Transverse moving type cleaning device

Abstract

The utility model belongs to the technical field of semiconductor substrate material manufacturing, and particularly discloses a transverse moving type cleaning device which comprises a base, a flushing part, a substrate box and a driving part. The substrate box is slidably arranged on the base along a first direction; the flushing part is arranged above the substrate box and is used for flushing the substrate box; the driving part is arranged on the base and used for driving the substrate box to reciprocate in the first direction. According to the transverse moving type cleaning device provided by the scheme, in the process of cleaning the substrate slices on the substrate box, the substrate box can be driven by the driving piece to reciprocate in the first direction, and compared with a substrate slice fixing mode, the cleaning effect and cleaning efficiency of the substrate slices can be effectively improved; the problem that an existing substrate slice cleaning mode is low in cleaning efficiency is effectively solved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to a transverse cleaning device. Background Art

[0002] A substrate is an object used to make transistors and integrated circuits. It not only plays a role in electrical performance but also plays a role in mechanical support.

[0003] During the manufacturing process of indium phosphide substrates, the substrates need to be cleaned. The existing cleaning method generally involves fixing the substrates and then immersing or rinsing them, which has low cleaning efficiency. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a transverse cleaning device to solve the problem of low cleaning efficiency of the existing substrate cleaning method.

[0005] In order to achieve the above technical objectives, the present application provides a transverse moving cleaning device, comprising: a base, a flushing member, a substrate box and a driving member;

[0006] The substrate box is slidably arranged on the base along a first direction;

[0007] The flushing member is arranged above the substrate box and is used for flushing the substrate box;

[0008] The driving member is disposed on the base and is used to drive the substrate box to reciprocate along the first direction.

[0009] Furthermore, it also includes: a first rotating shaft and a second rotating shaft;

[0010] The driving member is a motor;

[0011] The output end of the driving member is fixedly connected to one end of the first rotating shaft;

[0012] The other end of the first rotating shaft is rotatably connected to one end of the second rotating shaft;

[0013] The other end of the second rotating shaft is rotatably connected to the substrate box.

[0014] Furthermore, a boss is provided on the base;

[0015] The driving component is arranged on the boss.

[0016] Furthermore, the base is provided with a guide bar extending along the first direction;

[0017] The bottom of the substrate box is fixedly connected with a slider;

[0018] The sliding block can be slidably arranged on the guide bar.

[0019] Furthermore, the flushing member includes: a column and a flushing trough;

[0020] The column is fixed on the base;

[0021] The flushing trough is arranged on the column and is located above the substrate box.

[0022] Further, the flushing trough spans the substrate box along the second direction;

[0023] The second direction is perpendicular to the first direction.

[0024] Furthermore, the substrate box is provided with a plurality of slots arranged at intervals;

[0025] The card slot is used for the substrate sheet to be carded in.

[0026] Furthermore, the plurality of card slots are sequentially spaced apart along the second direction;

[0027] The clamping slot is used for clamping the substrate sheet in a normal direction toward the second direction.

[0028] Furthermore, the flush trough is provided with a cut edge so that water in the flush trough flows out from the cut edge;

[0029] The cutting edge is arranged obliquely relative to the second direction.

[0030] Furthermore, the flushing parts include two;

[0031] The two flushing members are arranged on both sides of the substrate box along a first direction.

[0032] As can be seen from the above technical solution, the present application provides a transverse cleaning device, comprising: a base, a flushing member, a substrate box and a driving member; the substrate box is slidably arranged on the base along a first direction; the flushing member is arranged above the substrate box for flushing the substrate box; the driving member is arranged on the base for driving the substrate box to reciprocate along the first direction.

[0033] The transverse cleaning device provided in this solution can drive the substrate box to move back and forth along the first direction through the driving member during the process of cleaning the substrate sheet on the substrate box. Compared with the method of fixing the substrate sheet, it can effectively improve the cleaning effect and cleaning efficiency of the substrate sheet, and effectively solve the problem of low cleaning efficiency of the existing substrate sheet cleaning method. BRIEF DESCRIPTION OF THE DRAWINGS

[0034] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative labor.

[0035] Figure 1 A schematic structural diagram of a transverse cleaning device provided in an embodiment of the present application;

[0036] Figure 2 A schematic diagram of a substrate box of a transverse cleaning device provided in an embodiment of the present application;

[0037] Figure 3 A schematic diagram of a base of a transverse cleaning device provided in an embodiment of the present application;

[0038] In the picture:

[0039] 10. Base; 11. Boss; 12. Guide strip;

[0040] 20. Flush fittings; 21. Uprights; 22. Flush trough; 23. Trimming edges;

[0041] 30. Substrate box; 31. Slider; 32. Card slot;

[0042] 40; driving member; 41, first rotating shaft; 42, second rotating shaft;

[0043] X-axis direction: first direction; Y-axis direction: second direction. DETAILED DESCRIPTION

[0044] The following will clearly and completely describe the technical solutions of the embodiments of this application in conjunction with the accompanying drawings. Obviously, the embodiments described are part of the embodiments of this application, not all of them. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection requested by this application.

[0045] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0046] In the description of the embodiments of the present application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, replaceable connections, or integral connections. They can also refer to mechanical connections or electrical connections. They can also refer to direct connections or indirect connections through an intermediate medium. They can also refer to internal connections between two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0047] See also Figures 1 to 3 A transverse moving cleaning device provided in an embodiment of the present application includes: a base 10, a flushing member 20, a substrate box 30 and a driving member 40; the substrate box 30 is slidably arranged on the base 10 along a first direction; the flushing member 20 is arranged above the substrate box 30, for flushing the substrate box 30; the driving member 40 is arranged on the base 10, for driving the substrate box 30 to reciprocate along the first direction.

[0048] As an implementation, see Figure 2 The substrate box 30 may be hollowed out to help reduce the contact area between the substrate box 30 and the substrate sheet on the substrate box 30. The first direction may be to Figures 1 to 3 In the X-axis direction. During the flushing process of the substrate cassette 30 by the flushing member 20, the driving member 40 can drive the substrate cassette 30 to reciprocate in the first direction, thereby increasing the flushing effect of the water on the substrate sheets, helping to ensure that the substrate sheets are fully flushed and improving the flushing efficiency of the substrate sheets. Furthermore, the reciprocating movement of the substrate cassette 30 in the first direction helps to evenly flush the substrate sheets at different positions on the substrate cassette 30.

[0049] In application, the driving member 40 may be a linear drive such as a cylinder.

[0050] In one embodiment provided herein, the driving member 40 is a motor. The transverse cleaning device provided herein further includes a first rotating shaft 41 and a second rotating shaft 42 . The output end of the driving member 40 is fixedly connected to one end of the first rotating shaft 41 ; the other end of the first rotating shaft 41 is rotatably connected to one end of the second rotating shaft 42 ; and the other end of the second rotating shaft 42 is rotatably connected to the substrate cassette 30 .

[0051] After the driving member 40 is started, the driving member 40 can drive the first rotating shaft 41 to rotate; the rotating first rotating shaft 41 can drive the second rotating shaft 42 to rotate; when the second rotating shaft 42 rotates, it can drive the substrate box 30 to reciprocate along the first direction.

[0052] In the application, see Figure 3The base 10 is provided with a guide bar 12 extending along a first direction; a slider 31 is fixedly connected to the bottom of the substrate box 30; the slider 31 is slidably provided on the guide bar 12. The guide bar 12 and the slider 31 provide a guide for the sliding of the substrate box 30.

[0053] Furthermore, a boss 11 is provided on the base 10, and the driving member 40 is provided on the boss 11. The boss 11 can prevent the first rotating shaft 41 and the second rotating shaft 42 from interfering with the base 10 when the driving member 40 drives the first rotating shaft 41 and the second rotating shaft 42 to move.

[0054] In one embodiment, the substrate box 30 may be provided with a plurality of slots 32 arranged at intervals; the slots 32 are used for receiving substrate sheets, so that a plurality of substrate sheets can be arranged in the slots 32 in a one-to-one correspondence.

[0055] More specifically, the flushing member 20 includes a column 21 and a flushing trough 22 ; the column 21 is fixed on the base 10 ; the flushing trough 22 is provided on the column 21 and is located above the substrate box 30 .

[0056] The flushing trough 22 can pour water toward the substrate box 30 below to flush the substrate box 30. Two flushing members 20 may be provided; the two flushing members 20 are disposed on both sides of the substrate box 30 along a first direction, thereby simultaneously flushing both sides of the substrate box 30, further improving the cleaning effect and efficiency.

[0057] In a further improved embodiment, the flushing trough 22 spans the substrate box 30 along a second direction; the second direction is perpendicular to the first direction. Figures 1 to 3 The flushing trough 22 spans the substrate box 30 along the second direction to ensure that the flushing trough can fully flush the substrate box 30 along the second direction, and fully rinse the substrate sheets on the substrate box 30 during the reciprocating motion of the substrate box 30 along the first direction.

[0058] In another embodiment, a plurality of card slots 32 are sequentially spaced apart along the second direction; the card slots 32 are used for allowing the substrate sheet to be inserted in a normal direction toward the second direction.

[0059] Specifically, after the substrate sheet is loaded into the card slot 32, the normal direction perpendicular to the plane on which the substrate sheet lies is defined as the second direction. Therefore, the reciprocating motion of the substrate cassette in the first direction drives the rinsing liquid along the plane on which the substrate sheet lies. This, on the one hand, reduces the impact of the liquid directly impacting the substrate sheet, and on the other hand, ensures a thorough rinsing of the substrate sheet.

[0060] As an embodiment, a cutting edge 23 is provided on the flushing trough 22 so that water in the flushing trough 22 flows out from the cutting edge 23 ; the cutting edge 23 is inclined relative to the second direction.

[0061] Specifically, the cutting edge 23 tilted relative to the second direction allows the impact direction of the water falling from the flushing trough 22 to impact the substrate plane, which can improve the flushing effect of the water on the substrate while avoiding damage to the substrate due to excessive impact force.

[0062] The above are only preferred embodiments of the present application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the aforementioned examples or make equivalent replacements for some of the technical features therein. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present application should be included in the scope of protection of the present application.

Claims

1. A transverse cleaning device, characterized in that: include: A base (10), a flushing member (20), a substrate box (30) and a driving member (40); The substrate box (30) is slidably arranged on the base (10) along a first direction; The flushing member (20) is arranged above the substrate box (30) and is used for flushing the substrate box (30); The driving member (40) is arranged on the base (10) and is used to drive the substrate box (30) to reciprocate along the first direction.

2. The traverse cleaning device according to claim 1, characterized in that: Also includes: a first rotating shaft (41) and a second rotating shaft (42); The driving member (40) is a motor; The output end of the driving member (40) is fixedly connected to one end of the first rotating shaft (41); The other end of the first rotating shaft (41) is rotatably connected to one end of the second rotating shaft (42); The other end of the second rotating shaft (42) is rotatably connected to the substrate box (30).

3. The traverse cleaning device according to claim 2, characterized in that: A boss (11) is provided on the base (10); The driving member (40) is arranged on the boss (11).

4. The traverse cleaning device according to claim 1, characterized in that: The base (10) is provided with a guide bar (12) extending along a first direction; The bottom of the substrate box (30) is fixedly connected with a slider (31); The slider (31) is slidably arranged on the guide bar (12).

5. The traverse cleaning device according to claim 1, characterized in that: The flushing member (20) comprises: a column (21) and a flushing trough (22); The column (21) is fixed on the base (10); The flushing trough (22) is arranged on the column (21) and is located above the substrate box (30).

6. The traverse cleaning device according to claim 5, characterized in that: The flushing trough (22) spans the substrate box (30) along a second direction; The second direction is perpendicular to the first direction.

7. The traverse cleaning device according to claim 6, characterized in that: The substrate box (30) is provided with a plurality of slots (32) arranged at intervals; The card slot (32) is used for the substrate sheet to be carded in.

8. The traverse cleaning device according to claim 7, characterized in that: The plurality of card slots (32) are sequentially spaced apart along the second direction; The clamping slot (32) is used for clamping the substrate sheet in a normal direction toward the second direction.

9. The traverse cleaning device according to claim 8, characterized in that: The flushing trough (22) is provided with a cutting edge (23) so that water in the flushing trough (22) flows out from the cutting edge (23); The cutting edge (23) is arranged obliquely relative to the second direction.

10. The traverse cleaning device according to any one of claims 5 to 9, characterized in that: The flushing parts (20) include two; The two flushing parts (20) are arranged on both sides of the substrate box (30) along a first direction.

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