiment, the rotating plate 382 is fixed inside the outer frame 381 by the outer frame 381 while being rotatable, and the object to be detected is placed on the top surface of the lens 383, so that the components inside the base mechanism 1 can illuminate the object on its top surface through the lens 383 and detect the stress it is subjected to. The motor 386 drives the driving wheel 385 to rotate, so that the driving wheel 385 can drive the rotating plate 382 to rotate, and cooperate with the internal components of the adjustment mechanism 3, so that the object on the top surface of the lens 383 can be detected at more angles.

[0029] Example 3

[0030] like Figure 1-5As shown, on the basis of embodiment 1, the utility model provides a technical solution: preferably, the base mechanism 1 includes a shell 11, the shell 11 is fixedly connected to the top surface of the bottom plate 2, the inner bottom surface of the shell 11 is fixedly connected to a bromine tungsten lamp 12, one end of the inner bottom surface of the shell 11 is fixedly connected to a fixed frame 13, the inner bottom end of the fixed frame 13 is movably connected to a homogenizer 14, the inner middle part of the fixed frame 13 is movably connected to a polarizer 15, the inner top of the fixed frame 13 is movably connected to a quarter wave plate 16, the side of the shell 11 is movably connected to a normally closed door 17, the top surface of the shell 11 is fixedly connected to a movable device 18, the fixed plate 31 is fixedly connected to one end of the top surface of the shell 11, and the movable device The device 18 includes a vertical rod 181, which is fixedly connected to one end of the top surface of the shell 11. A slide rod 188 is slidably connected to the inside of the side of the vertical rod 181. A tooth groove 182 is provided at the top of the side of the vertical rod 181. The inner side of the slide rod 188 is fixedly connected to a drive motor 184. The output end of the drive motor 184 is fixedly connected to a gear 185. The gear 185 is rotatably connected to the inside of the slide rod 188. The gear 185 and the tooth groove 182 are engaged with each other. The side of the slide rod 188 is fixedly connected to an infrared polarization camera 183. The bottom surface of the infrared polarization camera 183 is fixedly connected to an infrared microscope body 186. The bottom surface of the infrared microscope body 186 is fixedly connected to a zoom lens 187.

[0031] In this embodiment, the setting of the normally closed door 17 can protect the internal components of the base mechanism 1. At the same time, if the components inside the fixed frame 13 are damaged, they can be easily replaced. The bromine tungsten lamp 12 provides an infrared light source for the entire device. Emulsified glass is used as the homogenizer 14. The polarizer 15 and the quarter-wave plate 16 are both optical devices for near-infrared light. Through the cooperation of the bromine tungsten lamp 12, the homogenizer 14, the polarizer 15, and the quarter-wave plate 16, the infrared light source is transmitted through the lens 383 to the object on its top surface, and through the cooperation of the infrared polarization camera 183, the infrared microscope body 186, and the zoom lens 187, polarized light in four directions is received and imaged simultaneously, which is convenient for observing the stress of the object on the surface of the lens 383. The gear 185 can be driven to rotate by the driving motor 184. The gear 185 engages with the tooth groove 182, which will drive the infrared polarization camera 183 to move up and down, making it convenient to adjust its distance from the object to be detected.

[0032] The working principle of the infrared micro stress detection device is described in detail below.

[0033] like Figure 1-5As shown, by placing the object to be detected on the top surface of the lens 383, turning on the bromine tungsten lamp 12 to provide an infrared light source for the entire device, using emulsified glass as the homogenizer 14, the polarizer 15 and the quarter-wave plate 16 are all optical devices for near-infrared light, and through the cooperation of the bromine tungsten lamp 12, the homogenizer 14, the polarizer 15, and the quarter-wave plate 16, the infrared light source is transmitted through the lens 383 to irradiate the object on its top surface, and through the cooperation of the infrared polarization camera 183, the infrared microscope body 186, and the zoom lens 187, the polarized light in four directions is received and imaged simultaneously, so as to facilitate the observation of the stress condition of the object on the surface of the lens 383. The fixed block 35 is extended and retracted through the telescopic rod 1 34, driving the rotating device 38 to perform linear motion. The cooperation of the left and right telescopic rods 2 36 ensures that the rotating device 38 can be adjusted to the left and right positions. The motor 386 drives the driving wheel 385 to rotate, so that the driving wheel 385 can drive the rotating plate 382 to rotate, and cooperate with the internal components of the adjustment mechanism 3 to enable the object on the top surface of the lens 383 to rotate, realizing all-round detection of angles. The driving motor 184 drives the gear 185 to rotate, and the gear 185 engages with the tooth groove 182, which will drive the infrared polarization camera 183 to move up and down, making it convenient to adjust its distance from the object to be detected.

[0034] The above generally describes the present invention in detail. However, it is obvious to those skilled in the art that modifications or improvements may be made to the present invention. Therefore, modifications or improvements that do not depart from the spirit of the present invention are within the scope of protection of the present invention.

Claims

1. An infrared micro stress detection device, comprising a base plate (2), characterized in that: A base mechanism (1) is provided on the top surface of the bottom plate (2), and an adjustment mechanism (3) is provided on the top surface of the base mechanism (1); The adjusting mechanism (3) comprises a fixing plate (31), the fixing plate (31) being fixedly connected to the top surface of the base mechanism (1), a sliding groove being provided at one end of the top surface of the fixing plate (31), a limiting rod (39) being slidably connected inside the sliding groove of the top surface of the fixing plate (31), a fixing block (35) being fixedly connected to the top surface of the limiting rod (39), a telescopic rod (34) being fixedly connected to the back surface of the fixing block (35), a fixing cover (33) being fixedly connected to the side surface of the telescopic rod (34), and the fixing cover (33) being fixedly connected to one end of the top surface of the fixing plate (31).

2. The infrared microscopic stress detection device according to claim 1, characterized in that: A second telescopic rod (36) is fixedly connected to the inside of the side of the fixed block (35), and a rotating device (38) is fixedly connected to the side of the second telescopic rod (36). A groove (32) is provided at one end of the side of the fixed plate (31), and a light-transmitting groove (37) is provided in the middle of the top surface of the fixed plate (31).

3. The infrared microscopic stress detection device according to claim 2, characterized in that: The rotating device (38) includes an outer frame (381), the outer frame (381) is fixedly connected to the output end of the second telescopic rod (36), the inner portion of the outer frame (381) is rotatably connected to a rotating plate (382), the inner portion of the rotating plate (382) is fixedly connected to a lens (383), the side of the outer frame (381) is fixedly connected to a connecting plate (384), and the inner portion of the connecting plate (384) is rotatably connected to a driving wheel (385).

4. The infrared microscopic stress detection device according to claim 3, characterized in that: A motor (386) is fixedly connected to the bottom surface of the connecting plate (384), an output end of the motor (386) passes through the bottom surface of the connecting plate (384) and is fixedly connected to the bottom surface of the connecting plate (384), and a side surface of the driving wheel (385) is movably connected to a side surface of the rotating plate (382).

5. The infrared micro-stress detection device according to claim 1, characterized in that: The base mechanism (1) comprises a shell (11), the shell (11) is fixedly connected to the top surface of the base plate (2), a bromine tungsten lamp (12) is fixedly connected to the inner bottom surface of the shell (11), a fixed frame (13) is fixedly connected to one end of the inner bottom surface of the shell (11), a homogenizer (14) is movably connected to the inner bottom end of the fixed frame (13), a polarizer (15) is movably connected to the inner middle part of the fixed frame (13), a quarter-wave plate (16) is movably connected to the inner top of the fixed frame (13), a normally closed door (17) is movably connected to the side of the shell (11), a movable device (18) is fixedly connected to the top surface of the shell (11), and the fixed plate (31) is fixedly connected to one end of the top surface of the shell (11).

6. The infrared micro-stress detection device according to claim 5, characterized in that: The movable device (18) includes a vertical rod (181), the vertical rod (181) is fixedly connected to one end of the top surface of the housing (11), a sliding rod (188) is slidably connected to the inside of the side surface of the vertical rod (181), a tooth groove (182) is provided at the top end of the side surface of the vertical rod (181), a driving motor (184) is fixedly connected to the inner side surface of the sliding rod (188), and a gear (185) is fixedly connected to the output end of the driving motor (184).

7. The infrared micro-stress detection device according to claim 6, characterized in that: The gear (185) is rotatably connected to the interior of the slide bar (188), the gear (185) and the tooth groove (182) are meshed with each other, the side of the slide bar (188) is fixedly connected to an infrared polarization camera (183), the bottom surface of the infrared polarization camera (183) is fixedly connected to an infrared microscope body (186), and the bottom surface of the infrared microscope body (186) is fixedly connected to a zoom lens (187).

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