Mask plate multi-dimensional adjusting platform

Abstract

The utility model relates to semiconductor processing equipment, in particular to a multi-dimensional adjusting platform for a mask plate, which comprises a translation adjusting assembly arranged on an adjusting frame, a rotary motor assembled on the translation adjusting assembly, and a bearing assembly arranged at the output end of the rotary motor and used for placing the mask plate, when the placement position of the mask plate needs to be calibrated and adjusted, the translation adjusting assembly drives the rotating motor to perform adjustment in the X-axis and Y-axis directions; the rotary motor drives the bearing assembly to rotate so as to ensure that the position of the mask plate is correct; according to the utility model, a modularized structure is adopted on the whole, space is reasonably utilized, equipment space is saved, structural characteristics are optimized, translation and rotation are combined, equipment internal circuits and equipment complexity are reduced, the position accuracy of the mask plate in the detection operation process is ensured, the mask plate is ensured to be at a specified identification position, the error probability is reduced, and the detection efficiency is improved. And the overall mask plate detection efficiency is improved.

Description

Technical Field

[0001] The utility model relates to semiconductor processing equipment, in particular to a multi-dimensional adjustment platform for a mask plate. Background Art

[0002] A photomask is a key tool in semiconductor manufacturing, used to define the patterns and structures on integrated circuits and other microelectronic devices. It is a transparent glass or quartz substrate covered with a specific pattern. The desired pattern is projected onto the surface of the semiconductor wafer through photolithography. Therefore, the quality of the photomask is also a concern in semiconductor processing.

[0003] In the process of promoting semiconductor processing automation, the inspection and handling work related to the mask plate must also meet the corresponding automation standards. Conventional inspection and scanning are for assembly line transmission and coordinated with the corresponding work station, or manual operation is adopted; its overall footprint is wide, the equipment space is large, and human factors can easily cause uncontrollable quality problems. Therefore, there is an urgent need for an adjustment platform that is suitable for the automatic identification and inspection process of the mask plate and is used to fine-tune the placement position of the mask plate. Utility Model Content

[0004] The purpose of the utility model is to provide a platform with a modular structure, reasonable use of space, and rapid adjustment of the plane and placement angle.

[0005] In order to achieve the above-mentioned purpose, the present invention provides the following technical solutions:

[0006] A multi-dimensional adjustment platform for a mask plate comprises a translation adjustment component mounted on an adjustment frame, a rotary motor mounted on the translation adjustment component, and a bearing component mounted at the output end of the rotary motor for placing the mask plate;

[0007] When the placement of the mask plate needs to be calibrated and adjusted, the translation adjustment component drives the rotary motor to adjust the X-axis and Y-axis directions; the rotary motor drives the supporting component to rotate to ensure that the mask plate is in the correct position.

[0008] Furthermore, the translation adjustment assembly 620 includes an adjustment lower seat 622 fixed on the adjustment frame 610 and an adjustment upper seat 623 installed at the moving end of the adjustment lower seat 622; the rotary motor 630 is installed on the adjustment upper seat 623, and the central column 640 passes through the rotary motor 630 and is fixed on the adjustment upper seat 623;

[0009] Furthermore, the adjusting lower seat includes a lower seat bottom plate and a lower seat movable plate; the adjusting upper seat includes an upper seat bottom plate and an upper seat movable plate;

[0010] Furthermore, the adjustment lower seat and the adjustment upper seat also include auxiliary slide rails and adjustment drives; the lower seat base plate and the lower seat movable plate, as well as the upper seat base plate and the upper seat movable plate are all slidably connected by auxiliary slide rails; the adjustment drive is used to drive the lower seat movable plate and the upper seat movable plate.

[0011] Furthermore, the upper seat movable plate is connected to a rotary motor.

[0012] Furthermore, the adjustment drive is an ironless flat motor; the output end of the adjustment drive is connected to the corresponding movable component;

[0013] Furthermore, the central column is used to fix and connect the detection light source;

[0014] Furthermore, the upper seat bottom plate is fixed to the upper end surface of the lower seat movable plate; and the movement directions of the two sets of adjustment drives are perpendicular;

[0015] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0016] In actual use, the multi-dimensional adjustment platform is used to carry the mask plate. The adjustment frame is the base frame of the overall multi-dimensional adjustment platform. The translation adjustment component is fixed on the adjustment frame and is used to adjust the rotary motor in both directions of the X and Y axes. The carrying component is installed at the output end of the rotary motor to realize the overall rotation of the carrying component. Overall, the mask plate can be adjusted in three directions as needed: X and Y axes and rotation around the center of the carrying component.

[0017] The utility model adopts a modular structure as a whole, rationally utilizes space, saves equipment space, optimizes structural features, combines translation and rotation, reduces the internal circuits of the equipment and the complexity of the equipment, ensures the accurate position of the mask plate during the detection operation, ensures that the mask plate is in the specified identification position, reduces the probability of error, and improves the overall mask plate detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the application of the utility model;

[0019] Figure 2 It is a schematic diagram of the overall structure of the utility model;

[0020] Figure 3 It is a schematic diagram of the utility model after partial concealment;

[0021] Figure 4 This is a schematic diagram of the structure of the translation adjustment component of the utility model;

[0022] Figure 5 This is a schematic diagram of the internal structure of the translation adjustment component of the present invention. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0024] refer to Figure 1-5 As shown, a multi-dimensional adjustment platform for a mask plate includes a translation adjustment assembly 620 mounted on an adjustment frame 610, a rotation motor 630 assembled on the translation adjustment assembly 620, and a supporting assembly 650 mounted on the output end of the rotation motor 630 for placing the mask plate 500;

[0025] When the placement position of the mask plate 500 needs to be calibrated and adjusted, the translation adjustment component 620 drives the rotary motor 630 to adjust the X-axis and Y-axis directions; the rotary motor 630 drives the supporting component 650 to rotate to ensure that the position of the mask plate 500 is correct;

[0026] In actual use, the multi-dimensional adjustment platform is used to support the mask plate 500, the adjustment frame 610 is the base frame of the overall multi-dimensional adjustment platform, and the translation adjustment component 620 is fixed on the adjustment frame 610, which is used to adjust the rotary motor 630 in both directions of the X and Y axes; the output end of the rotary motor 630 is installed with the supporting component 650 to realize the overall rotation of the supporting component 650; as a whole, the mask plate 500 can be adjusted in three directions as needed, namely, the X and Y axes and the rotation around the center of the supporting component 650.

[0027] This mask plate dust-proof flip assembly adopts a modular structure as a whole, rationally utilizes space, saves equipment space, and optimizes structural features. It combines translation and rotation, reduces the internal wiring and equipment complexity of the equipment, ensures the accurate position of the mask plate during the inspection operation, ensures that the mask plate is in the specified identification position, reduces the probability of error, and improves the overall mask plate inspection efficiency.

[0028] In this embodiment, the translation adjustment assembly 620 includes an adjustment lower seat 622 fixed on the adjustment frame 610 and an adjustment upper seat 623 installed on the moving end of the adjustment lower seat 622; the rotation motor 630 is installed on the adjustment upper seat 623, and the center column 640 passes through the rotation motor 630 and is fixed on the adjustment upper seat 623; the adjustment lower seat 622 is used to realize X-axis adjustment, and the adjustment upper seat 623 is used to realize Y-axis adjustment; the rotation motor 630 is installed on the adjustment upper seat 623; and the overall plane and rotation adjustment is realized.

[0029] In this embodiment, the adjusting lower seat 622 includes a lower seat bottom plate 6221 and a lower seat movable plate 6222; the adjusting upper seat 623 includes an upper seat bottom plate 6231 and an upper seat movable plate 6232; in this embodiment, the adjusting lower seat 622 and the adjusting upper seat 623 also include auxiliary slide rails 624 and an adjustment drive 625; the lower seat bottom plate 6221 and the lower seat movable plate 6222, as well as the upper seat bottom plate 6231 and the upper seat movable plate 6232 are all slidably connected by auxiliary slide rails 624; the adjustment drive 625 is used to drive the lower seat movable plate 6222 and the upper seat movable plate 6232;

[0030] Auxiliary rails 624 are provided on both the lower seat base plate 6221 and the upper seat base plate 6231. The auxiliary rails 624 are used to ensure the sliding of the lower seat movable plate 6222 and the upper seat movable plate 6232. The upper seat base plate 6231 is installed on the lower seat movable plate 6222, so that independent adjustment of the X and Y axes can be achieved. In addition, adjustment drives 625 are provided on both the lower seat base plate 6221 and the upper seat base plate 6231 as the power source for adjustment.

[0031] In this embodiment, the upper seat movable plate 6232 is connected to the rotary motor 630 .

[0032] In this embodiment, the adjustment driver 625 is an ironless flat motor; the output end of the adjustment driver 625 is connected to the corresponding movable component.

[0033] In this embodiment, the central column 640 is used to fix the detection light source.

[0034] In this embodiment, the upper seat bottom plate 6231 is fixed to the upper end surface of the lower seat movable plate 6222; and the movement directions of the two groups of adjustment drives 625 are perpendicular.

[0035] The specific embodiments described herein are merely examples of the spirit of the present invention. Those skilled in the art may make various modifications or additions to the specific embodiments described, or replace them with similar methods, without departing from the scope defined by the spirit of the present invention.

Claims

1. A multi-dimensional mask adjustment platform, characterized in that: The invention comprises a translation adjustment component (620) installed on an adjustment frame (610), a rotation motor (630) assembled on the translation adjustment component (620), and a bearing component (650) installed at the output end of the rotation motor (630) for placing a mask plate (500); When the placement position of the mask plate (500) needs to be calibrated and adjusted, the translation adjustment component (620) drives the rotary motor (630) to adjust the X-axis and Y-axis directions; the rotary motor (630) drives the supporting component (650) to rotate to ensure that the position of the mask plate (500) is correct.

2. The multi-dimensional mask adjustment platform according to claim 1, characterized in that: The translation adjustment assembly (620) includes an adjustment lower seat (622) fixed on the adjustment frame (610) and an adjustment upper seat (623) installed at the moving end of the adjustment lower seat (622); the rotary motor (630) is installed on the adjustment upper seat (623), and the central column (640) passes through the rotary motor (630) and is fixed on the adjustment upper seat (623).

3. The multi-dimensional mask adjustment platform according to claim 2, characterized in that: The adjusting lower seat (622) includes a lower seat bottom plate (6221) and a lower seat movable plate (6222); the adjusting upper seat (623) includes an upper seat bottom plate (6231) and an upper seat movable plate (6232).

4. The multi-dimensional mask adjustment platform according to claim 3, characterized in that: The adjusting lower seat (622) and the adjusting upper seat (623) also include auxiliary slide rails (624) and an adjusting drive (625); the lower seat base plate (6221) and the lower seat movable plate (6222), as well as the upper seat base plate (6231) and the upper seat movable plate (6232) are all slidably connected by auxiliary slide rails (624); the adjusting drive (625) is used to drive the lower seat movable plate (6222) and the upper seat movable plate (6232).

5. The multi-dimensional mask adjustment platform according to claim 3, characterized in that: The upper seat movable plate (6232) is connected to the rotary motor (630).

6. The multi-dimensional mask adjustment platform according to claim 4, characterized in that: The adjustment drive (625) is an iron-coreless flat motor; the output end of the adjustment drive (625) is connected to a corresponding movable component.

7. The multi-dimensional mask adjustment platform according to claim 2, characterized in that: The central column (640) is used for fixedly connecting the detection light source.

8. The multi-dimensional mask adjustment platform according to claim 4, characterized in that: The upper seat bottom plate (6231) is fixed to the upper end surface of the lower seat movable plate (6222); and the movement directions of the two sets of adjustment drives (625) are perpendicular.

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