Output control device for laser direct writing image

Abstract

An output control device of a laser direct writing image comprises a digital micromirror device and a carrying plate, a driving plate is connected with a host and the carrying plate, the host outputs data through a first output port, the driving plate comprises a first input port, a data processor, a display controller, a storage assembly and a second output port, and the first input port is connected with the data processor. The first input port communicates with the first output port, the first input port is connected with the data processor, the data processor is connected with the storage component and the display controller, and the display controller is connected with the second output port; the data processor comprises a first interface unit, a data processing unit and a second interface unit, the input interface of the display controller adopts a high-speed serial interface, and the second output port and the second input port adopt high-speed serial interfaces. The image control data is transmitted at a high speed, so that the transmission rate is greatly improved, and the transmission of ultra-high-rate image data signals is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of laser direct writing, and in particular to an output control device for laser direct writing images. Background Art

[0002] The laser direct writing system, also known as the direct image projection system, can be applied to the research and development and production of semiconductors, PCBs and flat imaging fields. Its principle is to use a graphic generator to replace traditional mask technology and directly expose computer graphic data to the product, which can save costs and improve efficiency.

[0003] The pattern generator can use a digital micromirror device (DMD). A digital micromirror device (DMD) is a micro-electromechanical system with electronic input and optical output. It includes an array of micromirrors with two tilt angles. The desired direct-write image is formed by controlling the tilt angle of the micromirrors in the digital micromirror device.

[0004] In laser direct writing exposure equipment, the device rasterizes the user-entered exposure pattern, converting it into a large amount of dot matrix data. This data is then used to control the digital micromirror device (DMD) to produce the direct-written image. As exposure precision increases, the amount of dot matrix data increases. Low data transmission rates affect the efficiency of direct-written image conversion, and thus processing efficiency. Therefore, higher transmission rates are required to meet processing requirements. Summary of the Invention

[0005] The object of the present invention is to provide an output control device for laser direct writing images to improve the transmission rate of laser direct writing image data.

[0006] To this end, the present invention adopts the following technical solution: an output control device for laser direct writing images, which includes a digital micromirror device, which is installed on a carrier plate, and the carrier plate includes a second input port connected to the digital micromirror device. The output control device for laser direct writing images also includes a driving board, and the driving board is connected to a host and the carrier plate. The host is provided with an image processing unit, and the image processing unit outputs data through a first output port. The driving board includes a first input port, a data processor, a display controller, a storage component, and a second output port. The first input port communicates with the first output port, and the first input port is connected to the data processor. The data processor is connected to the storage component and the display controller, and the display controller is connected to the second output port, and the second output port communicates with the second input port; the data processor includes a first interface unit, a data processing unit, and a second interface unit. The input interface of the second interface unit and the display controller adopts a high-speed serial interface, and the second output port and the second input port adopt a high-speed serial interface.

[0007] In one embodiment, the storage component includes at least three memories, at least one of which is connected to the first interface unit of the data processor and the data processing unit, and is used to store data received by the first interface unit, and at least two memories are connected to the data processing unit and the second interface unit, and are used to store data output by the data processing unit.

[0008] In one embodiment, the image processing unit is provided with an image data processing module and a compression module. The image data processing module outputs the image data to the compression module, and the compression module compresses the image data to obtain compressed image data. The data processing unit includes a decompression module and a processing module. The decompression module decompresses the received compressed image data to obtain image data, and outputs it to the processing module. The processing module calculates and performs graphic conversion on the image data to obtain exposure graphic data.

[0009] In one embodiment, the second interface unit and the input interface of the display controller further include a low-speed interface for display controller interface control or display controller status query; the second output port and the second input port further include a low-speed interface for digital micromirror device interface control or digital micromirror device status query.

[0010] In one embodiment, the driving board also includes a position synchronization signal port, which is connected to the data processor. The position synchronization signal port receives a position synchronization signal and outputs it to the data processor. The position synchronization signal port uses an electrical signal interface, an optical signal interface, or both an electrical signal interface and an optical signal interface.

[0011] In one embodiment, the electrical signal interface is connected to the data processor through a data buffer, and the data buffer is used to convert the received unit signal into a differential signal and input it into the data processor; the optical signal interface is connected to the data processor through an optical fiber receiver, and the optical fiber receiver is used to convert the optical signal received by the optical signal interface into an electrical signal, and after level conversion, output it to the data processor.

[0012] In one embodiment, the first output port includes an optical signal interface and a network card, or an optical signal interface and a communication card, the first input port includes an optical signal interface and a PHY chip, the optical signal interface of the first output port communicates with the optical signal interface of the first input port, and the network card or communication card of the first output port communicates with the PHY chip of the first input port.

[0013] In one embodiment, the second interface unit and the input interface of the display controller are connected using backplane wiring.

[0014] In one embodiment, the second output port of the driving board and the second input port of the mounting board are connected by a flexible printed circuit board.

[0015] In one embodiment, the memory uses double data rate synchronous dynamic random access memory DDR3, DDR4, LPDDR4 or DDR5.

[0016] Compared to the prior art, the second interface unit and the display controller's input interface utilize a high-speed serial interface for high-speed transmission of exposure image data, while the second output port and the second input port utilize a high-speed serial interface for high-speed transmission of image control data. This significantly improves the transmission rate and enables ultra-high-speed transmission of image data signals. By providing a storage component that connects the first interface unit and the data processing unit, as well as the data processing unit and the second interface unit, the driver board's storage space is expanded, increasing the speed at which the data processor acquires image data and the speed at which the data processor transmits data to the display controller, thereby preventing the data acquisition and transmission of the data processing unit from being affected by the data transmission rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 Schematic diagram of an embodiment of an output control device for laser direct writing images.

[0018] Figure 2 Schematic diagram of data transmission between the host, driver board and carrier board.

[0019] Figure 3 This is a schematic diagram of data transmission between the host and the driver board.

[0020] Figure 4 Schematic diagram of data transmission between data processor and storage component.

[0021] Figure 5 This is a schematic diagram of another embodiment of an output control device for laser direct writing images. DETAILED DESCRIPTION

[0022] In order to make the technical solution of the present invention more clear, the specific embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the specific description of the embodiments is only used to teach those skilled in the art how to implement the present invention, rather than to exhaustively list all feasible ways of the present invention, nor to limit the specific scope of implementation of the present invention.

[0023] like Figure 1-5 As shown, the output control device for laser direct writing images proposed in the present invention includes a host, a driver board connected to the host, and a carrier board connected to the driver board. The host is provided with an image processing unit, which is provided with an image data processing module and a compression module. The image data processing module outputs image data to the compression module, which compresses the image data to obtain compressed image data, and the image processing unit outputs the compressed image data through a first output port. The driver board includes a first input port, a data processor, a display controller, a storage component, and a second output port. The first input port communicates with the first output port, the first input port is connected to the data processor, the data processor is connected to the storage component and the display controller, and the display controller is connected to the second output port. The carrier board includes a second input port and a digital micromirror device, the second input port communicates with the second output port, and the second input port is connected to the digital micromirror device. The first output port and the first input port can use optical signal interfaces such as SFP interfaces, SFP+ interfaces, or XFP interfaces to convert electrical signals into optical signals. The data processor includes a first interface unit, a data processing unit, and a second interface unit. The compressed image data is received through the first interface unit, the compressed image data is processed by the data processing unit to obtain exposure pattern data, and the exposure pattern data is transmitted to the display controller through the second interface unit.

[0024] The data processing unit includes a decompression module and a processing module. The decompression module is used to decompress the received compressed image data to obtain image data, which is then output to the processing module. The processing module performs calculations and graphic conversion on the image data to obtain exposure graphic data. The exposure graphic data corresponds to the physical state of the digital micromirror device. For example, if the digital micromirror device has an inclination angle relative to the movement direction of the workpiece, the exposure graphic data is calculated and converted based on the image data and the inclination angle of the digital micromirror device. The input interface of the second interface unit and the display controller uses a high-speed serial interface, connected by backplane wiring, for high-speed transmission of exposure graphic data. The input interface of the second interface unit and the display controller also includes a low-speed interface for display controller interface control or display controller status query. The use of two interfaces with different transmission rates not only achieves high-speed data transmission, but also meets the rate requirements of instruction transmission.

[0025] The storage component includes at least three memories, at least one of which is connected to the first interface unit of the data processor and the data processing unit and is used to store received compressed image data. At least two memories are connected to the data processing unit and the second interface unit and are used to store exposure pattern data converted by the data processing unit. Each of the memories may include multiple unit storage modules. As shown in the example, the storage component includes three memories, namely a first external memory, a second external memory and a third external memory. The first external memory is connected to the first interface unit and stores compressed image data. The data processing unit is connected to the first external memory, retrieves the compressed image data from the first external memory, decompresses the compressed image data through the decompression module, and outputs the image data to the processing module. The processing module processes the data to obtain exposure pattern data, which is stored in the second external memory. After the storage space of the second external memory is filled, the exposure pattern data is filled into the third external memory. At the same time, the exposure pattern data stored in the second external memory unit is output to the display controller through the second interface unit. After the storage space of the third external memory is filled, the exposure pattern data is filled into the second external memory. At the same time, the exposure pattern data stored in the third external memory unit is output to the display controller through the second interface unit. And so on, the exposure pattern data is continuously transmitted to the display controller. By providing a storage component that connects the first interface unit and the data processing unit, as well as the data processing unit and the second interface unit, the storage space of the driver board is expanded, the speed at which the data processor acquires image data is increased, and the speed at which the data processor transmits data to the display controller is increased, thereby preventing the data acquisition and transmission of the data processing unit from being affected by the data transmission rate. The memory can adopt a double data rate synchronous dynamic random access memory, such as DDR (Double Data Rate Synchronous Dynamic Random Access Memory) 3, DDR4, LPDDR4 (Low Power Double Data Rate Synchronous Dynamic Random Access Memory), DDR5, and other memories. Compared with other memories, the use of double data rate synchronous dynamic random access memory has a faster transmission rate. The image processing unit is provided with a compression module to compress the image data, reducing the amount of transmitted data and increasing the transmission speed. At the same time, it facilitates the first external memory to store more data.

[0026] The display controller receives the exposure pattern data and processes the exposure pattern data into image control data for a digital micromirror device. The image control data is transmitted to the second output port of the driver board via the output interface of the display controller. The second output port of the driver board and the second input port of the carrier board can be connected using an FPC (Flexible Printed Circuit). The second output port and the second input port can use a high-speed serial interface (HSSI). The second output port and the second input port also include a low-speed interface for digital micromirror device interface control or digital micromirror device status query. The use of two interfaces with different transmission rates achieves high-speed data transmission while meeting the rate requirements for command transmission.

[0027] The data processor and the display controller may adopt FPGA chips.

[0028] The driving board is powered by a DC-DC power supply, the mounting board is powered by a DC-DC power supply, and a PMIC (Power Management Integrated Circuit) chip is used to provide bias voltage for the digital micromirror device.

[0029] like Figure 5 As shown, the driver board also includes a position synchronization signal port, which uses an electrical signal interface, an optical signal interface, or both. The electrical signal interface is connected to the data processor via a data buffer, and the data buffer is used to convert the received unit signal into a differential signal and input it into the data processor, thereby improving anti-interference capability. The optical signal interface is connected to the data processor via an optical fiber receiver, and the optical fiber receiver is used to convert the optical signal received by the optical signal interface into an electrical signal, which is then output to the data processor after level conversion. The optical signal interface uses optical fiber communication to effectively avoid electromagnetic interference. The position synchronization signal interface is provided on the driver board, and the exposure data can be synchronized with the position signal in real time, resulting in higher exposure accuracy.

[0030] like Figure 5As shown, the host's first output port and the driver board's first input port utilize two communication methods. One utilizes optical signal transmission, with the host and driver board each equipped with an optical signal interface, such as an SFP (Small Form Pluggables), SFP+, XFP, or QSFP interface, for transmitting large amounts of image data. The other communication method utilizes a network card or fiber optic communication card on the host, and a PHY (Port Physical Layer) chip on the driver board for transmitting smaller amounts of image data. By utilizing these two communication methods, the appropriate interface can be selected based on the image data volume, resulting in improved compatibility.

[0031] Finally, it should be noted that due to the limitations of textual expression, the above embodiments are merely illustrative and not exhaustive. The present invention is not limited to the disclosed embodiments. Without departing from the scope and spirit of the above embodiments, those skilled in the art may make various improvements and modifications. Such improvements and modifications, without requiring creative effort, should also be considered within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be determined by the claims.

Claims

1. A laser direct writing image output control device, comprising a digital micromirror device (DMD), the DMD being mounted on a carrier plate, the carrier plate comprising a second input port connected to the DMD, characterized in that: The output control device for the laser direct writing image also includes a driving board, which is connected to the host and the loading board. The host is provided with an image processing unit, which outputs data through a first output port. The driving board includes a first input port, a data processor, a display controller, a storage component and a second output port. The first input port communicates with the first output port, the first input port is connected to the data processor, the data processor is connected to the storage component and the display controller, the display controller is connected to the second output port, and the second output port communicates with the second input port; the data processor includes a first interface unit, a data processing unit and a second interface unit. The input interface of the second interface unit and the display controller adopts a high-speed serial interface, and the second output port and the second input port adopt a high-speed serial interface.

2. The laser direct writing image output control device according to claim 1, characterized in that: The storage component includes at least three memories, at least one of which is connected to the first interface unit of the data processor and the data processing unit, and is used to store data received by the first interface unit, and at least two memories are connected to the data processing unit and the second interface unit, and are used to store data output by the data processing unit.

3. The laser direct writing image output control device according to claim 1, wherein: The image processing unit is provided with an image data processing module and a compression module. The image data processing module outputs image data to the compression module. The compression module compresses the image data to obtain compressed image data. The data processing unit includes a decompression module and a processing module. The decompression module decompresses the received compressed image data to obtain image data and outputs it to the processing module. The processing module calculates and performs graphic conversion on the image data to obtain exposure graphic data.

4. The laser direct writing image output control device according to claim 1, wherein: The second interface unit and the input interface of the display controller also include a low-speed interface for display controller interface control or display controller status query; the second output port and the second input port also include a low-speed interface for digital micromirror device interface control or digital micromirror device status query.

5. The laser direct writing image output control device according to claim 1, wherein: The driving board also includes a position synchronization signal port, which is connected to the data processor. The position synchronization signal port receives a position synchronization signal and outputs it to the data processor. The position synchronization signal port uses an electrical signal interface, an optical signal interface, or both an electrical signal interface and an optical signal interface.

6. The output control device for laser direct writing images according to claim 5, characterized in that: The electrical signal interface is connected to the data processor through a data buffer, and the data buffer is used to convert the received unit signal into a differential signal and input it into the data processor; the optical signal interface is connected to the data processor through an optical fiber receiver, and the optical fiber receiver is used to convert the optical signal received by the optical signal interface into an electrical signal, and output it to the data processor after level conversion.

7. The laser direct writing image output control device according to claim 1, wherein: The first output port includes an optical signal interface and a network card, or an optical signal interface and a communication card, the first input port includes an optical signal interface and a PHY chip, the optical signal interface of the first output port communicates with the optical signal interface of the first input port, and the network card or communication card of the first output port communicates with the PHY chip of the first input port.

8. The laser direct writing image output control device according to claim 1, wherein: The second interface unit and the input interface of the display controller are connected by backplane wiring.

9. The laser direct writing image output control device according to claim 1, wherein: The second output port of the driving board and the second input port of the mounting board are connected by a flexible circuit board.

10. The laser direct writing image output control device according to claim 1, wherein: The memory adopts double data rate synchronous dynamic random access memory DDR3, DDR4, LPDDR4 or DDR5.

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